CN104259080B - System and method based on artificial cycle structured filter ultrasound wave - Google Patents

System and method based on artificial cycle structured filter ultrasound wave Download PDF

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Publication number
CN104259080B
CN104259080B CN201410539417.5A CN201410539417A CN104259080B CN 104259080 B CN104259080 B CN 104259080B CN 201410539417 A CN201410539417 A CN 201410539417A CN 104259080 B CN104259080 B CN 104259080B
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ultrasound wave
artificial cycle
cycle structure
artificial
wave
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CN104259080A (en
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蔡飞燕
徐超伟
李飞
李永川
郑海荣
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Shenzhen Institute of Advanced Technology of CAS
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Shenzhen Institute of Advanced Technology of CAS
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Abstract

A kind of system based on artificial cycle structured filter ultrasound wave, described system includes: ultrasonic transmission device, artificial cycle structure and temperature control equipment, wherein: described ultrasonic transmission device, is used for launching ultrasound wave to be filtered;Described artificial cycle structure, for regulating and controlling incident ultrasound wave described to be filtered, and produces Lamb wave in the substrate of described artificial cycle structure, and described artificial cycle structure excites described Lamb wave to produce transmission enhancing peak;Described temperature control equipment, for regulating and controlling the operating temperature phase transition temperature higher or lower than described artificial cycle structure of described artificial cycle structure;Described artificial cycle structure, is additionally operable to regulate and control described transmission according to described operating temperature and strengthens frequency corresponding to peak, and the transmission ultrasonic wave after filtering is gone out.Use this system, can conveniently and effectively filter out the ultrasound wave corresponding with operating temperature by simple control.Further, it would be desirable to provide a kind of method based on artificial cycle structured filter ultrasound wave.

Description

System and method based on artificial cycle structured filter ultrasound wave
Technical field
The present invention relates to ultrasonic technology field, particularly relate to a kind of ultrasonic based on artificial cycle structured filter The system and method for ripple.
Background technology
Current acoustic wave filter, including SAW filter, is all based on electronic circuit to the signal of telecommunication Conversion also realizes the filtration to sound wave by ultrasonic transducer.The ultrasound wave that ultrasonic transducer sends has Certain frequency scope, most of energy of signal is included in one section of frequency band (effective bandwidth) that frequency is narrower. But by ultrasonic applications when sewage disposal, Polymer Synthesizing and sonar etc., generally require the narrow frequency of use very Ultrasound wave to single-frequency just can reach the purpose accurately controlling and detecting.The most even also need to take Temperature acts on jointly with single-frequency ultrasound wave, such as, in sewage disposal and chemosynthesis, need The Catalyzed by Ultrasonic Wave of certain frequency is used at a certain temperature;In sonar works, need according to water temperature change logical Cross the ultrasound wave of characteristic frequency to determine the depth of water and surrounding.
Artificial cycle structure is utilized to carry out ultrasound wave filtering the ultrasound wave that can obtain some characteristic frequency.This It is owing to elastic wave is when the middle propagation of artificial cycle structure (phonon crystal), by the shadow of artificial cycle structure Ring, be prevented from propagating in certain frequency scope (band gap), and permissible in other frequency ranges (passband) Propagate without loss.Therefore, this forbidden band character is utilized can to obtain the ultrasound wave of some characteristic frequency.
But how to utilize artificial cycle structure can conveniently and effectively filter out by the way of simple control with The ultrasound wave of the characteristic frequency that its operating temperature is corresponding, the most still a technical barrier.
Summary of the invention
Based on this, it is necessary to for above-mentioned technical problem, it is provided that a kind of control simply and is conveniently and effectively filtered Go out the system and method based on artificial cycle structured filter ultrasound wave of the ultrasound wave corresponding with operating temperature.
A kind of system based on artificial cycle structured filter ultrasound wave, described system includes: ultrasonic emitting fills Put, artificial cycle structure and temperature control equipment, wherein:
Described ultrasonic transmission device, is used for launching ultrasound wave to be filtered;
Described artificial cycle structure, for regulating and controlling incident ultrasound wave described to be filtered, and described Producing Lamb wave in the substrate of artificial cycle structure, described artificial cycle structure excites described Lamb wave to produce thoroughly Penetrate enhancing peak;
Described temperature control equipment, for regulating and controlling the operating temperature of described artificial cycle structure higher or lower than institute State the phase transition temperature of artificial cycle structure;
Described artificial cycle structure, is additionally operable to regulate and control described transmission enhancing peak according to described operating temperature corresponding Frequency, and will filter after transmission ultrasonic wave go out.
A kind of method based on artificial cycle structured filter ultrasound wave, described method includes:
Ultrasonic transmission device launches ultrasound wave to be filtered;
Incident ultrasound wave described to be filtered is regulated and controled by artificial cycle structure, and in artificial cycle structure Producing Lamb wave in substrate, described artificial cycle structure excites described Lamb wave to produce transmission enhancing peak;
Temperature control equipment regulates and controls the operating temperature of described artificial cycle structure higher or lower than described artificial cycle The phase transition temperature of structure;
According to described operating temperature, transmission described in described artificial cycle structure regulating strengthens the frequency that peak is corresponding, And will filter after transmission ultrasonic wave go out.
Above-mentioned system and method based on artificial cycle structured filter ultrasound wave, artificial cycle structure is to incidence Ultrasound wave to be filtered regulates and controls, and produces Lamb wave in the substrate of artificial cycle structure, and artificial cycle is tied Structure excites Lamb wave to produce transmission enhancing peak.Work temperature due to temperature control equipment regulation and control artificial cycle structure Degree is higher or lower than the phase transition temperature of artificial cycle structure, according to this operating temperature, artificial cycle structure regulating Transmission strengthens frequency corresponding to peak, and the transmission ultrasonic wave after filtering is gone out.Control i.e. from there through simple Can conveniently and effectively filter out the ultrasound wave corresponding with operating temperature.
Accompanying drawing explanation
Fig. 1 is system structure schematic diagram based on artificial cycle structured filter ultrasound wave in an embodiment;
Fig. 2-1 is artificial cycle structure measurement result of transmission spectrum when operating temperature 30 DEG C in an embodiment Figure;
Fig. 2-2 is artificial cycle structure measurement result of transmission spectrum when operating temperature 40 DEG C in an embodiment Figure;
Fig. 3 is the schematic diagram of artificial cycle structure in an embodiment;
Fig. 4 is the structural representation of system based on artificial cycle structured filter ultrasound wave in another embodiment;
Fig. 5 is the flow chart of method based on artificial cycle structured filter ultrasound wave in an embodiment;
Fig. 6 is the flow chart obtaining the transmission spectrum corresponding with operating temperature in an embodiment.
Detailed description of the invention
In order to make the purpose of the present invention, technical scheme and advantage clearer, below in conjunction with accompanying drawing and reality Execute example, the present invention is further elaborated.Only should be appreciated that specific embodiment described herein In order to explain the present invention, it is not intended to limit the present invention.
In one embodiment, as shown in Figure 1, it is provided that a kind of based on artificial cycle structured filter ultrasound wave System, this system includes: ultrasonic transmission device 102, artificial cycle structure 104 and temperature control equipment 106, wherein:
Ultrasonic transmission device 102, is used for launching ultrasound wave to be filtered.
Ultrasound wave to be filtered can be the ultrasound wave in the range of optional frequency.Ultrasonic transmission device 102 is permissible It it is the device launching any product control scope ultrasound wave.In a preferred embodiment, ultrasonic transmission device 102 include sender unit and ultrasound wave generating means, wherein: sender unit, are used for launching excitation Signal;Ultrasound wave generating means, for producing ultrasound wave according to pumping signal.Sender unit is preferably counted The impulse ejection receptor that calculation machine controls, the preferred ultrasonic transducer of ultrasound wave generating means.Pumping signal is permissible It is continuation sinusoidal, it is also possible to be pulsed sinusoidal signal.Ultrasonic transducer can be single array element ultrasonic transduction In device, phase array transducer, linear array ultrasonic transducer, convex battle array ultrasonic transducer and interdigital transducer Any one.Preferably, pumping signal is pulsed sinusoidal signal, and ultrasonic transducer uses that single array element is ultrasonic changes Can device.Such as, computer control impulse ejection receptor produce energy be 12.5 μ J, frequency be 100MHz Pulse signal, encouraged by this pulse signal, ultrasonic transducer produce 1.5MHz~4.5MHz wideband Ultrasound wave to be filtered, its mid frequency is 3.5MHz, and focal length is 400mm.
Artificial cycle structure 104, for regulating and controlling incident ultrasound wave to be filtered, and ties at artificial cycle Producing Lamb wave in the substrate of structure, artificial cycle structure excites Lamb wave to produce transmission enhancing peak.
Artificial cycle structure i.e. photonic crystal structure, it is made material and includes but not limited to barium strontium titanate (BaxSr1-xTiO3) ferroelectric ceramic material, concrete, strontium barium element ratio can be used for 3:7's (Ba0.7Sr0.3TiO3), (Ba of 2:80.8Sr0.2TiO3), (Ba of 3.5:6.50.65Sr0.35TiO3), 4:6 (Ba0.6Sr0.4TiO3) or other ferroelectric ceramic materials make.Barium strontium titanate (BaxSr1-xTiO3) ferroelectricity pottery In ceramic material, the ratio of barium element arbitrarily can change between (0~1), and corresponding operating temperature range can To be (-241 DEG C~130 DEG C).In the present embodiment, preferably strontium barium element is than (the Ba for 3:70.7Sr0.3TiO3)。
Artificial cycle structure can be fixed by sample stage, and concrete can be placed on sample by artificial cycle structure It is fixed in the middle of this TV station.The frequency range of corresponding ultrasound wave to be filtered, uses the artificial cycle of different parameters Structure regulates and controls.The substrate vibration of ultrasonic exciting artificial cycle structure to be filtered, in artificial cycle structure Substrate in produce Lamb wave.Artificial cycle structure excites Lamb wave to produce multiple with zeroth order antisymmetric mode Penetrate enhancing peak.Transmission strengthens the frequency that peak is corresponding, is closely related with the parameter of artificial cycle structure.Artificial week After the parameter determination of phase structure, the multiple specific frequency that transmission strengthens peak corresponding is i.e. determined therewith.Due to The acoustic propagation performance of Barium Strontium Titanate Ferroelectric Ceramics also suffers from the impact of operating temperature, now artificial cycle The frequency of the ultrasound wave that structured filter goes out is the most relevant with operating temperature.
Illustrating as a example by the wideband ultrasound wave to be filtered of 1.5MHz~4.5MHz, artificial cycle structure is adopted With parameter be substrate thickness be 0.5mm, Cycle Length be 1mm, raised line cross sectional shape be rectangle, raised line The width of sectional area is 0.6mm, and the height of raised line sectional area is the fence structure of 0.3mm.Such as Fig. 2-1 institute Showing, the operating temperature of artificial cycle structure is 30 DEG C, after the filtration of artificial cycle structure, transmits The ultrasonic frequency gone is 2.844MHz, 3.433MHz, 3.583MHz, 4.277MHz and 4.455MHz. As shown in Fig. 2-2, the operating temperature of artificial cycle structure is 40 DEG C, through artificial cycle structure filtration it After, the ultrasonic frequency that transmission is gone out is 3.137MHz, 3.752MHz and 3.920MHz.In above-mentioned figure It is apparent that after the parameter determination of artificial cycle structure, the operating temperature of artificial cycle structure changes Becoming, the frequency of the ultrasound wave after filtration changes along with the change of operating temperature.
Temperature control equipment 106, for regulating and controlling the operating temperature of artificial cycle structure higher or lower than artificial cycle The phase transition temperature of structure.
Owing to Barium Strontium Titanate Ferroelectric Ceramics has the acoustical behavior extremely sensitive to temperature, therefore, in phase Before and after temperature, its elastic modelling quantity and the velocity of wave of ultrasound wave propagated wherein have bigger change.Temperature What control device 106 was concrete can use digital display thermostat water bath, for regulating and controlling the operating temperature of artificial cycle Phase transition temperature higher or lower than Barium Strontium Titanate Ferroelectric Ceramics.With barium strontium titanate (Ba0.7Sr0.3TiO3) ferrum As a example by electroceramics material, its phase transition temperature is 30 DEG C, the work temperature of digital display thermostat water bath regulation and control artificial cycle Degree is higher or lower than 30 DEG C, and concrete can be the intensification between 10 DEG C~50 DEG C or cooling.
Artificial cycle structure 104, is additionally operable to strengthen, according to operating temperature regulation and control transmission, the frequency that peak is corresponding, and will Transmission ultrasonic wave after filtration is gone out.
After the parameter determination of artificial cycle structure, the frequency of the ultrasound wave that artificial cycle structured filter goes out is only Relevant with temperature.According to operating temperature, artificial cycle structure regulating transmission strengthens the frequency at peak, after filtering Transmission ultrasonic wave go out, obtain the ultrasound wave after the filtration corresponding with operating temperature.
In the present embodiment, incident ultrasound wave to be filtered is regulated and controled by artificial cycle structure, and in artificial week Producing Lamb wave in the substrate of phase structure, artificial cycle structure excites Lamb wave to produce transmission enhancing peak.Due to The operating temperature of temperature control equipment regulation and control artificial cycle structure is higher or lower than the phase alternating temperature of artificial cycle structure Degree, according to this operating temperature, artificial cycle structure regulating transmission strengthens the frequency that peak is corresponding, and by after filtration Transmission ultrasonic wave go out.Can conveniently and effectively filter out and operating temperature pair from there through simple control The ultrasound wave answered.
In one embodiment, artificial cycle structure includes substrate and multiple raised line, and multiple tab parallel are arranged On substrate and spacing distance is equal.In a preferred embodiment, the parameter of artificial cycle structure includes At least one in substrate thickness, Cycle Length, raised line cross sectional shape and raised line sectional area.Artificial cycle is tied Structure comprises the artificial cycle structure of different parameters, the corresponding ultrasound wave to be filtered of the artificial cycle structure of different parameters Frequency range, the frequency range of ultrasound wave to be filtered is modulated.Raised line cross sectional shape can be rectangular Shape, polygon or semicircle.As a example by raised line cross sectional shape is as rectangle, the schematic diagram of artificial cycle structure As shown in Figure 3.Wherein, the cycle that spacing d is artificial periodic structure between the longitudinal center line of raised line is long Degree, h2 is substrate thickness, and h1 is the height of cuboid, and w is the width of cuboid, and h1*w is cutting of cuboid The area i.e. sectional area of raised line.Substrate thickness, cuboid the wide three of height and cuboid can be identical.? Thickness is pass through scribing machine processing on the copper coin of h1+h2 can to obtain Cycle Length being d, and the height of cuboid is H1, width is the artificial cycle structure of the fence structure of w.
In one embodiment, as shown in Figure 4, system based on artificial cycle structured filter ultrasound wave is also wrapped Include ultrasonic probe, ultrasonic receiver 108, after receiving the pumping signal needed for generation ultrasound wave to be filtered and filtration Ultrasound wave, and the frequency spectrum that the frequency spectrum of pumping signal is corresponding with the ultrasound wave after filtration is carried out calculation process, To the transmission spectrum corresponding with the operating temperature of artificial cycle structure.
In the present embodiment, ultrasonic probe, ultrasonic receiver 108 is utilized to be calculated generation ultrasound wave institute to be filtered respectively The frequency spectrum data of the ultrasonic signal after the pumping signal needed and filtration, and both frequency spectrum datas are counted Calculate, thus obtain the transmission spectrum corresponding with the operating temperature of artificial cycle structure.
In a preferred embodiment, ultrasonic probe, ultrasonic receiver 108 includes at signal receiving device and data Reason device is wherein: signal receiving device, based on ultrasound wave after receiving pumping signal and filtering transmission extremely Calculation machine;Data processing equipment, for entering the frequency spectrum that the frequency spectrum of pumping signal is corresponding with the ultrasound wave after filtration Row operation processes.
In the present embodiment, the preferred computer-controlled impulse ejection receptor of signal receiving device, data process The preferred computer of device.Ultrasound wave after the computer pumping signal to receiving and filtration, transports respectively The frequency spectrum data that calculation processes.Concrete, Matlab program can be used, respectively to pumping signal with after filtering The time-domain signal of ultrasound wave carries out Fourier transformation and obtains the frequency-region signal of correspondence, and to frequency-region signal number According to collection, such as, gather 50 data, the data collected are averaged, respectively obtains pumping signal The frequency spectrum data that frequency spectrum data is corresponding with the ultrasound wave after filtration.Will filter after ultrasound wave frequency spectrum data with The frequency spectrum data of pumping signal is divided by, and obtains the transmission spectrum corresponding with the operating temperature of artificial cycle structure.
In one embodiment, as shown in Figure 5, it is provided that a kind of based on artificial cycle structured filter ultrasound wave Method, including:
Step 502, ultrasonic transmission device launches ultrasound wave to be filtered.
Step 504, incident ultrasound wave to be filtered is regulated and controled by artificial cycle structure, and ties at artificial cycle Producing Lamb wave in the substrate of structure, artificial cycle structure excites Lamb wave to produce transmission enhancing peak.
Step 506, the operating temperature of temperature control equipment regulation and control artificial cycle structure is higher or lower than artificial cycle The phase transition temperature of structure.
Step 508, according to operating temperature, artificial cycle structure regulating transmission strengthens the frequency that peak is corresponding, and will Transmission ultrasonic wave after filtration is gone out.
In the present embodiment, ultrasound wave to be filtered can be the ultrasound wave in the range of optional frequency, can be by ultrasonic Wave transmitting device launches ultrasound wave to be filtered.The broadband ultrasonic wave to be filtered comprising multiple frequency can be the most incident To artificial periodic structure.Incident ultrasound wave to be filtered is regulated and controled by artificial cycle structure.Artificial cycle is tied Structure includes substrate and multiple raised line, and multiple tab parallel are arranged on substrate and spacing distance is equal.Artificial week Phase structure can be fixed by sample stage, and concrete can be placed in the middle of sample stage by artificial cycle structure Row is fixing.The substrate vibration of ultrasonic exciting artificial cycle structure to be filtered, at the substrate of artificial cycle structure Middle generation Lamb wave.Artificial cycle structure excites Lamb wave to produce multiple transmissions enhancing with zeroth order antisymmetric mode Peak.Owing to transmission strengthens the frequency that peak is corresponding, it is closely related with the parameter of artificial cycle structure.Artificial cycle After the parameter determination of structure, the multiple specific frequency that transmission strengthens peak corresponding is i.e. determined therewith, now people The frequency of the ultrasound wave that work periodic structure filters out is the most relevant with temperature.Due to barium strontium titanate (Ba0.7Sr0.3TiO3) Ferroelectric ceramic material is before and after phase transition temperature, and its elastic modelling quantity and the velocity of wave of ultrasound wave propagated wherein have Bigger change.The operating temperature of temperature control equipment regulation and control artificial cycle structure is higher or lower than artificial cycle The phase transition temperature of structure.According to operating temperature, artificial cycle structure regulating transmission strengthens the frequency at peak, incited somebody to action Transmission ultrasonic wave after filter is gone out, and obtains the ultrasound wave after the filtration corresponding with operating temperature.Thus achieve The ultrasound wave corresponding with operating temperature is the most conveniently and effectively filtered out by simple control.
In one embodiment, the step that incident ultrasound wave to be filtered is regulated and controled by artificial cycle structure, Including: the frequency range of corresponding ultrasound wave to be filtered, use the artificial cycle structure of different parameters to be filtered The frequency range of ultrasound wave is modulated, parameter include substrate thickness, Cycle Length, raised line cross sectional shape and At least one in raised line sectional area.
In the present embodiment, the frequency range of ultrasound wave to be filtered is different, can use the artificial cycle of different parameters Structure is modulated.Ultrasound wave to be filtered can be launched by ultrasonic transducer.Due to ultrasonic transducer Frequency range is limited, and such as 1.5MHz-4.5MHz, and artificial cycle structure can be the most ultrasonic In the frequency range of transducer, produce transmission at multiple Frequency points and strengthen peak.Therefore, it can by changing super Sonic transducer changes the frequency range of ultrasound wave to be filtered.The parameter of artificial cycle structure include substrate thickness, At least one in Cycle Length, raised line cross sectional shape and raised line sectional area.Raised line cross sectional shape can be long Square, polygon or semicircle.Parameter difference i.e. represents that artificial cycle structure is different.With raised line cross sectional shape As a example by rectangle, for the wideband ultrasound wave to be filtered of 1.5MHz~4.5MHz, substrate can be used thick Degree h2 is 0.5mm, Cycle Length d is 1mm, raised line cross sectional shape is rectangle, the width of raised line sectional area Degree w is 0.6mm, the artificial cycle structure of the fence structure that height h1 is 0.3mm of raised line sectional area.
In one embodiment, before ultrasonic transmission device launches the step of ultrasound wave to be filtered, also include: Sender unit launches pumping signal;Pumping signal excitation ultrasound wave generating means produces ultrasound wave to be filtered.
In the present embodiment, the pumping signal that sender unit is launched can be continuation sinusoidal, it is also possible to It it is pulsed sinusoidal signal.Ultrasound wave generating means produces ultrasound wave according to pumping signal.Sender unit is excellent Computer is selected to control impulse ejection receptor, the preferred ultrasonic transducer of ultrasound wave generating means.Ultrasonic transducer Can be single array element ultrasonic transducer, phase array transducer, linear array ultrasonic transducer, convex battle array be ultrasonic changes Can any one in device and interdigital transducer.It is further preferred that pumping signal is pulsed sinusoidal signal, Ultrasonic transducer uses single array element ultrasonic transducer.Such as, computer controls impulse ejection receptor generation energy Amount is 12.5 μ J, frequency is the pulse signal of 100MHz, is produced by this pulse signal excitation ultrasonic transducer Raw 1.5MHz~4.5MHz wideband ultrasound wave to be filtered, its mid frequency is 3.5MHz, and focal length is 400mm.
In one embodiment, as shown in Figure 6, according to operating temperature, artificial cycle structure regulating transmission increases Also include after the frequency at strong peak, and the step gone out of the transmission ultrasonic wave after filtering:
Step 602, signal receiving device is by the ultrasound wave input data after the pumping signal received and filtration Reason device.
Step 604, the frequency spectrum data that data processing equipment gathers pumping signal is corresponding with the ultrasound wave after filtration Frequency spectrum data.
Step 606, the frequency that data processing equipment is corresponding with the ultrasound wave after filtration to the frequency spectrum data of pumping signal Modal data carries out calculation process, obtains the transmission spectrum corresponding with operating temperature.
In the present embodiment, the preferred computer of signal receiving device controls impulse ejection receptor, and data process dress Put preferred computer.Computer controls impulse ejection receptor and receives pumping signal and by artificial cycle structure Ultrasound wave after the filtration transmitted, and by the ultrasound wave input computer after pumping signal and filtration.Calculate Machine carries out calculation process to the ultrasound wave after the pumping signal received and filtration respectively and obtains the spectrum number of correspondence According to.Concrete, Matlab program, respectively the time domain letter to the ultrasound wave after pumping signal and filtration can be used Number carry out Fourier transformation and obtain the frequency-region signal of correspondence, and frequency-region signal is carried out data acquisition, such as, adopt Collect 50 data, the data collected are averaged, respectively obtain frequency spectrum data and the filtration of pumping signal After frequency spectrum data corresponding to ultrasound wave.The frequency spectrum data of the ultrasound wave after filtering and the frequency spectrum of pumping signal Data are divided by, and obtain the transmission spectrum corresponding with the operating temperature of artificial cycle structure.
Embodiment described above only have expressed the several embodiments of the present invention, and it describes more concrete and detailed, But therefore can not be interpreted as the restriction to the scope of the claims of the present invention.It should be pointed out that, for this area Those of ordinary skill for, without departing from the inventive concept of the premise, it is also possible to make some deformation and Improving, these broadly fall into protection scope of the present invention.Therefore, the protection domain of patent of the present invention should be with appended Claim is as the criterion.

Claims (10)

1. a system based on artificial cycle structured filter ultrasound wave, it is characterised in that described system includes: Ultrasonic transmission device, artificial cycle structure and temperature control equipment, wherein:
Described ultrasonic transmission device, is used for launching ultrasound wave to be filtered;
Described artificial cycle structure, for regulating and controlling incident ultrasound wave described to be filtered, and described Producing Lamb wave in the substrate of artificial cycle structure, described artificial cycle structure excites described Lamb wave to produce thoroughly Penetrate enhancing peak;
Described temperature control equipment, for regulating and controlling the operating temperature of described artificial cycle structure higher or lower than institute State the phase transition temperature of artificial cycle structure;
Described artificial cycle structure, is additionally operable to regulate and control described transmission enhancing peak according to described operating temperature corresponding Frequency, and will filter after transmission ultrasonic wave go out.
System the most according to claim 1, it is characterised in that described artificial cycle structure includes substrate With multiple raised lines, the plurality of tab parallel arranges on the substrate and spacing distance is equal.
System the most according to claim 2, it is characterised in that the parameter bag of described artificial cycle structure Include at least one in substrate thickness, Cycle Length, raised line cross sectional shape and raised line sectional area;
Described artificial cycle structure comprises the artificial cycle structure of different parameters, the artificial week of described different parameters The frequency range of the corresponding described ultrasound wave to be filtered of phase structure, enters the frequency range of described ultrasound wave to be filtered Row modulation.
System the most according to claim 1, it is characterised in that described system also includes that ultrasound wave receives Device, for receiving the ultrasound wave after producing pumping signal needed for described ultrasound wave to be filtered and filtration right The frequency spectrum that the frequency spectrum of described pumping signal is corresponding with the ultrasound wave after described filtration carries out calculation process, obtain with The transmission spectrum that the operating temperature of described artificial cycle structure is corresponding.
System the most according to claim 1, it is characterised in that described ultrasonic transmission device includes letter Number discharger and ultrasound wave generating means, wherein:
Sender unit, is used for launching pumping signal;
Described ultrasound wave generating means, for producing ultrasound wave according to described pumping signal.
System the most according to claim 4, it is characterised in that described ultrasonic probe, ultrasonic receiver includes letter Number receive device and data processing equipment, wherein:
Described signal receiving device, is used for the ultrasound wave after receiving described pumping signal and described filtration and transmits To described data processing equipment;
Described data processing equipment, is used for the ultrasound wave pair after the frequency spectrum to described pumping signal and described filtration The frequency spectrum answered carries out calculation process.
7. a method based on artificial cycle structured filter ultrasound wave, described method includes:
Ultrasonic transmission device launches ultrasound wave to be filtered;
Incident ultrasound wave described to be filtered is regulated and controled by artificial cycle structure, and in artificial cycle structure Producing Lamb wave in substrate, described artificial cycle structure excites described Lamb wave to produce transmission enhancing peak;
Temperature control equipment regulates and controls the operating temperature of described artificial cycle structure higher or lower than described artificial cycle The phase transition temperature of structure;
According to described operating temperature, transmission described in described artificial cycle structure regulating strengthens the frequency that peak is corresponding, And will filter after transmission ultrasonic wave go out.
Method the most according to claim 7, it is characterised in that described artificial cycle structure is to incidence Described ultrasound wave to be filtered carries out the step regulated and controled, including:
The frequency range of corresponding described ultrasound wave to be filtered, uses the artificial cycle structure of different parameters to described The frequency range of ultrasound wave to be filtered is modulated, and described parameter includes substrate thickness, Cycle Length, raised line At least one in cross sectional shape and raised line sectional area.
Method the most according to claim 7, it is characterised in that the transmitting of described ultrasonic transmission device is treated Before filtering the step of ultrasound wave, also include:
Sender unit launches pumping signal;
Described pumping signal excitation ultrasound wave generating means produces ultrasound wave to be filtered.
Method the most according to claim 9, it is characterised in that described according to described operating temperature, Described in described artificial cycle structure regulating transmission strengthen peak frequency, and will filter after transmission ultrasonic wave go out Step after, also include:
Ultrasound wave after the described pumping signal received and described filtration is inputted at data by signal receiving device Reason device;
Ultrasound wave pair after the frequency spectrum data of the described data processing equipment described pumping signal of collection and described filtration The frequency spectrum data answered;
Described data processing equipment is corresponding with the ultrasound wave after described filtration to the frequency spectrum data of described pumping signal Frequency spectrum data carry out calculation process, obtain the transmission spectrum corresponding with described operating temperature.
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