Up to now, lithium tetraborate (Li
2B
4O
7: LBO or LTB) single crystal growing, all adopt crystal pulling method (Czochralski) both at home and abroad.The essential characteristic of this growth method is in the crystal pulling method single crystal growing furnace, is melted in lithium tetraborate raw material in the platinum crucible by high frequency or resistive heating, again through sowing, operations such as necking down, rotary pulling, grow the LBO monocrystalline of certain orientation and certain size.This monocrystalline has high surface acoustic wave (SAW) effective electro-mechanical couple factor (k
2≈ 1%), zero-lag temperature factor (TCD=0) tangential, the high velocity of sound, light specific gravity need not polarize, the advantage that cold-forming property is good.Therefore, the LBO mono-crystalline piezoelectric materials is a kind of promising SAW and BAW(bulk acoustic wave) the temperature compensation substrate material of device.Because the LBO melt viscosity is big, the anisotropy of crystal thermal expansion during with the pulling method for growing LBO monocrystalline, is easy to occur white thread wrap, bubble, growth crackle, and component is crossed macroscopic defects and cracking fragmentations such as cold striped.This method unit per unit area yield adds because of the quick complete growth of the impossible greatly realization of LBO melt viscosity.Therefore, this process efficiency is low.Still the suitability for industrialized production of LBO monocrystalline in the world is unrealized.(day disclosure special permission communique (A), clear and 62-108800; Clear and 62-162693; Clear and 62-36098; Clear and 62-96398.
Jpn.J.Appl.Phys.1985,24(Suppl.24-3)
72-75;J.Material Soci.17(1982)1729-1738;
J.Crystal Growth 41(1977)225-227;
" artificial lens " 14(1985) 92.
The growth method that the purpose of this invention is to provide a kind of reliable and stable high quality LBO monocrystalline is to realize the suitability for industrialized production of LBO novel piezoelectric monocrystalline.It is the Bridgman method of growing LBO piezoelectric monocrystal.
Major technique content of the present invention is: high-purity (99.9%, as follows) LBO raw material briquetting is inserted the bottom lay in the crucible of certain size and direction crystal seed; Platinum crucible places the Bridgman single crystal growing furnace, and dropping speed of the crucible is controlled in melt raw material and crystal seed top under certain furnace temperature, can grow the high quality LBO single crystal that does not have macroscopic view and microscopic defect.
Detailed content of the present invention is as follows:
1. raw material compound stalk forming
With of the size and dimension requirement of high-purity LBO powder, do hydrostaticpressure or compression molding by platinum crucible.The density of LBO briquetting is 0.9~1.4 gram per centimeter
3
2. holding the LBO melt is 0.08~0.15 millimeter with the platinum crucible wall thickness of laying crystal seed, and near airtight, to prevent the volatilization of LBO melt composition.
3.LBO the crystal seed direction is<100 〉,<001,<110,<210 etc., perpendicular to the crystal seed cross-sectional area (S of the direction of growth
Crystal seed) with the cross-sectional area (S of growing crystal
Crystal) ratio P(=(S crystal seed)/(S crystal)) 〉=15%.
4. fusing LBO raw material briquetting and crystal seed top in the Bridgman single crystal growing furnace in furnace temperature is 950~1100 ℃ of scopes, descend with≤0.3 millimeter/hour speed, can obtain the complete LBO monocrystalline identical with the platinum crucible shape.
5. many platinum crucibles can be laid in the Bridgman single crystal growing furnace, the LBO monocrystalline of grow simultaneously different shapes, different size.(being platinum crucible shape, controllable number).
The present invention compares with crystal pulling method, and its advantage is: the temperature field is stable, and the lbo crystal integrity of growth is good, no macroscopic view and microscopic defect; The yield rate height; Crystalline size and profile are controlled easily, and be not easy to crack.Processing unit is simple, and is easy to operate, and energy consumption obviously reduces, and helps realizing suitability for industrialized production (seeing Table 1).
The comparison of table 1 the present invention and pulling method for growing LBO
Method |
Processing condition |
Crystal mass |
Production level |
Crystal pulling method |
The growth parameter(s) complexity, crystalline form is single, apparatus expensive |
The thread wrap of white, constitutional supercooling striped, bubble, fragmentation easy to crack |
The unit per unit area yield, efficient is low, energy consumption height, not industrialization |
The present invention |
The temperature field is stable, and crystalline form is variable, and equipment is simple, and is easy to operate |
No macroscopic view and microscopic defect, integrity is good, and is not easy to crack |
The unit fecund, the yield rate height, energy consumption and cost are low, can realize industrialized mass production. |
With widely used high-melting-point piezoquartz LN(LiNbO on the modern industry
3, 1250 ℃) and LT(LiTaO
3, 1670 ℃) and compare LBO monocrystalline fusing point low (917 ℃), congruent melting growth, and the processing that need not polarize.Its density only is about 1/2 of LN, 1/3 of LT.The lbo crystal piece rate of same weight will be about 2 times of LN, 3 times of LT, and this will reduce the cost of substrate greatly.LBO has high SAW k
2Tangential with TCD=0, this design to the improvement of SAW and BAW device performance and arrowband band logical SAW wave filter, resonator or very high frequency(VHF) device is extremely important.
As seen from Table 2, LBO can replace LT, the LN application at SAW and BAW device, helps the update of this class device.
At present, LT, LN are widely used in colour, black and white television set in the world, video tape recorder intermediate-frequency filter, the rf-resonator of video tape recorder, satellite broadcasting, special telephone, mobile radio unit etc.Its output value had been 7,800,000,000 yen in 1985.The production of the domestic LT of China, LN is in ton, and (produce the LN5 ton per year with 87 is example to the millions of approximately units of annual value of production, the output value
Being 6,000,000 yuan) the wave filter output value made with this material then is after tens million of units (seeing Table 2) LBO single crystal industrial is produced, can obtain more considerable economic.
The suitability for industrialized production because this crystal still is unrealized in the world uses method of the present invention to realize suitability for industrialized production, not only can obtain economic benefit, also will produce positive social benefit.
The embodiment of the invention is as follows:
With high-purity (99.9%) LBO powder through hydrostaticpressure or to be molded into density be 0.9 gram per centimeter
3Briquetting, and to put into wall thickness be 0.08 millimeter platinum crucible.<100〉rectangular cylindricality crystal seed, its cross-sectional area S
Crystal seed/ S
Crystal(being P) is 15% to place the briquetting bottom.In the Bridgman single crystal growing furnace, fusing briquetting and crystal seed top were incubated after 4 hours under 950 ℃ of temperature, with 0.3 millimeter/hour speed decline crucible, and the water white LBO perfect crystal of growing.
2. with density 1.2 gram per centimeters
3Briquetting, P is 25%<001〉garden shape crystal seed, puts into wall thickness and be 0.1 millimeter platinum crucible, on 1050 ℃ of following fusing briquettings and crystal seed top, then with 0.2 millimeter/hour speed decline crucible, gives birth to oval LBO perfect crystal.
3. be 1.4 gram per centimeters with density
3Briquetting, P be 30%<to put into wall thickness be 0.15 millimeter platinum crucible to 110〉Polygons crystal seeds, under 1100 ℃ of temperature, melt raw material and welding crystal seed are with 0.15 millimeter/hour speed decline crucible, growing LBO perfect crystal.
4. press example 1,2,3 described processing condition will<001 〉,<100,<110 〉,<210 etc. the crystal seed of different orientation put into 10 platinum crucibles, 10 lbo crystals of growing simultaneously.