CN104357809B - A kind of graphite boat and the supporting construction in load workshop - Google Patents
A kind of graphite boat and the supporting construction in load workshop Download PDFInfo
- Publication number
- CN104357809B CN104357809B CN201410684039.XA CN201410684039A CN104357809B CN 104357809 B CN104357809 B CN 104357809B CN 201410684039 A CN201410684039 A CN 201410684039A CN 104357809 B CN104357809 B CN 104357809B
- Authority
- CN
- China
- Prior art keywords
- boat
- graphite boat
- bending part
- gripper shoe
- fixing buckle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Carbon And Carbon Compounds (AREA)
- Fittings On The Vehicle Exterior For Carrying Loads, And Devices For Holding Or Mounting Articles (AREA)
Abstract
The invention discloses a kind of graphite boat and carry the supporting construction in workshop, including the boat pin bottom graphite boat and the platform of load roof, described platform both sides are respectively provided with Access Division, it it is interface arrangment between described Access Division and boat pin, it is additionally provided with fixing buckle between the boat body of described Access Division and graphite boat, described fixing buckle includes that the bending part of U-shaped, side, described bending part openend are provided with the connecting plate connecting Access Division, and bending part openend opposite side is provided with the gripper shoe supporting graphite boat boat body.Graphite boat of the present invention and load workshop are interface arrangment, conveniently pick and place；Being provided with a fixing buckle, the weight transfer tilted by graphite boat is to carrying underbody seat, thus increases graphite boat and be placed on the stability carried on car, anti-tip.
Description
Technical field
The present invention relates to the production equipment graphite boat of a kind of solar energy plasma enhanced chemical vapor deposition technical field, especially relate to a kind of graphite boat and carry the supporting construction in workshop.
Background technology
Graphite boat is the carrying tool that a kind of surface using plasma enhanced chemical vapor deposition processes in plasma enhanced chemical vapor deposition (PECVD) tube furnace to the polycrystalline after the PROCESS FOR TREATMENT such as making herbs into wool and diffusion or monocrystalline silicon piece carries out silicon nitride film coating.Graphite boat insert unload silicon chip during be disposed on special load car, its place attitude demand keep flat and slant setting two kinds, in order to employee by silicon chip insert and draw off graphite boat.General graphite boat carries car cannot realize as above function.
Such as China Patent Publication No.: CN202214416U, in the patent document in publication date on May 9th, 2012, disclose a kind of graphite boat carrier loader for PECVD operation, including vehicle frame, described vehicle frame is sequentially arranged above base and the platform for carrying graphite boat being connected is fixed in the upper end with described base.Platform and the graphite boat of above-mentioned carrier loader fix, it is impossible to rotate.
For another example China Patent Publication No.: CN203393224U, in the patent document in publication date on January 15th, 2014, disclose the graphite boat small handcart of a kind of novel PECVD feeding, table top and structural framing is deposited including graphite boat, described graphite boat is deposited table top and is located on described structural framing, the top of described structural framing is provided with rotary shaft, and described rotary shaft is provided with described graphite boat and deposits table top.The graphite boat small handcart of above-mentioned novel PEVCD feeding can realize rotating into heeling condition and facilitate employee to operate, but dangerous under heeling condition, is susceptible to accidentally graphite boat be deposited from small handcart the accident turned down table top in employee's operating process.
Summary of the invention
The present invention is to overcome above-mentioned existing graphite boat and carrying the weak point of workshop attachment structure, it is provided that a kind of supporting construction that can effectively prevent graphite boat from turning over the graphite boat fallen and carrying workshop.
To achieve these goals, the present invention is by the following technical solutions:
A kind of graphite boat of the present invention and the supporting construction in load workshop, including the boat pin bottom graphite boat and the platform of load roof, described platform both sides are respectively provided with Access Division, it it is interface arrangment between described Access Division and boat pin, it is additionally provided with fixing buckle between the boat body of described Access Division and graphite boat, described fixing buckle includes that the bending part of U-shaped, side, described bending part openend are provided with the connecting plate connecting Access Division, and bending part openend opposite side is provided with the gripper shoe supporting graphite boat boat body.
Graphite boat and the supporting construction in load workshop in the present invention, predominantly carrying between car Access Division and graphite boat boat pin is interface arrangment, in that context it may be convenient to places and takes out graphite boat.In order to prevent in an inclined state, situation about accidentally graphite boat being turned down from load car storage platform in employee's operating process, it is provided with a fixing buckle, the Access Division of fixing buckle one end connecting platform, the fixing buckle other end supports graphite boat boat body.The bending part of fixing buckle U-shaped is to preferably avoid graphite boat boat placement of foot, and the weight transfer tilted by graphite boat by fixing buckle extremely carries underbody seat, thus increases graphite boat and be placed on the stability carried on car.
As preferably, described boat pin is inverted U-shaped, and Zhou Jiaonei corner is provided with chamfering.Chamfering is to prevent graphite boat from sharply locating breakage.
As preferably, Access Division is constituted, by two blocks of side plates and one piece of top board, the inverted U-shaped mated with boat pin clamping, and described side plate side vertically extends one piece of side plate connecting portion, and connecting plate and one piece of side plate connecting portion of fixing buckle fix.
As preferably, the connecting plate of fixing buckle is provided with two bolts hole, connecting plate and one piece of side plate connecting portion bolt and fixes.
As preferably, the gripper shoe of fixing buckle tilts relative to bending part vertical direction, and boat pin side is withstood in gripper shoe one end, and the gripper shoe other end withstands boat body base, and gripper shoe, boat pin and boat body constitute triangular support configurations.Triangular support configurations is more firm.
As preferably, described gripper shoe tilts 50 degree～70 degree relative to bending part vertical direction.
It is furthermore preferred that described gripper shoe tilts 60 degree relative to bending part vertical direction.
There is advantages that graphite boat and load workshop are interface arrangment, conveniently pick and place；Being provided with a fixing buckle, the weight transfer tilted by graphite boat is to carrying underbody seat, thus increases graphite boat and be placed on the stability carried on car, anti-tip.
Accompanying drawing explanation
Fig. 1 is a kind of structural representation of the present invention.
Fig. 2 is the structural representation fixing buckle in the present invention.
In figure: boat pin 1, Access Division 2, side plate connecting portion 21, boat body 3, fixing buckle 4, bending part 41, connecting plate 42, gripper shoe 43, bolt hole 44.
Detailed description of the invention
The present invention will be further described with detailed description of the invention below in conjunction with the accompanying drawings.
In embodiment 1 as shown in Figure 1 and Figure 2, a kind of graphite boat and the supporting construction in load workshop, including the boat pin 1 bottom graphite boat and the platform of load roof.Platform both sides are respectively provided with Access Division 2, are interface arrangment between Access Division 2 and boat pin 1.Boat pin 1 is inverted U-shaped, and in boat pin 1, corner is provided with chamfering.Access Division 2 is constituted, by two blocks of side plates and one piece of top board, the inverted U-shaped mated with boat pin 1 clamping, and side plate side vertically extends one piece of side plate connecting portion 21.
Fixing buckle 4 it is additionally provided with between the boat body 3 of Access Division 2 and graphite boat.Fixing buckle 4 includes the bending part 41 of U-shaped, and side, bending part 41 openend is provided with the connecting plate 42 connecting Access Division 2, and bending part 41 openend opposite side is provided with the gripper shoe 43 supporting graphite boat boat body 3.The connecting plate 42 of fixing buckle 4 is provided with two bolts hole 44, connecting plate 42 and one piece of side plate connecting portion 21 bolt and fixes.The gripper shoe 43 of fixing buckle 4 tilts relative to bending part 41 vertical direction, and boat pin 1 side is withstood in gripper shoe 43 one end, and gripper shoe 43 other end withstands boat body 3 base, and gripper shoe 43, boat pin 1 and boat body 3 constitute triangular support configurations.
The a length of 40mm of connecting plate 42 of fixing buckle 4, width is 40mm, bolt hole 44 on connecting plate 42 is M10, it is 30mm that bending part 41 connects the vertical side edge length of connecting plate 42, bending part 41 base is 35mm, it is 45mm that bending part 41 connects the vertical side edge length of gripper shoe 43, and gripper shoe 43 tilts 60 degree relative to bending part 41 vertical direction.
Embodiment 2: be with the difference of embodiment 1, the a length of 40mm of connecting plate 42 of fixing buckle 4, width is 40mm, bolt hole 44 on connecting plate 42 is M10, it is 25mm that bending part 41 connects the vertical side edge length of connecting plate 42, bending part 41 base is 35mm, and it is 45mm that bending part 41 connects the vertical side edge length of gripper shoe 43, and gripper shoe 43 tilts 50 degree relative to bending part 41 vertical direction.
Embodiment 3: be with the difference of embodiment 1, the a length of 40mm of connecting plate 42 of fixing buckle 4, width is 40mm, bolt hole 44 on connecting plate 42 is M10, it is 40mm that bending part 41 connects the vertical side edge length of connecting plate 42, bending part 41 base is 35mm, and it is 45mm that bending part 41 connects the vertical side edge length of gripper shoe 43, and gripper shoe 43 tilts 70 degree relative to bending part 41 vertical direction.
Claims (5)
1. a graphite boat and the supporting construction in load workshop, including the boat pin (1) bottom graphite boat and the platform of load roof, it is characterized in that, described platform both sides are respectively provided with Access Division (2), it is interface arrangment between described Access Division (2) and boat pin (1), it is additionally provided with fixing buckle (4) between the boat body (3) of described Access Division (2) and graphite boat, described fixing buckle (4) includes the bending part (41) of U-shaped, described bending part (41) side, openend is provided with the connecting plate (42) connecting Access Division (2), bending part (41) openend opposite side is provided with the gripper shoe (43) supporting graphite boat boat body (3)；
Described boat pin (1) is inverted U-shaped, and boat pin (1) interior corner is provided with chamfering；
The gripper shoe (43) of fixing buckle (4) tilts relative to bending part (41) vertical direction, boat pin (1) side is withstood in gripper shoe (43) one end, gripper shoe (43) other end withstands boat body (3) base, and gripper shoe (43), boat pin (1) and boat body (3) constitute triangular support configurations.
A kind of graphite boat the most according to claim 1 and the supporting construction in load workshop, it is characterized in that, Access Division (2) is constituted, by two blocks of side plates and one piece of top board, the inverted U-shaped mated with boat pin (1) clamping, described side plate side vertically extends one piece of side plate connecting portion (21), and connecting plate (42) and one piece of side plate connecting portion (21) of fixing buckle (4) fix.
A kind of graphite boat the most according to claim 1 and the supporting construction in load workshop, it is characterised in that the connecting plate (42) of fixing buckle (4) is provided with two bolts hole (44), connecting plate (42) and one piece of side plate connecting portion (21) bolt and fixes.
A kind of graphite boat the most according to claim 1 and the supporting construction in load workshop, it is characterised in that described gripper shoe (43) tilts 50 degree～70 degree relative to bending part (41) vertical direction.
A kind of graphite boat the most according to claim 1 and the supporting construction in load workshop, it is characterised in that described gripper shoe (43) tilts 60 degree relative to bending part (41) vertical direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410684039.XA CN104357809B (en) | 2014-11-25 | 2014-11-25 | A kind of graphite boat and the supporting construction in load workshop |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410684039.XA CN104357809B (en) | 2014-11-25 | 2014-11-25 | A kind of graphite boat and the supporting construction in load workshop |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104357809A CN104357809A (en) | 2015-02-18 |
| CN104357809B true CN104357809B (en) | 2016-09-07 |
Family
ID=52525112
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410684039.XA Active CN104357809B (en) | 2014-11-25 | 2014-11-25 | A kind of graphite boat and the supporting construction in load workshop |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104357809B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116334595B (en) * | 2023-02-18 | 2023-11-17 | 阳光中科（福建）能源股份有限公司 | Boat bearing block for improving conductivity of perc battery piece coating process |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202214416U (en) * | 2011-09-08 | 2012-05-09 | 无锡德鑫太阳能电力有限公司 | Graphite boat carrying trolley for PECVD procedure |
| CN103287724A (en) * | 2013-06-24 | 2013-09-11 | 南昌欧菲光学技术有限公司 | Glass supporting frame |
| CN204251710U (en) * | 2014-11-25 | 2015-04-08 | 浙江东达光伏有限公司 | The supporting structure in a kind of graphite boat and year workshop |
-
2014
- 2014-11-25 CN CN201410684039.XA patent/CN104357809B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202214416U (en) * | 2011-09-08 | 2012-05-09 | 无锡德鑫太阳能电力有限公司 | Graphite boat carrying trolley for PECVD procedure |
| CN103287724A (en) * | 2013-06-24 | 2013-09-11 | 南昌欧菲光学技术有限公司 | Glass supporting frame |
| CN204251710U (en) * | 2014-11-25 | 2015-04-08 | 浙江东达光伏有限公司 | The supporting structure in a kind of graphite boat and year workshop |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104357809A (en) | 2015-02-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2009522790A5 (en) | ||
| WO2010085949A3 (en) | Substrate carrier for mounting substrates | |
| WO2009086257A8 (en) | Susceptor with support bosses | |
| CN104357809B (en) | A kind of graphite boat and the supporting construction in load workshop | |
| TWM412155U (en) | Equipment with air bearing table | |
| CN204251710U (en) | The supporting structure in a kind of graphite boat and year workshop | |
| CN205186995U (en) | Supplementary saddle of board -like pressure vessel transportation is supported in area | |
| CN102328827B (en) | Graphite boat trolley for plasma enhanced chemical vapor deposition (PECVD) automatic wafer loading and unloading system | |
| WO2003085704A3 (en) | Device for accommodating substrates | |
| CN203320184U (en) | Crystal sampling vehicle | |
| CN211572650U (en) | H-shaped steel clamping and hoisting device | |
| CN209258088U (en) | Change electric installation | |
| CN206598756U (en) | Cup holder for vehicle | |
| JP4770789B2 (en) | Substrate handling device | |
| CN201889790U (en) | Work piece holding device | |
| CN218532451U (en) | Turnover appliance for automobile roof stamping parts | |
| CN106395677A (en) | Device and Method of Handling Detach Procedure | |
| CN1792743A (en) | Storage container | |
| CN219467815U (en) | Handling device for toughened glass production | |
| CN207060821U (en) | A kind of support holder structure for the transport of silicon single crystal rod automatic inspection line and loading and unloading | |
| CN211805562U (en) | Galvanized steel pipe arc port shaping fixing device | |
| CN219134995U (en) | Ceramic tile transportation is with stacking support | |
| CN216736472U (en) | Carrying device for glass curtain wall | |
| CN105703695B (en) | Photovoltaic system supporting construction waterborne | |
| JP5077459B2 (en) | Substrate mounting method and substrate removal method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |