CN104257352A - Network-type MEMS neural micro probe and manufacture method thereof - Google Patents
Network-type MEMS neural micro probe and manufacture method thereof Download PDFInfo
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- CN104257352A CN104257352A CN201410523275.3A CN201410523275A CN104257352A CN 104257352 A CN104257352 A CN 104257352A CN 201410523275 A CN201410523275 A CN 201410523275A CN 104257352 A CN104257352 A CN 104257352A
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/40—Detecting, measuring or recording for evaluating the nervous system
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/68—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient
- A61B5/6846—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be brought in contact with an internal body part, i.e. invasive
- A61B5/6847—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be brought in contact with an internal body part, i.e. invasive mounted on an invasive device
- A61B5/685—Microneedles
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
- A61N1/00—Electrotherapy; Circuits therefor
- A61N1/02—Details
- A61N1/04—Electrodes
- A61N1/05—Electrodes for implantation or insertion into the body, e.g. heart electrode
- A61N1/0551—Spinal or peripheral nerve electrodes
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Abstract
Disclosed are a network-type MEMS neural micro probe and a manufacture method thereof. The network-type MEMS neural micro probe comprises a base, a probe head and a probe rod. The probe head is connected to the base through the probe rod to form a probe body; silicon layers and insulation layers are arranged inside the probe head, probe rod and base; the silicon layers are arranged below the insulation layers; the surface of the probe head is provided with a plurality of detection electrodes; the surface of the base is provided with a plurality of grooves; the interior of the probe body is provided with a plurality of guide wires penetrating the interior of the probe body; one end of one guide wire is connected to one detection electrode, and the other end of the guide wire forms an externally-connected guide bonding pad, with a groove; the guide wires are arranged in the insulation layers of the probe head, probe rod and base; the probe rod is provided with a plurality of through holes distributed in a network shape. The network-type MEMS neural micro probe has the advantages that structural strength is high, biological compatibility is high, the detection signal density is high, and reliability is high.
Description
Technical field
The present invention relates to a kind of latticed MEMS neuro microprobe and preparation method thereof, belong to microelectromechanical systems and Weak absorption technical field.
Background technology
MEMS neuro microprobe is the core medical apparatus of a kind of nerve signal detection and stimulation, has a wide range of applications in all polyneural engineering systems such as brain-computer interface technology, neural prosthesis technique, the Diagnosis and Treat of sacred disease, neural rehabilitation.Many research institutions of the U.S., Europe, Japan and Korea S pay much attention to this research direction, obtain much top scientific research and application achievements.
Although MEMS neuro microprobe achieves many achievements, in structural strength, still there is a lot of problem in bio-compatibility, the aspect such as signal density and reliability of structure.In structural strength: need implantable neural cell during the application of MEMS neuro microprobe, therefore whole probe structure needs enough mechanical strengths, to guarantee smooth implantation, but generally, enough mechanical strengths mean larger structure, to cause larger wound during implantation, bio-compatibility is poorer; In bio-compatibility: in order to extend the life-span of MEMS neuro microprobe record nerve signal, need MEMS neuro microprobe to have good bio-compatibility.Bio-compatibility is primarily of probe material and implant wound size and determine, except probe material, implant wound less, bio-compatibility is better, embedded material and neurocyte contact area less, bio-compatibility is better; In signal density: in order to obtain more nerve signal, need integrated more microprobe, the integrated more sensing point of every root microprobe, however acquisition of signal point volume is larger more at most, between holding wire, mutually interference is larger.
Summary of the invention
Goal of the invention: in order to overcome the deficiencies in the prior art, the invention provides a kind of network-like MEMS neuro microprobe and preparation method thereof, improves bio-compatibility, structural strength and detectable signal density.
Technical scheme: for achieving the above object, the technical solution used in the present invention is:
A kind of latticed MEMS neuro microprobe, comprises pedestal, syringe needle and shank; Described syringe needle is connected on pedestal by shank and forms microprobe; Described syringe needle, shank and base interior all have silicon layer and insulating barrier; Described silicon layer is arranged on the below of insulating barrier; The surface of described syringe needle is provided with several exploring electrodes; Described base-plates surface is provided with several grooves; Microprobe inside also comprises some lead-out wires, and described lead-out wire is inner through microprobe; Article one, one end of lead-out wire connects an exploring electrode, and the other end of this lead-out wire and a groove form an external extraction pad; In the insulating barrier of described lead-out wire in syringe needle, shank and pedestal; Described shank is provided with the through hole that several distribute as net shape.
Further, syringe needle, shank and pedestal adopt silicon materials to make.
Further, insulating barrier is the composite layer that silicon dioxide layer, silicon nitride layer and silicon dioxide layer from top to bottom superpose composition.
Further, the surface of pedestal, syringe needle and shank is covered with one deck biodegradable coating.
Further, described through hole is rectangle.
Further, described exploring electrode is iridium electrode.
Further, described lead-out wire adopts polysilicon to make.
8, a kind of preparation method of latticed MEMS neuro microprobe is:
1) first, utilize heavily boron diffusion technology to define microprobe figure on silicon, and form boron doping etch-stop leukorrhagia stopping in graphic limit; This probe patterns comprises pedestal, syringe needle and shank; Described syringe needle is connected on pedestal by shank and forms microprobe;
2) above silicon wafer, utilize low-pressure chemical vapor deposition from top to bottom to be superposed the composite layer formed by silicon dioxide layer, silicon nitride layer and silicon dioxide layer, obtain lower insulating barrier;
3) polysilicon is deposited over above lower insulating barrier and forms lead-out wire;
4) above lead-out wire, from top to bottom superpose by silicon dioxide layer, silicon nitride layer and silicon dioxide layer the composite layer formed with low-pressure chemical vapor deposition and form insulating barrier;
5) utilize the upper insulating barrier on dry etching syringe needle and pedestal, make to obtain several grooves with the upper insulating barrier on pedestal on syringe needle, and make the lead-out wire one end of the upper insulating barrier be on syringe needle and pedestal be revealed in groove surfaces respectively; Groove on pedestal and the lead-out wire one end be revealed on base recess are as external extraction pad;
6) on one end of metal sputtering lead-out wire on described syringe needle, metal is connected with lead-out wire, forms exploring electrode;
7) the outer unnecessary insulating barrier of microprobe figure is removed in etching, etches insulating barrier on shank simultaneously and forms rectangular window;
8) utilize ICP to etch rectangular window described in microprobe and form through hole;
9) the unnecessary unadulterated silicon layer of EDP wet etching is finally utilized, release microprobe.
Beneficial effect:
(1) adopt the fenestral fabric of novelty, probe body arranges some latticed through holes, reduce the contact area of microprobe and neurocyte, reduce biological rejection; Fenestral fabric can not cause intensity obviously to decline simultaneously, maintains enough intensity; When reducing to implant, probe body and neurocyte contact area, increase bio-compatibility.
(2) the acquisition of signal electrode of more than eight or eight that can be integrated on a probe body syringe needle, improves detectable signal density.
(3) lead-out wire is wrapped in insulating barrier, both the insulation of lead-out wire and microprobe can be realized, simultaneously lead-out wire can be realized and Cell sap is isolated, with neuronic interface section, only there is iridium electrode directly to contact with Cell sap, improve the reliability of microelectrode.
(4) adopt biodegradable coating technology, the volume of microprobe can reduce further, improves bio-compatibility, and rigidity when paint-on technique can maintain implantation, be convenient to optimize final structure.
(5) perforate adopts rectangle, and its processing and fabricating is easy.
(6) described insulating barrier is the composite layer that silicon dioxide layer, silicon nitride layer and silicon dioxide layer from top to bottom superpose composition, can the thermal stress of effective compensation microprobe, reduces the flexural deformation in microprobe processing.
Accompanying drawing explanation
Fig. 1 is the present invention's latticed MEMS neuro microprobe schematic diagram;
Fig. 2 is the present invention's latticed MEMS neuro microprobe generalized section;
Fig. 3 is the present invention's latticed MEMS neuro microprobe work flow schematic diagram.
Detailed description of the invention
Below in conjunction with accompanying drawing, the present invention is further described.
Composition graphs 1 and Fig. 2, the latticed MEMS neuro microprobe of the present invention, for nerve signal detection and stimulation.
A kind of latticed MEMS neuro microprobe, comprises pedestal 1, syringe needle 7 and shank 8; Syringe needle 7 is connected on pedestal 1 by shank 8 and forms microprobe; All there are silicon layer 9 and insulating barrier 2 in syringe needle 7, shank 8 and pedestal 1 inside; Silicon layer 9 is arranged on the below of insulating barrier 2; The surface of syringe needle 7 is provided with several exploring electrodes 4; Pedestal 1 is provided with several grooves on the surface; Microprobe inside also comprises some lead-out wires 6, and lead-out wire 6 is inner through microprobe; Article one, one end of lead-out wire 6 connects an exploring electrode 4, and the other end of this lead-out wire 6 and a groove are as an external extraction pad 3; In the insulating barrier 2 of lead-out wire 6 in syringe needle 7, shank 8 and pedestal 1; Described shank 8 is provided with the through hole 5 that several distribute as net shape.
Composition graphs 3, the preparation method of the latticed MEMS neuro microprobe of the present invention, comprises the steps:
1) heavily boron diffusion definition probe rod size; 2) sealing coat deposition under; 3) deposit and make internal connection line; 4) insulating barrier in deposition; 5) etching opens joint face; 6) sputter layer gold and form recording electrode; 7) etching removes the external insulating barrier of microprobe, etches insulating barrier on probe rod simultaneously and forms rectangular window; 8) utilize ICP to etch microprobe shank rectangular window and form netted open-end hole; 9) the unnecessary unadulterated silicon layer of EDP wet etching is utilized, release microprobe.
First, utilize heavily boron diffusion technology to define microprobe figure on N-type silicon wafer, and form boron doping etch-stop leukorrhagia stopping in graphic limit, be for can last releasing structure in wet etching, this probe patterns comprises pedestal, syringe needle and shank; Described syringe needle is connected on pedestal by shank and forms microprobe.Then, side's low-pressure chemical vapor deposition is from top to bottom superposed the composite layer formed by silicon dioxide layer, silicon nitride layer and silicon dioxide layer on silicon, obtains lower insulating barrier.Further, polysilicon is deposited on lower insulating barrier and forms lead-out wire.Further, above lead-out wire, from top to bottom superpose by silicon dioxide layer, silicon nitride layer and silicon dioxide layer the composite layer formed with low-pressure chemical vapor deposition and form insulating barrier.Insulating barrier is the composite layer that silicon dioxide layer, silicon nitride layer and silicon dioxide layer from top to bottom superpose composition, can the thermal stress of effective compensation microprobe, reduces the flexural deformation in microprobe processing.Further, utilize the upper insulating barrier on dry etching syringe needle and pedestal, make the upper insulating barrier on syringe needle and pedestal obtains several grooves respectively, and make the lead-out wire one end on syringe needle and pedestal be revealed in groove surfaces respectively, the groove on pedestal and the lead-out wire one end of pedestal upper groove appeared are as external extraction pad.Further, one end that metal iridium sputters at described lead-out wire makes metal iridium be connected with lead-out wire, form detection iridium electrode.Further, the outer unnecessary insulating barrier of microprobe figure is removed in etching, etches insulating barrier on probe rod simultaneously and forms rectangular window.Further, utilize ICP to etch rectangular window described in microprobe and form through hole.Finally utilize the unnecessary unadulterated silicon layer of EDP wet etching, release microprobe.
After basic structure is released, according to designing requirement, if adopt biodegradable coating technology, next first adopt similar micro-processing technology to process a micro-recesses mould, then select suitable Biodegradable material, such as PLGA, sugar, fibroin albumens etc., then shape microprobe body and degradation material, and finally employing lift-off technology or lithographic technique just can obtain the MEMS neuro microprobe with biodegradable coating.This technical process both can ensure that this miniature probe had enough mechanical strengths when implanting, and due to the degraded of biological coating simultaneously after implanting, can realize the volume minimization of implant, density maximizes, and significantly reduced the chronic rejection of cell.
Specific implementation method is as follows:
Lead-out wire in the external extraction pad of latticed MEMS neuro microprobe is connected with external interface circuit by flexible connection line, then by special fixture, MEMS neuro microprobe body is implanted in neuron, iridium electrode directly will contact with neuron, by the lead-out wire on external extraction pad, signal is introduced interface circuit to amplify, just can obtain the signal of neuron activity, the nerve stimulation signal of interface circuit also can be applied on iridium electrode by the lead-out wire on external extraction pad simultaneously, by contacting with neuronic, the activity of direct stimulating neuronal.Because nerve probe body is connected with adopting flexible connection line between interface circuit, the probe that the wriggling that therefore can reduce neuron or neurocyte causes comes off or implants the consequences such as wound lesion larger, the rejection of cell can be effectively reduced, improve bio-compatibility.
The above is only the preferred embodiment of the present invention; be noted that for those skilled in the art; under the premise without departing from the principles of the invention, can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (8)
1. a latticed MEMS neuro microprobe, is characterized in that: comprise pedestal (1), syringe needle (7) and shank (8); Described syringe needle (7) is connected on pedestal (1) by shank (8) and forms microprobe; All there are silicon layer (9) and insulating barrier (2) in described syringe needle (7), shank (8) and pedestal (1) inside; Described silicon layer (9) is arranged on the below of insulating barrier (2); The surface of described syringe needle (7) is provided with several exploring electrodes (4); Described pedestal (1) is provided with several grooves on the surface; Microprobe inside also comprises some lead-out wires (6), and described lead-out wire (6) is inner through microprobe; Article one, one end of lead-out wire (6) connects an exploring electrode (4), and the other end of this lead-out wire (6) and a groove are as an external extraction pad (3); In the insulating barrier (2) of described lead-out wire (6) in syringe needle (7), shank (8) and pedestal (1); Described shank (8) is provided with several through holes distributed as net shape (5).
2. the latticed MEMS neuro microprobe of one according to claim 1, is characterized in that: syringe needle (7), shank (8) and pedestal (1) adopt silicon materials to make.
3. the latticed MEMS neuro microprobe of one according to claim 1, is characterized in that: the composite layer that described insulating barrier (2) is silicon dioxide layer, silicon nitride layer and silicon dioxide layer from top to bottom superpose composition.
4. the latticed MEMS neuro microprobe of one according to claim 1, is characterized in that: the surface of described pedestal (1), syringe needle (7) and shank (8) is covered with one deck biodegradable coating.
5. the latticed MEMS neuro microprobe of one according to claim 1, is characterized in that: described through hole (5) is rectangle.
6. the latticed MEMS neuro microprobe of one according to claim 1, is characterized in that: described exploring electrode (4) is iridium electrode.
7. the latticed MEMS neuro microprobe of one according to claim 1, is characterized in that: described lead-out wire (6) adopts polysilicon to make.
8. the preparation method of a kind of latticed MEMS neuro microprobe according to claim 1 is:
1) first, utilize heavily boron diffusion technology to define microprobe figure on silicon, and form boron doping etch-stop leukorrhagia stopping in graphic limit; This probe patterns comprises pedestal, syringe needle and shank; Described syringe needle is connected on pedestal by shank and forms microprobe;
2) above silicon wafer, utilize low-pressure chemical vapor deposition from top to bottom to be superposed the composite layer formed by silicon dioxide layer, silicon nitride layer and silicon dioxide layer, obtain lower insulating barrier;
3) polysilicon is deposited over above lower insulating barrier and forms lead-out wire;
4) above lead-out wire, from top to bottom superpose by silicon dioxide layer, silicon nitride layer and silicon dioxide layer the composite layer formed with low-pressure chemical vapor deposition and form insulating barrier;
5) utilize the upper insulating barrier on dry etching syringe needle and pedestal, make to obtain several grooves with the upper insulating barrier on pedestal on syringe needle, and make the lead-out wire one end of the upper insulating barrier be on syringe needle and pedestal be revealed in groove surfaces respectively; Groove on pedestal and the lead-out wire one end be revealed on base recess are as external extraction pad;
6) on one end of metal sputtering lead-out wire on described syringe needle, metal is connected with lead-out wire, forms exploring electrode;
7) the outer unnecessary insulating barrier of microprobe figure is removed in etching, etches insulating barrier on shank simultaneously and forms rectangular window;
8) utilize ICP to etch rectangular window described in microprobe and form through hole;
9) the unnecessary unadulterated silicon layer of EDP wet etching is finally utilized, release microprobe.
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Cited By (6)
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| CN106667475A (en) * | 2016-12-20 | 2017-05-17 | 国家纳米科学中心 | Implanted flexible neural microelectrode comb, and preparation method and implanting method thereof |
| CN109142462A (en) * | 2018-06-22 | 2019-01-04 | 思贝科斯(北京)科技有限公司 | Conducting probe and its manufacturing method |
| CN110051343A (en) * | 2019-04-08 | 2019-07-26 | 北京大学 | It is a kind of using stainless steel as multifunction three-dimensional biology microprobe of substrate and preparation method thereof |
| CN112099160A (en) * | 2020-08-14 | 2020-12-18 | 中国科学院上海微系统与信息技术研究所 | Rear end connecting structure of implantable nerve photoelectric electrode and preparation method thereof |
| CN114343656A (en) * | 2022-01-10 | 2022-04-15 | 武汉衷华脑机融合科技发展有限公司 | Microneedle for nerve interface |
| CN117401643A (en) * | 2023-10-20 | 2024-01-16 | 扬州国宇电子有限公司 | MEMS micro-hotplate and preparation method thereof |
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