CN104267582A - Circuit board system for DMD (Digital Micro-mirror Device) control - Google Patents
Circuit board system for DMD (Digital Micro-mirror Device) control Download PDFInfo
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- CN104267582A CN104267582A CN201410513825.3A CN201410513825A CN104267582A CN 104267582 A CN104267582 A CN 104267582A CN 201410513825 A CN201410513825 A CN 201410513825A CN 104267582 A CN104267582 A CN 104267582A
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- circuit board
- dmd
- master control
- control board
- systems controlled
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Abstract
The invention discloses a circuit board system for DMD (Digital Micro-mirror Device) control, which is applied to a direct-writing type photoetching system. The circuit board system comprises a DMD lens and a main control board, wherein the main control board is connected with the DMD lens by virtue of a flexible printed circuit board. According to the circuit board system, a connecting structure of the flexible printed circuit board is used between the DMD lens and the main control board, thus the demands that the installation requirement for a DMD in optical debugging is high and the DMD is required to have relatively strong adjustability are met, and the convenience is brought for industrialized popularization and application.
Description
Technical field
The present invention relates to semicon industry and printed circuit board industry technical field of lithography, particularly relate to a kind of circuit board systems controlled for DMD (Digital Micro-mirror Device, digital micro-mirror).
Background technology
DMD is made up of many small eyeglasses of aluminizing, and can rotate around yoke, the anglec of rotation is ± 12 °, utilizes eyeglass, in the different anglecs of rotation, the light injected is reflexed to different places.Directly writing exposure system adopts collimation laser to be injected on DMD, DMD rotates to diverse location respectively according to view data, by in the laser reflection objective lens injected, by on the plane of exposure projected to after object lens zoomed image on mobile platform, thus realize the object of the litho machine write-through exposure of a new generation.Little eyeglass on DMD is ranks format permutation.
Along with the development of photoetching technique, in industry, new demand is proposed to write-through exposure technique.Given this, the invention provides the circuit board systems controlled for DMD that a kind of controllability is strong.
Summary of the invention
The object of this invention is to provide the circuit board systems controlled for DMD that a kind of controllability is strong, to meet the new demand in industry.
For realizing object of the present invention, the invention provides a kind of circuit board systems controlled for DMD, be applied in write-through etching system, described circuit board systems comprises: DMD camera lens and master control board, and described master control board is connected by soft circuit board with described DMD camera lens.
Further, described soft circuit board is two pieces or three pieces or four pieces, and described in each block, soft circuit board is made up of multilayer circuit board, and each layer circuit board comprises multiple stratum and signals layer.
Further, described in each block, soft circuit board comprises the multilayer circuit board be superimposed.
Further, the interface connector of described soft circuit board and master control board and DMD camera lens is SEAM/F_30_8.
Further, described master control board is provided with multiple data transmission interface, described data transmission interface is for receiving the data of host computer, and described data transmission interface comprises a USB3.0 interface, one or two gigabit network interface, 10,000,000,000 network interfaces and/or a PCIE interface.
Further, described master control board comprises graph processing chips, and described graph processing chips is the fpga chip of Virtex-6 or the Virtex-7 series of Xilinx.
Further, described master control board comprises the control chip of DMD, and the control chip of described DMD is DDC4100 chipset.
Further, described master control board comprises the data-carrier store for graphics process, and described data-carrier store is DDR3, and model is the KVR1333D3S8S9/2G of 8 particles.
Further, described master control borad is connected with the input of 12V power supply.
Further, described circuit board systems also comprises master control board radiator structure, and described radiator structure comprises fan and heat radiator.
The present invention, compared with prior art, between DMD camera lens and master control board, use the syndeton of soft circuit board, meet in optics debugging high to the installation requirement of DMD, require that DMD has the demand of stronger controllability, be convenient to industrially promotion and application.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Fig. 2 is the structural representation of master control board provided by the invention;
Fig. 3 is the structural representation of soft circuit board provided by the invention;
In figure, 1-data input, 2-location triggered signaling interface, 3-soft circuit board, 31-ground floor circuit board, 32-second layer circuit board, 33-third layer circuit board, 4-interface connector.
Embodiment
In order to make object of the present invention, technical scheme and beneficial effect clearly understand, below in conjunction with embodiment, the present invention is further elaborated.Should be understood to specific embodiment described herein only in order to explain the present invention, be not limited to protection scope of the present invention.
As shown in Figure 1, the invention provides a kind of circuit board systems controlled for DMD, be applied in write-through etching system, described circuit board systems comprises: DMD camera lens and master control board, and described master control board is connected by soft circuit board with described DMD camera lens.
Due to high to the installation requirement of DMD in optics debugging, so, require that DMD has certain controllability.In order to meet this requirement, technical solution of the present invention have employed DMD camera lens and carries out with using soft circuit board between control panel the structure be connected.
Described soft circuit board is two pieces or three pieces or four pieces, and described in each block, soft circuit board is made up of multilayer circuit board, and each layer circuit board comprises multiple stratum and signals layer.As shown in Figure 3, each block soft circuit board comprises ground floor circuit board, second layer circuit board and third layer circuit board and is superimposed.
The interface connector of described soft circuit board and master control board and DMD camera lens is SEAM/F_30_8.
As shown in Figure 2, the present invention is according to the new demand in industry, DMD being used for write-through exposure, require that the data volume of transmission figure that is large and DMD refreshes fast, devise multiple high speed data transmission interface, comprise the interfaces such as USB3.0, kilomega network, 10,000,000,000 nets and PCIE, meet user demand under various circumstances, the data of reception are used the FPGA process of xilinx, data after process are stored among DDR3, are presented on DMD by the data reading in DDR3 when exposure.
Described master control board is provided with multiple data transmission interface, for the data of the communications reception host computer with computing machine, the data that host computer receives are processed, be presented on DMD camera lens by the graph data after process, described data transmission interface comprises a USB3.0 interface, one or two gigabit network interface, 10,000,000,000 network interfaces and/or PCIE interface.
Described master control board comprises graph processing chips, and described graph processing chips is the fpga chip of Virtex-6 or the Virtex-7 series of Xilinx.
Described master control board comprises the control chip of DMD, and the control chip of described DMD is DDC4100 chipset.
Described master control board comprises the data-carrier store for graphics process, and described data-carrier store is DDR3, and model is the KVR1333D3S8S9/2G of 8 particles.
As shown in Figure 3, described master control borad is connected with the input of 12V power supply.
In order to improve the heat dispersion of master control board further, described circuit board systems also comprises master control board radiator structure, and described radiator structure comprises fan and heat radiator two kinds of radiator structures combine.
When in use, view data is transferred to the fpga chip of xilinx by host computer by high speed interface kilomega network or USB3.0 or 10,000,000,000 nets or PCIE in the present invention; FPGA, by after the Data Analysis process of reception, exists among DDR3; When there being location triggered signal to input, FPGA reads data from DDR3, and sends to DDC4100; DDC4100 sends the data to DMD by soft circuit board, and the refresh operation of control DMD.
The present invention have one-piece construction simple, support high speed data transfer, support large data processing and storage, DMD installs the features such as simple and easy.
The above is only the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, under the premise without departing from the principles of the invention; can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (10)
1., for the circuit board systems that DMD controls, be applied in write-through etching system, it is characterized in that, described circuit board systems comprises: DMD camera lens and master control board, and described master control board is connected by soft circuit board with described DMD camera lens.
2. the circuit board systems controlled for DMD according to claim 1, it is characterized in that, described soft circuit board is two pieces or three pieces or four pieces, and described in each block, soft circuit board is made up of multilayer circuit board, and each layer circuit board comprises multiple stratum and signals layer.
3. the circuit board systems controlled for DMD according to claim 2, it is characterized in that, described in each block, soft circuit board comprises the multilayer circuit board be superimposed.
4. the circuit board systems controlled for DMD according to claim 3, it is characterized in that, the interface connector of described soft circuit board and master control board and DMD camera lens is SEAM/F_30_8.
5. the circuit board systems controlled for DMD according to any one of claim 1-4, it is characterized in that, described master control board is provided with multiple data transmission interface, described data transmission interface is for receiving the data of host computer, and described data transmission interface comprises a USB3.0 interface, one or two gigabit network interface, 10,000,000,000 network interfaces and/or a PCIE interface.
6. the circuit board systems controlled for DMD according to any one of claim 1-4, it is characterized in that, described master control board comprises graph processing chips, and described graph processing chips is the fpga chip of Virtex-6 or the Virtex-7 series of Xilinx.
7. the circuit board systems controlled for DMD according to any one of claim 1-4, it is characterized in that, described master control board comprises the control chip of DMD, and the control chip of described DMD is DDC4100 chipset.
8. the circuit board systems controlled for DMD according to any one of claim 1-4, it is characterized in that, described master control board comprises the data-carrier store for graphics process, and described data-carrier store is DDR3, and model is the KVR1333D3S8S9/2G of 8 particles.
9. the circuit board systems controlled for DMD according to any one of claim 1-4, is characterized in that, described master control borad is connected with the input of 12V power supply.
10. the circuit board systems controlled for DMD according to any one of claim 1-4, it is characterized in that, described circuit board systems also comprises master control board radiator structure, and described radiator structure comprises fan and heat radiator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410513825.3A CN104267582A (en) | 2014-09-29 | 2014-09-29 | Circuit board system for DMD (Digital Micro-mirror Device) control |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410513825.3A CN104267582A (en) | 2014-09-29 | 2014-09-29 | Circuit board system for DMD (Digital Micro-mirror Device) control |
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| CN104267582A true CN104267582A (en) | 2015-01-07 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201410513825.3A Pending CN104267582A (en) | 2014-09-29 | 2014-09-29 | Circuit board system for DMD (Digital Micro-mirror Device) control |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107065442A (en) * | 2016-12-31 | 2017-08-18 | 江苏九迪激光装备科技有限公司 | The data processing method and system of a kind of laser direct-writing |
| CN107065441A (en) * | 2016-12-31 | 2017-08-18 | 江苏九迪激光装备科技有限公司 | A kind of laser direct-writing data handling system and processing method |
| CN108107686A (en) * | 2018-01-22 | 2018-06-01 | 合肥芯碁微电子装备有限公司 | A kind of real-time observation device and observation procedure for direct-write photoetching equipment figure |
| WO2022025879A1 (en) * | 2020-07-29 | 2022-02-03 | Applied Materials, Inc. | Process, system, and software for maskless lithography systems |
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| CN101516160A (en) * | 2008-01-25 | 2009-08-26 | 株式会社东芝 | Flexible printed wiring board and electronic apparatus |
| CN101723304A (en) * | 2008-10-16 | 2010-06-09 | 周正三 | Microstructure with flexible circuit board and manufacturing method thereof |
| CN202956536U (en) * | 2012-12-06 | 2013-05-29 | 无锡微奥科技有限公司 | Micro-electromechanical system (MEMS) scan probe |
| CN203643683U (en) * | 2014-01-02 | 2014-06-11 | 桂林市光隆光电科技有限公司 | MEMS micro-mirror chip capable of double-axial rotation |
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2014
- 2014-09-29 CN CN201410513825.3A patent/CN104267582A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101516160A (en) * | 2008-01-25 | 2009-08-26 | 株式会社东芝 | Flexible printed wiring board and electronic apparatus |
| CN101723304A (en) * | 2008-10-16 | 2010-06-09 | 周正三 | Microstructure with flexible circuit board and manufacturing method thereof |
| CN202956536U (en) * | 2012-12-06 | 2013-05-29 | 无锡微奥科技有限公司 | Micro-electromechanical system (MEMS) scan probe |
| CN203643683U (en) * | 2014-01-02 | 2014-06-11 | 桂林市光隆光电科技有限公司 | MEMS micro-mirror chip capable of double-axial rotation |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107065442A (en) * | 2016-12-31 | 2017-08-18 | 江苏九迪激光装备科技有限公司 | The data processing method and system of a kind of laser direct-writing |
| CN107065441A (en) * | 2016-12-31 | 2017-08-18 | 江苏九迪激光装备科技有限公司 | A kind of laser direct-writing data handling system and processing method |
| CN108107686A (en) * | 2018-01-22 | 2018-06-01 | 合肥芯碁微电子装备有限公司 | A kind of real-time observation device and observation procedure for direct-write photoetching equipment figure |
| WO2022025879A1 (en) * | 2020-07-29 | 2022-02-03 | Applied Materials, Inc. | Process, system, and software for maskless lithography systems |
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Application publication date: 20150107 |