CN104316862B - The crosstalk evaluation method of 3 axis MEMS accelerometer signal process circuit - Google Patents
The crosstalk evaluation method of 3 axis MEMS accelerometer signal process circuit Download PDFInfo
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- CN104316862B CN104316862B CN201410554076.9A CN201410554076A CN104316862B CN 104316862 B CN104316862 B CN 104316862B CN 201410554076 A CN201410554076 A CN 201410554076A CN 104316862 B CN104316862 B CN 104316862B
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Abstract
The present invention relates to a kind of crosstalk evaluation method of 3 axis MEMS accelerometer signal process circuit, it is：（1）Internal adjustment：Adjust the parameter in signal processing circuit and change its working condition so that the operational data corresponding to each axle of 3 axis MEMS accelerometer is consistent；（2）Outside regulation：The respective input of three axles is adjusted, the output voltage of two of which axle is reached a stationary value；Adjusting the input of the 3rd axle again changes its output voltage, when the output voltage of the 3rd axle often changes identical graduation value, monitors the variable quantity of the output voltage of other two axle, the variable quantity is crosstalk；Repeat said process and evaluate each crosstalk of the axle to other two axles in three axles respectively.This method can be when testing three axis accelerometer signal processing circuit performance parameter, sample circuit degree of crosstalk, it is ensured that the validity of circuit test, and cost-effective, has great importance and can be widely popularized to the reliability for improving test.
Description
Technical field
The present invention relates to a kind of method that signal processing circuit to 3 axis MEMS accelerometer carries out crosstalk evaluation.
Background technology
Micro-machine acceleration transducer has small volume, lightweight, power consumption as a kind of important inertial sensor with it
Small, easy of integration the advantages of, it is widely deployed in the every field such as inertial navigation, consumer electronics, automotive electronics and geological prospecting
It is wherein most ripe with consumer electronics and vehicle electric field, this is also the staple market of commercial accelerometers.
Capacitance type micro mechanical acceleration transducer has the advantages that high resolution, dynamic range be big, good temp characteristic, so that
It is widely used.Capacitance type micro mechanical acceleration system is made up of acceleration sensor and signal processing circuit, because
The performance of this signal processing circuit directly affects the overall performance of capacitance type micro mechanical acceleration system, improve signal transacting electricity
The performance on road is the emphasis in capacitance type micro mechanical acceleration system design.
The operation principle of signal processing circuit is to be become front end by sensor senses external physical quantity by charge amplifier
The changing value of electric capacity is converted to voltage signal caused by changing, and the carrier signal that this voltage signal entered certain frequency is adjusted
System, then filters out carrier signal, finally according to certain multiplication factor by electricity by rectifier and low pass filter rectification demodulation
The magnitude of voltage amplification output of lotus amplifier output.
Circuit is main to be produced by memory and its control circuit, pierce circuit, reference voltage generating circuit, bias current
Circuit and three road single shaft open loop signal process circuits etc. are constituted.Wherein, oscillator, reference voltage generating circuit, biased electrical miscarriage
Raw circuit and memory and its control circuit for common sparing, three road single shaft open loop signal process circuits independently handle X-axis,
The sensitizing input signal of Y-axis, Z axis so that unavoidable between three axles to cause a certain degree of crosstalk.Input is to use
Differential type electric capacity is inputted, and adjustable condenser device on the market is without scale at present, it is impossible to the change of accurate quantification input capacitance
Amount, the country quantifies test for the degree of crosstalk of three axis accelerometer signal processing circuit and there is blank.All it is in practical application
Tested, tested by multi-angle rotation by band structure, checking repeatedly could tentatively judge cross talk conditions, can not reflect specific
Degree of crosstalk, there is limitation, and method of testing is complicated, takes time and effort.
The content of the invention
It is an object of the invention to provide one kind do not increase hardware configuration and can degree of crosstalk between the axle of effective evaluation three, from
And improve the crosstalk evaluation method of the 3 axis MEMS accelerometer signal process circuit of 3 axis MEMS accelerometer precision.
To reach above-mentioned purpose, the technical solution adopted by the present invention is：
A kind of crosstalk evaluation method of 3 axis MEMS accelerometer signal process circuit, be：（1）Internal adjustment：Adjustment letter
Parameter in number process circuit and change its working condition so that corresponding to the work number of each axle of 3 axis MEMS accelerometer
According to consistent；（2）Outside regulation：The input of three respective signal processing circuits of axle is adjusted, makes the signal transacting of two of which axle
The output voltage of circuit reaches a stationary value；Adjusting the input of the signal processing circuit of the 3rd axle again changes its output voltage,
When the output voltage of the signal processing circuit of the 3rd described axle often changes identical graduation value, the signal transacting of other two axle is monitored
The variable quantity of the output voltage of circuit, the variable quantity is crosstalk；Repeat said process and evaluate in three axles each axle respectively to it
The crosstalk of his two axles.
The operational data of described each axle includes detuning capacitor compensation, drive voltage amplitude, last gain multiplication factor.
The input of the signal processing circuit of each axle has two adjustable condensers；Pass through the adjustable condenser described in regulation
And adjust the differential-input capacitance of each axle.
Because above-mentioned technical proposal is used, the present invention has following advantages compared with prior art：This method can be in test
During three axis accelerometer signal processing circuit performance parameter, sample circuit degree of crosstalk, it is ensured that the validity of circuit test, and section
About cost, has great importance and can be widely popularized to the reliability for improving test.
Brief description of the drawings
Accompanying drawing 1 is the test philosophy figure of 3 axis MEMS accelerometer signal process circuit.
Embodiment
With reference to embodiment, the invention will be further described.
Embodiment one：The present invention proposes a kind of evaluation method of 3 axis MEMS accelerometer signal process circuit crosstalk, its
Do not increase the hardware configuration of signal processing circuit, and can between the axle of effective evaluation three crosstalk degree.Three axis accelerometer is believed
The crosstalk of number process circuit directly influences the precision of accelerometer, can be with the crosstalk journey of effective evaluation between centers using the method
Degree, greatly improves testing reliability.
This method is realized by internal adjustment and outside regulation two ways are combined.
（1）Internal adjustment：Internal adjustment refers to instruct by the EEPROM programmings of software for circuit, to change circuit work
State.Specifically, by adjusting the parameter in signal processing circuit（Including detuning capacitor compensation, drive voltage amplitude, finally increase
Beneficial multiplication factor etc.）And change the working condition of signal processing circuit so that corresponding to each axle of 3 axis MEMS accelerometer
Operational data it is consistent.
（2）Outside regulation：Outside regulation refer to differential-input capacitance is adjusted by adjusting adjustable condenser and
Change output.Specifically, as shown in Figure 1, adjusting at the input of three respective signal processing circuits of axle, the signal of each axle
Managing the input of circuit has two adjustable condensers CS1 and CS2, utilizes the adjustable of the respective input of signal processing circuit of three axles
Capacitor CS1 and CS2, carry out differential-input capacitance regulation, i.e., defeated by the difference for adjusting adjustable condenser and adjusting each axle
Enter electric capacity, the open loop output voltage of the signal processing circuit of two of which axle is reached a stationary value；The difference of the 3rd axle is adjusted again
Divide input capacitor input and change the output voltage of its signal processing circuit, the output electricity of the signal processing circuit of the 3rd axle
When pressure often changes identical graduation value, the variable quantity of the output voltage of the signal processing circuit of other two axle is monitored, the variable quantity is
Crosstalk for the 3rd axle to other two axle.Repeat said process and evaluate each crosstalk of the axle to other two axles in three axles respectively.
Performance of the reliability of accelerometer signal process circuit to accelerometer overall work efficiency plays most important
Effect, its reliability must be paid attention in the test process to signal processing circuit.This method accelerates in capacitance type micro mechanical
In the theoretical foundation for spending sensor construction, a kind of new test is proposed during test three axis accelerometer signal processing circuit
Method --- by fixing the output quantity of two axles, quantify the output of the 3rd axle of regulation to evaluate crosstalk journey of every axle to other two axles
Degree.By this method, can be when testing three axis accelerometer signal processing circuit performance parameter, sample circuit degree of crosstalk,
Ensure the validity of circuit test, have great importance to the reliability for improving test.
This method is directed to the crosstalk test case of current three axis accelerometer signal processing circuit, fundamentally solves string
The limitation of Tachistoscope is disturbed, while design is increased without hardware spending, it is cost-effective, it can be widely popularized.The invention enables three
The test of axis accelerometer signal processing circuit has striden forward a step in terms of high reliability, versatility.
The above embodiments merely illustrate the technical concept and features of the present invention, and its object is to allow person skilled in the art
Scholar can understand present disclosure and implement according to this, and it is not intended to limit the scope of the present invention.It is all according to the present invention
The equivalent change or modification that Spirit Essence is made, should all be included within the scope of the present invention.
Claims (2)
1. a kind of crosstalk evaluation method of 3 axis MEMS accelerometer signal process circuit, it is characterised in that：This method is：（1）
Internal adjustment：Adjust the parameter in signal processing circuit and change its working condition so that corresponding to 3 axis MEMS accelerometer
Each axle operational data it is consistent；（2）Outside regulation：Adjust the input of three respective signal processing circuits of axle, each axle
The input of signal processing circuit there are two adjustable condensers；Each axle is adjusted by the adjustable condenser described in regulation
Differential-input capacitance, makes the output voltage of the signal processing circuit of two of which axle reach a stationary value；The 3rd axle is adjusted again
The input of signal processing circuit changes its output voltage, and the output voltage of the signal processing circuit of described the 3rd axle often changes
During identical graduation value, the variable quantity of the output voltage of the signal processing circuit of other two axle is monitored, the variable quantity is crosstalk；Weight
Multiple said process evaluates each crosstalk of the axle to other two axles in three axles respectively.
2. the crosstalk evaluation method of 3 axis MEMS accelerometer signal process circuit according to claim 1, its feature exists
In：The operational data of described each axle includes detuning capacitor compensation, drive voltage amplitude, last gain multiplication factor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201410554076.9A CN104316862B (en) | 2014-10-17 | 2014-10-17 | The crosstalk evaluation method of 3 axis MEMS accelerometer signal process circuit |
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| CN201410554076.9A CN104316862B (en) | 2014-10-17 | 2014-10-17 | The crosstalk evaluation method of 3 axis MEMS accelerometer signal process circuit |
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| CN104316862A CN104316862A (en) | 2015-01-28 |
| CN104316862B true CN104316862B (en) | 2017-10-13 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP3805888B2 (en) * | 1998-03-20 | 2006-08-09 | 株式会社アドバンテスト | IC test equipment |
| CN101907693B (en) * | 2010-07-07 | 2013-01-09 | 中国科学院上海微系统与信息技术研究所 | Method for quantitatively calibrating and eliminating crosstalk of SQUID (Superconducting Quantum Interference Device) planar three-shaft magnetometer |
| KR101299729B1 (en) * | 2012-05-29 | 2013-08-22 | 삼성전기주식회사 | Sensor |
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Effective date of registration: 20180813 Address after: 233030 2016 Tang He road, Bengbu, Anhui Patentee after: Huadong Photoelectric Integrated Device Research Institute Address before: 215163 No. 89 Longshan Road, hi tech Zone, Suzhou, Jiangsu Patentee before: China North Industries Group Corporation No.214 Research Institute Suzhou R&D Center |
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