CN104345286B - Integrating circuit and the superconductive quantum interference sensor being applicable - Google Patents
Integrating circuit and the superconductive quantum interference sensor being applicable Download PDFInfo
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- CN104345286B CN104345286B CN201310340677.5A CN201310340677A CN104345286B CN 104345286 B CN104345286 B CN 104345286B CN 201310340677 A CN201310340677 A CN 201310340677A CN 104345286 B CN104345286 B CN 104345286B
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Abstract
The present invention provides a kind of integrating circuit and the superconductive quantum interference sensor being applicable.According to sensor of the present invention, the gate by external control signal is configured in the integrating circuit, and the integrating circuit is changed according to the control signal so that the integrating circuit can carry out one kind in positive polarity integration, negative polarity integration, reset and debugging.Thus SPUID is resulted in optimum working parameter, and flexibly select operating point, simplify the integrating circuit in existing superconductive quantum interference sensor readout circuit.
Description
Technical field
The present invention relates to a kind of integrating circuit and the superconductive quantum interference sensor being applicable.
Background technology
SPUID (Superconducting Quantum Interference Device, hereinafter referred to as
SQUID) it is used for the most sensitive Magnetic Sensor being currently known, wherein low-temperature superconducting SQUID sensitivity reaches that 10 fly spy, and high temperature surpasses
Lead SQUID sensitivity and reach that 100 fly spy.These SQUID are important high-end applications sensors, are widely used in biological magnetic, ground
In ball physical detecting, extremely low field nuclear magnetic resonance apparatus equipment.
SQUID and reading circuit together form superconductive quantum interference sensor, due to the particularity that SQUID works, i.e.,
Realize that the linear transformation of magnetic flux voltage is realized based on reading circuit principle.
The device that the not upper electricity of SQUID device puts into operation.SPUID passes through film by superconductor
The microelectronic component being prepared from micro fabrication, is limited, yield of devices is low by material and technique, even with a collection of
Uniformity between the device of secondary processing is also poor.Therefore the running parameter between device, such as bias current and resistance characteristic are complete
It is complete different.Therefore the reading circuit coordinated with SQUID device, it is impossible to fix the parameters such as bias current, and need according to low
Practical operation situation carrys out regulation parameter under warm environment.Therefore to possess debugging test function before sensor puts into operation, generally
It is required that reading circuit can switch to amplifier mode, in the case of external world loading test magnetic field, it can be observed in circuit output end
To SQUID voltage responsive signals, by this voltage responsive, user can just monitor SQUID magnetic fluxs when adjusting bias current
The situation of voltage responsive, judges whether in sensitivity highest state (voltage responded is maximum)., can by amplification mode
Auxiliary realizes the regulation of SQUID device bias current.
On the other hand, because SQUID field voltage transfer characteristics are nonlinear, the sinusoidal function in cycle is showed
Characteristic, therefore the maximum operating point of sensitivity may have positive magnetic flux voltage conversion ratio (dV/d Φ) or negative magnetic flux voltage to turn
Change rate (dV/d Φ).Therefore tool is required in order to choose the integrating circuit in optimal sensitivity operating point, reading circuit
There are positive polarity integration and negative polarity to integrate selectable punction so that circuit may be locked in changes slope and negative with positive magnetic flux voltage
On the operating point of magnetic flux voltage conversion slope.
In addition, in the case of external disturbance, reading circuit is in the state of Closed loop operation, in fact it could happen that because interference occurs
Spillover, due to SQUID particularity, normal operating conditions can not be automatically replied after spilling.In order to which circuit can be returned
Return operating point, it is desirable to which circuit has reset function.
In order to meet the demand, current superconductive quantum interference sensor is reading electricity for the configuration of each SQUID device
Lu Shi, in addition it is also necessary to which debug circuit is provided.This make it that the circuit volume and power consumption of current sensor are big, it is impossible to tackle SQUID biographies
The less and less demand of the size of sensor.
Therefore, the integrated level of raising sensor is wanted, it is necessary to be improved to existing integrating circuit and reading circuit.
The content of the invention
The shortcoming of prior art in view of the above, it is an object of the invention to provide a kind of integrating circuit and is applicable
Superconductive quantum interference sensor, for solving the problem of integrating circuit and reading circuit structure are complicated in the prior art.
In order to achieve the above objects and other related objects, the present invention provides a kind of product for superconductive quantum interference sensor
Parallel circuit, wherein, the superconductive quantum interference sensor includes：SPUID and the superconducting quantum interference device
The connected preamplifier of the output end of part and the feedback circuit being connected with the integrating circuit, the integrating circuit are at least wrapped
Include：Electric signal for the preamplifier to be exported is integrated the integration sub-circuit of processing；With the preposition amplification
Device with integration sub-circuit be connected and for external control signal control order it is described integration sub-circuit progress positive polarity integration
Or the gate of negative polarity integration.
Preferably, the integration sub-circuit includes：The amplifier being connected with the gate, the output with the amplifier
Hold the electric capacity that is connected with the negative input end of the amplifier, wherein, the negative input end of the electric capacity and the amplifier also with ground
Line is connected.
Preferably, the gate includes：First gate, wherein, the input of first gate with it is described before
The output end for putting amplifier is connected, and first gate includes：First gating switch, connects the input of first gate
End and the negative input end of the amplifier；Second gating switch, connects the input and the amplifier of first gate
Positive input terminal；
Second gate, wherein, the input of second gate is connected with the output end of the reverser, and described
Two gates include：5th gating switch, connects the output end of the reverser and the input of the feedback circuit；6th choosing
Pass is opened up, the output end of the reverser and the input of the feedback circuit is connected.
Preferably, the gate be additionally operable to the control of external control signal order it is described integration sub-circuit answered
Position.
Preferably, the first gate in the gate includes：3rd gating switch, one end connects the preposition amplification
The output end of device, the other end is hanging.
Preferably, the second gate in the gate includes：In 7th gating switch, with the integration sub-circuit
Electric capacity is in parallel and one end is grounded.
Preferably, the gate is additionally operable to order described in the integration sub-circuit output in the control of external control signal
The electric signal that preamplifier is exported.
Preferably, the first gate in the gate includes：4th gating switch, connects first gate
The negative input end of input and the amplifier.
Preferably, the second gate in the gate includes：In 8th gating switch, with the integration sub-circuit
Electric capacity is in parallel and one end is grounded.
Based on above-mentioned purpose, the present invention also provides a kind of superconductive quantum interference sensor, and it at least includes：Superconducting Quantum is done
Relate to device；The reading circuit being connected with the SPUID, including：With the output of the SPUID
The connected preamplifier in end；The as above any described integrating circuit being connected with the output end of the preamplifier；And
The feedback circuit being connected with the integrating circuit.
As described above, the integrating circuit of the present invention and the superconductive quantum interference sensor being applicable, with following beneficial effect
Really：Enabled by the gating switch of gate and changed between integration sub-circuit positive polarity integration and negative polarity integration,
The integrating circuit in existing superconductive quantum interference sensor is simplified, the size of sensor is effectively reduced；Simultaneously as simplifying
The quantity of power consuming device, integrating circuit of the present invention has lower power consumption.
Brief description of the drawings
Fig. 1 is shown as the structural representation of the superconductive quantum interference sensor comprising integrating circuit of the present invention.
Fig. 2 is shown as a kind of structural representation of preferred embodiment of the integrating circuit of the present invention.
Component label instructions
1 superconductive quantum interference sensor
11 SPUIDs
12 preamplifiers
13 integrating circuit
A1, A0 control interface
The gates of SW1-B first
The gating switches of S3B first
The gating switches of S4B second
The gating switches of S1B the 3rd
The gating switches of S2B the 4th
The gates of SW1-A second
The gating switches of S3A the 5th
The gating switches of S4A the 6th
The gating switches of S1A the 7th
The gating switches of S2A the 8th
14 feedback circuits
Embodiment
Embodiments of the present invention are illustrated by particular specific embodiment below, those skilled in the art can be by this explanation
Content disclosed by book understands other advantages and effect of the present invention easily.
Fig. 1 is referred to Fig. 2.It should be clear that structure, ratio, size depicted in this specification institute accompanying drawings etc., is only used to
Coordinate the content disclosed in specification, so that those skilled in the art is understood with reading, being not limited to the present invention can be real
The qualifications applied, therefore do not have technical essential meaning, the tune of the modification of any structure, the change of proportionate relationship or size
It is whole, in the case where not influenceing effect of the invention that can be generated and the purpose that can reach, all should still it fall in disclosed skill
Art content is obtained in the range of covering.
As shown in figure 1, the present invention provides a kind of superconductive quantum interference sensor.The sensor 1 includes：Superconducting Quantum is done
Relate to device 11, reading circuit.
The SPUID 11 (SQUID) is used to believe the magnetic detected using superconductive quantum interference technology
Number it is converted into electric signal.
Specifically, the faint magnetic that the SPUID 11 detects certain frequency using superconductive quantum interference technology is believed
Number, such as heart magnetic, brain magnetic, nuclear magnetic resonance or geophysics magnetic signal, and according to the magnetic signal detected change itself etc.
Resistance is imitated, to export corresponding electric signal.The SPUID 11 includes：Superconducting ring and feedback coil.
The electric signal that the reading circuit is used to be changed the SPUID 11 carries out preposition processing, and
Exported.Wherein, the reading circuit includes：Preamplifier 12, integrating circuit 13 and feedback circuit 14.
The preamplifier 12 is connected with the output end of the SPUID 11, for by the superconduction amount
The electric signal that sub- interfered device 11 is exported is amplified.Wherein, the multiplication factor of the preamplifier 12 can be tens
Again to hundred times, it is preferable that the multiplication factor of the preamplifier 12 is more than 100 times.
The electric signal that the integrating circuit 13 is used to be exported the preamplifier 12 is integrated processing.
Specifically, the SPUID 11 is influenceed by magnetic field environment, and the magnetic flux of the electric signal exported is passed
Positive magnetic flux voltage and negative sense magnetic flux voltage cyclically-varying, therefore, the integrating circuit 13 in defeated characteristic were needed according to week
The flux transfer characteristic locking integration polarity of phase property change, and the Integral Processing of positive polarity/negative polarity is provided, recycle described anti-
The feedback function of current feed circuit 14, to offset the flux change being carried on SQUID.
In order to which the magnetic flux voltage locking ring can lock work, the product in the operating point of forward and reverse magnetic flux voltage
Parallel circuit 13 has the integrating function of positive-negative polarity simultaneously.The integrating circuit 13 includes：Integrate sub-circuit, gate.
The electric signal that the integration sub-circuit is used to be exported the preamplifier 12 is integrated processing.Wherein,
The integration sub-circuit can comprising controlled positive integration sub-circuit and reverse integral sub-circuit, the integration sub-circuit it is defeated
Go out end with the feedback coil input of the feedback circuit 14 and the sensor I1 to be connected.Preferably, as shown in Fig. 2 described
Integration sub-circuit includes：The amplifier being connected with the gate, with the output end of the amplifier and bearing for the amplifier
The connected electric capacity of input, in addition, the electric capacity is also connected with the negative input end of the amplifier with resistance R3, resistance R3 and ground
Line is connected, and is also grounded while the positive input terminal of the amplifier is connected with the gate by resistance R2, described to avoid
Occur during the gate open circuit of amplifier positive input terminal connection it is hanging and can not the situation of normal work occur.
The gate is connected with the preamplifier 12 and integration sub-circuit and for the control in external control signal
Make the integration sub-circuit of ordering and carry out positive polarity integration or negative polarity integration.Wherein, gate electric conduction in conducting
Resistance is less than 50 ohm, and the off resistance when disconnecting is more than megohm, while positive and negative 10v analog signal transmission can be born.
For example, the gate can be relay or single pole multiple throw.
Specifically, the gate has the control interface that is connected with external equipment, and the external equipment is to the gating
Device sends control signal, and the gate carries out positive polarity integration or negative according to the control signal gating integration sub-circuit
Polar integral.
For example, when the gate receives the control signal of negative polarity integration, the gate will the preceding storing
The output end of big device 12 and the negative input end UNICOM of the amplifier in the integration sub-circuit, the output end connection of the amplifier
The feedback circuit 14, then the preamplifier 12, integration sub-circuit and feedback circuit 14, which are constituted, is based on positive polarity operating point
Reading circuit.
Preferably, as shown in Fig. 2 the gate, which is double N, selects a gate, wherein, N is gating switch in gate
Quantity, described couple of N selects each gate in a gate to be controlled by a control interface, meanwhile, according to corresponding control
System, each gate only one of which gating switch closure.For example, the gate selects a gate for double four.The gate
It can also include：The first gate SW1-B with control interface A1, A0 and the second gate SW1-A with control interface.
The first gate SW1-B and the second gate SW1-A pass through respective control interface A1, A0 and external equipment
It is connected, to receive the control signal that the external equipment is exported.Preferably, the control interface is multiple.For example, the control
Interface processed is 2.Wherein, the analog signal that the control signal can be constituted for data signal or low and high level.
The first gate SW1-B also have input, the output end of the first gate SW1-B with it is described preposition
The output end of amplifier 12 is connected.The first gate SW1-B at least includes：The gatings of first gating switch S3B and second are opened
Close S4B.
The input of first gating switch S3B connections the first gate SW1-B and the amplifier it is negative defeated
Enter end.
The input of second gating switch S4B connections the first gate SW1-B and the amplifier it is just defeated
Enter end.
Second gate SW1-A also has input, input and the reverser of the second gate SW1-A
Output end is connected.The second gate SW1-A at least includes：5th gating switch S3A and the 6th gating switch S4A.
The output end of the 5th gating switch S3A connections reverser and the input of the feedback circuit 14.
The output end of the 6th gating switch S4A connections reverser and the input of the feedback circuit 14.
As a kind of preferred scheme, the gate be additionally operable to the control of external control signal order it is described integration electricity
Road is resetted.
Specifically, when receiving the control signal of reset, the gate conducting and the electricity in the integration sub-circuit
Hold gating switch in parallel so that the electric capacity two ends are connected, the charge discharge of electric capacity storage.
Preferably, the first gate SW1-B also includes：3rd gating switch S1B.Second gate SW1-A is also wrapped
Include：7th gating switch S1A.
Described 3rd gating switch S1B one end connects the output end of the preamplifier 12, and the other end is hanging.
The 7th gating switch S1A is in parallel with the electric capacity in the integration sub-circuit and one end is grounded.
As another preferred scheme, the gate be additionally operable to the control of external control signal order it is described integration
The electric signal that preamplifier 12 described in circuit output is exported.
Specifically, as shown in Fig. 2 when receiving the control signal of debugging, the gate makes the integration sub-circuit
In electric capacity electric discharge, and the output end of the preamplifier 12 and resistance R1 one end are connected, the R1 other ends and the integration
The negative input end of amplifier in sub-circuit is connected, and the positive input terminal of the amplifier is grounded by resistance R2, then the integration
Sub-circuit becomes sign-changing amplifier, and its multiplication factor is-R4/R1.Electric signal that the preamplifier 12 is exported directly by
Amplifier output in the integration sub-circuit, so that external equipment observes the electricity that the SPUID 11 is changed
The flux transfer characteristic of signal, forwards/reverse work is locked further according to the flux transfer characteristic observed to gate output
Make the control signal of point, the corresponding positive polarity of negative polarity integral feedback circuit 14/ is connected so as to the gating switch of the gate
Integral feedback circuit 14.
Preferably, the first gate SW1-B also includes：4th gating switch S2B.Second gate SW1-A is also wrapped
Include：8th gating switch S2A.
The input of 4th gating switch S2B connections the first gate SW1-B and the amplifier it is negative defeated
Enter end.
The 8th gating switch S2A is in parallel with the electric capacity in the integration sub-circuit and one end is grounded.
The feedback circuit 14 is connected with the integrating circuit 13, defeated for the output end institute based on the integrating circuit 13
The electric signal gone out adjusts the electric signal that the SPUID 11 is exported.It includes：Feedback resistance.
According to above-mentioned preferred circuit connecting relation, annexation as shown in Figure 2, the product in the magnetic flux lock-in circuit
Parallel circuit includes double four gates, electric capacity and amplifier for selecting one, and the course of work of the integrating circuit is exemplified below：
When control interface A1, A0 of the gate receive 00 control being made up of low and high level that external equipment is sent
During signal, the 3rd gating switch S1B and the 7th gating switch S1A closures, then the preamplifier passes through the 3rd gating switch
S1B is suspended, meanwhile, the 7th gating switch S1A connects the two ends of the electric capacity C1, and the electric charge on electric capacity C1 is released
Put.Because the positive input terminal of the amplifier U1 in integrating circuit is grounded by resistance R2, therefore positive input terminal is no-voltage, and is born
Input is connected with output by S1A, is formed a follower, after electric capacity C1 charge discharges, amplifier U1 output
It will stay in that zero.Thus, while the preamplifier does not export electric signal, the electric capacity C1 is opened by the described 7th gating
Close S1A electric discharges so that integrating circuit amplifier U1 output zero, realize integrator zero reset.When reading circuit overflows
When going out, by the operation, the integration sub-circuit realizes reset function.
When control interface A1, A0 of the gate receive the external equipment is sent be made up of low and high level 01
During control signal, the 4th gating switch S2B and the 8th gating switch the S2A closure so that the preamplifier 12 and electricity
Hinder R1 to connect, the negative input end of the R1 other ends and amplifier U1 is connected, and amplifier U1 output end passes through the 8th gating switch S2A
Connected with resistance R4, the resistance R4 other ends connect with amplifier U1 negative input end.Amplifier U1 positive input terminal passes through
Resistance R2 is grounded, therefore keeps no-voltage.Now, resistance R1 and R4 and operational amplifier U1 constitutes an inverse proportion amplification
Device, multiplication factor-R4/R1.Because amplifier U1 is under inverse proportion amplification mode, the current potential and positive input current potential phase of negative input end
Together, all it is no-voltage, therefore amplifier U1 negative input end is grounded by R3, will not be had an impact to circuit.Therefore in amplifier
U1 output end, the detectable electric signal exported from the preamplifier 12 of the external equipment, realizes the outside
Observation of the equipment to SQUID magnetic flux voltage response signals.
When the external equipment makes the integrating circuit carry out negative polarity Integral Processing by observing determination, the outside
Control interface from equipment to the gate A1, A0 send 10 control signal being made up of low and high level when, it is described first gating
S3B and the 5th gating switch S3A closures are switched, then in the output and feedback circuit of the amplifier U1 in the integration sub-circuit
Feedback resistance is connected.Meanwhile, the electric signal from preamplifier is connected by the first gating switch S3B with resistance R1, is produced
Electric current flows into amplifier U1 and electric capacity C1, now, and resistance R1 and electric capacity C1 constitutes the integrating circuit of a negative polarity, from institute
The voltage signal driving resistance R1 for stating preamplifier produces integration current and flows into electric capacity, the voltage of the amplifier U1 outputs
Integrated for the negative polarity that flows through resistance R1 electric currents, meanwhile, the voltage of amplifier U1 output by the 5th gating switch S3A with
Feedback resistance connection in feedback circuit.Thus, preamplifier, the first gating switch S3B, electric capacity, amplifier, the 5th gating
Switch S3A and feedback circuit constitute the reading circuit based on positive polarity operating point.It is described under the feedback of the reading circuit
Feedback coil and superconducting ring mutual inductance in SPUID, so that the feedback current plays anti-to the magnetic flux of superconducting ring
Feedback is acted on.
When the external equipment makes the integrating circuit carry out positive polarity Integral Processing by observing determination, the outside
Control interface from equipment to the gate A1, A0 send 11 control signal being made up of low and high level when, the second gating switch
S4B and the 6th gating switch S4A closures, then the 6th gating switch S4A connects amplifier U1 output with feedback circuit,
The second gating switch S4B exports preamplifier 12 to be connected with amplifier U1 positive input terminal, and now electric capacity C1 is combined
Resistance R3 constitutes the integrating circuit of positive polarity.The negative terminal of resistance R3 one end concatenation operation amplifiers, other end ground connection, in negative-feedback
In the presence of, the voltage being carried on resistance R3 is equal with the voltage that operational amplifier anode is carried in from preamplifier,
It is positive polarity integration that what amplifier U1 was exported, which flows through resistance R3 electric currents,.Thus, preamplifier, the second gating switch S4B, electricity
Appearance, amplifier, the 6th gating switch S4A and feedback circuit constitute the reading circuit based on negative polarity operating point.
In summary, integrating circuit of the invention and the superconductive quantum interference sensor being applicable, pass through the choosing of gate
Opening up pass enables integration sub-circuit positive polarity integration and negative polarity to be changed between integrating, and simplifies existing Superconducting Quantum
Integrating circuit in interference sensor, effectively reduces the size of sensor；Simultaneously as the quantity of power consuming device has been simplified,
Integrating circuit of the present invention has lower power consumption.So, the present invention effectively overcome various shortcoming of the prior art and
Has high industrial utilization.
The above-described embodiments merely illustrate the principles and effects of the present invention, not for the limitation present invention.It is any ripe
Know the personage of this technology all can carry out modifications and changes under the spirit and scope without prejudice to the present invention to above-described embodiment.Cause
This, those of ordinary skill in the art is complete without departing from disclosed spirit and institute under technological thought such as
Into all equivalent modifications or change, should by the present invention claim be covered.
Claims (8)
1. a kind of integrating circuit for superconductive quantum interference sensor, it is characterised in that at least include：
Integration sub-circuit for the electric signal received to be integrated to processing, including：The amplifier that is connected with gate and
The electric capacity being connected with the output end of the amplifier and the negative input end of the amplifier, wherein, the electric capacity and the amplification
The negative input end of device is also connected by resistance with ground wire；
With it is described integration sub-circuit be connected and for external control signal control order it is described integration sub-circuit progress positive pole
Property integration or negative polarity integration gate, including：
The first gate with input, including：
First gating switch, connects the input of first gate and the negative input end of the amplifier；
Second gating switch, connects the input of first gate and the positive input terminal of the amplifier；
Second gate, including：
5th gating switch, connects the output end of the amplifier；
6th gating switch, connects the output end of the amplifier.
2. the integrating circuit according to claim 1 for superconductive quantum interference sensor, it is characterised in that the gating
Device be additionally operable to the control of external control signal order it is described integration sub-circuit resetted.
3. the integrating circuit according to claim 2 for superconductive quantum interference sensor, it is characterised in that the gating
The first gate in device includes：3rd gating switch, one end connects the input of first gate, and the other end is hanging.
4. the integrating circuit according to claim 2 for superconductive quantum interference sensor, it is characterised in that the gating
The second gate in device includes：7th gating switch, and one end ground connection in parallel with the electric capacity in the integration sub-circuit.
5. the integrating circuit according to claim 1 for superconductive quantum interference sensor, it is characterised in that the gating
Device is additionally operable in the integration sub-circuit output superconductive quantum interference sensor is ordered in the control of external control signal
The electric signal that preamplifier is exported.
6. the integrating circuit according to claim 5 for superconductive quantum interference sensor, it is characterised in that the gating
The first gate in device includes：4th gating switch, connects the input of first gate and bearing for the amplifier
Input.
7. the integrating circuit according to claim 5 for superconductive quantum interference sensor, it is characterised in that the gating
The second gate in device includes：8th gating switch, and one end ground connection in parallel with the electric capacity in the integration sub-circuit.
8. a kind of superconductive quantum interference sensor, it is characterised in that at least include：
SPUID；
The reading circuit being connected with the SPUID, including：
The preamplifier being connected with the output end of the SPUID；
The integrating circuit as described in any in claim 1-7 being connected with the output end of the preamplifier；And
The feedback circuit being connected with the integrating circuit.
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| CN104808156B (en) * | 2015-05-05 | 2018-02-13 | 中国科学院上海微系统与信息技术研究所 | SQUID Magnetic Sensors and best operating point locking means |
| CN110380700B (en) * | 2019-08-23 | 2020-05-26 | 中国科学院地质与地球物理研究所 | Preamplifier, MEMS sensor readout circuit and MEMS sensor system |
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| US4906930A (en) * | 1987-02-27 | 1990-03-06 | Hitachi, Ltd. | Magnetometer using a Josephson device and superconducting phototransistor |
| KR101012107B1 (en) * | 2009-04-22 | 2011-02-07 | 한국표준과학연구원 | Data acquisition system of multi-channel SQUID signal |
| KR101092490B1 (en) * | 2009-11-26 | 2011-12-13 | 한국표준과학연구원 | Flux-Locked Loop Circuit, Flux-Locked Loop Method, and SQUID Measuring Apparatus |
| CN102353911B (en) * | 2011-08-31 | 2013-08-21 | 中国科学院上海微系统与信息技术研究所 | High-sensitivity magnetic measurement device in environment field based on disturbance compensation and realization method thereof |
| CN203480005U (en) * | 2013-08-06 | 2014-03-12 | 中国科学院上海微系统与信息技术研究所 | An integrating circuit and an applicable superconducting quantum interference sensor |
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Effective date of registration: 20180911 Address after: 201108 221, room 1, 3688 Kim do road, Minhang District, Shanghai. Patentee after: Man Di medical instruments (Shanghai) Co., Ltd. Address before: 200050 No. 865, Changning Road, Shanghai, Changning District Patentee before: Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences |