CN104402437A - Low-temperature sintered NdNbO4-CaTiO3 series microwave dielectric ceramic and preparation method thereof - Google Patents
Low-temperature sintered NdNbO4-CaTiO3 series microwave dielectric ceramic and preparation method thereof Download PDFInfo
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- CN104402437A CN104402437A CN201410484068.1A CN201410484068A CN104402437A CN 104402437 A CN104402437 A CN 104402437A CN 201410484068 A CN201410484068 A CN 201410484068A CN 104402437 A CN104402437 A CN 104402437A
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- 239000000919 ceramic Substances 0.000 title claims abstract description 32
- 238000002360 preparation method Methods 0.000 title claims abstract description 11
- 229910002971 CaTiO3 Inorganic materials 0.000 title abstract 5
- 238000005245 sintering Methods 0.000 claims abstract description 29
- 239000002994 raw material Substances 0.000 claims abstract description 20
- 238000000498 ball milling Methods 0.000 claims abstract description 19
- 238000005469 granulation Methods 0.000 claims abstract description 7
- 230000003179 granulation Effects 0.000 claims abstract description 7
- 239000000126 substance Substances 0.000 claims abstract description 5
- 238000001035 drying Methods 0.000 claims abstract description 3
- 238000007873 sieving Methods 0.000 claims abstract description 3
- 239000000843 powder Substances 0.000 claims description 36
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 24
- 238000009766 low-temperature sintering Methods 0.000 claims description 17
- 239000008367 deionised water Substances 0.000 claims description 12
- 229910021641 deionized water Inorganic materials 0.000 claims description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 12
- 229910052797 bismuth Inorganic materials 0.000 claims description 6
- 239000003795 chemical substances by application Substances 0.000 claims description 6
- 239000011812 mixed powder Substances 0.000 claims description 6
- 239000012188 paraffin wax Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- 238000012360 testing method Methods 0.000 claims description 6
- 238000002844 melting Methods 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims description 2
- 239000000463 material Substances 0.000 abstract description 7
- 238000000034 method Methods 0.000 abstract description 6
- 239000003989 dielectric material Substances 0.000 abstract description 3
- WMWLMWRWZQELOS-UHFFFAOYSA-N bismuth(iii) oxide Chemical compound O=[Bi]O[Bi]=O WMWLMWRWZQELOS-UHFFFAOYSA-N 0.000 abstract 4
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Chemical compound O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 abstract 2
- 238000000465 moulding Methods 0.000 abstract 1
- PLDDOISOJJCEMH-UHFFFAOYSA-N neodymium oxide Inorganic materials [O-2].[O-2].[O-2].[Nd+3].[Nd+3] PLDDOISOJJCEMH-UHFFFAOYSA-N 0.000 abstract 1
- 229910052779 Neodymium Inorganic materials 0.000 description 8
- 239000002253 acid Substances 0.000 description 8
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 8
- 239000000654 additive Substances 0.000 description 4
- 230000000996 additive effect Effects 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000003836 solid-state method Methods 0.000 description 3
- 150000001206 Neodymium Chemical class 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229910004261 CaF 2 Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 238000010532 solid phase synthesis reaction Methods 0.000 description 1
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- Compositions Of Oxide Ceramics (AREA)
- Inorganic Insulating Materials (AREA)
Abstract
The invention discloses a low temperature sintered NdNbO4-CaTiO3 series microwave dielectric ceramic, which has a composition of 0.6 wt.% of NdNbO4, m wt.% of CaTiO3 and 0.2-8 wt.% of Bi2O3, wherein M satisfies the relation of 0.2<=m<=8. The method is as below: first preparing the raw materials of Nd2O3 and Nb2O5 according to the NdNbO4 chemical formula; conducting ball milling, drying, sieving and sintering; adding 0.6wt.% of CaTiO3 and 0.2-8 wt% of Bi2O3, and conducting secondary material preparation; then conducting granulation and compacting moulding; and sintering the blank at 950 to 1100 DEG C NdNbO4 CaTiO3 to prepare the low-temperature sintered microwave dielectric ceramic. According to the invention, the sintering temperature is successfully reduced to 1000 DEG C; and the microwave dielectric ceramic has dielectric constant of 20.3, temperature coefficient of resonant frequency of 29.7 ppm / DEG C and quality factor Q*f reaching a maximum of 52780 GHz. The invention has the advantages of simple preparation process and no pollution in the process; and the microwave dielectric material has promising prospects.
Description
Technical field
The invention belongs to electronic information material and components and parts field, particularly relate to a kind of novel high q-factor (quality factor) NdNbO
4-CaTiO
3the low-temperature sintering method of series microwave dielectric ceramic.
Background technology
Along with the fast development of satellite broadcasting and microwave communication techniques, many microwave equipments based on dielectric resonator, and can as independently element application in microwave telecommunication system by good development and application.And electronic information technology is constantly to high frequency and digitizing future development, to the miniaturization of components and parts, integrated so that modular requirement is also more and more urgent.Therefore, the dielectric material of microwave application requires to have high-k, low-dielectric loss and near-zero resonance frequency temperature coefficient, can fire at a lower temperature simultaneously.
Niobate material is important electronic material, has excellent photoelectric properties and non-linear optical property, good optical effect and the peculiar property such as electric property and metacrystal phase boundary, has been widely used in and has manufactured electrical condenser and opto-electronic device.Usually, platinum and Jin Chang are used as the interior electrode of the equipment prepared by high sintering temperature (>1200 DEG C) material.High temperature sintering not only makes preparation process spend to be increased, and wastes more resource.Prepare the research that micro-wave dielectric equipment should be tending towards the material of high energy efficiency and dominance energy, so, reduce the sintering temperature of material, make again the dielectric properties of material not be subject to large impact simultaneously, to lay the foundation with energy consumption for using low-melting base metal (as copper, silver) to reduce costs.
Niobic acid neodymium pottery has perovskite-like scheelite-type structure, has suitable DIELECTRIC CONSTANT ε
r(19.6), the temperature coefficient of resonance frequency τ of nearly zero
f(-24ppm/ DEG C), but quality factor q × f lower (33000GHz), and sintering temperature is 1250 DEG C.Visible, the lower and higher application that govern niobic acid neodymium microwave-medium ceramics of sintering temperature of quality factor.The present invention adopts conventional solid-state method, with CaTiO
3for additive and Bi
2o
3for sintering aid, prepare high Q niobic acid neodymium series microwave dielectric ceramic, while specific inductivity and temperature coefficient of resonance frequency remain unchanged substantially, improved the quality factor of niobic acid neodymium system pottery, reduce sintering temperature.
The applicant once disclosed a kind of High-quality-factor neodymium niobate microwave dielectric ceramic and preparation method thereof (CN102603296A) in 2012, and this application is with Nd
2o
3, Nb
2o
5for raw material, and add CaF
2as fusing assistant, overcome the defect that quality factor q × f is lower, by solid phase method preparation, there is high quality factor (75000GHz.) niobic acid neodymium series microwave dielectric ceramic.
The applicant also once disclosed another kind of High-quality-factor neodymium niobate microwave dielectric ceramic and preparation method thereof (201310047133X) in 2013, with Nd
2o
3, Nb
2o
5for raw material, add CaTiO
3for additive, adopt conventional solid-state method, provide the niobic acid neodymium microwave-medium ceramics that one has higher figure of merit (70000GHz).The shortcoming of above-mentioned two kinds of niobic acid neodymium microwave-medium ceramics is that sintering temperature is higher, and respectively at 1250 ~ 1300 DEG C and 1200 ~ 1325 DEG C of sintering, the present invention, on this basis, adds Bi
2o
3fusing assistant, makes its sintering temperature obviously reduce (950 ~ 1000 DEG C), and maintains its good dielectric properties, can meet the requirement of practical application.
Summary of the invention
The object of the invention, being that quality factor for overcoming prior art are lower and sintering temperature is higher, govern the shortcoming of niobic acid neodymium microwave-medium ceramics application, provides a kind of with Nd
2o
3, Nb
2o
5for main raw material, with CaTiO
3for additive, with Bi
2o
3for sintering aid, keep the low-temperature sintering high q-factor NdNbO of excellent microwave dielectric property simultaneously
4-CaTiO
3the method of series microwave dielectric ceramic
The present invention is achieved by following technical solution.
A kind of low-temperature sintering NdNbO
4-CaTiO
3series microwave dielectric ceramic, it consists of NdNbO
4-0.6wt.%CaTiO
3-m wt.%Bi
2o
3, wherein, 0.2≤m≤8;
This low-temperature sintering NdNbO
4-CaTiO
3the preparation method of series microwave dielectric ceramic, has following steps:
(1) by chemical feedstocks Nd
2o
3and Nb
2o
5according to NdNbO
4chemical formula weigh batching;
(2) mixed powder of step (1) is put into ball grinder, add deionized water and zirconia ball, ball milling 6 hours; Again by the raw material after ball milling in 110 DEG C of oven dry, cross 40 mesh sieves, obtain evengranular powder;
(3) by the powder after the sieving of step (2) in 950 DEG C of pre-burnings 3 hours, and be incubated 4 hours at this temperature;
(4) to additional 0.6wt.%CaTiO in the ceramic powder after the pre-burning of step (3)
3, and the low melting point sintering aid Bi of 0.2 ~ 8wt%
2o
3, second batch.
(5) powder of step (4) second batch is put into ball grinder, add deionized water and zirconia ball, ball milling 6 ~ 12 hours, after drying, additional mass percent is that the paraffin of 6 ~ 10% is as tackiness agent granulation, cross 80 mesh sieves, be pressed into base substrate with powder compressing machine;
(6) by the base substrate of step (5) in 950 ~ 1100 DEG C of sintering, be incubated 2 ~ 6 hours, make low-temperature sintering high q-factor NdNbO
4-CaTiO
3series microwave dielectric ceramic;
(7) by the microwave property of network analyzer test article.
The raw material of described step (1) is analytical pure raw material.
The base substrate of described step (5) is the green body cylinders of Φ 10mm × 5mm.
The pressure of the powder compressing machine of described step (5) is 4 ~ 6Mpa.
Described step (5) sintering temperature is 1000 DEG C.
The present invention is with NdNbO
4based on-series microwave dielectric ceramic, adopt conventional solid-state method, add 0.6wt.%CaTiO
3additive improves quality factor effectively; Add Bi
2o
3for sintering aid, successfully its sintering temperature is reduced to 1000 DEG C.
When sintering temperature is 1000 DEG C, soaking time 4h, Bi
2o
3doping when being 5wt.%, specific inductivity is 20.3, and temperature coefficient of resonance frequency is-29.7ppm/ DEG C, and quality factor q × f reaches and is 52,780GHz to the maximum.In addition, preparation technology of the present invention is simple, and process is pollution-free, improves its dielectric properties, reduces sintering temperature, is the promising microwave dielectric material of a kind of tool.
Embodiment
The raw material Nd that the present invention adopts
2o
3, Nb
2o
5, CaTiO
3and Bi
2o
3be analytical pure raw material, purity is greater than 99.9%, and specific embodiment is as follows:
Embodiment 1
(1) by Nd
2o
3, Nb
2o
5nd in molar ratio
2o
3: Nb
2o
5=1:1 is configured to main powder.
(2) mixed powder of main powder is put into ball grinder, add deionized water and zirconia ball, ball milling 6 hours on planetary ball mill, then the raw material after ball milling is dried in 110 DEG C of loft drier, after oven dry, raw material is crossed 40 mesh sieves.
(3) powder pre-burning 3 hours at 950 DEG C of will cross sieve, and be incubated 4 hours at this temperature.
(4) the powder 20g after pre-burning is taken, additional 0.6wt.%CaTiO
3and 5.0wt%Bi
2o
3, second batch.
(5) above-mentioned second batch gained powder is put into ball grinder, add deionized water and zirconia ball, ball milling 8 hours, after oven dry, additional mass percent is that the paraffin of 8% is as tackiness agent granulation again, cross 80 mesh sieves, depress to the green body cylinders of Φ 10mm × 5mm with powder compressing machine with the pressure of 6MPa.
(6) by green body cylinders in 1000 DEG C of sintering, be incubated 4 hours, make low-temperature sintering high q-factor NdNbO
4-CaTiO
3series microwave dielectric ceramic.
(7) by the microwave property of network analyzer test article: specific inductivity is 20.3, quality factor q × f is 52,780GHz, and temperature coefficient of resonance frequency is-29.7ppm/ DEG C.
Embodiment 2
(1) by Nd
2o
3, Nb
2o
5nd in molar ratio
2o
3: Nb
2o
5=1:1 is configured to main powder.
(2) mixed powder of main powder is put into ball grinder, add deionized water and zirconia ball, ball milling 6 hours on planetary ball mill, then the raw material after ball milling is dried in 110 DEG C of loft drier, after oven dry, raw material is crossed 40 mesh sieves.
(3) powder pre-burning 3 hours at 950 DEG C of will cross sieve, and be incubated 4 hours at this temperature.
(4) the powder 20g after pre-burning is taken, additional 0.6wt.%CaTiO
3and 0.2wt%Bi
2o
3, second batch.
(5) above-mentioned second batch gained powder is put into ball grinder, adds deionized water and zirconia ball, ball milling 12 hours, after oven dry more additional mass percent be the paraffin of 8% as tackiness agent granulation, cross 80 mesh sieves, with powder compressing machine with 6MP
apressure depress to the green body cylinders of Φ 10mm × 5mm.
(6) by green body cylinders in 1100 DEG C of sintering, be incubated 4 hours, make low-temperature sintering high q-factor NdNbO
4-CaTiO
3series microwave dielectric ceramic.
(7) by the microwave property of network analyzer test article: specific inductivity is 21.2, quality factor q × f is 38,696GHz, and temperature coefficient of resonance frequency is-28.3ppm/ DEG C.
Embodiment 3
(1) by Nd
2o
3, Nb
2o
5nd in molar ratio
2o
3: Nb
2o
5=1:1 is configured to main powder.
(2) mixed powder of main powder is put into ball grinder, add deionized water and zirconia ball, ball milling 6 hours on planetary ball mill, then the raw material after ball milling is dried in 110 DEG C of loft drier, after oven dry, raw material is crossed 40 mesh sieves.
(3) powder pre-burning 3 hours at 950 DEG C of will cross sieve, and be incubated 4 hours at this temperature.
(4) the powder 20g after pre-burning is taken, additional 0.6wt.%CaTiO
3and 2.0wt%Bi
2o
3, second batch.
(5) above-mentioned second batch gained powder is put into ball grinder, adds deionized water and zirconia ball, ball milling 10 hours, after oven dry more additional mass percent be the paraffin of 8% as tackiness agent granulation, cross 80 mesh sieves, with powder compressing machine with 6MP
apressure depress to the green body cylinders of Φ 10mm × 5mm.
(6) by green body cylinders in 1050 DEG C of sintering, be incubated 4 hours, make low-temperature sintering high q-factor NdNbO
4-CaTiO
3series microwave dielectric ceramic.
(7) by the microwave property of network analyzer test article: specific inductivity is 20.6, quality factor q × f is 42,382GHz, and temperature coefficient of resonance frequency is-28.9ppm/ DEG C.
Embodiment 4
(1) by Nd
2o
3, Nb
2o
5nd in molar ratio
2o
3: Nb
2o
5=1:1 is configured to main powder.
(2) mixed powder of main powder is put into ball grinder, add deionized water and zirconia ball, ball milling 6 hours on planetary ball mill, then the raw material after ball milling is dried in 110 DEG C of loft drier, after oven dry, raw material is crossed 40 mesh sieves.
(3) powder pre-burning 3 hours at 950 DEG C of will cross sieve, and be incubated 4 hours at this temperature.
(4) the powder 20g after pre-burning is taken, additional 0.6wt.%CaTiO
3and 8.0wt%Bi
2o
3, second batch.
(5) above-mentioned second batch gained powder is put into ball grinder, add deionized water and zirconia ball, ball milling 6 hours, after oven dry, additional mass percent is that the paraffin of 8% is as tackiness agent granulation again, cross 80 mesh sieves, depress to the green body cylinders of Φ 10mm × 5mm with powder compressing machine with the pressure of 6MPa.
(6) by green body cylinders in 950 DEG C of sintering, be incubated 4 hours, make low-temperature sintering high q-factor NdNbO
4-CaTiO
3series microwave dielectric ceramic.
(7) by the microwave property of network analyzer test article: specific inductivity is 18.2, quality factor q × f is 39,238GHz, and temperature coefficient of resonance frequency is-33.2ppm/ DEG C.
Claims (5)
1. a low-temperature sintering NdNbO
4-CaTiO
3series microwave dielectric ceramic, it consists of NdNbO
4-0.6wt.%CaTiO
3-mwt.%Bi
2o
3, wherein, 0.2≤m≤8;
This low-temperature sintering NdNbO
4-CaTiO
3the preparation method of series microwave dielectric ceramic, has following steps:
(1) by chemical feedstocks Nd
2o
3and Nb
2o
5according to NdNbO
4chemical formula weigh batching;
(2) mixed powder of step (1) is put into ball grinder, add deionized water and zirconia ball, ball milling 6 hours; Again by the raw material after ball milling in 110 DEG C of oven dry, cross 40 mesh sieves, obtain evengranular powder;
(3) by the powder after the sieving of step (2) in 950 DEG C of pre-burnings 3 hours, and be incubated 4 hours at this temperature;
(4) to additional 0.6wt.%CaTiO in the ceramic powder after the pre-burning of step (3)
3, and the low melting point sintering aid Bi of 0.2 ~ 8wt%
2o
3, second batch.
(5) powder of step (4) second batch is put into ball grinder, add deionized water and zirconia ball, ball milling 6 ~ 12 hours, after drying, additional mass percent is that the paraffin of 6 ~ 10% is as tackiness agent granulation, cross 80 mesh sieves, be pressed into base substrate with powder compressing machine;
(6) by the base substrate of step (5) in 950 ~ 1100 DEG C of sintering, be incubated 2 ~ 6 hours, make low-temperature sintering high q-factor NdNbO
4-CaTiO
3series microwave dielectric ceramic;
(7) by the microwave property of network analyzer test article.
2. low-temperature sintering NdNbO according to claim 1
4-CaTiO
3series microwave dielectric ceramic, is characterized in that, the raw material of described step (1) is analytical pure raw material.
3. low-temperature sintering NdNbO according to claim 1
4-CaTiO
3series microwave dielectric ceramic, is characterized in that, the base substrate of described step (5) is the green body cylinders of Φ 10mm × 5mm.
4. low-temperature sintering NdNbO according to claim 1
4-CaTiO
3series microwave dielectric ceramic, is characterized in that, the pressure of the powder compressing machine of described step (5) is 4 ~ 6Mpa.
5. low-temperature sintering NdNbO according to claim 1
4-CaTiO
3series microwave dielectric ceramic, is characterized in that, described step (5) sintering temperature is 1000 DEG C.
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105060887A (en) * | 2015-07-24 | 2015-11-18 | 天津大学 | Low-temperature sintering low loss microwave dielectric ceramic material |
CN105060888A (en) * | 2015-08-31 | 2015-11-18 | 天津大学 | Low-loss stable niobic acid neodymium ceramic prepared through aluminum oxide doping |
CN106986635A (en) * | 2017-03-31 | 2017-07-28 | 天津大学 | A kind of intermediate sintering temperature ceramics as low-loss microwave medium material and preparation method thereof |
CN107311646A (en) * | 2017-06-19 | 2017-11-03 | 天津大学 | A kind of preparation method for improving strontium titanate ceramicses dielectric material performance |
CN107434411A (en) * | 2017-08-29 | 2017-12-05 | 电子科技大学 | Low Jie's high quality factor LTCC microwave dielectric materials and preparation method thereof |
CN107586133A (en) * | 2017-09-20 | 2018-01-16 | 中国矿业大学 | A kind of high performance microwave medium ceramic material, preparation method and application |
CN116535212A (en) * | 2023-05-15 | 2023-08-04 | 中国矿业大学 | High-performance microwave dielectric ceramic material applied to LTCC (Low temperature Co-fired ceramic) and preparation method thereof |
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CN101913859A (en) * | 2010-08-13 | 2010-12-15 | 桂林理工大学 | Li2Zn3Ti4O12 microwave dielectric ceramic material and low temperature sintering method thereof |
CN103073292A (en) * | 2013-02-05 | 2013-05-01 | 天津大学 | High-quality-factor neodymium niobate microwave dielectric ceramic and preparation method thereof |
-
2014
- 2014-09-19 CN CN201410484068.1A patent/CN104402437B/en not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101913859A (en) * | 2010-08-13 | 2010-12-15 | 桂林理工大学 | Li2Zn3Ti4O12 microwave dielectric ceramic material and low temperature sintering method thereof |
CN103073292A (en) * | 2013-02-05 | 2013-05-01 | 天津大学 | High-quality-factor neodymium niobate microwave dielectric ceramic and preparation method thereof |
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CN105060887A (en) * | 2015-07-24 | 2015-11-18 | 天津大学 | Low-temperature sintering low loss microwave dielectric ceramic material |
CN105060888A (en) * | 2015-08-31 | 2015-11-18 | 天津大学 | Low-loss stable niobic acid neodymium ceramic prepared through aluminum oxide doping |
CN106986635A (en) * | 2017-03-31 | 2017-07-28 | 天津大学 | A kind of intermediate sintering temperature ceramics as low-loss microwave medium material and preparation method thereof |
CN107311646A (en) * | 2017-06-19 | 2017-11-03 | 天津大学 | A kind of preparation method for improving strontium titanate ceramicses dielectric material performance |
CN107434411A (en) * | 2017-08-29 | 2017-12-05 | 电子科技大学 | Low Jie's high quality factor LTCC microwave dielectric materials and preparation method thereof |
CN107586133A (en) * | 2017-09-20 | 2018-01-16 | 中国矿业大学 | A kind of high performance microwave medium ceramic material, preparation method and application |
CN107586133B (en) * | 2017-09-20 | 2019-06-21 | 中国矿业大学 | A kind of high performance microwave medium ceramic material, preparation method and application |
CN116535212A (en) * | 2023-05-15 | 2023-08-04 | 中国矿业大学 | High-performance microwave dielectric ceramic material applied to LTCC (Low temperature Co-fired ceramic) and preparation method thereof |
CN116535212B (en) * | 2023-05-15 | 2023-12-26 | 中国矿业大学 | High-performance microwave dielectric ceramic material applied to LTCC (Low temperature Co-fired ceramic) and preparation method thereof |
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