CN104440696A - Automatic locking device for batched MEMS (micro-electro-mechanical systems) acceleration sensors - Google Patents
Automatic locking device for batched MEMS (micro-electro-mechanical systems) acceleration sensors Download PDFInfo
- Publication number
- CN104440696A CN104440696A CN201410750805.8A CN201410750805A CN104440696A CN 104440696 A CN104440696 A CN 104440696A CN 201410750805 A CN201410750805 A CN 201410750805A CN 104440696 A CN104440696 A CN 104440696A
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- China
- Prior art keywords
- clamping cylinder
- shake table
- extension head
- revolution clamping
- solenoid directional
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M7/00—Vibration-testing of structures; Shock-testing of structures
- G01M7/02—Vibration-testing by means of a shake table
- G01M7/027—Specimen mounting arrangements, e.g. table head adapters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Vibration Prevention Devices (AREA)
Abstract
The invention relates to a vibration testing technique for MEMS (micro-electro-mechanical systems) acceleration sensors, in particular to an automatic locking device for batched MEMS (micro-electro-mechanical systems) acceleration sensors, and solves the problem that vibration testing with the existing vibrating bench fixture is high in time consumption and low in efficiency. The automatic locking device comprises an execution portion and a control portion. The execution portion comprises a vibrating bench extension head, an underframe and a plurality of rotary clamping cylinders. The control portion comprises a pressure sensor, an analog-digital converter, a PLC (programmable logic controller), an upper computer, an electromagnetic reversing valve, a pressure regulating valve and an air source. The vibrating bench extension head is in a tubular structure, with the upper end closed and the lower end opened. The underframe covers a lower opening of the vibrating bench extension head. Cylinder barrels of the rotary clamping cylinders are all mounted on the upper surface of the underframe. The automatic locking device is applicable to the vibration test of MEMS acceleration sensors.
Description
Technical field
The present invention relates to the vibration test technology of MEMS acceleration transducer, specifically a kind of mass MEMS acceleration transducer forced locking device.
Background technology
MEMS acceleration transducer is as an important branch of MEMS sensor, with advantages such as its volume is little, lightweight, cost is low, good reliability, low in energy consumption, measurement category is large, be widely used in the fields such as automotive electronics, radio communication, consumer electronics, biomedicine, Aero-Space, industry, agricultural.Along with the development of these industries, the demand of MEMS acceleration transducer is increasing, also more and more higher to the requirement of its precision.MEMS acceleration transducer all needs test and the demarcation of carrying out performance parameters after development and before using.One of main experimental that vibration test is tested as MEMS acceleration transducer gamut range performance, second-order linearity coefficient and the frequency response characteristic of MEMS acceleration transducer can not only be demarcated, and may be used for the constant multiplier, biased long-time stability, structural strength etc. of demarcating MEMS acceleration transducer.Therefore, before MEMS acceleration transducer dispatches from the factory, need the vibration test of the realistic requirement of strict implement, check the qualification of MEMS acceleration transducer and reliability to play vital effect to examination.In vibration test, shake table clamp is very important equipment, and its effect is by the locking of MEMS acceleration transducer on a vibration table, thus the motion of shake table is passed to MEMS acceleration transducer truly.Existing shake table clamp limit due to self structure, the following problem of ubiquity: one, existing shake table clamp needs manually by the locking of MEMS acceleration transducer on a vibration table, cause vibration test length consuming time, efficiency low thus, thus cause the production efficiency of MEMS acceleration transducer low.They are two years old, existing shake table clamp can only by the locking of single-piece MEMS acceleration transducer on a vibration table in a vibration test, and cannot by the locking of batch MEMS acceleration transducer on a vibration table, cause vibration test length consuming time, efficiency low thus equally, thus cause the production efficiency of MEMS acceleration transducer low equally.Based on this, be necessary to invent a kind of brand-new shake table clamp, cause vibration test length consuming time, inefficient problem to solve existing shake table clamp.
Summary of the invention
The present invention causes vibration test length consuming time, inefficient problem to solve existing shake table clamp, provides a kind of mass MEMS acceleration transducer forced locking device.
The present invention adopts following technical scheme to realize: mass MEMS acceleration transducer forced locking device, comprises and perform part and control section; Described enforcement division is divided and is comprised shake table Extension Head, chassis, revolution clamping cylinder; Described control section comprises pressure sensor, analog-digital converter, PLC, host computer, solenoid directional control valve, pressure regulator valve, source of the gas; Wherein, shake table Extension Head is tubular structure; The upper end closed of shake table Extension Head, lower end are provided with uncovered; Chassis lid be encapsulated in the lower end of shake table Extension Head uncovered on; The number of revolution clamping cylinder is several; The cylinder barrel of each revolution clamping cylinder is all installed on the upper disk surface on chassis; The equal activity of piston rod of each revolution clamping cylinder runs through the upper end wall of shake table Extension Head; The clamp arm of each revolution clamping cylinder is all parallel with the upper outer end wall of shake table Extension Head; The number of pressure sensor is equal with the number of revolution clamping cylinder; Each pressure sensor one_to_one corresponding is installed on the head downside of the clamp arm of each revolution clamping cylinder; The signal input part of analog-digital converter is connected with the signal output part of each pressure sensor respectively; The signal input part of PLC is connected with the signal output part of analog-digital converter; Host computer and PLC are bi-directionally connected; The signal input part of solenoid directional control valve is connected with the signal output part of PLC; First gas outlet of solenoid directional control valve turns round clamping cylinder respectively first air inlet with each is communicated with; Second gas outlet of solenoid directional control valve turns round clamping cylinder respectively second air inlet with each is communicated with; The gas outlet of pressure regulator valve is communicated with the air inlet of solenoid directional control valve; Source of the gas is communicated with the air inlet of pressure regulator valve.
During work, first shake table Extension Head, chassis, shake table are fixed together, and the signal input part of shake table is connected with the signal output part of host computer.Then several MEMS acceleration transducers are fixed on two weighted platforms, and two weighted platforms are placed on the upper outer end wall of shake table Extension Head and each turns round between the clamp arm of clamping cylinder, as shown in Figure 1.Specific works process is as follows: first, and host computer sends instruction to PLC, and PLC controls solenoid directional control valve according to instruction and carries out action, makes first gas outlet conducting of solenoid directional control valve.Now, air from source of the gas enters each revolution clamping cylinder by pressure regulator valve, solenoid directional control valve successively, make the clamp arm of each revolution clamping cylinder carry out spiral decline, two weighted platforms are locked at the upper outer end wall of shake table Extension Head by the clamp arm of each revolution clamping cylinder thus.In locking process, each pressure sensor measures the clamp arm of each revolution clamping cylinder in real time to two weighted platform institute applied pressure values, and the force value recorded is sent to analog-digital converter in real time.Analog-digital converter carries out real-time analog-to-digital conversion to the force value received, and the force value after conversion is sent to PLC in real time.The force value received is sent to host computer by PLC in real time.The force value received compares with predetermined value by host computer in real time.If force value reaches predetermined value, then host computer sends instruction to PLC.PLC controls solenoid directional control valve according to instruction and stops action, makes first gas outlet cut-off of solenoid directional control valve.Now, the air from source of the gas stops entering each revolution clamping cylinder, makes the clamp arm of each revolution clamping cylinder stop declining, and two weighted platform lockings put in place by the clamp arm of each revolution clamping cylinder thus.Then, host computer sends instruction to shake table, shake table vibrates according to instruction, and drives each MEMS acceleration transducer to vibrate by chassis, shake table Extension Head, two weighted platforms successively, carries out vibration test thus to each MEMS acceleration transducer.After vibration test terminates, host computer sends instruction to PLC, and PLC controls solenoid directional control valve according to instruction and carries out action, makes second gas outlet conducting of solenoid directional control valve.Now, air from source of the gas enters each revolution clamping cylinder by pressure regulator valve, solenoid directional control valve successively, make the clamp arm of each revolution clamping cylinder carry out spiral escalation, the upper outer end wall of two weighted platforms from shake table Extension Head is unclamped by the clamp arm of each revolution clamping cylinder thus.
Based on said process, compared with existing shake table clamp, mass MEMS acceleration transducer forced locking device of the present invention is by adopting brand new, possesses following advantage: one, mass MEMS acceleration transducer forced locking device of the present invention is without the need to locking MEMS acceleration transducer on a vibration table manually, and only need by perform part and control section can by MEMS acceleration transducer auto lock on a vibration table, make that vibration test is consuming time significantly to be shortened thus, efficiency significantly improves, thus the production efficiency of MEMS acceleration transducer is significantly improved.They are two years old, mass MEMS acceleration transducer forced locking device of the present invention is by adopting several revolution clamping cylinders, achieve by the locking of batch MEMS acceleration transducer on a vibration table, vibration test significantly shortening, efficiency consuming time is made significantly to improve, thus make the production efficiency of MEMS acceleration transducer significantly improve equally thus equally.In sum, mass MEMS acceleration transducer forced locking device of the present invention efficiently solves existing shake table clamp and causes vibration test length consuming time, inefficient problem.
The present invention is rational in infrastructure, it is ingenious to design, and efficiently solves existing shake table clamp and causes vibration test length consuming time, inefficient problem, be applicable to the vibration test of MEMS acceleration transducer.
Accompanying drawing explanation
Fig. 1 is the structural representation of execution part of the present invention.
Fig. 2 is the structural representation of control section of the present invention.
In figure: 1-shake table Extension Head, 2-chassis, 3-turns round clamping cylinder, 4-pressure sensor, 5-analog-digital converter, 6-PLC, 7-host computer, 8-solenoid directional control valve, 9-pressure regulator valve, 10-source of the gas, 11-weighted platform, and 12-installs through hole.
Detailed description of the invention
Mass MEMS acceleration transducer forced locking device, comprises and performs part and control section; Described enforcement division is divided and is comprised shake table Extension Head 1, chassis 2, revolution clamping cylinder 3; Described control section comprises pressure sensor 4, analog-digital converter 5, PLC6, host computer 7, solenoid directional control valve 8, pressure regulator valve 9, source of the gas 10; Wherein, shake table Extension Head 1 is tubular structure; The upper end closed of shake table Extension Head 1, lower end are provided with uncovered; Chassis 2 cap seal is on the lower end of shake table Extension Head 1 is uncovered; The number of revolution clamping cylinder 3 is several; The cylinder barrel of each revolution clamping cylinder 3 is all installed on the upper disk surface on chassis 2; The equal activity of piston rod of each revolution clamping cylinder 3 runs through the upper end wall of shake table Extension Head 1; The clamp arm of each revolution clamping cylinder 3 is all parallel with the upper outer end wall of shake table Extension Head 1; The number of pressure sensor 4 is equal with the number of revolution clamping cylinder 3; Each pressure sensor 4 one_to_one corresponding is installed on the head downside of the clamp arm of each revolution clamping cylinder 3; The signal input part of analog-digital converter 5 is connected with the signal output part of each pressure sensor 4 respectively; The signal input part of PLC6 is connected with the signal output part of analog-digital converter 5; Host computer 7 and PLC6 are bi-directionally connected; The signal input part of solenoid directional control valve 8 is connected with the signal output part of PLC6; First gas outlet of solenoid directional control valve 8 turns round clamping cylinder 3 respectively first air inlet with each is communicated with; Second gas outlet of solenoid directional control valve 8 turns round clamping cylinder 3 respectively second air inlet with each is communicated with; The gas outlet of pressure regulator valve 9 is communicated with the air inlet of solenoid directional control valve 8; Source of the gas 10 is communicated with the air inlet of pressure regulator valve 9.
During concrete enforcement, the upper end wall of shake table Extension Head 1, the card on chassis 2 are through offers several installation through holes 12.During work, installing through hole by each can be fixed together shake table Extension Head, chassis, shake table easily.
Claims (1)
1. a mass MEMS acceleration transducer forced locking device, is characterized in that: comprise and perform part and control section; Described enforcement division is divided and is comprised shake table Extension Head (1), chassis (2), revolution clamping cylinder (3); Described control section comprises pressure sensor (4), analog-digital converter (5), PLC(6), host computer (7), solenoid directional control valve (8), pressure regulator valve (9), source of the gas (10); Wherein, shake table Extension Head (1) is tubular structure; Upper end closed, the lower end of shake table Extension Head (1) are provided with uncovered; Chassis (2) cap seal is on the lower end of shake table Extension Head (1) is uncovered; The number of revolution clamping cylinder (3) is several; The cylinder barrel of each revolution clamping cylinder (3) is all installed on the upper disk surface of chassis (2); The equal activity of piston rod of each revolution clamping cylinder (3) runs through the upper end wall of shake table Extension Head (1); The clamp arm of each revolution clamping cylinder (3) is all parallel with the upper outer end wall of shake table Extension Head (1); The number of pressure sensor (4) is equal with the number of revolution clamping cylinder (3); Each pressure sensor (4) one_to_one corresponding is installed on the head downside of the clamp arm of each revolution clamping cylinder (3); The signal input part of analog-digital converter (5) is connected with the signal output part of each pressure sensor (4) respectively; PLC(6) signal input part is connected with the signal output part of analog-digital converter (5); Host computer (7) and PLC(6) to be bi-directionally connected; The signal input part of solenoid directional control valve (8) and PLC(6) signal output part be connected; First gas outlet of solenoid directional control valve (8) turns round clamping cylinder (3) respectively first air inlet with each is communicated with; Second gas outlet of solenoid directional control valve (8) turns round clamping cylinder (3) respectively second air inlet with each is communicated with; The gas outlet of pressure regulator valve (9) is communicated with the air inlet of solenoid directional control valve (8); Source of the gas (10) is communicated with the air inlet of pressure regulator valve (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410750805.8A CN104440696B (en) | 2014-12-10 | 2014-12-10 | Mass MEMS acceleration transducer forced locking device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410750805.8A CN104440696B (en) | 2014-12-10 | 2014-12-10 | Mass MEMS acceleration transducer forced locking device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104440696A true CN104440696A (en) | 2015-03-25 |
| CN104440696B CN104440696B (en) | 2016-04-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410750805.8A Active CN104440696B (en) | 2014-12-10 | 2014-12-10 | Mass MEMS acceleration transducer forced locking device |
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| CN (1) | CN104440696B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104924234A (en) * | 2015-04-30 | 2015-09-23 | 东南大学 | Adjustable fixture used for wet etching anisotropic velocity test of hemispheric test piece |
| CN112718561A (en) * | 2020-12-23 | 2021-04-30 | 常州安一智能科技有限公司 | Acceleration testing device for automatically testing touch feedback sensor |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5083463A (en) * | 1990-02-07 | 1992-01-28 | M/Rad Corporation | Rotatable vibration test apparatus |
| US5435533A (en) * | 1993-09-10 | 1995-07-25 | Screening Systems, Inc. | Adjustable clamping fixture for vibrating various sized circuit boards |
| DE102007032064A1 (en) * | 2007-07-10 | 2009-01-15 | Siemens Ag | Test piece holder and method for vibration material testing |
| CN103063879A (en) * | 2012-12-28 | 2013-04-24 | 苏州中盛纳米科技有限公司 | Multi-parameter batch test equipment of micro-electromechanical systems (MEMS) acceleration sensor |
| CN103592466A (en) * | 2013-12-03 | 2014-02-19 | 中北大学 | Automatic lot sizing static rolling testing device for MEMS acceleration sensor |
-
2014
- 2014-12-10 CN CN201410750805.8A patent/CN104440696B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5083463A (en) * | 1990-02-07 | 1992-01-28 | M/Rad Corporation | Rotatable vibration test apparatus |
| US5435533A (en) * | 1993-09-10 | 1995-07-25 | Screening Systems, Inc. | Adjustable clamping fixture for vibrating various sized circuit boards |
| DE102007032064A1 (en) * | 2007-07-10 | 2009-01-15 | Siemens Ag | Test piece holder and method for vibration material testing |
| CN103063879A (en) * | 2012-12-28 | 2013-04-24 | 苏州中盛纳米科技有限公司 | Multi-parameter batch test equipment of micro-electromechanical systems (MEMS) acceleration sensor |
| CN103592466A (en) * | 2013-12-03 | 2014-02-19 | 中北大学 | Automatic lot sizing static rolling testing device for MEMS acceleration sensor |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104924234A (en) * | 2015-04-30 | 2015-09-23 | 东南大学 | Adjustable fixture used for wet etching anisotropic velocity test of hemispheric test piece |
| CN112718561A (en) * | 2020-12-23 | 2021-04-30 | 常州安一智能科技有限公司 | Acceleration testing device for automatically testing touch feedback sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104440696B (en) | 2016-04-20 |
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