CN104280111B - A kind of vibration sensor - Google Patents
A kind of vibration sensor Download PDFInfo
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- CN104280111B CN104280111B CN201310291119.4A CN201310291119A CN104280111B CN 104280111 B CN104280111 B CN 104280111B CN 201310291119 A CN201310291119 A CN 201310291119A CN 104280111 B CN104280111 B CN 104280111B
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- light beam
- light
- mirror
- vibrating diaphragm
- vibration sensor
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Abstract
The present invention is applied to ray machine electro-technical field, there is provided a kind of vibration sensor and electronic equipment, the vibration sensor includes light source, the light that sends the light source and is divided into the spectroscope of two beams, the vibrating diaphragm to receive wherein light beam and vibration signal, makes light combination mirror that light beam of another light beam with being reflected through the vibrating diaphragm interferes and to obtain the interference pattern produced and the image processor handled.The light that light source is sent first is divided into two beams by the present invention, then wherein light beam and vibration signal are received by vibrating diaphragm, and light of the another light beam with being reflected through the vibrating diaphragm is interfered, then to the image procossing that interference is produced, so as to know the feature for the vibration signal for acting on vibrating diaphragm.Because the interference of light is extremely sensitive to disturbance, therefore this vibration sensor can improve measuring accuracy, and structure is extremely simple.The microphone that thus this vibration sensor can be used in seismic survey, geological prospecting, audio equipment, underwater acoustic transducer in sonar etc..
Description
Technical field
The invention belongs to ray machine electro-technical field, more particularly to a kind of vibration sensor.
Background technology
In the modern industry of high development, modern test technology develops into necessarily sending out to digitlization, information-based direction
Exhibition trend, and test system is sensor foremost, it is the soul of whole test system, and sophisticated skill is classified as by countries in the world
Art, particularly IC technologies and computer technology fast-developing in recent years, for sensor development provide well with reliably
Scientific and technical basis, makes the development day crescent benefit of sensor, and digitlization, it is multi-functional with it is intelligent be modern sensor development
Key character.But precision is relatively low and complicated during existing vibration sensor test.
The content of the invention
The purpose of the embodiment of the present invention is to provide a kind of vibration sensor, it is intended to solves existing vibration sensor and surveys
Try the problem of precision is low.
The embodiment of the present invention is achieved in that a kind of vibration sensor, including light source, the light that sends the light source
Be divided into the spectroscope of two beams, the vibrating diaphragm to receive wherein light beam and vibration signal, make another light beam with it is anti-through the vibrating diaphragm
Light combination mirror that light beam penetrated is interfered and to obtain at the interference pattern produced and the image handled
Manage device.
The another object of the embodiment of the present invention is offer a kind of electronic equipment, and the electronic equipment is passed using above-mentioned vibration
Induction device.
The light that light source is sent first is divided into two beams by the embodiment of the present invention, then receives wherein light beam by vibrating diaphragm and vibration is believed
Number, and light of the another light beam with being reflected through the vibrating diaphragm is interfered, then to the image procossing that interference is produced, so as to know effect
In the feature of the vibration signal of vibrating diaphragm.Because the interference of light is extremely sensitive to disturbance, therefore this vibration sensor can improve test
Precision, and structure is extremely simple.Thus this vibration sensor can be used in seismic survey, geological prospecting, audio equipment
The field such as microphone, underwater acoustic transducer in sonar.
Brief description of the drawings
Fig. 1 is the structural representation for the vibration sensor that the embodiment of the present invention one is provided；
Fig. 2 is the structural representation for the vibration sensor that the embodiment of the present invention two is provided.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, it is right below in conjunction with drawings and Examples
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
The light that light source is sent first is divided into two beams by the embodiment of the present invention, then receives wherein light beam by vibrating diaphragm and vibration is believed
Number, and light of the another light beam with being reflected through the vibrating diaphragm is interfered, then to the image procossing that interference is produced, so as to know effect
In the feature of the vibration signal of vibrating diaphragm.Because the interference of light is extremely sensitive to disturbance, therefore this vibration sensor can improve test
Precision, and structure is extremely simple.
Realization of some embodiments to the present invention is set forth below to be described in detail.
Embodiment one
As shown in figure 1, the light that vibration sensor provided in an embodiment of the present invention includes light source 1, sends the light source 1
It is divided into the spectroscope 2 of two beams, the vibrating diaphragm 3 to receive wherein light beam and vibration signal, makes another light beam and through the vibrating diaphragm 3
The light combination mirror 4 that light beam of reflection is interfered and the image to obtain the pattern of the interference generation and be handled
Processor 5.The light for herein first sending light source 1 is divided into two beams, then receives wherein light beam and vibration signal by vibrating diaphragm 3, and
Light of the another light beam with being reflected through the vibrating diaphragm 3 is interfered, then to the image procossing that interference is produced, is shaken so as to know and act on
The feature of the vibration signal of film 3.Because the interference of light is extremely sensitive to disturbance, therefore this vibration sensor can improve test essence
Degree, and structure is extremely simple.
Wherein, the spectroscope 2 and light combination mirror 4 are respectively the first half-reflecting half mirror and the second half-reflecting half mirror.Specifically,
The wherein light beam is that the light beam of vibrating diaphragm 3 is reflexed to through the first half-reflecting half mirror, and the another light beam is through the first half anti-half
Lens are transmitted through the light beam of the second half-reflecting half mirror；The reflected mirror 6 of light beam reflected through the vibrating diaphragm 3 again after secondary reflection with through institute
The beam combination of the second half-reflecting half mirror transmission is stated, occurs the interference.So described vibrating diaphragm 3 is in the lower generation of vibration signal effect
Vibration, can be modulated to the light path of the wherein light beam, and the change in optical path length of the wherein light beam can be produced to interference
Raw pattern (i.e. interference pattern) is modulated, then is obtained interference pattern in real time by described image processor 5 and changed feelings to it
Condition is analyzed and processed, and obtains acting on the feature of the vibration signal of the vibrating diaphragm 3, such as amplitude, frequency, phase.
Generally, described image processor 5 is analyzed and processed using following algorithm to the situation of change of interference pattern.
1.1 noise reduction
1.1.1 first time noise reduction
Because the picture collected contains a small amount of background noise, to reduce influence of the noise to recovering signal, therefore to image
Noise reduction process is done, the algorithm of noise reduction is used：Accelerate convergence (Lucy-Richardson) algorithm.Here with Poisson's equation, to making an uproar
Sound carry out statistics extraction standard, pushed away according still further to this standard combination PSF is counter, for picture noise information it is unknown when, Ke Yiyong
Different PSF values are attempted, and obtain optimal effect.It is sharp because it is not immediately clear that CCD camera lenses produce the mechanism of noise
The effect for carrying out noise reduction with acceleration convergence algorithm is best.
1.1.2 signal is strengthened
Signal is once strengthened after noise reduction first, takes and first strengthens contrast, then switchs to bianry image, reconvert figure
Sheet data type is the means of integer.The image after noise reduction may cause the signal de-emphasis of original image or even lose first, use
Such a algorithm is strengthened after contrast and switchs to binary map being provided to enhanced signal.
1.1.3 noise reduction again
Tried again Wei Na noise reductions for strengthened image.After previous action, image, which is also remained, much " to be dissipated
Point " noise, and these noises are clear and definite, and Wei Na algorithms carry out noise reduction aiming at clear and definite noise.
1.1.4 strengthen again
Using opening and closing operation repeatedly, the blob in image is obtained, and abandons small object, small object is often possible to be to make an uproar
Sound or the signal admixed together with noise, can not also analyze after multiple noise reduction, abandon for the time being, have herein enough
Blob analyzed, this influences very little on the result finally obtained (small object proportion is no more than 5%).
1.2 expansion
For the image obtained now, because abandoning small object, there is phenomenon of rupture, so carrying out expansive working, make
Breaking portion reconnects, and the operation of expansion is all based on what clear and definite pixel was carried out, and the coefficient of expansion can
Constraint, so error is controllable with distortion.
1.3 Nogatas are equalized
The enhancing of image is the autotelic some features for emphasizing image, and enhanced image can be tended to significantly
Strengthen the recognition capability of specific information, in machine recognition, enhancing and the processing of image often directly influence machine perception and
Understandability, and the efficiency recognized.Herein use histogram equalization operation, make clearly feature retained, to inadequate
Clearly feature is strengthened, and finally makes identification feature enough fully, completely.
1.4 refinement
After expansion connection, acquisition original signal main body is removed in the distortion that expansion is brought, so using Refinement operation,
Wide signal is taken into intermediate compression, while ensureing the continuity at edge, until approaching the original signal center without expansion.
1.5 find out characteristic point
Several lines are drawn from reference axis, are intersected with signal in image, the coordinate value of intersection point is extracted, algebraically meter is carried out
Calculate reduction.
1.6 algebraic manipulation reduces original vibration signal
Find out after features described above point, calculated by the reduction formula derived, draw the corresponding of original vibration signal
Feature.
The metal reflective film or hard that the preferably ruffle of vibrating diaphragm 3 described in the embodiment of the present invention hangs on framework are reflective thin
Film, to improve vibration measuring precision.If the hard light reflecting membrane is glass reflector, the fixed screw pine in the framework is made herein
After de-, vibration signal is received by the glass reflector, such vibration sensor is remained to meet and required, and cost is relatively low.
It regard the glass reflector as the receiving plane for receiving vibration signal towards the surface of vibration source 7 herein.In addition, this vibrating sensing
It is that relative type motor machinery receives structure or inertia-type machinery receives structure that device for mechanical, which receives structure,.
Said light source 1 is preferably the shorter laser of wavelength, beneficial to the generation interference.Sequentially set along laser propagation direction
Small filter 8 and beam-expanding collimation mirror 9 are put, so that veiling glare be filtered out and obtain being projected to the standard of first half-reflecting half mirror
Collimated optical beam, the final interference fringe for producing better quality.Thus this vibration sensor is widely used in seismic survey, and geology is surveyed
Visit, the microphone in audio equipment, the field such as underwater acoustic transducer in sonar.
Embodiment two
From unlike embodiment one, wherein light beam is reflexes to instead through the first half-reflecting half mirror 2 described in the present embodiment
The light beam of mirror 6 is penetrated, the another light beam is the light beam that the second half-reflecting half mirror 4 is transmitted through through the first half-reflecting half mirror 2；Through described
Speculum 6 reflect light beam after vibrating diaphragm 3 again secondary reflection with beam combination transmit through second half-reflecting half mirror 4, generation
The interference, as shown in Figure 2.Remainder is identical with embodiment one, repeats no more.
Embodiment three
From unlike embodiment one, described in the present embodiment wherein light beam be through the first half-reflecting half mirror transmit after project
To the light beam of vibrating diaphragm, the another light beam is the light beam that the second half-reflecting half mirror is projected to after being reflected through the first half-reflecting half mirror；
The reflected mirror of light beam reflected through the vibrating diaphragm again after secondary reflection with beam combination transmit through the second half-reflecting half mirror, generation institute
State interference.Remainder is identical with embodiment one, repeats no more.
Example IV
From unlike embodiment one, described in the present embodiment wherein light beam be through the first half-reflecting half mirror transmit after project
To the light beam of speculum, the another light beam is the light that the second half-reflecting half mirror is projected to after being reflected through the first half-reflecting half mirror
Beam；Through the speculum reflect light beam after vibrating diaphragm again secondary reflection with beam combination transmit through the second half-reflecting half mirror, send out
The raw interference.Remainder is identical with embodiment one, repeats no more.From the foregoing, it will be observed that this vibration sensor flexible design, real
It is strong with property.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all essences in the present invention
Any modifications, equivalent substitutions and improvements made within refreshing and principle etc., should be included in the scope of the protection.
Claims (9)
1. a kind of vibration sensor, it is characterised in that the light sent including light source, by the light source is divided into the light splitting of two beams
Mirror, the vibrating diaphragm to receive wherein light beam and vibration signal, make another light beam with through the vibrating diaphragm reflect that light beam send out
The light combination mirror of raw interference and the image processor to obtain the pattern of the interference generation and be handled, the spectroscope
On the output light path of the light source, the vibrating diaphragm is located on spectroscopical reflected light path, and the light combination mirror is located at institute
State on spectroscopical transmitted light path, described image processor is located on the output light path of the light combination mirror.
2. vibration sensor as claimed in claim 1, it is characterised in that the spectroscope and light combination mirror are respectively the first half
Anti- pellicle mirror and the second half-reflecting half mirror.
3. vibration sensor as claimed in claim 2, it is characterised in that the wherein light beam is through the first half-reflection and half-transmission
Mirror reflexes to the light beam of vibrating diaphragm, and the another light beam is the light beam that the second half-reflecting half mirror is transmitted through through the first half-reflecting half mirror；
The reflected mirror of light beam reflected through the vibrating diaphragm again after secondary reflection with beam combination transmit through second half-reflecting half mirror, send out
The raw interference.
4. vibration sensor as claimed in claim 2, it is characterised in that the wherein light beam is through the first half-reflection and half-transmission
Mirror reflexes to the light beam of speculum, and the another light beam is the light that the second half-reflecting half mirror is transmitted through through the first half-reflecting half mirror
Beam；The light beam reflected through the speculum is folded with the light beam that transmit through second half-reflecting half mirror after vibrating diaphragm again secondary reflection
Plus, occur the interference.
5. vibration sensor as claimed in claim 2, it is characterised in that the wherein light beam is through the first half-reflection and half-transmission
It is projected to the light beam of vibrating diaphragm after mirror transmission, the another light beam is that the second half anti-half are projected to after being reflected through the first half-reflecting half mirror
The light beam of lens；The light beam of the reflected mirror of light beam reflected through the vibrating diaphragm again after secondary reflection with being transmitted through the second half-reflecting half mirror
Superposition, occurs the interference.
6. vibration sensor as claimed in claim 2, it is characterised in that the wherein light beam is through the first half-reflection and half-transmission
It is projected to the light beam of speculum after mirror transmission, the another light beam is that the second half are projected to after being reflected through the first half-reflecting half mirror is anti-
The light beam of pellicle mirror；Light of the light beam reflected through the speculum after vibrating diaphragm again secondary reflection with being transmitted through the second half-reflecting half mirror
Beam is superimposed, and occurs the interference.
7. such as vibration sensor according to any one of claims 1 to 6, it is characterised in that the vibrating diaphragm hangs for ruffle
In the metal reflective film or hard light reflecting membrane of framework.
8. vibration sensor as claimed in claim 7, it is characterised in that the hard light reflecting membrane is glass reflector,
Make after the fixed screw in the framework releases, vibration signal is received by the glass reflector.
9. vibration sensor as claimed in claim 8, it is characterised in that the glass reflector is towards the surface of vibration source
For the receiving plane to receive vibration signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310291119.4A CN104280111B (en) | 2013-07-11 | 2013-07-11 | A kind of vibration sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310291119.4A CN104280111B (en) | 2013-07-11 | 2013-07-11 | A kind of vibration sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104280111A CN104280111A (en) | 2015-01-14 |
| CN104280111B true CN104280111B (en) | 2017-09-26 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310291119.4A Expired - Fee Related CN104280111B (en) | 2013-07-11 | 2013-07-11 | A kind of vibration sensor |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU911168A1 (en) * | 1980-08-29 | 1982-03-07 | Предприятие П/Я В-2504 | Optical vibrometer |
| GB2215055A (en) * | 1988-02-20 | 1989-09-13 | Stc Plc | Vibratory optical fibre sensor |
| CN101750533A (en) * | 2008-12-10 | 2010-06-23 | 徐启峰 | Membrane-vibration type high-voltage sensor |
| CN203432675U (en) * | 2013-07-11 | 2014-02-12 | 张驰 | Vibration sensing device and electronic equipment |
-
2013
- 2013-07-11 CN CN201310291119.4A patent/CN104280111B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU911168A1 (en) * | 1980-08-29 | 1982-03-07 | Предприятие П/Я В-2504 | Optical vibrometer |
| GB2215055A (en) * | 1988-02-20 | 1989-09-13 | Stc Plc | Vibratory optical fibre sensor |
| CN101750533A (en) * | 2008-12-10 | 2010-06-23 | 徐启峰 | Membrane-vibration type high-voltage sensor |
| CN203432675U (en) * | 2013-07-11 | 2014-02-12 | 张驰 | Vibration sensing device and electronic equipment |
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| Publication number | Publication date |
|---|---|
| CN104280111A (en) | 2015-01-14 |
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