CN104405837A - Ultraprecise friction driving mechanism - Google Patents

Ultraprecise friction driving mechanism Download PDF

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Publication number
CN104405837A
CN104405837A CN201410589690.9A CN201410589690A CN104405837A CN 104405837 A CN104405837 A CN 104405837A CN 201410589690 A CN201410589690 A CN 201410589690A CN 104405837 A CN104405837 A CN 104405837A
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CN
China
Prior art keywords
axle
support
ball bearing
friction
driving
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CN201410589690.9A
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Chinese (zh)
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CN104405837B (en
Inventor
顾国刚
钟君
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Suzhou Institute of Biomedical Engineering and Technology of CAS
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Suzhou Institute of Biomedical Engineering and Technology of CAS
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H13/00—Gearing for conveying rotary motion with constant gear ratio by friction between rotary members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H13/00—Gearing for conveying rotary motion with constant gear ratio by friction between rotary members
    • F16H13/10—Means for influencing the pressure between the members
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/10—Structural association with clutches, brakes, gears, pulleys or mechanical starters

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Power Engineering (AREA)
  • Transmission Devices (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
  • Gear Transmission (AREA)

Abstract

The invention discloses an ultraprecise friction driving mechanism. The mechanism mainly comprises a driving part, an auxiliary support part, a pressing part and an eccentric pressing part, wherein stable and precise rotation positioning is provided by the driving part, a torque motor is directly connected with a friction driving shaft, a driving error caused by intermediate transmission links is reduced, a circular grating is connected to the other end of the driving shaft, and the angular precision of a driving wheel is measured; through the auxiliary support part, the deflection deformation of the tail end of a driven rod is reduced, the position precision of the driven rod is guaranteed, so as to achieve the effects of auxiliary support and fine-tuning positioning, wherein the displacement output by an eccentric wheel structure is converted into pressing force by a pressure reed, and a driving wheel system and a friction guide rod are pressed through a prepressing wheel system; through the eccentric pressing part, accurate displacement output can be provided for the pressure reed, the pressing force can be conveniently adjusted, and the change of the pressing force can be monitored in real time by a pressure sensor installed on an eccentric wheel driven component, so as to satisfy the controllable requirement on the pressing force.

Description

A kind of ultraprecise friction driving mechanisms
Technical field
The invention belongs to ultraprecise drive system, relate to a kind of driving principle and mechanism, the ultraprecise friction driving mechanisms of nano grade positioning precision.
Background technique
Ultraprecise drive mechanism is indispensable important component part at high-grade, precision and advanced instrument and equipment.The Feed servo system mode that precise-motion mechanism mainly adopts at present has ball screw, static-pressure lead screw, linear electric motor, friction driving etc., and their mechanostructural property directly affects the precision output characteristics of feed drive system and drives dynamics.The main problem of lead screw is to there is creeping phenomenon, and have reversing motion gap, periodic error, pitch error are difficult to the shortcomings such as correction; Have complicated resiliently deformable and microvibration during the main problem of ball screw is to move, there is creeping phenomenon, have reversing motion gap, periodic error, pitch error are difficult to revise, the shortcomings such as Decay Rate is bad; The shortcomings such as it is little that static-pressure lead screw exists structural rigidity, easily produces vibration, and supplementary equipment is many, linear electric motor, owing to there being high magnetic fields, being debug, are dismantled inconvenience, easily inhale iron filings and other metal fillings, and heating is serious, easily produce the shortcomings such as vibration.
Ultraprecise friction driving mechanisms positioning precision is high, and element structure is simple, anufacturability good, can realize the positive and negative motion of gapless, and without creeping phenomenon, dynamic and static rigidity is high, operates steadily, and excited vibration is little, system reliability is high.The requirement of highi degree of accuracy driving mechanism can well be solved.Friction driving mechanisms structure composition comprise drive part, auxiliary supporting part, part of exerting pressure, follower grade several link form.
Summary of the invention
The object of the invention is to the above problem overcoming prior art existence, provide a kind of ultraprecise friction driving mechanisms, this driving mechanism can realize nanometer-level ultra-precise location, without creeping phenomenon in movement process, can realize the motion of forward and reverse gapless, operate steadily, system reliability is high.In friction driving experiment mechanism, provide stable, accurate revolution to locate by drive train, ensureing the positioning precision of follower lever straight line motion, is the core in friction driving mechanisms.Torque motor is directly connected with live axle, can reduce the driving error that intermediate transmission link is brought, and improves transmission accuracy.Circular gratings is connected to the live axle the other end, for measuring driving wheel corner accuracy, as the measuring unit of Close loop servo control.Auxiliary train reduces the deflection deformation of follower lever end, ensures the positional accuracy of follower lever, plays the effect of supplemental support and fine setting location.The converts displacement that eccentric wheel structure exports is become impacting force by pressure reed, and drive train and friction guide rod is compressed by precompressed train.Eccentric mechanism can provide displacement accurately to export for pressure spring sheet, can adjust the size of impacting force easily, and by being arranged on the change of the pressure transducer Real-Time Monitoring impacting force on eccentric wheel driven member, meets the requirement to impacting force controllability.
For realizing above-mentioned technical purpose, reach above-mentioned technique effect, the present invention is achieved through the following technical solutions:
A kind of ultraprecise friction driving mechanisms, this mechanism mainly comprises drive part, and auxiliary supporting part, part of exerting pressure and bias are exerted pressure part, it is characterized in that:
Described drive part comprises torque motor, described torque motor stator is fixedly mounted with driving support by torque motor seat, torque motor rotor connects one end of friction driving axle by motor flange, described friction driving axle is arranged on and drives on support, and between be provided with radial dense ball bearing shafting and thrust dense ball bearing shafting, the other end of friction driving axle is connected by Circular gratings flange plate with Circular gratings;
Described auxiliary supporting part comprises supplemental support axle, and described supplemental support axle is arranged on auxiliary support, and between be provided with radial dense ball bearing shafting and thrust dense ball bearing shafting;
Described pressure portion is divided and is comprised axle of exerting pressure, described in axle of exerting pressure be arranged on and exert pressure on support, and between be provided with radial dense ball bearing shafting and thrust dense ball bearing shafting, described in exert pressure the reed of exerting pressure also be provided with above support for transmitting precompression;
Described eccentric pressure portion is divided and is comprised eccentric shaft, described eccentric shaft is arranged on eccentric shaft support by driving bearing, described eccentric shaft to be connected by worm type of reduction gearing by stepper motor and drives, the radial direction of eccentric shaft connects and has driven vertical drive shaft, vertical drive shaft is slidably arranged in sliding shaft sleeve, and lower end is connected with pressure transducer, the other end of pressure transducer is fixed with bulb of exerting pressure, and exerts pressure on reed described in bulb of exerting pressure is pressed on.
Further, radial dense ball bearing shafting structure between described friction driving axle and driving support installs sealed bead bearing overcoat for driving in support axis hole, steel ball by radial ball retainer interference pretension between friction driving axle and sealed bead bearing overcoat, left and right sides thrust dense ball bearing shafting structure installs sealed bead bearing overcoat for driving in support axis hole, steel ball passes through thrust steel balls retainer interference pretension between friction driving axle and sealed bead bearing overcoat end face, radial dense ball bearing shafting between described supplemental support axle and auxiliary support and thrust dense ball bearing shafting, identical with thrust dense ball bearing shafting structure with above-mentioned radial dense ball bearing shafting with thrust dense ball bearing shafting with the radial dense ball bearing shafting of exerting pressure between support at described axle of exerting pressure.
Further, this mechanism also includes friction lever, and described friction lever is arranged on friction driving axle and supplemental support axle, friction lever self contering centering.
Further, described in axle of exerting pressure closely be pressed on friction lever, and the reliable pretightening force of conduct of the vertical compressive force provided by eccentric part of exerting pressure.
Further, described eccentric shaft drives vertical drive shaft to do radial alignment motion by rotating, and is directly pressed on and exerts pressure on reed, produce adjustable impacting force by the bulb of exerting pressure of bottom.
The invention has the beneficial effects as follows:
The straight-line displacement resolution that 1, can realize exporting can reach 10nm, and positioning precision is better than 100nm;
2, forward and reverse motion can realize gapless motion, poor without reversing motion backhaul;
3, friction pair contacting pattern is cambered surface contact, has self-alignment effect, ensure that the linarity that follower lever moves to circular cross-section friction follower lever;
4, pressure exerting arrangement is that eccentric wheel is exerted pressure mode, realizes impacting force evenly adjustable, and have employed worm gear structure and can ensure reverse self-locking, ensure that the constant of friction driving mechanisms in use impacting force.
5, driving wheel, follower lever, pinch roller adopt just to compression mode, make the distortion of follower lever symmetrical, ensure that the linarity of linear movement.
6, transmit impacting force by reed between compression axis system and pressure exerting arrangement, vertical for impacting force can be delivered on follower lever surface of contact by the point cantact mode of employing, does not produce the power in other direction and affects running precision.
Accompanying drawing explanation
Fig. 1 is structure positive view of the present invention;
Fig. 2 is structure side sectional view of the present invention;
Fig. 3 is stereogram of the present invention;
Fig. 4 is structure front view (not cuing open) of the present invention;
Fig. 5 is structure side view (not cuing open) of the present invention.
Number in the figure illustrates: 1, torque motor, 2, motor cabinet, 3, drive support, 4, friction driving axle, 5, motor flange, 6, motor fastening flange, 7, sealed bead bearing overcoat, 8, radial ball retainer, 9, steel ball, 10, thrust steel balls retainer, 11, Circular gratings, 12, Circular gratings flange plate, 13, locking nut, 14, motor fastening flange, 15, supplemental support axle, 16, auxiliary support, 17, to exert pressure axle, 18, to exert pressure support, 19, to exert pressure reed, 20, eccentric shaft, 21, eccentric shaft support, 22, driving bearing, 23, stepper motor, 24, worm type of reduction gearing, 25, vertical drive shaft, 26, sliding shaft sleeve, 27, pressure transducer, 28, to exert pressure bulb, 29, bearing beam, 30, supporting base, 31, friction lever.
Embodiment
Below with reference to the accompanying drawings and in conjunction with the embodiments, describe the present invention in detail.
With reference to shown in Fig. 1, a kind of ultraprecise friction driving mechanisms, this mechanism mainly comprises drive part, auxiliary supporting part, part of exerting pressure and bias are exerted pressure part, described drive part is fixedly mounted with driving support 3 by torque motor seat 2 by torque motor 1 stator, torque motor 1 rotor is connected by motor flange 5 with friction driving axle 4, and fixed by motor fastening flange 6, described friction driving axle 4 live axle is arranged on and drives on support 3, radial dense ball bearing shafting and thrust dense ball bearing shafting is devised between live axle and driving support, radial dense ball bearing shafting structure installs sealed bead bearing overcoat 7 for driving in support axis hole, steel ball 9 by radial ball retainer 8 interference pretension between live axle and sealed bead bearing overcoat, left and right sides thrust dense ball bearing shafting structure installs sealed bead bearing overcoat 7 for driving in support axis hole, and steel ball 9 between live axle and sealed bead bearing overcoat end face, ensures that live axle is in the axial direction without play by thrust steel balls retainer 10 interference pretension, Circular gratings 11 is connected with live axle 6 by Circular gratings flange plate 12, and is locked by locking nut 13.
Described auxiliary supporting part supplemental support axle 15 is arranged on auxiliary support 16, radial dense ball bearing shafting and thrust dense ball bearing shafting is devised between supplemental support axle and auxiliary support, radial dense ball bearing shafting structure for installing sealed bead bearing overcoat 7 in auxiliary support axis hole, steel ball 9 by radial ball retainer 8 interference pretension between supplemental support axle and sealed bead bearing overcoat; Left and right sides thrust dense ball bearing shafting structure is for installing sealed bead bearing overcoat 7 in auxiliary support axis hole, steel ball 9 between supplemental support axle and sealed bead bearing overcoat 7 end face, ensures that supplemental support axle is in the axial direction without play by thrust steel balls retainer 10 interference pretension.
Described pressure portion gives last item 17 and is arranged on and exerts pressure on support 18, to exert pressure axle and exert pressure between support and devise radial dense ball bearing shafting and thrust dense ball bearing shafting, radial dense ball bearing shafting structure is for installing sealed bead bearing overcoat 7 in support axis hole of exerting pressure, and steel ball 9 is being exerted pressure between axle and sealed bead bearing overcoat by radial ball retainer 8 interference pretension; Left and right sides thrust dense ball bearing shafting structure is for installing sealed bead bearing overcoat 7 in support axis hole of exerting pressure, and steel ball 9 is being exerted pressure between axle and sealed bead bearing overcoat 7 end face by thrust steel balls retainer 10 interference pretension, ensures to exert pressure axle in the axial direction without play.Exert pressure to install above support and exert pressure reed 19 for transmitting precompression.
Described bias axle system eccentric shaft 20 of exerting pressure is arranged on eccentric shaft support 21, centre is provided with driving bearing 22, stepper motor 23 is connected with eccentric shaft 20 by worm type of reduction gearing 24, eccentric shaft 20 is connected with vertical drive shaft 25, vertical drive shaft 25 is slided in sliding shaft sleeve 26, vertical drive shaft 25 end is connected with pressure transducer 27, the size of monitoring pressure is used for pressure transducer, the other end of pressure transducer 27 is fixed with bulb 28 of exerting pressure, and bulb 28 of exerting pressure directly is pressed on exerts pressure on reed 19.The whole bias axle system that exerts pressure is connected with bearing beam 29, is fixed on welded supporting base 30.
With reference to shown in Fig. 2, this mechanism also includes friction lever 31, and friction lever 31 is arranged on live axle 4 with on supplemental support axle 15, friction lever 31 self contering centering, and live axle system exports the high-precision straight line motion that rotation motion is converted into friction lever 31.
After the fixed installation of described live axle system, be fixed after the synchronism of debugging torque motor 1 and Circular gratings 11 and install.Torque motor 1 drives friction driving axle 4 to realize accurate angular turn, for friction driving mechanisms provides stable, accurate revolution to locate, ensures the positioning precision of friction lever 31 straight line motion.Bicircular arcs structure ensures the linarity of friction lever 36 straight line motion.
Shown supplemental support axle system will coordinate with the fixed position of live axle system installs, the relative position of centering supplemental support axle system China's supplemental support axle and live axle system, supplemental support axle system is for reducing the deflection deformation of friction lever 31 end, ensure the positional accuracy of follower lever, play the effect of supplemental support and fine setting location.
The axle 17 of exerting pressure of compression axis system is closely pressed on friction lever 31, the pressing friction bar 31 that the impacting force provided by eccentric pressure exerting arrangement is vertical, ensures to there is reliable pretightening force between live axle and friction lever.
Eccentric pressure exerting arrangement adds the rotation of worm type of reduction gearing by stepper motor, eccentric shaft 20 rotates and drives vertical drive shaft 26 straight line motion, bulb 28 of exerting pressure directly is pressed on exerts pressure on reed 19, act on reed of exerting pressure like this and adjustable impacting force is produced to pre-last item system, realize the adjustable of impacting force.
The foregoing is only the preferred embodiments of the present invention, be not limited to the present invention, for a person skilled in the art, the present invention can have various modifications and variations.Within the spirit and principles in the present invention all, any amendment done, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.

Claims (5)

1. a ultraprecise friction driving mechanisms, this mechanism mainly comprises drive part, and auxiliary supporting part, part of exerting pressure and bias are exerted pressure part, it is characterized in that:
Described drive part comprises torque motor (1), described torque motor (1) stator is fixedly mounted with driving support (3) by torque motor seat (2), torque motor (1) rotor connects one end of friction driving axle (4) by motor flange (5), described friction driving axle (4) is arranged on and drives on support (3), and between be provided with radial dense ball bearing shafting and thrust dense ball bearing shafting, the other end of friction driving axle (4) is connected by Circular gratings flange plate (12) with Circular gratings (11);
Described auxiliary supporting part comprises supplemental support axle (15), and described supplemental support axle (15) is arranged on auxiliary support (16), and between be provided with radial dense ball bearing shafting and thrust dense ball bearing shafting;
Described pressure portion is divided and is comprised axle of exerting pressure (17), described axle of exerting pressure (17) is arranged on support of exerting pressure (19), and between be provided with radial dense ball bearing shafting and thrust dense ball bearing shafting, described in support (18) top of exerting pressure reed of exerting pressure (19) for transmitting precompression is also installed;
Described eccentric pressure portion is divided and is comprised eccentric shaft (20), described eccentric shaft (20) is arranged on eccentric shaft support (21) by driving bearing (22), described eccentric shaft (20) is connected by stepper motor (23) by worm type of reduction gearing (24) and is driven, the radial direction of eccentric shaft (20) connects and has driven vertical drive shaft (25), vertical drive shaft (25) is slidably arranged in sliding shaft sleeve (26), and lower end is connected with pressure transducer (27), the other end of pressure transducer (27) is fixed with bulb (28) of exerting pressure, exert pressure on reed (19) described in bulb (28) of exerting pressure is pressed on.
2. ultraprecise friction driving mechanisms according to claim 1, it is characterized in that, radial dense ball bearing shafting structure between described friction driving axle (4) and driving support (3) installs sealed bead bearing overcoat (7) for driving in support (3) axis hole, steel ball (9) by radial ball retainer (8) interference pretension between friction driving axle (4) and sealed bead bearing overcoat (7), left and right sides thrust dense ball bearing shafting structure installs sealed bead bearing overcoat (7) for driving in support (3) axis hole, steel ball (9) by thrust steel balls retainer (10) interference pretension between friction driving axle (4) and sealed bead bearing overcoat (7) end face, radial dense ball bearing shafting between described supplemental support axle (15) and auxiliary support (16) and thrust dense ball bearing shafting, identical with thrust dense ball bearing shafting structure with above-mentioned radial dense ball bearing shafting with thrust dense ball bearing shafting with the radial dense ball bearing shafting between support of exerting pressure (18) described axle of exerting pressure (17).
3. ultraprecise friction driving mechanisms according to claim 1, it is characterized in that, this mechanism also includes friction lever (31), and described friction lever (31) is arranged on friction driving axle (4) with on supplemental support axle (15), friction lever (31) self contering centering.
4. the ultraprecise friction driving mechanisms according to claim 1 or 3, is characterized in that, described in axle (17) of exerting pressure closely be pressed on friction lever (31), and the reliable pretightening force of conduct of the vertical compressive force provided by eccentric part of exerting pressure.
5. ultraprecise friction driving mechanisms according to claim 1, it is characterized in that, described eccentric shaft (20) drives vertical drive shaft (26) to do radial alignment motion by rotating, directly be pressed on reed of exerting pressure (19) by the bulb of exerting pressure (28) of bottom, produce adjustable impacting force.
CN201410589690.9A 2014-10-29 2014-10-29 Ultraprecise friction driving mechanism Active CN104405837B (en)

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Application Number Priority Date Filing Date Title
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CN104405837B CN104405837B (en) 2017-01-25

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112460215A (en) * 2020-11-24 2021-03-09 中国科学院光电技术研究所 Offset shafting thrust reaction cancellation device

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0663715A2 (en) * 1994-01-14 1995-07-19 Bayer Corporation Self-propelled linear motion drive apparatus
CN2680929Y (en) * 2004-03-22 2005-02-23 王新泉 Conical surface friction gear planet reducing mechanism
CN101151476A (en) * 2005-02-28 2008-03-26 戴科欧洲科学研究实验室 Friction wheel actuator
KR100921967B1 (en) * 2009-03-25 2009-10-15 삼성탈레스 주식회사 Driving deflection prevening apparatus for device
CN201582360U (en) * 2009-12-22 2010-09-15 杨永顺 Vertical shaft friction transmission device
CN204437210U (en) * 2014-10-29 2015-07-01 中国科学院苏州生物医学工程技术研究所 A kind of ultraprecise friction driving mechanisms

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0663715A2 (en) * 1994-01-14 1995-07-19 Bayer Corporation Self-propelled linear motion drive apparatus
CN2680929Y (en) * 2004-03-22 2005-02-23 王新泉 Conical surface friction gear planet reducing mechanism
CN101151476A (en) * 2005-02-28 2008-03-26 戴科欧洲科学研究实验室 Friction wheel actuator
KR100921967B1 (en) * 2009-03-25 2009-10-15 삼성탈레스 주식회사 Driving deflection prevening apparatus for device
CN201582360U (en) * 2009-12-22 2010-09-15 杨永顺 Vertical shaft friction transmission device
CN204437210U (en) * 2014-10-29 2015-07-01 中国科学院苏州生物医学工程技术研究所 A kind of ultraprecise friction driving mechanisms

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112460215A (en) * 2020-11-24 2021-03-09 中国科学院光电技术研究所 Offset shafting thrust reaction cancellation device
CN112460215B (en) * 2020-11-24 2022-12-30 中国科学院光电技术研究所 Offset shafting thrust reaction cancellation device

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