CN104308464A - Micro-nanometer machining integration process - Google Patents
Micro-nanometer machining integration process Download PDFInfo
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- CN104308464A CN104308464A CN201410431326.XA CN201410431326A CN104308464A CN 104308464 A CN104308464 A CN 104308464A CN 201410431326 A CN201410431326 A CN 201410431326A CN 104308464 A CN104308464 A CN 104308464A
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- sheet metal
- micro
- machining
- thin metal
- metal sheets
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
Abstract
The invention discloses a micro-nanometer machining integration process which is used for machining a precise instrument adopting thin metal sheets. The process comprises the following steps: firstly, selecting a plurality of thin metal sheets, and respectively amplifying, punching, shearing and bending the thin metal sheets to form the needed structures by adopting a cold die punching process; then, carrying out cold die punching machining for the thin metal sheets to form amplified convex structures on the thin metal sheets; finally, soldering and bonding the machined thin metal sheets into a product structure with micro chambers or micro fluid channels. The process is adopted for machining, mass machining can be realized, and the machining cost is relatively low. The machined product is strong in market competitiveness.
Description
Technical field
The present invention relates to micro-nano technology integrated technology field, in particular to one, cold punching and lamination welding are carried out to sheet metal, make it form the micro-nano technology integrated technique of the small die cavity of metal thin-wall.
Background technology
Since eighties of last century seventies, be that the means of the micro-nano technology technique of representative emerge in an endless stream with MEMS, current micro-nano technology technique, the processing technology mainly based on silica-based is integrated.
Silica-based processing technology of the prior art serves primarily in the hypomegetic sensor not too high to required precision, in application, silica-based equipment is due to its intrinsic fragility and processed complex degree, cause its processing cost very expensive, and, due to the plasticity of metal, workability, high-termal conductivity, high conductivity, be easy to the superior functions such as existing metal parts assembling, and silica-based equipment does not have the performance of this respect, therefore the equipment of complete alternative metals material is also difficult to, on some precision instruments, such as ultrathin gas-liquid two-phase separating dispenser, ultrathin fluid flow fields distributor, ultra-thin heat radiation device, ultrathin gas-liquid two-phase blender etc., silica-based equipment cannot be adopted to process, therefore how the emphasis remaining research is processed to metal material.
According to the Experiences given by silica-based processing technology, the techniques such as the micro etch occurring utilizing silica-based processing to derive, micro-electroforming, microplating are started in prior art, and expand and the techniques such as the bent throwing of next micro spark, micro-cutting, low-light from mechanical Precision Machining, although these technology can realize the processing to metal material, but its processing cost is very high, and large-scale mass manufacture cannot be realized.
Vigorous along with the market demand, the requirement for the processing of high efficiency mass low cost is also more and more higher, therefore, how to meet the need of market, and becomes the problem that the present invention needs to solve.
Summary of the invention
In order to solve the problems of the technologies described above, the invention provides a kind of micro-nano technology integrated technique, by the mode utilizing cold-punching mould processing technology to combine with welding procedure, the product that mass manufacture has the small die cavity of metal thin-wall can be realized.
Technical scheme of the present invention is as follows:
A kind of micro-nano technology integrated technique, according to the structure of product, choose the sheet metal that some thickness is 50-500 micron, according to product demand, adopt that cold-punching mould technique is extended to sheet metal partly or completely, punching, shearing and bending, cold punching progressive die can carry out the punch forming speed of 150-300 beat/min, makes it form the structure of needs; (2) the cold-punching mould technique in step (1), because the machining accuracy of cold-punching mould is higher, therefore extend bulge-structure or bending structure can be formed on described sheet metal, according to product needed, cold-punching mould processing can be carried out again, make to extend on bulge-structure and there is groove etc., meet the function of product; (3) sheet metal after processing to be welded by lamination or bonds, the such as solder technology such as ultrasonic bonding, Reflow Soldering, make it be formed to have micro chamber or the microfluidic channels structure of difference in functionality feature, thus form final product.
Beneficial effect: the present invention is by above technical scheme, solve the problem run in prior art, can not only increase work efficiency, make sheet metal carry out mass and be processed into possibility, meeting the need of market of high degree, and this technique can reduce the manufacturing cost of product greatly, produced product is made to have the stronger market competitiveness.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is the perspective view of the first sheet metal of the microfluidic fluid receptacles disclosed in the embodiment of the present invention 1;
Fig. 2 is the detonation configuration schematic diagram of the microfluidic fluid receptacles disclosed in the embodiment of the present invention 1;
Fig. 3 is the sectional structure schematic diagram of the microfluidic fluid receptacles disclosed in the embodiment of the present invention 1;
The perspective view of the 3rd sheet metal that Fig. 4 is the microfluidic channel disclosed in the embodiment of the present invention 2;
Fig. 5 is the detonation configuration schematic diagram of the microfluidic channel disclosed in the embodiment of the present invention 2;
The sheet metal B that Fig. 6 is the gas-liquid two-phase blender disclosed in the embodiment of the present invention 3 faces structural representation;
Fig. 7 is the detonation configuration schematic diagram of the gas-liquid two-phase blender disclosed in the embodiment of the present invention 3.
Numeral and the corresponding component title represented by letter in figure:
1, the first sheet metal; 2, to extend convex closure structure; 3, groove; 4, the second sheet metal; 5, the 3rd sheet metal; 6, drainage trough; 7, import; 8, export; 9, the 4th sheet metal; 10, sheet metal A; 11, through hole; 12, sheet metal B; 13, sheet metal C; 14, mixed plate array structure.
Detailed description of the invention
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
Embodiment 1
A kind of gas-liquid two-phase is separated the processing technology of microfluidic fluid receptacles, described microfluidic fluid receptacles includes the first sheet metal 1 and the second sheet metal 4, described first sheet metal 1 is by extend processing and the Bending Processing in cold-punching mould technique, convex closure structure of extending is formed on the surface of described first sheet metal 1, groove 3 is included at described top of extending convex closure structure 2, the bottom of described groove 3 is a little more than the bottom surface of described first sheet metal 1, by described first sheet metal 1 and the mode of described second sheet metal 4 by welding, such as ultrasonic bonding, diffusion welding (DW), soldering etc., make described first sheet metal 1 bonding with described second sheet metal 4, like this, the combination of described extend convex closure structure 2 and described groove 3, the cavity of microfluidic fluid receptacles is divided into the gas phase fluid channel with high height and the liquid phase fluid channel with lower height, when injecting liquids and gases between described first sheet metal 1 and described second sheet metal 4, because liquid and metal surface tension are much larger than gas and metal surface tension, therefore, gas and liquid can realize being separated in described microfluidic fluid receptacles.
Embodiment 2
A kind of processing technology with the microfluidic channel of drainage trough 6 structure, described microfluidic channel is made up of the 3rd sheet metal 5 and the 4th sheet metal 9, on described 3rd sheet metal 5, by utilizing the punching press in cold-punching mould technique, shear and bending technique, the surface of described 3rd sheet metal 5 is made to form convex closure structure 2 of extending, again through punching press and bending technique on described convex closure structure 2 of extending, form drainage trough 6, punching technology is passed through afterwards on described convex closure structure 2 of extending, offer import 7 and outlet 8, finally by lamination welding procedure, such as diffusion welding (DW), soldering etc., by bonding with described 4th sheet metal 9 for described 3rd sheet metal 5, thus formation microfluidic channel, during work, liquid is entered microfluidic channel inside from import 7, owing to being provided with drainage trough 6 in described convex closure structure 2 inside of extending, and drainage trough 6 can be dredged liquid, when liquid flows into certain speed, after striking drainage trough 6, liquid can fully exchange in microfluidic channel, liquid after exchange flows out from the outlet 8 of described microfluidic channel.
Embodiment 3
A kind of processing technology of gas-liquid two-phase blender, gas-liquid two-phase blender is by a sheet metal A10 with upper curved cavity, a sheet metal B12 with mixed plate array structure 14, and a sheet metal C13 with lower curved cavity forms, described upper curved cavity and described lower curved cavity are by extending and bending in cold-punching mould technique, then on described sheet metal A10 and sheet metal C13, through hole 11 is offered, the upper-lower position of described through hole 11 is corresponding, by described sheet metal B12 through extending and punching press, bending, make described sheet metal B12 forms mixed plate array structure 14, then by stacking welding or bonding, such as ultrasonic bonding, the technology such as Reflow Soldering, by described sheet metal A10, sheet metal B12 welds with sheet metal C13 phase or bonds, gas-liquid two-phase blender described in formation, during work, liquid air inlet and enter liquid from through hole 11, according to the impact of flow velocity, after the disturbance being subject to mixed plate array structure 14, gas and liquid can fully mix in passage, then flow out from other through holes, specific as follows: liquid enters from the through hole 11 sheet metal A10, gas enters from the sheet metal C13 bottom through-hole of its correspondence, be subject to Action of Gravity Field, liquid is fully mixed with gas by the perforate on mixed plate array mechanism 14, then the gas passage of sheet metal C13 is entered, gas enters the fluid passage of sheet metal A10, final liquid flows out from the through hole 11 of sheet metal C13 opposite side, gas is discharged from the through hole 11 of sheet metal A10 opposite side.
Above-described is only the preferred embodiment of the present invention, it should be pointed out that for the person of ordinary skill of the art, and without departing from the concept of the premise of the invention, can also make some distortion and improvement, these all belong to protection scope of the present invention.
Claims (1)
1. a micro-nano technology integrated technique, is characterized in that, comprises the following steps:
(1) choose some sheet metals, adopt that cold-punching mould technique carries out once or repeatedly extending to described sheet metal, punching, shearing and bending, make it form the structure of needs; (2) the cold-punching mould technique once or repeatedly in step (1), sheet metal wherein forms bulge-structure of extending; (3) sheet metal after processing welded by lamination or bond, making it form micro chamber or microfluidic channels structure, thus form the structure of product.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410431326.XA CN104308464A (en) | 2014-08-27 | 2014-08-27 | Micro-nanometer machining integration process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410431326.XA CN104308464A (en) | 2014-08-27 | 2014-08-27 | Micro-nanometer machining integration process |
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| Publication Number | Publication Date |
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| CN104308464A true CN104308464A (en) | 2015-01-28 |
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| CN201410431326.XA Pending CN104308464A (en) | 2014-08-27 | 2014-08-27 | Micro-nanometer machining integration process |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1431645A (en) * | 1974-08-08 | 1976-04-14 | Nissan Motor | Method of forming a vaned element for a hydraulic torque converter |
| CN2139673Y (en) * | 1992-08-08 | 1993-08-04 | 江水通 | Water tank for water heater |
| CN101114712A (en) * | 2006-07-28 | 2008-01-30 | 元智大学 | Combined dual-polar plate for fuel cell |
| CN101308135A (en) * | 2004-08-27 | 2008-11-19 | 中国科学院长春光学精密机械与物理研究所 | Convex concave mould for manufacturing chip microfluid dynamic mixer mixing pool |
| CN201554536U (en) * | 2009-12-04 | 2010-08-18 | 重庆长安汽车股份有限公司 | Exhaust manifold assembly |
| CN202470840U (en) * | 2012-01-19 | 2012-10-03 | 中山华帝燃具股份有限公司 | Plate-type condenser for gas water heater |
| CN203370940U (en) * | 2013-06-19 | 2014-01-01 | 广州大峰精密工业有限公司 | Heat protection shield molding die |
-
2014
- 2014-08-27 CN CN201410431326.XA patent/CN104308464A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1431645A (en) * | 1974-08-08 | 1976-04-14 | Nissan Motor | Method of forming a vaned element for a hydraulic torque converter |
| CN2139673Y (en) * | 1992-08-08 | 1993-08-04 | 江水通 | Water tank for water heater |
| CN101308135A (en) * | 2004-08-27 | 2008-11-19 | 中国科学院长春光学精密机械与物理研究所 | Convex concave mould for manufacturing chip microfluid dynamic mixer mixing pool |
| CN101114712A (en) * | 2006-07-28 | 2008-01-30 | 元智大学 | Combined dual-polar plate for fuel cell |
| CN201554536U (en) * | 2009-12-04 | 2010-08-18 | 重庆长安汽车股份有限公司 | Exhaust manifold assembly |
| CN202470840U (en) * | 2012-01-19 | 2012-10-03 | 中山华帝燃具股份有限公司 | Plate-type condenser for gas water heater |
| CN203370940U (en) * | 2013-06-19 | 2014-01-01 | 广州大峰精密工业有限公司 | Heat protection shield molding die |
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Application publication date: 20150128 |
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