CN104404478A - Method for preparing organic ammonium metal halide film - Google Patents

Method for preparing organic ammonium metal halide film Download PDF

Info

Publication number
CN104404478A
CN104404478A CN201410681219.2A CN201410681219A CN104404478A CN 104404478 A CN104404478 A CN 104404478A CN 201410681219 A CN201410681219 A CN 201410681219A CN 104404478 A CN104404478 A CN 104404478A
Authority
CN
China
Prior art keywords
film
metal halide
organic ammonium
glass tubing
ammonium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201410681219.2A
Other languages
Chinese (zh)
Inventor
曹焕奇
陈晓敏
杨利营
印寿根
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tianjin University of Technology
Original Assignee
Tianjin University of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tianjin University of Technology filed Critical Tianjin University of Technology
Priority to CN201410681219.2A priority Critical patent/CN104404478A/en
Publication of CN104404478A publication Critical patent/CN104404478A/en
Pending legal-status Critical Current

Links

Abstract

The invention discloses a method for preparing an organic ammonium metal halide film. A half-closed type carrier gas free hot wall type low-pressure chemical vapor deposition method process is adopted to prepare the organic ammonium metal halide film. The method comprises the following steps: firstly, preparing a metal halide (MX2) film on a quartz substrate by using a dry method or a wet method, and transferring the metal halide (MX2) film into a glass tube for annealing, wherein one end of the glass tube is sealed and the other end is grounded; secondly, transferring the energy to organic ammonium (AX) powder inside the glass tube through a hot wall, forming steam blocks through self-diffusion of AX steam in low vacuum, performing chemical reaction on MX2 with a hot substrate to generate the film which is uniform in thickness, good in appearance, high in light absorption rate and smooth in surface, and performing in-situ annealing so as to generate the AMX3 film which is dense in structure and high in crystallinity degree. The method has the advantages that in-situ annealing can be performed in the film formation process, continuous vacuuming is not needed, the preparation time is shortened, the energy consumption is reduced, the filming efficiency is high, the charge capture trap in the film is reduced, and the carrier mobility is increased.

Description

A kind of preparation method of organic ammonium metal halide film
[technical field]
The present invention relates to organic inorganic hybridization technical field of semiconductors, be specifically related to a kind of preparation method of organic ammonium metal halide film.
[background technology]
Organic inorganic hybridization organic ammonium metal halide (AMX 3) normally uhligite crystal formation, be therefore also called organic-inorganic perovskite compound (IOP).AMX 3normally by metal halide (MX 2) and organic ammonium halogenide (AX) two kinds of component synthesis.Photovoltaic technology develops a kind of novel renewable energy rapidly recently in decades.Along with the progress of technology, its photoelectric transformation efficiency is greatly improved.The laminated cell be wherein made up of GaAs/InP, the highest transformation efficiency reaches 44.7%.The solar battery efficiency be made up of crystal silicon reaches 25%, and the sun power efficiency be made up of copper-indium-galliun-selenium (CIGS) reaches 21%.Although above conventional solar cell efficiency is higher, preparation cost is relatively high.Organic solar batteries, dye sensitization solar battery, quantum dot solar cell, perovskite typed solar cell etc. are the very popular photovoltaic technologies occurred in recent years.By AMX 3the thin-film solar cells formed as active coating is the topic that area of solar cell one is very popular in recent years.Such battery is commonly called perovskite typed solar cell (PSC).The most high-photoelectric transformation efficiency of perovskite typed solar cell, by the interface engineering of research film, is brought up to 19.3% by the Y.Yang team of Univ California-Los Angeles USA.The efficiency of uhligite solar cell is at present still in quick growth.
The solution preparation of perovskite thin film is divided into single step solution method and two step solution methods.The preparation method of single step solution method is normally: by MX 2, AX is dissolved in solvent (as gamma-butyrolactone), is then prepared film forming by wet method.Last anneal.The first method of two step solution methods is normally: first by MX 2be dissolved in respectively with AX and intersect accordingly in solvent (as DMF and Virahol).The wet methods such as spin coating are utilized to make MX 2film, then same wet method makes one deck AX film thereon, and in making AX thin-film process, AX molecule infiltrates the MX of lower floor 2in film, with its reaction, obtain one deck and contain AMX 3, solvent, MX 2, AX mixed film.Finally utilize thermal annealing process to remove desolventizing, promote MX 2with the reaction of AX, thus obtain the high AMX of degree of crystallinity 3film.The second method of two step solution methods is: by the MX made above 2film immerses in AX solution, and solute molecule spreads in liquid-solid interface, reaction.The soak time of the method is generally 1-3 hour.In immersion process, the perovskite thin film that initial surface is formed can be partly solubilized, and is thus difficult to obtain smooth film.The common drawback of wet method perovskite film accurately cannot control thickness, is difficult to the film obtaining surface uniform, is difficult to make rhythmo structure etc.
The method of vapour deposition can overcome above shortcoming, and these class methods reported at present comprise the source vapour deposition of vacuum list, the vapour deposition of vacuum double source, inert gas carrier chemical vapour deposition and gas phase and assist aumospheric pressure cvd four kinds.1999, the people such as the D.B.Mitzi of American I BM company utilized the vapour deposition of vacuum list source to make AMX 3film, employing be single source flash method (SSTA).Flash method has the shortcomings such as accurately cannot control thickness and evaporation rate is slow, thus cannot be applied in quick scale operation.2013, the H.J.Snaith seminar of Regius professor utilized vacuum double source vapour deposition process to make AMX 3film.The film that the method is made has very high planeness, and its particle diameter is more than some tens of pm.The photovoltaic device photoelectric transformation efficiency be made up of this film can reach 15.4%.But the shortcoming of the method is because AX molecule has very low vaporization temperature, at the vaporization temperature, first AX is decomposed into organic amine and hydrogen halide (note: under normal pressure, AX can distil but not decompose. 4), cause huge pollution to wall inside, the method cannot carry out scale operation.2014, the D.J.Lewis seminar of Britain's this especially big of graceful side utilized aerosol assistant chemical vapor deposition (AACVD) fabrication techniques perovskite thin film.The defect of the method is the surface topography being difficult to control film, is difficult to uniformly film (scheming see its SEM).2014, the Y.Qi seminar of university of Okinawa Japan science and technology large institute utilized mixed chemical vapour deposition process (HCVD) to prepare AMX 3film, the advantage of the method is that film-forming properties is even, and thickness is controlled.But the shortcoming of the method is difficult to control to the actual Heating temperature of substrate.Meanwhile, this system uses the conventional CVD process of open system, and AX is taken to MX by rare gas element 2surface is reacted, and thus system air pressure is higher, and AX steam mean free path is short, speed of reaction is slow, diffractive difference.In addition, the common feature of above CVD (Chemical Vapor Deposition) method adopts vacuum as reaction environment, and reaction process intermediate pump is in running order all the time, thus there is the shortcomings such as energy expenditure is large, production cost is high.2014, the Y.Yang team of Univ California-Los Angeles USA had been full of N by utilizing 2glove box in heating AX (CH in closed system 3nH 3i), by advance by MX prepared by spin coating 2(PbI 2) film is converted into AMX 3(CH 3nH 3pbI 3) film.With the film that the method generates, there is PbI 2transformation efficiency is high, uniform particles, coverage advantages of higher.But due in the method, PbI 2the surface of film and particulate interspaces are filled with the nitrogen molecule not participating in reacting, and these nitrogen molecules make the CH arriving film surface 3nH 3the mean free path of I vapour molecule is less than several CVD method above-mentioned several order of magnitude, therefore can collide out AX vapour molecule, be difficult to arrive film substrate.Generally need reaction times (two hours) of more growing in this way, this is unfavorable to quick scale operation.
Low Pressure Chemical Vapor Deposition (LPCVD) is compared to atmospheric pressure cvd (NPCVD), and LPCVD has advantages such as improving uniformity of film, resistivity consistence and production efficiency.Its reason is that LPCVD is owing to having lower pressure, thus has lower molecular conecentration, higher spread coefficient, faster quality transmission rate, faster speed of reaction, the reaction advantage such as more abundant.In addition, traditional C VD method is usually because high temperature problem cannot use on flexible substrates.It is temperature required low that the organic ammonium raw material of the organic ammonium metal halide that the present invention relates to forms the steam being applicable to reacting, and thus can synthesize on flexible substrates.
The comparison of the various AMX3 method for manufacturing thin film of form 1
*, the raw material availability of * * spin-coating method is low, silk screen printing, and the raw material availabilities such as volume to volume printing are high
+ need to react in glove box
++ what part document was mentioned prepares speed
#, ## can be improved by solvent engineering
[summary of the invention]
The object of the invention is for above-mentioned technical Analysis and existing problems, provide a kind of preparation method of organic ammonium metal halide film, this preparation method improves the mean free path of vapour molecule, thus makes reaction more fully fast; Film is ingress of air not, and film equality, density are high; In deposition process, do not need vacuum pump continued running, do not need inert gas carrier, AX raw material recoverable, can significantly reduce the energy and carrier gas cost drop into, be applicable to scale operation
Technical scheme of the present invention:
A preparation method for organic ammonium metal halide film, adopts semienclosed no carrier gas hot wall type Low Pressure Chemical Vapor Deposition (HW-LPCVD) technique to prepare, comprises the following steps:
1) under the condition of isolated air, in the substrate cleaned up, metal halide (MX is prepared by wet method or dry method 2) film, the cavity of load sample is vacuumized, vacuum tightness be 0.1-1000Pa, temperature be 60-100 degree Celsius under by sample holder to MX 2film carries out annealing 5-10 minute to remove residual solvent and foreign gas, heats 5-10 minute to remove the foreign gas of inside cavity absorption at 60-100 DEG C of temperature simultaneously;
2) film sample of preparation and organic ammonium halogenide (AX) powder are placed in the cavity of load sample, at temperature is 110-200 DEG C, reacts 10-30 minute;
3) specimen holder is stopped to heat after reacting completely;
4) obtained AMX 3film, is filled with rare gas element and preserves.
Described metal halide (MX 2) material is lead chloride (PbCl 2), lead bromide (PbBr 2), lead iodide (PbI 2), Selenium monochloride, Selenium monobromide or iodate selenium; Organic ammonium halogenide (AX) material is chloromethane ammonium, chloroethene ammonium, chlorine formamidine salt (NH=CHNH 3cl), chlorine dimethylammonium, bromine first ammonium, bromine second ammonium, bromine formamidine salt (NH=CHNH 3br), bromine dimethylammonium, iodine first ammonium, iodine second ammonium, iodine formamidine salt (NH=CHNH 3or iodine dimethylammonium I).
A kind of preparation facilities of described organic ammonium metal halide film, comprise Glass tubing, specimen holder, heating jacket and feed-pipe, one end of Glass tubing is provided with sealing plug, be provided with middle part sealing plug in the middle of Glass tubing and Glass tubing be divided into annular seal space a and annular seal space b, sealing plug center, middle part is provided with centre hole, the annular seal space b part of Glass tubing is provided with bleeds ventpipe and is provided with seal cartridge, and the exit end of Glass tubing is provided with vapor pipe and is provided with valve; Specimen holder is arranged in the annular seal space a of Glass tubing; The annular seal space a that heating jacket is arranged at Glass tubing is outside; Feed-pipe enters in annular seal space a through the centre hole of bleed ventpipe and middle part sealing plug.
Technical Analysis of the present invention:
Rough vacuum is utilized to synthesize organic ammonium metal halide film, vacuum tightness in Glass tubing is 0.1-1000Pa, do not need vacuum pump still can maintain vacuum tightness required for reaction after chamber vacuum degree is evacuated to required vacuum tightness, the joule heating transferring energy utilizing hot-plate to produce is to hot wall, directly act on AX raw material, make it form steam.In the inner collision continuously of wall, there is diffraction in AX steam.The diffusion of AX molecule bears free energy change by the temperature at non-heated position, two ends to drive, but not vacuum pump takes out the diffusion or inert carrier gas (N that cause 2or Ar etc.) transport.Energy can be saved like this.
Utilize inside and outside two temperature-control devices control MX respectively 2the temperature in backside of substrate temperature and AX source synthesizes organic ammonium metal halide film.AX is dispersed in the Glass tubing bottom in external heat interval range, utilizes hot wall to heat and evaporates.MX 2substrate is attached on specimen holder, is positioned between outer heating zone equally, but is directly heated by specimen holder.Thus can to MX 2annealing and after annealing process in original position preannealing, reaction process is accurately carried out in substrate.Thus ensure that the homogeneity of film former, impurity defect is reduced, decreases the time cost of sample transfer simultaneously.
The present invention is at preparation AMX 3what adopt during film is the working method completely cutting off air completely, is semienclosed no carrier gas hot wall type Low Pressure Chemical Vapor Deposition (HW-LPCVD) technique of a kind of employing.As employing wet-layer preparation MX 2during film, do not need to use other vacuum evaporation cavity or vacuum dryers, rear for the extension of this device and glove box can be formed continuous apparatus.As employing dry process MX 2during film, rear for the extension of this device and vacuum evaporation cavity can be formed continuous apparatus.
The invention has the beneficial effects as follows:
1, the heat that hot wall produces is efficiently utilized, and makes evaporation source AX form steam, and makes the steam of generation in wall inside not condensation, improve the diffractive of AX molecule, can form the collision that repeatedly rebounds, until and MX in wall inside 2reaction or the region condensation colder at two ends;
2, carry out In Situ Heating by specimen holder to film, molecular motion is violent, and lattice mismatch degree is little.The perovskite thin film subsurface defect produced is few, and degree of crystallinity is high; But the temperature of specimen holder can not be too high, otherwise organic ammonium molecule is difficult to adsorb at film surface, and on the other hand, the crystal grain generated under high temperature is large, affects planeness; Meanwhile, base reservoir temperature can not be too low, otherwise excessive organic ammonium molecule at film surface and specimen holder surface condensation, can affect its diffusion and further reaction;
3, wall inside can be recycled at the AX compared with cold spots condensation, reduces cost of manufacture;
4, AMX 3formation belong to gas-solid out-phase reaction, gas molecule has higher mean free path relative to fluid molecule, and therefore relative to liquid phase reaction, AX is at MX 2the velocity of diffusion of solid particulate interface and granule interior is faster, and speed of reaction is faster, reaction is more abundant.
5, because two kinds of reaction meet stoichiometric between raw material and the material of generation, produce, thus without the need to inert gas carrier without gas by-product; Meanwhile, because temperature of reaction is lower, thus without the need to reacting in the closed quartz tube of harshness, semi-enclosed Glass tubing and the supporting system of silica gel material can meet reaction conditions.Economy, operability, preparation efficiency improve greatly.No carrier gas, semi-enclosed LPCVD preparation method of use low vacuum do not see and prepared AMX in the past 3in the relevant report of film.
This device has the feature of exclusion of water oxygen, thus can improve the AMX of formation 3the aerial stability of film.The present invention preparation method used have be swift in response, film forming evenly, fine and close, energy expenditure is low, rare gas element consumption less, the feature such as thickness is controlled, be very applicable to large scale continuous prod.
[accompanying drawing explanation]
Fig. 1 is the preparation facilities structural representation of this organic ammonium metal halide film.
Fig. 2 is the amplification perspective view of the specimen holder of the preparation facilities of organic ammonium metal halide film.
In figure: 1. in the middle part of Glass tubing 2. specimen holder 3. heating jacket 4. feed-pipe 5. sealing plug 6., sealing plug 7. annular seal space a 8. annular seal space b 9. centre hole 10 is bled ventpipe 11. seal cartridge 12. vapor pipe 13. valve.
Fig. 3 is the CH that in embodiment 1 prepared by no carrier gas hot wall type Low Pressure Chemical Vapor Deposition 3nH 3pbI 3the PbI that surface topography AFM figure (left side) of film and corresponding wet method obtain 2the surface topography AFM of film schemes (right side).
Fig. 4 is the CH that in embodiment 1 prepared by no carrier gas hot wall type Low Pressure Chemical Vapor Deposition 3nH 3pbI 3the PbI that the XRD spectra of film differential responses time and corresponding wet method obtain 2the XRD spectra of film.
Fig. 5 is the CH that in embodiment 1 prepared by no carrier gas hot wall type Low Pressure Chemical Vapor Deposition 3nH 3pbI 3the PbI that the visible absorption spectra figure of film and corresponding wet method obtain 2the visible absorption spectra figure of film.
Fig. 6 is the CH that in embodiment 2 prepared by no carrier gas hot wall type Low Pressure Chemical Vapor Deposition 3nH 3pbI 3the film thickness of different zones eight points of different positions on the substrate of 1 inch × 1 inch of film.
Fig. 7 is the CH that in embodiment 2 prepared by no carrier gas hot wall type Low Pressure Chemical Vapor Deposition 3nH 3pbI 3the PbI that surface topography SEM figure (left side) of film and corresponding dry method obtain 2the surface topography SEM of film schemes (right side).
Embodiment
Following examples will the present invention is described further by reference to the accompanying drawings.In following examples, the preparation of target compound all utilizes the preparation facilities of organic ammonium metal halide film to complete.The preparation facilities of this organic ammonium metal halide film, as shown in Figure 1, 2, comprise Glass tubing 1, specimen holder 2, heating jacket 3 and feed-pipe 4, one end of Glass tubing 1 is provided with sealing plug 5, be provided with middle part sealing plug 6 in the middle of Glass tubing 1 and Glass tubing be divided into annular seal space a7 and annular seal space b8, sealing plug center, middle part is provided with centre hole 9, and the annular seal space b8 part of Glass tubing 1 is provided with bleeds ventpipe 10 and is provided with seal cartridge 11, and the exit end of Glass tubing 1 is provided with vapor pipe 12 and is provided with valve 13; Specimen holder 2 is arranged in the annular seal space a7 of Glass tubing 1; The annular seal space a7 that heating jacket 3 is arranged at Glass tubing 1 is outside; Feed-pipe 4 enters in annular seal space a7 through the centre hole 9 of bleed ventpipe 10 and middle part sealing plug 6.
Embodiment 1:
A preparation method for organic ammonium metal halide film, adopts semienclosed no carrier gas hot wall type Low Pressure Chemical Vapor Deposition (HW-LPCVD) technique to prepare, comprises the following steps:
1) quartz plate is cleaned: use acetone, Virahol, deionized water ultrasonic cleaning quartz plate 30 minutes respectively, pressurized air dries up, ozonize 10 minutes; By 0.23g PbI 2be dissolved in 0.5mL dry DMF, be heated to 60 DEG C, magnetic agitation 30 minutes; On the 2.5cm × 2.5cm silica glass cleaned up, 6000rpm spin coating PbI 2dMF solution 30s; Heating 5 minutes in thermal station substrate being placed in 100 DEG C, after naturally cooling to room temperature, the PbI good by spin coating 2quartz plate is transferred to and is full of in the glove box of argon gas.
2) preparation facilities put into glove box and open valve, taking 0.02 gram of CH 3nH 3i, evenly puts into heating jacket overlay area.
3) by PbI 2quartz plate is attached on specimen holder.Put into annular seal space a, close total valve and seal cartridge valve, preparation facilities is transferred to outside glove box.
4) pass into high-purity argon gas from valve, connect vacuum meter, with biexhaust pipe, device device is bled, use hair dryer water back simultaneously, get rid of the water vapour of inwall absorption, be then filled with high-purity argon gas, repeatedly pumping-charge operation three times.
5) open valve, be filled with high-purity argon gas, be evacuated to below 1000Pa; Valve-off, wait for 20 minutes, as vacuum tightness is undamped, then identity system is without gas leakage.Open valve, heated sample frame to 100 DEG C, wait for 5 minutes, carry out degasification and vacuum pre-anneal treatment.
6) open heating mantle heats system, be heated to 80 DEG C, wait for 10 minutes, system degasification, is then increased to 120 DEG C by jacket temperature, stops 1 minute, further degasification, valve-off; Continue to be increased to 150 DEG C, stop 10 minutes, CH in this process 3nH 3i forms steam and and PbI 2react, generate rapidly the CH of chocolate 3nH 3pbI 3film.
7) close heating mantle heats system, remove heating jacket, exposed by annular seal space a outer wall and naturally cool to room temperature in atmosphere, be then filled with high-purity argon gas, valve-off, obtained organic ammonium metal halide film, film thickness gauge records thickness and is about 450nm.
Fig. 3 is CH prepared by no carrier gas hot wall type Low Pressure Chemical Vapor Deposition 3nH 3pbI 3the PbI that surface topography AFM figure (left side) of film and corresponding wet method obtain 2the surface topography AFM of film schemes (right side).Show in figure: CH 3nH 3pbI 3particle diameter is 100-450nm, covers quartz surfaces substantially completely, and its mean square roughness is 33.0nm, is about PbI 2three times of mean square roughness (10.3nm).
Fig. 4 is CH prepared by no carrier gas hot wall type Low Pressure Chemical Vapor Deposition 3nH 3pbI 3the PbI that the XRD spectra of film differential responses time and corresponding wet method obtain 2the XRD spectra of film.Show in figure: the XRD spectra of reacting 10 minutes, 30 minutes, 60 minutes, 120 minutes is basically identical, all without PbI 2peak occurs, shows in 10 minutes, most PbI 2react and generated CH 3nH 3pbI 3.
Fig. 5 is CH prepared by no carrier gas hot wall type Low Pressure Chemical Vapor Deposition 3nH 3pbI 3the PbI that the visible absorption spectra figure of film and corresponding wet method obtain 2the visible absorption spectra figure of film.Show in figure: the CH of generation 3nH 3pbI 3the photoabsorption interval of film extends to 760nm, covers whole visible region, is suitable as light absorbing zone.
Embodiment 2:
A kind of preparation method of organic ammonium metal halide film, semienclosed no carrier gas hot wall type Low Pressure Chemical Vapor Deposition (HW-LPCVD) technique is adopted to prepare, step is substantially the same manner as Example 1, and difference is that the purging method of quartz plate is as follows:
Use acetone, Virahol, deionized water ultrasonic cleaning quartz plate 30 minutes respectively, pressurized air dries up, ion bombardment 10 minutes; 5 × 10 -4under Pa background pressure, with the speed of 0.1nm/s, the 2.5cm × 2.5cm quartz cleaned up is prepared the PbI of one deck 80nm 2film, source cardinal distance is 40cm, and source is loaded on tungsten boat, and substrate distribution adopts rotary spherical distribution, and its thickness is controlled by corrected quartz crystal.Base reservoir temperature is 80 DEG C, then by PbI 2quartz plate is transferred to and is full of in the glove box of argon gas.
Fig. 6 is CH prepared by no carrier gas hot wall type Low Pressure Chemical Vapor Deposition 3nH 3pbI 3the film thickness of different zones eight points of different positions on the substrate of 1 inch × 1 inch of film, shows in figure: the thickness of A-H point is followed successively by 231nm, 226nm, 235nm, 230nm, 227nm, 235nm, 231nm, 225nm.
Fig. 7 is CH prepared by no carrier gas hot wall type Low Pressure Chemical Vapor Deposition 3nH 3pbI 3the PbI that surface topography SEM figure (left side) of film and corresponding dry method obtain 2the surface topography SEM of film schemes (right side).Show in figure: PbI 2film in the form of sheets, and generate CH 3nH 3pbI 3film is formed primarily of particle, and particle diameter ratio is comparatively even, and particle diameter is 200-400nm, covers quartz surfaces substantially completely.
Above-mentioned embodiment is only that the present invention's enforceable small-scale in laboratory scale prepares AMX 3the preferred implementation of film; describe technological line of the present invention and essential implementation in detail; not that protection scope of the present invention is limited; all any simple modification of carrying out according to spirit of the present invention and equivalent structure transformation or modification, all should be encompassed within protection scope of the present invention.
Known to the thickness distribution of film, crystalline structure, Analysis of Surface Topography by means of testing such as step instrument, X-ray diffraction (XRD), atomic force microscope (AFM), scanning electronic microscope (SEM), absorption spectrometers: the method applied in the present invention can prepare the perovskite typed AMX that thickness is even, degree of crystallinity is high, light absorption ratio is high 3film.The method that the present invention adopts solves film morphology AMX 3the dynamics problem of building-up reactions.For AMX 3the formation of film, its speed of reaction mainly by AX molecule at MX 2rate of diffusion in crystal grain determines, with the saturation vapour pressure of AX, mean free path, base reservoir temperature and MX 2the pattern of film is relevant.Improve the saturation vapour pressure of AX, reduce background pressure, improve base reservoir temperature and can improve rate of diffusion and speed of reaction.Directly contacted with hot wall by (1), under (2) rough vacuum condition, (3) substrate In Situ Heating three approach implements simultaneously, speed of reaction is accelerated greatly, effectively shortens the reaction times.

Claims (3)

1. a preparation method for organic ammonium metal halide film, is characterized in that: adopt semienclosed no carrier gas hot wall type Low Pressure Chemical Vapor Deposition (HW-LPCVD) technique to prepare, comprise the following steps:
1) under the condition of isolated air, in the substrate cleaned up, metal halide (MX is prepared by wet method or dry method 2) film, the cavity of load sample is vacuumized, vacuum tightness be 0.1-1000 Pa, temperature be 60-100 degree Celsius under by sample holder to MX 2film carries out annealing 5-10 minute to remove residual solvent and foreign gas, heats 5-10 minute to remove the foreign gas of inside cavity absorption at 60-100 DEG C of temperature simultaneously;
2) film sample of preparation and organic ammonium halogenide (AX) powder are placed in the cavity of load sample, at temperature is 110-200 DEG C, reacts 10-30 minute;
3) specimen holder is stopped to heat after reacting completely;
4) obtained AMX 3film, is filled with rare gas element and preserves.
2. the preparation method of organic ammonium metal halide film according to claim 1, is characterized in that: described metal halide (MX 2) material is lead chloride, lead bromide, lead iodide, Selenium monochloride, Selenium monobromide or iodate selenium; Organic ammonium halogenide (AX) material is chloromethane ammonium, chloroethene ammonium, chlorine formamidine salt (NH=CHNH 3cl), chlorine dimethylammonium, bromine first ammonium, bromine second ammonium, bromine formamidine salt (NH=CHNH 3br), bromine dimethylammonium, iodine first ammonium, iodine second ammonium, iodine formamidine salt (NH=CHNH 3or iodine dimethylammonium I).
3. the preparation facilities of an organic ammonium metal halide film as claimed in claim 1, it is characterized in that: comprise Glass tubing, specimen holder, heating jacket and feed-pipe, one end of Glass tubing is provided with sealing plug, be provided with middle part sealing plug in the middle of Glass tubing and Glass tubing be divided into annular seal space a and annular seal space b, sealing plug center, middle part is provided with centre hole, the annular seal space b part of Glass tubing is provided with bleeds ventpipe and is provided with seal cartridge, and the exit end of Glass tubing is provided with vapor pipe and is provided with valve; Specimen holder is arranged in the annular seal space a of Glass tubing; The annular seal space a that heating jacket is arranged at Glass tubing is outside; Feed-pipe enters in annular seal space a through the centre hole of bleed ventpipe and middle part sealing plug.
CN201410681219.2A 2014-11-24 2014-11-24 Method for preparing organic ammonium metal halide film Pending CN104404478A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201410681219.2A CN104404478A (en) 2014-11-24 2014-11-24 Method for preparing organic ammonium metal halide film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201410681219.2A CN104404478A (en) 2014-11-24 2014-11-24 Method for preparing organic ammonium metal halide film

Publications (1)

Publication Number Publication Date
CN104404478A true CN104404478A (en) 2015-03-11

Family

ID=52642140

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201410681219.2A Pending CN104404478A (en) 2014-11-24 2014-11-24 Method for preparing organic ammonium metal halide film

Country Status (1)

Country Link
CN (1) CN104404478A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105239054A (en) * 2015-11-03 2016-01-13 天津理工大学 Preparation device and method for organic and inorganic hybrid perovskite film with micro grain size
CN105470400A (en) * 2015-11-19 2016-04-06 华北电力大学 Perovskite film preparation method and application
CN105576131A (en) * 2016-03-14 2016-05-11 华北电力大学 Method for preparing interface modified perovskite solar cell through vapor auxiliary solution method
CN106229415A (en) * 2016-08-11 2016-12-14 佛山千里目科技有限公司 A kind of method preparing metal halide perovskite and device thereof
CN108677169A (en) * 2018-05-17 2018-10-19 天津理工大学 A kind of preparation facilities of organic ammonium metal halide film and preparation and characterizing method
WO2019056779A1 (en) * 2017-09-22 2019-03-28 杭州纤纳光电科技有限公司 Device for improving uniformity of perovskite film formation, and method therefor
CN113845896A (en) * 2021-09-10 2021-12-28 天津理工大学 Curved organic ammonium metal halide film, preparation method, solar cell and application
CN116083876A (en) * 2022-11-18 2023-05-09 佛山仙湖实验室 Densification method of lead iodide film and application thereof

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105239054A (en) * 2015-11-03 2016-01-13 天津理工大学 Preparation device and method for organic and inorganic hybrid perovskite film with micro grain size
CN105470400A (en) * 2015-11-19 2016-04-06 华北电力大学 Perovskite film preparation method and application
CN105470400B (en) * 2015-11-19 2018-06-22 华北电力大学 A kind of preparation method and application of perovskite film
CN105576131A (en) * 2016-03-14 2016-05-11 华北电力大学 Method for preparing interface modified perovskite solar cell through vapor auxiliary solution method
CN106229415A (en) * 2016-08-11 2016-12-14 佛山千里目科技有限公司 A kind of method preparing metal halide perovskite and device thereof
WO2019056779A1 (en) * 2017-09-22 2019-03-28 杭州纤纳光电科技有限公司 Device for improving uniformity of perovskite film formation, and method therefor
CN108677169A (en) * 2018-05-17 2018-10-19 天津理工大学 A kind of preparation facilities of organic ammonium metal halide film and preparation and characterizing method
WO2019218567A1 (en) * 2018-05-17 2019-11-21 天津理工大学 Device and method for preparing organic ammonium metal halide film, and representation method
CN113845896A (en) * 2021-09-10 2021-12-28 天津理工大学 Curved organic ammonium metal halide film, preparation method, solar cell and application
CN113845896B (en) * 2021-09-10 2023-08-04 天津理工大学 Curved organic ammonium metal halide film, preparation method, solar cell and application
CN116083876A (en) * 2022-11-18 2023-05-09 佛山仙湖实验室 Densification method of lead iodide film and application thereof

Similar Documents

Publication Publication Date Title
CN104404478A (en) Method for preparing organic ammonium metal halide film
JP6550534B2 (en) Method and application of low pressure chemical vapor deposition system for perovskite thin films
CN106463625B (en) For manufacturing the system and method for being used for the perovskite film of solar battery purposes
CN104485425B (en) The processing method of perovskite-type material preparation method and equipment and its photovoltaic device
Guesnay et al. Vapor deposition of metal halide perovskite thin films: Process control strategies to shape layer properties
Peng et al. A hybrid physical–chemical deposition process at ultra-low temperatures for high-performance perovskite solar cells
WO2019218567A1 (en) Device and method for preparing organic ammonium metal halide film, and representation method
CN106384811B (en) A kind of indigo plant phosphorus/transition metal dichalcogenide hetero-junctions anode material and preparation method
CN107447200A (en) A kind of method for preparing transient metal chalcogenide compound/two-dimensional layer material interlayer heterojunction structure using two step chemical vapour deposition techniques
Taşdemirci Influence of annealing on properties of SILAR deposited nickel oxide films
CN105239054B (en) A kind of preparation facilities and method of micron grain size organic inorganic hybridization perovskite thin film
CN105355794A (en) Method for using chemical vapor deposition method to prepare perovskite film solar cell
Ngqoloda et al. Air-stable hybrid perovskite solar cell by sequential vapor deposition in a single reactor
Yang et al. Interfacial engineering and film-forming mechanism of perovskite films revealed by synchrotron-based GIXRD at SSRF for high-performance solar cells
CN109023297A (en) A kind of preparation method of large scale single layer selenium subregion doping tungsten disulfide thin-film material
CN106340591B (en) Powder covers silicon CH3NH3PbI3Perovskite thin film preparation method
CN105668555A (en) Method for preparing three-dimensional graphene
CN102709351A (en) Cuprous sulfide film with preferred orientation growth
CN108360067A (en) A kind of ultra-thin two-dimension PbI2The preparation method of monocrystalline
CN102153288A (en) Method for preparing copper disulfide thin film with preferred orientation
Liu et al. Crystalline quality control in sequential vapor deposited perovskite film toward high efficiency and large scale solar cells
Zhang et al. Ultrafast Growth of High-Quality Cs0. 14FA0. 86Pb (Br x I1–x) 3 Thin Films Achieved Using Super-Close-Space Sublimation
JP2023534606A (en) Fast hybrid CVD for perovskite solar cell modules
CN107915496A (en) A kind of preparation method of large-area two-dimensional organic-inorganic perovskite thin film
CN107779844A (en) Forming method, former and its application method of calcium titanium ore bed film and application

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20150311

WD01 Invention patent application deemed withdrawn after publication