CN104359554A - Ultraviolet spectrum-tunable light source - Google Patents

Ultraviolet spectrum-tunable light source Download PDF

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Publication number
CN104359554A
CN104359554A CN201410734892.8A CN201410734892A CN104359554A CN 104359554 A CN104359554 A CN 104359554A CN 201410734892 A CN201410734892 A CN 201410734892A CN 104359554 A CN104359554 A CN 104359554A
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ultraviolet spectrum
light
spectrum
tunable optical
optical source
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CN201410734892.8A
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CN104359554B (en
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吴柯萱
王加朋
孙红胜
孙广尉
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Beijing Zhenxing Metrology and Test Institute
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Beijing Zhenxing Metrology and Test Institute
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Abstract

The invention relates to an ultraviolet spectrum-tunable light source, comprising a light source system, a collimating system, a dispersion system, a spectrum modulation system, a projection system and a uniform light mixing system which are sequentially connected in series, wherein the collimating system and the projection system are composed of spherical reflectors; the dispersion system is composed of a plane diffraction grating and a spherical reflector; the spectrum modulation system comprises a deformable mirror; and the ultraviolet spectrum tunable light source is capable of adjusting spectral components within the spectral range of 300-400nm and the light spot brightness. According to the ultraviolet spectrum tunable light source, polychromatic light of which the spectral components are freely distributed and the radiation brightness is freely adjusted can be generated, so that the calibration of an imaging spectrometer and a star sensor is carried out with the adequately-accurate spectrum distribution; the calibration error can be effectively reduced; and the calibration accuracy is improved.

Description

A kind of ultraviolet spectrum tunable optical source
Technical field
The present invention relates to technical field of optical test, particularly relate to a kind of ultraviolet spectrum tunable optical source.
Background technology
The radiation characteristic of ultraviolet band is different from visible ray and infrared band, and it has irreplaceable advantage in space exploration field, and the development in succession planned along with moon exploration program, survey of deep space plan and mars exploration etc., receives increasing concern.Carrying out timing signal to ultraviolet load, ultraviolet simulator, ultraviolet source and ultraviolet load need to demarcate in advance.Fix in the spectral distribution of timing signal conventional lighting sources, and comparatively large with tested ground object target spectral distribution difference, and be difficult to reappear tested ground object target spectral information, calibration accuracy is lower, therefore sets up ultraviolet spectrum tunable optical source very necessary to improve calibration accuracy.
Standard sources is the important ingredient of optic test quasi-instrument, light source more options halogen tungsten lamp or xenon lamp in existing collimation technique, this type of light stability, but spectral distribution can not change, cannot the spectral information of accurate analog atural object table, late time data inversion accuracy is impacted.And usually the light source such as halogen tungsten lamp can not adjust brightness, so cannot the starlight of the different magnitude of accurate simulation.
Summary of the invention
In view of above-mentioned analysis, the object of the invention is to solve existing spectral radiance calibration and detectors calibrate technical deficiency, provide a kind of ultraviolet spectrum tunable optical source, it can not only provide the uniform light spots that in ultraviolet range, spectral distribution is adjustable arbitrarily, and can change the brightness exporting uniform light spots within the specific limits.
Object of the present invention is mainly achieved through the following technical solutions:
A kind of ultraviolet spectrum tunable optical source, comprises light-source system, colimated light system, dispersion system, spectral modulation system, optical projection system and the uniform mixed light system of connecting successively; Described colimated light system and described optical projection system form by spherical reflector, described dispersion system is made up of plane diffraction grating and a spherical reflector, described spectral modulation system comprises distorting lens, described ultraviolet spectrum tunable optical source can realize spectral range from 300nm to 400nm spectral composition composition adjustable and hot spot brightness is adjustable.
Preferably, following design can be taked:
(1) described plane diffraction grating is that plane portrays grating, and it is that 300 lines/mm is to 3600 lines/mm that described plane portrays grating line density range.
(2) parameter of described three spherical reflectors is: bore scope is 10mm ~ 500mm, R1 radius surface scope is 30mm ~ 1000mm.
(3) the reflective surface film of described three spherical reflectors is high-reflecting film.
(4) described plane diffraction grating is fixed on colimated light system rear.
(5) described uniform mixed light system adopts total reflection mode to carry out mixed light.
(6) described uniform mixed light system comprises lamp guide.
The ultraviolet spectrum tunable optical source that the present invention relates to, primarily of light-source system, colimated light system, dispersion system, spectral modulation system, optical projection system and uniform mixed light system composition, the diverging light sent by high stable Energy control light source is converted into directional light through colimated light system, lighting source sends to be had certain angle of divergence polychromatic light and becomes the very little directional light of the angle of divergence through colimated light system, the light of directional light different wave length after dispersion system can be imaged in spectral modulation system with different directions outgoing, form a series of straight bands of a spectrum that different frequency spectrum is separated from each other, these are straight, and bands of a spectrum x direction represents the frequency of light, y direction represents the brightness of light.Spectral modulation system is equivalent to spatial modulator, spatial modulator can be modulated arbitrarily on each position of two dimensional surface, carry out in x direction modulating the spectral frequency can selecting to enter in optical projection system, simultaneously for selected all frequency spectrum, on straight bands of a spectrum face, the length in y direction is longer, represents energy more, thus brightness is larger, the light of random length on y direction can be selected to enter into optical projection system by the spatial modulator changed in spectral modulation system thus change the brightness entering into light in optical projection system, target optical spectrum enters in uniform mixed light system by optical projection system, tens porch Bright folding results are obtained in exit, finally can the adjustable arbitrarily uniform light spots of output spectrum at uniform mixed light system outlet.
Beneficial effect of the present invention is as follows:
(1) the present invention can realize the modulation of the light of any spectral distribution of 300nm-400nm, and spot intensity is adjustable.
(2) the present invention can realize the effective lifting to imaging spectral class load spectrum parameter calibration accuracy, for subsequent optical system provides variable luminance brightness with the magnitude of analog variable, reduces measuring error, improving measurement accuracy.
Other features and advantages of the present invention will be set forth in the following description, and, becoming apparent from instructions of part, or understand by implementing the present invention.Object of the present invention and other advantages realize by structure specifically noted in write instructions, claims and accompanying drawing and obtain.
Accompanying drawing explanation
Accompanying drawing only for illustrating the object of specific embodiment, and does not think limitation of the present invention, and in whole accompanying drawing, identical reference symbol represents identical parts.
Fig. 1 is spectrum tunable optical source structural representation of the present invention.
Fig. 2 is the colimated light system schematic diagram of spectrum tunable optical source of the present invention.
Fig. 3 is the dispersion system schematic diagram of spectrum tunable optical source of the present invention.
Fig. 4 is the space projection system schematic of spectrum tunable optical source of the present invention.
Fig. 5 is the fundamental diagram of spectrum tunable optical source of the present invention.
Embodiment
Specifically describe the preferred embodiments of the present invention below in conjunction with accompanying drawing, wherein, accompanying drawing forms the application's part, and together with embodiments of the present invention for explaining principle of the present invention.
As shown in Figure 1, the ultraviolet spectrum tunable optical source that the present invention relates to, form primarily of light-source system, colimated light system, dispersion system, spectral modulation system, optical projection system and uniform mixed light system, the diverging light sent by high stable Energy control light source is converted into directional light through colimated light system, the light of directional light different wave length after dispersion system can be imaged in spectral modulation system with different directions outgoing, form a series of straight bands of a spectrum that different frequency spectrum is separated from each other, these are straight, and bands of a spectrum x direction represents the frequency of light, and y direction represents the brightness of light.Spectral modulation system is equivalent to spatial modulator, spatial modulator can be modulated arbitrarily on each position of two dimensional surface, carrying out modulation in x direction can select target spectrum, simultaneously for selected all frequency spectrum, on straight bands of a spectrum face, the length in y direction is longer, represents energy more, thus brightness is larger, the light of random length on y direction can be selected to enter into optical projection system by the spatial modulator changed in spectral modulation system thus change the brightness entering into light in optical projection system, target optical spectrum enters in uniform mixed light system by optical projection system, tens porch Bright folding results are obtained in exit, finally can the adjustable arbitrarily uniform light spots of output spectrum at uniform mixed light system outlet.The catoptron of the collimating mirror in colimated light system and the imaging lens in dispersion system and optical projection system is all coated with 300nm-400nm high-reflecting film.
Light-source system is by high stable Energy control high power xenon lamp light source, xenon source power bracket is from 1w ~ 1000W, xenon lamp makes the voltage of tens volts rise to the high-voltage pulse of more than 20,000 volts by transformer within moment, the xenon activated in Xe lamp bulb produces the powerful radiance of 6000K ~ 10000K color temperature in electric arc, xenon lamp has casted off traditional burning tungsten filament principle of luminosity once and for all, brightness be the 3-5 of traditional tungsten lamp doubly, lower at ultraviolet band spectral energy, and curve of spectrum steeper, xenon lamp is more level and smooth at ultraviolet 300nm-400nm band spectrum distribution curve, and it is higher at 300nm-400nm luminous energy proportion of composing, so the maximum luminance that this system can reach is higher, can the brightness of regulation output light by spectral modulation system, thus the luminance brightness dynamic range of output light is increased.
As shown in Figure 2, the structural drawing of colimated light system, colimated light system comprises a spherical reflector, and the object space F number of incident light is comparatively large, and traditional off axis paraboloidal mirror is not easily processed, and the aberration that follow-up dispersion system produces not easily is corrected.Traditional transmission-type colimated light system adopts number of lenses more, and correct the optical glass that aberration needs to use abbe number difference larger, cost is higher.Spherical reflector is coated with highly reflecting films, higher than traditional transmission-type colimated light system efficiency of light energy utilization.Control light-source system in colimated light system focal plane front, the light that light-source system is sent produces the less parallel light compared with small divergence angle after collimating mirror, then by correcting the astigmatism produced by dispersion system after dispersion system, picture element is improved a lot, and compact conformation, with low cost.
Spherical reflector base material preferably selects K9, the light that this catoptron sends slit is by collimating effect, and catoptron bore D1 scope should control within the scope of 10mm ~ 500mm, when catoptron bore D1 gets 26mm, under the condition of satisfied illumination utilization factor, system bulk can reach minimum.Mirror center thickness d 1 is 3mm, and the radius R 1 of catoptron first surface is 7.75mm, and is all coated with the high-reflecting film being greater than 95% in wavelength 0.3 μm-0.4 μm internal reflection rate.
As shown in Figure 3, dispersion system comprises a plane diffraction grating and a spherical reflector to the structural drawing of dispersion system.More excellent, plane diffraction grating can select plane to portray grating, and it is 300 line/mm to 3600/mm that plane portrays grating line density range, and when grating line 1200 lines/mm effect is optimum, now spectral resolution is higher and system bulk is less.Spherical reflector, catoptron bore D2 scope should control within the scope of 10mm ~ 500mm, when catoptron bore D2 is 56mm, effect is better, now system spectrum resolution is higher and system bulk is less, radius of curvature R 2 is 172mm, mirror center thickness d 2 is 7mm, and front surface is all coated with the reflectance coating being greater than 95% in wavelength 0.3 μm-0.4 μm internal reflection rate.White light can be divided into the multi beam quasi-monochromatic light that each wavelength is separated from each other by dispersion system, and in spectral modulation system, form a series of straight bands of a spectrum.
Spectral modulation system is made up of distorting lens, distorting lens is equivalent to a spatial modulator, can each coordinate points modulate in the two-dimensional direction, dispersion system forms a series of straight bands of a spectrum on distorting lens, x-axis direction spectral frequency along bands of a spectrum constantly increases, the energy of this spectrum of length representative of bands of a spectrum y-axis, by the deformation of each coordinate points on the accurate controlling distortion mirror of computing machine, thus select target spectral component enters optical projection system, again by changing the length each frequency spectrum entering bands of a spectrum in optical projection system, thus change the energy entered in optical projection system, the radiance of integrated light source output terminal can be changed.
As shown in Figure 4, optical projection system comprises a spherical reflector, spherical reflector Choice of substrate materials K9 glass effects is more excellent, catoptron bore D3 scope should control within the scope of 10mm ~ 500mm, when catoptron bore D3 is that 42mm effect is better, the now higher and small volume of system spectrum resolution, radius of curvature R 3 is 70mm, mirror center thickness d 3 is 4mm, and front surface is all coated with the reflectance coating being greater than 95% in wavelength 0.3 μm-0.4 μm internal reflection rate.The light that spectral modulation system sends projects in uniform mixed light system by optical projection system.
Uniform mixed light system: uniform mixed light system can adopt existing mixed light system, preferably adopts lamp guide.It is utilize luminous energy to carry out total reflection principle work in optical glass that lamp guide is adopted, the light entered at lamp guide input end transmits in lamp guide, run into lamp guide outer wall to be then totally reflected at every turn, can be understood as to have become in lamp guide once as, light is repeatedly totally reflected in lamp guide, obtains the even image planes being permitted to be superimposed, thus at lamp guide output terminal with the form radiation of approximate Lambertian radiator, luminance brightness in all directions is identical, and homogeneity is better.Lamp guide volume is very little and output terminal radiance homogeneity is very high, and particularly lamp guide adopts total reflection principle, and output terminal energy is substantially equal with input end energy, and the efficiency of light energy utilization is very high.
Ultraviolet spectrum tunable optical source principle of work provided by the invention:
As shown in Figure 5: in imaging spectral class load spectroscopic calibration, spectrum tunable optical source stablizes rear output and target optical spectrum distributes to similar uniform light spots, connect load to be measured at spectrum tunable optical source output terminal, carry out contrast by the spectral response of load and light source light spectrum and complete load spectroscopic calibration.
In sum, embodiments provide a kind of ultraviolet spectrum tunable optical source,
(1) the present invention can realize the modulation of the light of any spectral distribution of 300nm-400nm, and spot intensity is adjustable.
(2) the present invention can realize the effective lifting to imaging spectral class load spectrum parameter calibration accuracy, for subsequent optical system provides variable luminance brightness with the magnitude of analog variable, reduces measuring error, improving measurement accuracy.
The above; be only the present invention's preferably embodiment, but protection scope of the present invention is not limited thereto, is anyly familiar with those skilled in the art in the technical scope that the present invention discloses; the change that can expect easily or replacement, all should be encompassed within protection scope of the present invention.

Claims (7)

1. a ultraviolet spectrum tunable optical source, comprises light-source system, colimated light system, dispersion system, spectral modulation system, optical projection system and the uniform mixed light system of connecting successively; Described colimated light system and described optical projection system form by spherical reflector, described dispersion system is made up of plane diffraction grating and a spherical reflector, described spectral modulation system comprises distorting lens, described ultraviolet spectrum tunable optical source can realize spectral range from 300nm to 400nm spectral composition composition adjustable and hot spot brightness is adjustable.
2. ultraviolet spectrum tunable optical source according to claim 1, is characterized in that described plane diffraction grating is that plane portrays grating, and it is that 300 lines/mm is to 3600 lines/mm that described plane portrays grating line density range.
3. ultraviolet spectrum tunable optical source according to claim 1 and 2, it is characterized in that the parameter of described three spherical reflectors is: bore scope is 10mm ~ 500mm, mirror curvature radius R 1 scope is 30mm ~ 1000mm.
4., according to the arbitrary described ultraviolet spectrum tunable optical source of claims 1 to 3, it is characterized in that the reflective surface film of described three spherical reflectors is high-reflecting film.
5., according to the arbitrary described ultraviolet spectrum tunable optical source of claims 1 to 3, it is characterized in that described plane diffraction grating is fixed on colimated light system rear.
6., according to the arbitrary described ultraviolet spectrum tunable optical source of claims 1 to 3, it is characterized in that described uniform mixed light system adopts total reflection mode to carry out mixed light.
7. ultraviolet spectrum tunable optical source according to claim 6, described uniform mixed light system comprises lamp guide.
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106641813A (en) * 2015-11-02 2017-05-10 北京振兴计量测试研究所 Vacuum ultraviolet light tube illumination device
CN106644070A (en) * 2015-11-02 2017-05-10 北京振兴计量测试研究所 Vacuum ultraviolet imaging spectrometer calibration device
CN107238005A (en) * 2017-06-12 2017-10-10 中国科学院西安光学精密机械研究所 Light source with randomly tunable spectral distribution and brightness and light source tuning method

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Publication number Priority date Publication date Assignee Title
GB2410122A (en) * 2004-01-16 2005-07-20 Imp College Innovations Ltd Tunable source of electromagnetic radiation
US20110279889A1 (en) * 2008-02-26 2011-11-17 Ming Li Spectra shaping scheme for chirped pulse amplification
US20120206725A1 (en) * 2010-06-24 2012-08-16 Spectral Sciences, Inc. External Cavity Laser Source
CN103018010A (en) * 2012-11-30 2013-04-03 北京振兴计量测试研究所 Light source spectrum modulating device

Patent Citations (4)

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Publication number Priority date Publication date Assignee Title
GB2410122A (en) * 2004-01-16 2005-07-20 Imp College Innovations Ltd Tunable source of electromagnetic radiation
US20110279889A1 (en) * 2008-02-26 2011-11-17 Ming Li Spectra shaping scheme for chirped pulse amplification
US20120206725A1 (en) * 2010-06-24 2012-08-16 Spectral Sciences, Inc. External Cavity Laser Source
CN103018010A (en) * 2012-11-30 2013-04-03 北京振兴计量测试研究所 Light source spectrum modulating device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106641813A (en) * 2015-11-02 2017-05-10 北京振兴计量测试研究所 Vacuum ultraviolet light tube illumination device
CN106644070A (en) * 2015-11-02 2017-05-10 北京振兴计量测试研究所 Vacuum ultraviolet imaging spectrometer calibration device
CN106641813B (en) * 2015-11-02 2018-07-17 北京振兴计量测试研究所 Vacuum ultraviolet light pipe lighting device
CN107238005A (en) * 2017-06-12 2017-10-10 中国科学院西安光学精密机械研究所 Light source with randomly tunable spectral distribution and brightness and light source tuning method
CN107238005B (en) * 2017-06-12 2019-01-22 中国科学院西安光学精密机械研究所 Light source with randomly tunable spectral distribution and brightness and light source tuning method

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