CN104295497B - Dry pump safe stopping devices and using method thereof and dry pumping system - Google Patents
Dry pump safe stopping devices and using method thereof and dry pumping system Download PDFInfo
- Publication number
- CN104295497B CN104295497B CN201410542981.2A CN201410542981A CN104295497B CN 104295497 B CN104295497 B CN 104295497B CN 201410542981 A CN201410542981 A CN 201410542981A CN 104295497 B CN104295497 B CN 104295497B
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- China
- Prior art keywords
- dry pump
- motor
- stopping devices
- safe stopping
- clutch
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/02—Pumps characterised by combination with or adaptation to specific driving engines or motors
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/28—Safety arrangements; Monitoring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Control Of Positive-Displacement Pumps (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Abstract
The present invention discloses a kind of dry pump safe stopping devices and using method thereof and dry pumping system, and described dry pump safe stopping devices comprises: the coupling be connected with dry pump by hand interface; Be arranged at the motor on described coupling and clutch, described clutch is between described motor and hand interface; And the controller to be connected with described motor and clutch.Adopt dry pump safe stopping devices of the present invention, when described dry pump runs well, described controller controls described clutch and is in separated state, and controls described motor and do not operate; When described dry pump occurs abnormal, described controller controls described clutch and is in coupled condition, and controls described motor running, to drive dry pump to run well, thus avoids dry pump stuck owing to abending.
Description
Technical field
The present invention relates to IC manufacturing field, particularly one dry pump safe stopping devices and using method thereof and dry pumping system.
Background technique
In flat panel display (FPD) industry, dry pump is generally used in the manufacturing process such as chemical vapor deposition (CVD), dry etching (DryEtch), because manufacturing process bad environments such as has more dust, dry pump does not allow to abend, once dry pump abends, the pollutants such as dust can be attached on the rotor of dry pump, are easy to cause dry pump seizure abnormal.
At present, for solving the problem that dry pump abends, the common way of industry is after dry pump abends, use ups power to keep dry pump to run well or safety stop, but the operate power of dry pump own is comparatively large, and ups power is more expensive, and cost is higher.Another kind of way is that staff manually shakes dry pump, and to keep dry pump to run well, but dry pump quantity is more, if the dry pump of manual shake, often can not ensure that dry pump shakes in time and fully, still easily cause dry pump seizure abnormal.
Therefore, provide a kind of can realize dry pump automatically, the device of safety stop is very necessary.
Summary of the invention
The invention provides a kind of dry pump safe stopping devices, to solve the problem of dry pump seizure exception.
For solving the problems of the technologies described above, the invention provides a kind of dry pump safe stopping devices, described dry pump comprises a hand interface, and described dry pump safe stopping devices comprises:
By the coupling that described hand interface is connected with described dry pump;
Be arranged at the motor on described coupling and clutch, described clutch is between described motor and hand interface; And
The controller be connected with described motor and clutch;
Wherein, when described dry pump runs well, described controller controls described clutch and is in separated state, and controls described motor and do not operate; When described dry pump occurs abnormal, described controller controls described clutch and is in coupled condition, and controls described motor running, to drive described dry pump running.
Optionally, in described dry pump safe stopping devices, described dry pump safe stopping devices also comprises a speed reducer, and described speed reducer to be arranged on described coupling and to be connected with described motor.
Optionally, in described dry pump safe stopping devices, described dry pump safe stopping devices also comprises a support, and described support is in order to support described speed reducer.
Optionally, in described dry pump safe stopping devices, described motor is gear motor.
Optionally, in described dry pump safe stopping devices, described motor is d.c. motor.
Optionally, in described dry pump safe stopping devices, described dry pump safe stopping devices also comprises a battery, and described battery is used for powering for described motor and controller.
Optionally, in described dry pump safe stopping devices, described controller also connects the control cabinet of a main equipment, clutch and motor described in the SC sigmal control that described controller sends according to described control cabinet.
Optionally, in described dry pump safe stopping devices, described main equipment is chemical vapor depsotition equipment or dry etching equipment.
The present invention also provides a kind of dry pumping system, comprises a dry pump, also comprises dry pump safe stopping devices as above.
The present invention provides again a kind of using method of dry pump safe stopping devices, comprising:
When described dry pump runs well, described controller controls described clutch and is in separated state, and controls described motor and do not operate; And
When described dry pump occurs abnormal, described controller controls described clutch and is in coupled condition, and controls described motor running, to drive described dry pump running.
Adopt dry pump safe stopping devices of the present invention, when described dry pump runs well, described controller controls described clutch and is in separated state, and controls described motor and do not operate; When described dry pump occurs abnormal, described controller controls described clutch and is in coupled condition, and controls described motor running, to drive described dry pump running, thus avoids dry pump stuck owing to abending.
Accompanying drawing explanation
Fig. 1 is the structural representation of the dry pumping system of the present invention.
Embodiment
Below in conjunction with schematic diagram, the present invention is described in more detail, which show the preferred embodiments of the present invention, should be appreciated that those skilled in the art can revise the present invention described here, and still realize advantageous effects of the present invention.Therefore, following description is appreciated that extensively knowing for those skilled in the art, and not as limitation of the present invention.
In order to clear, whole features of practical embodiments are not described.They in the following description, are not described in detail known function and structure, because can make the present invention chaotic due to unnecessary details.Will be understood that in the exploitation of any practical embodiments, a large amount of implementation detail must be made to realize the specific objective of developer, such as, according to regarding system or the restriction about business, change into another embodiment by an embodiment.In addition, will be understood that this development may be complicated and time-consuming, but be only routine work to those skilled in the art.
In the following passage, more specifically the present invention is described by way of example with reference to accompanying drawing.According to the following describes and claims, advantages and features of the invention will be clearer.It should be noted that, accompanying drawing all adopts the form that simplifies very much and all uses non-ratio accurately, only in order to object that is convenient, the aid illustration embodiment of the present invention lucidly.
As shown in Figure 1, the invention provides a kind of dry pump safe stopping devices, described dry pump 10 comprises a hand interface 11, and described dry pump 10 safe stopping devices comprises: the coupling 21 be connected with described dry pump 10 by described hand interface 11; Be arranged at the motor 22 on described coupling 21 and clutch 23, described clutch 23 is between described motor 22 and hand interface 11; And the controller 24 to be connected with described motor 22 and clutch 23; Wherein, when described dry pump 10 runs well, described controller 24 controls described clutch 23 and is in separated state, and controls described motor 22 and do not operate; When described dry pump 10 occurs abnormal, described controller 24 controls described clutch 23 and is in coupled condition, and controls described motor 22 and operate, and to drive dry pump 10 to run well, thus avoids dry pump 10 stuck owing to abending.
In preferred embodiment, described dry pump 10 safe stopping devices also comprises a speed reducer 25, described speed reducer 25 to be arranged on described coupling 21 and to be connected with described motor 22, utilize the principle of the slow-speed of revolution height moment of torsion of speed reducer 25, even if adopt low power motor, also can realize by speed reducer 25 object that small-power drives dry pump 10 low speed rotation.Such as, the rotating speed of described motor 22 be several thousand turns (as), described speed reducer 25 can be decelerated to tens turns, drives dry pump 10 low-speed running one predetermined amount of time, realize the safety stop of dry pump 10 with this.Described dry pump 10 safe stopping devices also can comprise a support 27, and described speed reducer 25 is arranged on described support 24, supports described speed reducer 25 by described support 27.Certainly, the present invention is not limited to such scheme, also directly can select gear motor, so then need not install speed reducer, can realize the object driving the safe low-speed running of dry pump equally.
Continue with reference to figure 1, described dry pump 10 safe stopping devices also comprises a battery 26, described battery 26 is for powering for described motor 22 and controller 24, so, even if there is powering-off state, when dry pump 10 abends, described motor 22, controller 24 still can rely on battery 26 normally to run, to drive dry pump 10 low speed rotation a period of time, realize dry pump 10 safety stop.Described motor 22 is such as the d.c. motor 22 of 24V or 48V, the battery of corresponding employing 24V or 48V, described controller 24 can also connect an ac power supply, described ac power supply can be charged for described battery 26 on the one hand, if be not cause dry pump abnormal under powering-off state on the other hand, so ac power supply also can be powered for controller 24 simultaneously.
Wherein, described clutch 23 is magnetic clutch, can be powered by described battery 26 for described magnetic clutch.Certainly, the present invention is not limited to magnetic clutch, also can adopt the clutch of other types, as long as realize the object of joint or the effect of dialysis transmission of power.
In the present embodiment, described dry pump 10 is for a main equipment, described controller 24 is connected to the control cabinet 30 of described main equipment, under normal circumstances, the normal signal that the control cabinet 30 that controller 24 receives main equipment sends, magnetic clutch 23 is in separated state, and when dry pump 10 runs well, safe stopping devices does not operate.When dry pump 10 abends, the abnormal signal that the control cabinet 30 that controller 24 receives main equipment sends, controller 24 solenoidoperated cluthes 23 are closed (usual afterwards for some seconds, can not stop immediately after dry pump abends, some seconds can be run) under the effect of inertia, motor 22 operates simultaneously, and at this moment safety starting device drives dry pump 10 to run well, and stops after a period of time.
Wherein, described dry pump 10 can be dry screw vacuum pump, without oily reciprocating pump, claw vacuum pump or oil-free scroll vacuum pump.Described main equipment can be chemical vapor deposition (CVD) equipment, dry etching (DryEtch) equipment that flat panel display (FPD) industry or semiconductor technology use, also can be other equipment that other industry uses, need when safety stop, to be all applicable to dry pump safe stopping devices of the present invention as long as relate to dry pump.
The structure of dry pump safe stopping devices of the present invention is simple, cheap motor 22, speed reducer, magnetic clutch and controller 24 can be selected to realize the safety stop of dry pump 10, once occur that abnormal conditions are as the power-off suddenly of dry pump 10, be that motor 22, magnetic clutch and controller 24 is powered by the battery of dry pump safe stopping devices, thus drive dry pump 10 low speed rotation one predetermined amount of time, and then stop, so can avoid causing dry pump seizure phenomenon to occur owing to suddenly abending.That is, the automatic safe only needing lower cost just can realize dry pump stops.In addition, the dry pump caused for other situations is abnormal, and the automatic safe that dry pump safe stopping devices of the present invention can be adopted equally to realize dry pump stops.
According to another side of the present invention, also provide a kind of dry pumping system, comprise at least one dry pump 10 and at least one dry pump safe stopping devices as above.Wherein, all corresponding dry pump safe stopping devices as above of each dry pump 10, also only can install dry pump safe stopping devices by the dry pump of part 10.
Accordingly, the present invention also provides a kind of using method of dry pump safe stopping devices, and described dry pump 10 is for a main equipment, and described dry pump safe stopping devices using method comprises:
When described dry pump 10 runs well, described controller 24 controls described clutch 23 and is in separated state, and controls described motor 22 and do not operate; And
When described dry pump 10 occurs abnormal, described controller 24 controls described clutch 23 and is in coupled condition, and controls described motor 22 and operate, and runs well to drive described dry pump 10.
Wherein, described main equipment comprises a control cabinet 30, and under normal circumstances, the normal signal that the control cabinet 30 that controller 24 receives main equipment sends, magnetic clutch 23 is in separated state, and when dry pump runs well, safe stopping devices does not operate.When dry pump abends, the abnormal signal that the control cabinet 30 that controller 24 receives main equipment sends, controller 24 solenoidoperated cluthes 23 are closed (usual afterwards for some seconds, can not stop immediately after dry pump abends, some seconds can be run) under the effect of inertia, motor 22 operates simultaneously, and at this moment safety starting device drives dry pump to run well, and stops after a period of time.Or, when dry pump abends, also can be that dry pump itself sends abnormal signal to controller, namely, can be that main equipment sends abnormal signal after dry pump abends, also can be that dry pump itself sends abnormal signal, and controller 24 controls described clutch 23 according to the abnormal signal that the control cabinet 30 of dry pump or main equipment sends and is in coupled condition, and control described motor 22 and operate, run well to drive described dry pump 10.So, automatic, the safety stop of dry pump can be realized.
It should be noted that, in this specification, each embodiment adopts the mode of going forward one by one to describe, and what each embodiment stressed is the difference with other embodiments, between each embodiment identical similar portion mutually see.For method disclosed in embodiment, due to corresponding with device disclosed in embodiment, so description is fairly simple, relevant part illustrates see device section.
Obviously, those skilled in the art can carry out various change and modification to invention and not depart from the spirit and scope of the present invention.Like this, if these amendments of the present invention and modification belong within the scope of the claims in the present invention and equivalent technologies thereof, then the present invention is also intended to comprise these change and modification.
Claims (10)
1. a dry pump safe stopping devices, described dry pump comprises a hand interface, it is characterized in that, described dry pump safe stopping devices comprises:
By the coupling that described hand interface is connected with described dry pump;
Be arranged at the motor on described coupling and clutch, described clutch is between described motor and hand interface; And
The controller be connected with described motor and clutch;
Wherein, when described dry pump runs well, described controller controls described clutch and is in separated state, and controls described motor and do not operate; When described dry pump occurs abnormal, described controller controls described clutch and is in coupled condition, and controls described motor running, to drive described dry pump running.
2. dry pump safe stopping devices as claimed in claim 1, it is characterized in that, described dry pump safe stopping devices also comprises a speed reducer and a support, and described speed reducer to be arranged on described coupling and to be connected with described motor, and described support is in order to support described speed reducer.
3. dry pump safe stopping devices as claimed in claim 1, it is characterized in that, described motor is gear motor.
4. dry pump safe stopping devices as claimed in claim 1, it is characterized in that, described motor is d.c. motor.
5. dry pump safe stopping devices as claimed in claim 1, is characterized in that, described dry pump safe stopping devices also comprises a battery, and described battery is used for powering for described motor and controller.
6. the dry pump safe stopping devices according to any one of claim 1 to 5, it is characterized in that, described controller also connects the control cabinet of a main equipment, clutch and motor described in the SC sigmal control that described controller sends according to described control cabinet.
7. the dry pump safe stopping devices according to any one of claim 1 to 5, is characterized in that, described controller also connects described dry pump, and described controller is clutch and motor according to the SC sigmal control of described dry pump transmission.
8. dry pump safe stopping devices as claimed in claim 6, is characterized in that, described main equipment is chemical vapor depsotition equipment or dry etching equipment.
9. a dry pumping system, comprises at least one dry pump, it is characterized in that, also comprises at least one dry pump safe stopping devices according to any one of claim 1 to 8.
10. a using method for dry pump safe stopping devices as claimed in claim 1, is characterized in that, comprising:
When described dry pump runs well, described controller controls described clutch and is in separated state, and controls described motor and do not operate; And
When described dry pump occurs abnormal, described controller controls described clutch and is in coupled condition, and controls described motor running, to drive described dry pump running.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410542981.2A CN104295497B (en) | 2014-10-14 | 2014-10-14 | Dry pump safe stopping devices and using method thereof and dry pumping system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410542981.2A CN104295497B (en) | 2014-10-14 | 2014-10-14 | Dry pump safe stopping devices and using method thereof and dry pumping system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104295497A CN104295497A (en) | 2015-01-21 |
| CN104295497B true CN104295497B (en) | 2016-04-20 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410542981.2A Expired - Fee Related CN104295497B (en) | 2014-10-14 | 2014-10-14 | Dry pump safe stopping devices and using method thereof and dry pumping system |
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| Country | Link |
|---|---|
| CN (1) | CN104295497B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3226846A1 (en) * | 1981-10-15 | 1983-05-11 | Veb Kombinat Pumpen Und Verdichter, Ddr 4020 Halle | Hydromechanical protection device for pumps |
| CN2554398Y (en) * | 2001-12-24 | 2003-06-04 | 姚平 | Water pump clutch with uniformly acceleration starting up and uniformly acceleration off function |
| DE102007028060A1 (en) * | 2007-06-19 | 2008-12-24 | Webasto Ag | Vehicle e.g. car, air conditioning system, has compressor driven by motor e.g. direct current motor, where compressor and motor stay in connection with each other by centrifugal clutch, and motor shaft connected with drive shaft |
| CN201292945Y (en) * | 2008-03-17 | 2009-08-19 | 蔡德源 | Start-up protective system for spiral slice type oil-sealed vacuum pump |
| CN201865873U (en) * | 2010-11-17 | 2011-06-15 | 湖北业浩动力科技有限公司 | Dual-powered pump unit |
| CN103047145A (en) * | 2012-12-29 | 2013-04-17 | 中国科学院沈阳科学仪器股份有限公司 | Vacuum pump transmission structure |
| CN103104493A (en) * | 2011-11-11 | 2013-05-15 | 中国科学院沈阳科学仪器研制中心有限公司 | Oil-free dry vacuum pump double-driving main shaft control system |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004278316A (en) * | 2003-03-12 | 2004-10-07 | Toyota Industries Corp | Control device of hybrid compressor |
-
2014
- 2014-10-14 CN CN201410542981.2A patent/CN104295497B/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3226846A1 (en) * | 1981-10-15 | 1983-05-11 | Veb Kombinat Pumpen Und Verdichter, Ddr 4020 Halle | Hydromechanical protection device for pumps |
| CN2554398Y (en) * | 2001-12-24 | 2003-06-04 | 姚平 | Water pump clutch with uniformly acceleration starting up and uniformly acceleration off function |
| DE102007028060A1 (en) * | 2007-06-19 | 2008-12-24 | Webasto Ag | Vehicle e.g. car, air conditioning system, has compressor driven by motor e.g. direct current motor, where compressor and motor stay in connection with each other by centrifugal clutch, and motor shaft connected with drive shaft |
| CN201292945Y (en) * | 2008-03-17 | 2009-08-19 | 蔡德源 | Start-up protective system for spiral slice type oil-sealed vacuum pump |
| CN201865873U (en) * | 2010-11-17 | 2011-06-15 | 湖北业浩动力科技有限公司 | Dual-powered pump unit |
| CN103104493A (en) * | 2011-11-11 | 2013-05-15 | 中国科学院沈阳科学仪器研制中心有限公司 | Oil-free dry vacuum pump double-driving main shaft control system |
| CN103047145A (en) * | 2012-12-29 | 2013-04-17 | 中国科学院沈阳科学仪器股份有限公司 | Vacuum pump transmission structure |
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| Publication number | Publication date |
|---|---|
| CN104295497A (en) | 2015-01-21 |
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