CN104317049B - Double eccentric adjustment light path devices - Google Patents

Double eccentric adjustment light path devices Download PDF

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Publication number
CN104317049B
CN104317049B CN201410545404.9A CN201410545404A CN104317049B CN 104317049 B CN104317049 B CN 104317049B CN 201410545404 A CN201410545404 A CN 201410545404A CN 104317049 B CN104317049 B CN 104317049B
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CN
China
Prior art keywords
lens
eccentric
disk
diameter
outer disc
Prior art date
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Expired - Fee Related
Application number
CN201410545404.9A
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Chinese (zh)
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CN104317049A (en
Inventor
党学明
何小虎
卢荣胜
黄平安
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Hefei University of Technology
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Hefei University of Technology
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Publication date
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Priority to CN201410545404.9A priority Critical patent/CN104317049B/en
Publication of CN104317049A publication Critical patent/CN104317049A/en
Application granted granted Critical
Publication of CN104317049B publication Critical patent/CN104317049B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The invention discloses a kind of double eccentric adjustment light path devices, for forming scanning light beam in the field such as spot scan and cofocus scanning measurement.It is made up of inside and outside two nontransparent disks and lens with eccentric orfice, inner disc is installed in the eccentric orfice of external disk, inner disc diameter is identical with eccentric bore dia;Lens are arranged on the eccentric orfice of inner disc, and lens diameter is identical with interior eccentric orfice, form double eccentric structures.Internal and external disk is freely rotated around respective center.By changing the rotational angle of two disks, change position of the lens on space plane, use major diameter(More than aperture of lens, less than external disk diameter)Light beam is incided on disk, just can be continuously varied to form scanning light beam according to lens position.Its compact conformation, it is good with traditional light path associativity, and also thang-kng amount fixes, and can keep the luminous point energy and shape coincidence for being formed, it is adaptable to the scanning of various optical wavelength.

Description

Double eccentric adjustment light path devices
Technical field
The present invention relates to optical path adjustment device field, specifically a kind of double eccentric adjustment light path devices.
Background technology
The formation of the scanning light beam in spot scan and cofocus scanning measurement is usually to use spatial light modulator at present, Influenceed by optical wavelength during formation scanning light beam, needed using different modulator parameters for the light of different wave length.It is single The scanning angle of one spatial light modulator is limited.Spatial light modulator temperature influence is larger simultaneously, high to environmental requirement.
The content of the invention
It is an object of the invention to provide a kind of double eccentric adjustment light path devices, made with solving prior art spatial light modulator With easy restricted problem.
In order to achieve the above object, the technical solution adopted in the present invention is:
Double eccentric adjustment light path devices, it is characterised in that:Including inner disk, outer disc, the outer disc is with diameter greater than interior Disk, bias is provided with outer disc eccentric through-hole in outer disc, and the inner disk is rotatably installed in outer disc eccentric orfice, constitutes double Eccentric structure, bias is installed with lens in being provided with inner disk eccentric through-hole, and inner disk eccentric through-hole in inner disk.
Described double eccentric adjustment light path device, it is characterised in that:The outer disc eccentric through-hole diameter is straight with inner disk Footpath is matched, and inner disk eccentric through-hole diameter is matched with lens diameter.
Described double eccentric adjustment light path device, it is characterised in that:The outer disc around its center rotate, inner disk with While revolution with outer disc, can independently be rotated around its center.
The principle of the invention is:
Cylindrical disk center is e with the outer eccentric distance at outer disc eccentric through-hole center1, inner circle disk center and inner disk are eccentric The interior eccentric distance at through hole center is e2, when inside and outside circle coils respective center rotating, lens change in the position of disk plane Become.Setting original position is:Cylindrical disk center o1, inner circle disk center o2And lens centre o33 points are in horizontal line, o2In o1With o3It is middle.When outer disc rotates (counterclockwise) θ1, inner disk rotation θ2When.Lens centre o3Position be (with o1Centered on pole Coordinate representation):
Wherein, r is lens centre o3With cylindrical disk center o1Distance, θ is o1o3Line and pole axis (horizontal direction) press from both sides Angle.
(2) deformation can be obtained:
In view of round symmetric form, the θ in formula1And θ2Scope is (0, л), similarly hereinafter.
It can be seen that e is received in the position of lens centre1, e2, θ1, θ2Together decide on.When it is determined that e1And e2Afterwards, the size of r is by θ2Determine, While θ2By formula (3) limitation.And the span of r be (| e1-e2|,e1+e2).Therefore the scope that lens centre can reach is exactly Interior outer radius is respectively | e1-e2| and e1+e2Annular region.
Generally, it is desirable to which lens are by cylindrical disk center, if lens radius are r3, now e1, e2Need to meet:e2-r3< e1<e2+r3
Work as e1=e2During=e, lens centre just can be by cylindrical disk center, and the scope that lens can be reached is exactly with e1+e2 It is the circle of radius.Now:
For the straight line l for giving:L and o1Gathering l0(|e1-e2|<l0<e1+e2), it is α with horizontal line angle.Then meet:
Point (r, θ) it is inevitable on this straight line.
Due to θ1And θ2The continuity of change, therefore the position that lens centre can reach is continuous in region.Continuously adjust θ1And θ2Size, lens centre just can in the plane form straight path.
With heavy caliber collimated light beam (it is required that with diameter greater than e1+e2) be irradiated on device, only it is irradiated to the light of lens component Shu Caineng forms correspondence light beam in opposite side.Change the rotational angle of inside and outside disk, can just be formed and lens movement in opposite side Think corresponding scanning light beam in track.
Beneficial effect of the invention is:
1st, the structure used in device is all circle, good with traditional light path associativity;
2nd, because the thang-kng amount of lens is fixed, therefore the energy of the light beam formed in offside and the uniformity of shape are good;It is right Optical wavelength is without selectivity, it is adaptable to the scanning of various optical wavelength.
3rd, whole device compact conformation, it is only necessary to the rotational angle of the inside and outside disk of regulation, can be achieved with the scanning of light beam, adjust Section light spot position is simple, and scanning angle is not limited in theory.
Brief description of the drawings
Fig. 1 is structure top view of the invention.
Fig. 2 is that light path of the invention forms schematic diagram.
Fig. 3 is the change in location of Fig. 1 with reference to figure.
Fig. 4 is inside and outside disk motion mode with reference to figure.
Specific embodiment
As Figure 1-Figure 4, double eccentric adjustment light path devices, including inner disk 2, outer disc 3, outer disc 3 with diameter greater than Inner disk 2, bias is provided with outer disc eccentric through-hole in outer disc 3, and inner disk 2 is rotatably installed in the eccentric orfice of outer disc 3, constitutes Double eccentric structures, bias is installed with lens 1 in being provided with inner disk eccentric through-hole, and inner disk eccentric through-hole in inner disk 2.
Outer disc eccentric through-hole diameter and the diameter matches of inner disk 2, inner disk eccentric through-hole diameter and the diameter of lens 1 Match somebody with somebody.
Outer disc 3 is rotated around its center, while inner disk 2 follows outer disc to revolve round the sun, can independently be turned around its center It is dynamic.
The present invention is to provide a kind of double eccentric adjustment light path devices, including lens 1, inner disk 2 and band with eccentric orfice The outer disc 3 of eccentric orfice.
Lens 1 are fixedly mounted in the eccentric orfice of inner disk 2, and lens size is identical with interior eccentric orfice size.Inner disk 2 leads to The mode crossed similar to hinge riveting is installed in the outer eccentric orfice of outer disc 3, and inner disk can freely be rotated in outer eccentric orfice, Inner disk radius is identical with interior eccentric pore radius.Outer disc can be rotated around itself fixing axle.
Two groups of transmission devices of independence are set, and one group of drive outer disc does and revolve around itself fixing axle (i.e. the center of outer disc) Transhipment is dynamic, also can just drive inner disk to do revolution motion around cylindrical disk center, and another group of drive inner disk is around inner circle disk center Rotate.Also just can simultaneously change the rotation angular frequency of inside and outside disk by this two groups of transmission devices, can just change lens Position in the planes, makes lens centre complete linear motion.
When being irradiated on device with heavy caliber light beam 4, the light beam for being only irradiated to lens component could be in opposite side shape Into converging beam, remainder light beam is blocked by inner disk and outer disc.Change the position of lens, converge the position of luminous point therewith Change.
Inside and outside disk rotational is driven by transmission device, the continuous position for changing lens centre just can be another in lens Side forms scanning light beam.

Claims (1)

1. pair bias adjusts light path device, it is characterised in that:Including inner disk, outer disc, the outer disc is with diameter greater than inner circle Disk, bias is provided with outer disc eccentric through-hole in outer disc, and the inner disk is rotatably installed in outer disc eccentric orfice, constitutes double inclined Core structure, bias is installed with lens in being provided with inner disk eccentric through-hole, and inner disk eccentric through-hole in inner disk;It is described outer Disk eccentric through-hole diameter and inner disk diameter matches, inner disk eccentric through-hole diameter are matched with lens diameter;The outer disc Rotated around its center, while inner disk follows outer disc to revolve round the sun, can independently be rotated around its center.
CN201410545404.9A 2014-10-15 2014-10-15 Double eccentric adjustment light path devices Expired - Fee Related CN104317049B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201410545404.9A CN104317049B (en) 2014-10-15 2014-10-15 Double eccentric adjustment light path devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201410545404.9A CN104317049B (en) 2014-10-15 2014-10-15 Double eccentric adjustment light path devices

Publications (2)

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CN104317049A CN104317049A (en) 2015-01-28
CN104317049B true CN104317049B (en) 2017-07-04

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Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114233988A (en) * 2021-12-13 2022-03-25 北京微纳星空科技有限公司 Double-eccentric adjusting mechanism

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5173598A (en) * 1991-05-10 1992-12-22 U.S. Philips Corporation Optical scanning beam position control system which is free of modulation by tracking error
CN1099043C (en) * 1999-03-04 2003-01-15 中国科学院半导体研究所 Coupling method for coaxial semiconductor luminous device
DE102009040790B4 (en) * 2009-09-09 2012-10-25 Universität Stuttgart Method for optical compensation of the measuring track centering in rotary angle sensors
CN202308760U (en) * 2011-01-14 2012-07-04 西安欧益光电科技有限公司 Optical path adjusting bracket
CN103331616B (en) * 2013-06-20 2015-05-20 重庆大学 Double-eccentric type three-dimensional pose adjusting platform
CN204101812U (en) * 2014-10-15 2015-01-14 合肥工业大学 Two bias adjustment light path device

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