CN104264230A - Cooling pull rod for high temperature furnace for crystal growth and manufacturing method of cooling pull rod - Google Patents

Cooling pull rod for high temperature furnace for crystal growth and manufacturing method of cooling pull rod Download PDF

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Publication number
CN104264230A
CN104264230A CN201410526637.4A CN201410526637A CN104264230A CN 104264230 A CN104264230 A CN 104264230A CN 201410526637 A CN201410526637 A CN 201410526637A CN 104264230 A CN104264230 A CN 104264230A
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CN
China
Prior art keywords
beam barrel
high temperature
threaded
pull bar
pull rod
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Pending
Application number
CN201410526637.4A
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Chinese (zh)
Inventor
刘东成
张晋
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SHENZHEN SHENGSHI INTELLIGENT EQUIPMENT Co Ltd
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SHENZHEN SHENGSHI INTELLIGENT EQUIPMENT Co Ltd
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Priority to CN201410526637.4A priority Critical patent/CN104264230A/en
Publication of CN104264230A publication Critical patent/CN104264230A/en
Pending legal-status Critical Current

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Abstract

The invention discloses a cooling pull rod for a high temperature furnace for crystal growth and a manufacturing method of the cooling pull rod. The pull rod is used for solving the problem that the existing pull rod has the possibility of unsoldering, and can improve the usage safety of the pull rod. The pull rod disclosed by the invention comprises a flow distributing shaft, an outer shaft cylinder and a pull head which are sequentially connected together, wherein the flow distributing shaft and one end of the outer shaft cylinder are in threaded connection and are welded together at the threaded connecting position; the other end of the outer shaft cylinder and the pull head are in threaded connection and are welded together at the threaded connecting position. The improvement mode of the pull rod can be completely realized through simple processing on the existing product, the universality is good, and the pull rod is not needed to be subjected to fundamental structural change, so that the pull rod can be suitable for the existing high temperature furnace and can be matched with a cooling water system. Under the conditions of generating the greatest safety benefit and avoiding the greatest safety risk, the pull rod disclosed by the invention is completely fitted with other existing devices, so that the safety upgrading cost of the high temperature furnace is quite low.

Description

The high temperature furnace used cooling pull bar of crystal growth and manufacture method thereof
Technical field
The present invention relates to a kind of pull bar, particularly relate to a kind of high temperature furnace used cooling pull bar.
Background technology
Existing crystal growth High Temperature Furnaces Heating Apparatus needs to use cooling pull bar.As described in Figure 1, it comprises shunt shaft 1, outer beam barrel 3 and pull head 4 to Tiebar structure, and they weld together successively, and such as shunt shaft 1 and outer beam barrel 3 weld at weld seam 2 place.Beam barrel 3 is provided with water coolant prosopyle 6 outside, and shunt shaft 1 is provided with water coolant posticum 5.Water coolant is entered by prosopyle 6, is flowed out by posticum 5.Beam barrel is also provided with interior beam barrel outside.Wherein general shunt shaft, outer beam barrel and interior beam barrel are steel, and pull head is copper.The connection of the shunt shaft of said structure, outer beam barrel and pull head is tangent plane welding.In crystal high-temperature stove, furnace temperature is very high, generally has more than 1,000 degree, even has 2,000 degree, and pull bar is placed in High Temperature Furnaces Heating Apparatus, and the thermal conductivity of pull head requires very high, and current pull head can select copper material.But the fusing point of copper is lower, therefore pull head needs to keep continuing cooling.Existing pull bar adopts three sections of welded constructions, because High Temperature Furnaces Heating Apparatus furnace temperature is very high, and the commissure thermal resistance very high (there is oxidative phenomena during welding, cause its thermal resistance to raise) of welding, its easy accumulated heat, causes commissure localized hyperthermia.After frequent use pull bar, the situation of weld seam sealing-off can be there is.If during sealing-off, pull bar is in High Temperature Furnaces Heating Apparatus, then the water coolant in pull bar can spray in High Temperature Furnaces Heating Apparatus, and water coolant is vaporized, and then sets off an explosion.There is potential safety hazard in existing Tiebar structure.
Summary of the invention
First technical problem to be solved by this invention is to provide the high temperature furnace used cooling pull bar of a kind of crystal growth, there is the problem of the possibility of sealing-off for solving existing pull bar, improves the security that pull bar uses.
Second technical problem to be solved by this invention is to provide the manufacture method of the high temperature furnace used cooling pull bar of a kind of crystal growth, there is the problem of the possibility of sealing-off for solving existing pull bar, improves the security that pull bar uses.
3rd technical problem to be solved by this invention is to provide the manufacture method of the high temperature furnace used cooling pull bar of a kind of crystal growth, there is the problem of the possibility of sealing-off for solving existing pull bar, improves the security that pull bar uses.
For solving above-mentioned first technical problem, the technical solution adopted in the present invention is as follows:
The high temperature furnace used cooling pull bar of a kind of crystal growth, comprise shunt shaft, outer beam barrel and pull head, they are connected in turn, and described shunt shaft is connected with the threaded one end of outer beam barrel, and threaded connection place welds together; The other end of described outer beam barrel is threaded with described pull head, and threaded connection place welds together.
Preferably: described pull bar comprises interior beam barrel, interior beam barrel is placed in described outer beam barrel, and one end is connected with the end thread of described shunt shaft, and threaded connection place welds together.In some optional techniques, interior beam barrel can be welded on shunt shaft inside, and the process that is not threaded.
Preferably: described pull bar comprises interior beam barrel, interior beam barrel is placed in described outer beam barrel, and one end is connected with the end thread of described shunt shaft, and both radial end faces at screw thread position weld together, and deposits solder layer after brazing between two relative end faces.
Preferably: described shunt shaft is threaded with outer beam barrel, and both radial end faces at screw thread position weld together, between two relative end faces, there is solder layer; Or outer beam barrel is threaded with described pull head, and both radial end faces at screw thread position weld together, and deposit solder layer after brazing between two relative end faces.
Preferably: described shunt shaft and outer beam barrel threaded connection place, or outer beam barrel and described pull head threaded connection place, i.e., there is metal solder layer in thread surface, metal solder layer will need two positions of welding to weld together after magnetic discharge welding.
Preferably: described pull head is oxygen free copper or copper alloy material.
Preferably: described welding material is tin, zinc, aluminium, gold or plumbous material.
Preferably: the threaded connection place on pull bar, at the radial abutment place of two parts be threaded, the solder layer after soldering is had.
For solving above-mentioned second technical problem, the technical solution adopted in the present invention is as follows:
Manufacture a method for the high temperature furnace used cooling pull bar of crystal growth, it comprises:
On shunt shaft, outer beam barrel, interior beam barrel and pull head, car goes out screw thread respectively;
Screwed shunt shaft and screwed interior beam barrel are threaded togather, then soldering is carried out in double thread junction;
Be threaded togather with pull head and shunt shaft respectively by all screwed for two ends outer beam barrel, then soldering is carried out in double thread junction.
For solving above-mentioned 3rd technical problem, the technical solution adopted in the present invention is as follows:
Manufacture a method for the high temperature furnace used cooling pull bar of crystal growth, it comprises:
On shunt shaft, outer beam barrel, interior beam barrel and pull head, car goes out screw thread respectively;
Layer of metal solder is made in thread surface;
Screwed shunt shaft and screwed interior beam barrel are threaded togather, then electromagnetism welding is carried out in double thread junction, and brazing metal makes two of weld workpiece weld together;
Be threaded togather with pull head and shunt shaft respectively by all screwed for two ends outer beam barrel, then electromagnetism welding is carried out in double thread junction, and brazing metal makes two of weld workpiece weld together.
Preferably: after carrying out described electromagnetism welding, at the radial abutment place of two parts be threaded, then soldering is carried out.
Compared to existing technology, the present invention has abandoned simple gap welded construction, and the technology of the present invention adopts at shunt shaft, between outer beam barrel and pull head, car goes out screw thread, is first threaded between them, then by the mode of soldering or magnetic discharge welding, the junction of two web members is closely linked.This pull bar processing mode can avoid the situation of prior art weld seam sealing-off to occur, and then greatly improves the security of pull bar, completely avoid the possibility that water coolant enters High Temperature Furnaces Heating Apparatus.Improved procedure of the present invention can carry out simple processing completely and can realize on existing product, highly versatile, and without the need to carrying out essence structural modification to pull bar, therefore, it can be suitable for existing High Temperature Furnaces Heating Apparatus and coordinate cooling water system.The present invention is when producing huge safety benefit, evading huge security risk, and equip adaptation with existing other completely, therefore the safety upgrade cost of High Temperature Furnaces Heating Apparatus is very low.The furnace temperature of the High Temperature Furnaces Heating Apparatus of crystal production reaches several thousand degrees celsius, once blast can to cause very large property damage, even personal injury, therefore, this equipment must meet the standard of zero tolerance at its each sport technique segment as far as possible, technology of the present invention solves the potential safety hazard of existing Tiebar structure, as long as cooling water recirculation system does not go wrong, pull bar of the present invention would not explosion caused situation.
Accompanying drawing explanation
Fig. 1 is the structural representation of prior art.
Fig. 2 is structural representation of the present invention.
Identifier declaration in figure: 1, shunt shaft; 2, weld seam; 3, outer beam barrel; 4, pull head; 5, posticum; 6, prosopyle; 7, shunt shaft; 8, outer beam barrel; 9, pull head; 10, interior beam barrel; 11, prosopyle; 12, cooling fluid exterior passage way; 13, posticum; 14, first be threaded; 15, second be threaded; 16, the 3rd be threaded; 17, cooling fluid interior passageway; 18, radial end face.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is described in further detail.Should be appreciated that specific embodiment described herein only for explaining the present invention, but do not limit the present invention.
See the example structure of Fig. 2, the high temperature furnace used cooling pull bar of this crystal growth, is formed by connecting primarily of several component combinations such as shunt shaft 7, outer beam barrel 8, pull head 9 and interior beam barrels 10.Shunt shaft 7, outer beam barrel 8, pull head 9 are connected in turn.
Shunt shaft 7 is connected with the threaded one end of outer beam barrel 8, and threaded connection place welds together, and forms first in Fig. 2 and is threaded 14.The other end of outer beam barrel 8 is threaded with pull head 9, and threaded connection place welds together, and forms second and is threaded 15.
Pull bar comprises interior beam barrel 10, and interior beam barrel 10 is placed in outer beam barrel 8, and one end is connected with the end thread of shunt shaft, and threaded connection place welds together, and forms the 3rd and is threaded 16.
Shunt shaft 7 and outer beam barrel 8 threaded connection place, and outer beam barrel 8 and pull head 9 threaded connection place, deposit braze metal layer after brazing.
In a preferred embodiment, there is metal solder layer in shunt shaft and outer beam barrel threaded connection place, and outer beam barrel and pull head threaded connection place, and metal solder layer will need two positions of welding to weld together after magnetic discharge welding.Welding material is tin, zinc, aluminium, gold or plumbous material.
In one embodiment, pull head 9 is oxygen free copper, and oxygen free copper has high thermal conductivity, is desirable pull head material.Shunt shaft, outer beam barrel and interior beam barrel all can adopt steel.
Pull bar three-dimensional structure diagram of the present invention can reference drawing 1, and in shape, the pull bar of pull bar of the present invention and prior art can be same or similar.
In order to manufacture pull bar of the present invention, technique of the present invention is as follows:
On shunt shaft, outer beam barrel, interior beam barrel and pull head, car goes out screw thread respectively; Screwed shunt shaft and screwed interior beam barrel are threaded togather, then soldering is carried out in double thread junction; Be threaded togather with pull head and shunt shaft respectively by all screwed for two ends outer beam barrel, then soldering is carried out in double thread junction.
This method employs soldering tech, and its shunt shaft, outer beam barrel are relative with the complete processing of interior beam barrel simple.The weld seam of soldering is positioned at the end of screwed part, and the radial end face 18 see Fig. 2 is positioned at the position diametrically of two screw connection points.Soldering, except playing ligation, also plays sealing function.
This manufacture technics pull bar out, see Fig. 2, in the junction of shunt shaft 8 with pull head 9, there is brazing solder layer in radial end face 18 place at screw thread position; The junction of beam barrel 8 and shunt shaft 7 outside, also there is brazing solder layer in the radial end face place at screw thread position; And in the junction of interior beam barrel and shunt shaft, also there is brazing solder layer in the radial end face place at screw thread position.
The present invention also proposes the manufacturing process of the second pull bar, and the technical scheme adopted is as follows:
On shunt shaft, outer beam barrel, interior beam barrel and pull head, car goes out screw thread respectively; Layer of metal solder is covered in thread surface; Screwed shunt shaft and screwed interior beam barrel are threaded togather, then electromagnetism welding is carried out in double thread junction, and brazing metal makes two of weld workpiece weld together; Be threaded togather with pull head and shunt shaft respectively by all screwed for two ends outer beam barrel, then electromagnetism welding is carried out in double thread junction, and brazing metal makes two of weld workpiece weld together.
This manufacture technics pull bar out, thread surface everywhere has layer of metal layer, or the layer of metal layer that two metal layers fusion is formed.
After carrying out described electromagnetism welding, at the radial abutment place of two parts be threaded, then carry out soldering.This structure is then in the junction of shunt shaft and pull head, and the radial end face place at screw thread position exists brazing solder layer; The junction of beam barrel and shunt shaft outside, also there is brazing solder layer in the radial end face place at screw thread position; And in the junction of interior beam barrel and shunt shaft, also there is brazing solder layer in the radial end face place at screw thread position.
This processing requirement carries out solder-coated to the screw thread place on shunt shaft, outer beam barrel, interior beam barrel and pull head, and coating can be the various coating for metal surfaces technology such as plating, spraying plating, deposition.Solder coat must be metal, and the fusing point of solder is under the fusing point of the metallic substance such as shunt shaft, outer beam barrel, interior beam barrel and pull head, only in this way, when Electromagnetic Heating, just can guarantee that solder first melts, and not injure all parts of pull bar.The mode of this welding and the difference of the soldering of first embodiment are above: this routine solder is in thread surface, it can realize screw thread welding, and screw thread has sealing function, and the soldering of above-mentioned first embodiment, then screw thread place is locked effect, and its stopping property does not do requirement.The improvement project of this example: this example is carried out beyond magnetic discharge welding at screw thread place, soldering can also be carried out to the threaded connection place at each position, established technology increases the soldering processes of above-described embodiment one, make the radial end face position of two screw connection points, the weld seam of soldering is positioned at the end of screwed part.
The use of pull bar of the present invention, see Fig. 2, prosopyle 11 is connected with extraneous cooling system with posticum 13.Cold water enters in cooling fluid exterior passage way 12 by prosopyle 11, enters in cooling fluid interior passageway 17 in the bottom of pull head, then is flowed out by posticum 13, completes the cooling to pull head 9.Temperature within this cooling structure can make pull head keep 100 degree.
Above-mentioned embodiment is only the preferred embodiment of the present invention; can not limit the scope of protection of the invention with this, change and the replacement of any unsubstantiality that those skilled in the art does on basis of the present invention all belong to the present invention's scope required for protection.

Claims (10)

1. the high temperature furnace used cooling pull bar of crystal growth, comprise shunt shaft, outer beam barrel and pull head, they are connected in turn, and it is characterized in that: described shunt shaft is connected with the threaded one end of outer beam barrel, and threaded connection place welds together; The other end of described outer beam barrel is threaded with described pull head, and threaded connection place welds together.
2. the high temperature furnace used cooling pull bar of crystal growth according to claim 1, it is characterized in that: described pull bar comprises interior beam barrel, interior beam barrel is placed in described outer beam barrel, one end is connected with the end thread of described shunt shaft, and both radial end faces at screw thread position weld together, between two relative end faces, deposit solder layer after brazing.
3. the high temperature furnace used cooling pull bar of crystal growth according to claim 1, is characterized in that: described shunt shaft is threaded with outer beam barrel, and both radial end faces at screw thread position weld together, between two relative end faces, there is solder layer; Or outer beam barrel is threaded with described pull head, and both radial end faces at screw thread position weld together, and deposit solder layer after brazing between two relative end faces.
4. the high temperature furnace used cooling pull bar of crystal growth according to claim 1, it is characterized in that: described shunt shaft and outer beam barrel threaded connection place, or outer beam barrel and described pull head threaded connection place, there is metal solder layer, metal solder layer will need two positions of welding to weld together after magnetic discharge welding.
5. the high temperature furnace used cooling pull bar of crystal growth according to claim 4, is characterized in that: described pull head is oxygen free copper or copper alloy material.
6. the high temperature furnace used cooling pull bar of the crystal growth according to claim 3 or 4, is characterized in that: described welding material is tin, zinc, aluminium, gold or plumbous material.
7. the high temperature furnace used cooling pull bar of crystal growth according to claim 4, is characterized in that: the threaded connection place on pull bar, at the radial abutment place of two parts be threaded, has the solder layer after soldering.
8. manufacture a method for the high temperature furnace used cooling pull bar of crystal growth, it comprises:
On shunt shaft, outer beam barrel, interior beam barrel and pull head, car goes out screw thread respectively;
Screwed shunt shaft and screwed interior beam barrel are threaded togather, then soldering is carried out in double thread junction;
Be threaded togather with pull head and shunt shaft respectively by all screwed for two ends outer beam barrel, then soldering is carried out in double thread junction.
9. manufacture a method for the high temperature furnace used cooling pull bar of crystal growth, it comprises:
On shunt shaft, outer beam barrel, interior beam barrel and pull head, car goes out screw thread respectively;
Layer of metal solder is covered in thread surface;
Screwed shunt shaft and screwed interior beam barrel are threaded togather, then electromagnetism welding is carried out in double thread junction, and brazing metal makes two of weld workpiece weld together;
Be threaded togather with pull head and shunt shaft respectively by all screwed for two ends outer beam barrel, then electromagnetism welding is carried out in double thread junction, and brazing metal makes two of weld workpiece weld together.
10. method according to claim 9, is characterized in that: after carrying out described electromagnetism welding, at the radial abutment place of two parts be threaded, then carries out soldering.
CN201410526637.4A 2014-09-30 2014-09-30 Cooling pull rod for high temperature furnace for crystal growth and manufacturing method of cooling pull rod Pending CN104264230A (en)

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Application Number Priority Date Filing Date Title
CN201410526637.4A CN104264230A (en) 2014-09-30 2014-09-30 Cooling pull rod for high temperature furnace for crystal growth and manufacturing method of cooling pull rod

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CN104264230A true CN104264230A (en) 2015-01-07

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104862776A (en) * 2015-05-22 2015-08-26 内蒙古晶环电子材料有限公司 Novel upper shaft cooling rod for sapphires

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JPH09194292A (en) * 1996-01-17 1997-07-29 Sumitomo Sitix Corp Holding jig for seed crystal for growing single crystal
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CN102517627A (en) * 2011-12-20 2012-06-27 北京京仪世纪电子股份有限公司 Water-cooled shaft structure
CN202297870U (en) * 2011-09-29 2012-07-04 深圳大学 Ultrapure germanium single crystal furnace drawing device
CN202530196U (en) * 2012-01-21 2012-11-14 徐州协鑫光电科技有限公司 Seed rod for growing single crystal and single crystal growing equipment comprising seed rod
CN203546200U (en) * 2013-11-11 2014-04-16 英利能源(中国)有限公司 Connecting device for producing silicon single crystal rod by using czochralski method and equipment for producing silicon single crystal rod
CN204138822U (en) * 2014-09-30 2015-02-04 深圳市盛世智能装备有限公司 The high temperature furnace used cooling pull bar of crystal growth

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0710687A (en) * 1993-06-18 1995-01-13 Komatsu Electron Metals Co Ltd Seed chuck of device for drawing semiconductor single crystal
JPH09194292A (en) * 1996-01-17 1997-07-29 Sumitomo Sitix Corp Holding jig for seed crystal for growing single crystal
CN101724892A (en) * 2008-10-22 2010-06-09 Omt集团有限公司 Seed crystal clamping device
CN201942789U (en) * 2011-01-19 2011-08-24 江西神硅科技有限公司 Seed crystal holding device used for producing solar-grade silicon single crystal
CN202297870U (en) * 2011-09-29 2012-07-04 深圳大学 Ultrapure germanium single crystal furnace drawing device
CN102517627A (en) * 2011-12-20 2012-06-27 北京京仪世纪电子股份有限公司 Water-cooled shaft structure
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CN203546200U (en) * 2013-11-11 2014-04-16 英利能源(中国)有限公司 Connecting device for producing silicon single crystal rod by using czochralski method and equipment for producing silicon single crystal rod
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104862776A (en) * 2015-05-22 2015-08-26 内蒙古晶环电子材料有限公司 Novel upper shaft cooling rod for sapphires
CN104862776B (en) * 2015-05-22 2017-12-29 内蒙古晶环电子材料有限公司 Axle cooling rod on a kind of new sapphire

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Application publication date: 20150107