CN104253311B - Metamaterial composite structure and its manufacture method - Google Patents

Metamaterial composite structure and its manufacture method Download PDF

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CN104253311B
CN104253311B CN201410419872.1A CN201410419872A CN104253311B CN 104253311 B CN104253311 B CN 104253311B CN 201410419872 A CN201410419872 A CN 201410419872A CN 104253311 B CN104253311 B CN 104253311B
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meta materials
feature board
materials feature
adhesive linkage
keriotheca
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CN104253311A (en
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不公告发明人
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Kuang Chi Innovative Technology Ltd
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Shenzhen Guangqi Sophisticated Technique LLC
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Abstract

Disclose a kind of metamaterial composite structure and its manufacture method.The metamaterial composite structure includes the first Meta Materials feature board, including first medium substrate and the first micro structure array on first medium substrate;Second Meta Materials feature board, including second medium substrate and the second micro structure array on second medium substrate;And the Meta Materials keriotheca between the first Meta Materials feature board and the second Meta Materials feature board, wherein, the Meta Materials keriotheca includes the multiple 3rd Meta Materials feature boards stacked, also, each in the multiple 3rd Meta Materials feature board includes the 3rd medium substrate and the 3rd micro structure array on the 3rd medium substrate.Meta Materials keriotheca not only acts as the effect for improving mechanical strength, and further improve electromagnetic penetration performance as Meta Materials as intermediate layer.

Description

Metamaterial composite structure and its manufacture method
Technical field
The present invention relates to artificial composite material field, more particularly, to metamaterial composite structure and its manufacture method.
Background technology
In recent years, Meta Materials research and application attracted extensive attention.Meta Materials are the artificial multiple of specific microstructure Close structure or composite.Designed by the structure ordering on the physical size of material, some natural laws can be broken through Limitation, so as to show the extraordinary physical property not available for natural material.The physical property of Meta Materials depends not only on material Intrinsic properties, and depending on the micro-structural that is wherein formed.
Meta Materials can be laminated by multiple Meta Materials feature boards or be combined by other regular arrays.Meta Materials feature board Multiple man-made microstructures of array are formed including medium substrate and on medium substrate.Meta Materials feature board shows Meta Materials Characteristic., can also be stacked together by Meta Materials feature board and honeycomb panel in order to further enhance mechanical strength.
A kind of application of Meta Materials is to be used to manufacture antenna house.Antenna house is used for the antenna for protecting it internal.On the one hand, day Irdome should have certain mechanical strength to provide protective effect.On the other hand, antenna house should be guaranteed that the electromagnetism of working frequency range Wave height penetrance.
Existing antenna house is substantially pure material antenna house, is merely able to play a part of protecting antenna, in admissible model Enclose the interior performance that can influence antenna.General Physics material use half-wavelength or quarter-wave are theoretical, corresponding to different days Line frequency, change its thickness.When material thickness is the 1/2 of working frequency range electromagnetic wavelength, electromagnetic wave penetrance is best.However, , will be blocked up according to the antenna house of half-wavelength Theoretical Design if operation wavelength is long.Not only the weight of antenna house is bigger than normal, and not Can meet the needs of wide-angle Electromgnetically-transparent.In addition, the filtering characteristic of pure material antenna house is poor, easily by successive bands Interference.
Meta Materials can not only improve the electromagnetic wave penetrance of working frequency range, and it is special to show good filtering Property, suppress the Electromgnetically-transparent of adjacent band.Still the structure of further improvement Meta Materials it is expected, to improve the electricity of working frequency range The filter effect of the wave transmission effect of magnetic wave and the electromagnetic wave of suppression successive bands.
The content of the invention
In view of foregoing problems, it is an object of the invention to provide a kind of metamaterial composite structure that can improve wave transmission effect and Its manufacture method.
According to an aspect of the present invention, there is provided a kind of metamaterial composite structure, including:First Meta Materials feature board, including First medium substrate and the first micro structure array on first medium substrate;Second Meta Materials feature board, including second Jie Matter substrate and the second micro structure array on second medium substrate;And surpass positioned at the first Meta Materials feature board and the second material Expect the Meta Materials keriotheca between feature board, wherein, the Meta Materials keriotheca includes the multiple 3rd Meta Materials functions of stacking Plate, also, each in the multiple 3rd Meta Materials feature board includes the 3rd medium substrate and positioned at the 3rd medium substrate On the 3rd micro structure array.
Preferably, in the metamaterial composite structure, the multiple 3rd Meta Materials feature board forms the Meta Materials At least a portion side wall of keriotheca.
Preferably, in the metamaterial composite structure, the plane of the first Meta Materials feature board the second surpasses with described The plane of material function plate is parallel.
Preferably, in the metamaterial composite structure, the plane of the multiple 3rd Meta Materials feature board is parallel to each other, And the plane of the first Meta Materials feature board is vertical with the plane of the multiple 3rd Meta Materials feature board.
Preferably, in the metamaterial composite structure, the thickness of the Meta Materials keriotheca is the 3rd micro structure array Microstructure unit size integral multiple.
Preferably, in the metamaterial composite structure, the Meta Materials keriotheca also includes multiple adhesive linkages, described more The multiple 3rd Meta Materials feature board is bonded together by individual adhesive linkage.
Preferably, in the metamaterial composite structure, each in the multiple adhesive linkage includes multiple be spaced apart Bar arranged in parallel, and the bar forms at least another part side wall of the Meta Materials keriotheca.
Preferably, in the metamaterial composite structure, the bar of the adjacent adhesive linkage in the multiple adhesive linkage It is parallel to each other along its length bearing of trend.
Preferably, in the metamaterial composite structure, the bar of the adjacent adhesive linkage in the multiple adhesive linkage It is staggered along its width bearing of trend.
Preferably, in the metamaterial composite structure, the respective bar of adjacent adhesive linkage in the multiple adhesive linkage Shape thing spacing is equal.
Preferably, in the metamaterial composite structure, at least one of each adhesive linkage in the multiple adhesive linkage Individual bar is located at the centre position of the two neighboring bar of another adjacent adhesive linkage.
Preferably, in the metamaterial composite structure, the strip of the adhesive linkage of the odd number aspect of the multiple adhesive linkage Thing separates the first spacing, and the bar of the adhesive linkage of even number aspect separates the second spacing, wherein the first spacing is more than the second spacing.
Preferably, in the metamaterial composite structure, the length bearing of trend of the bar of the adhesive linkage and first The plane of Meta Materials feature board and the second Meta Materials feature board is vertical.
According to another aspect of the present invention, there is provided a kind of method for manufacturing metamaterial composite structure, including:It is more by stacking Individual 3rd Meta Materials feature board forms Meta Materials keriotheca;And by Meta Materials keriotheca be fixed on the first Meta Materials feature board and Between second Meta Materials feature board, wherein, the first Meta Materials feature board includes first medium substrate and positioned at first medium substrate On the first micro structure array, the second Meta Materials feature board include second medium substrate and on second medium substrate second Each in micro structure array, and the multiple 3rd Meta Materials feature board includes the 3rd medium substrate and is situated between positioned at the 3rd The 3rd micro structure array on matter substrate.
Preferably, in the process, forming Meta Materials keriotheca includes:Form the multiple 3rd Meta Materials function Plate;The multiple 3rd Meta Materials feature board is bonded together using the adhesive linkage between adjacent Meta Materials feature board, shape Into Meta Materials lamination;And Meta Materials lamination is cut into bar along stacking direction.
Preferably, in the process, forming the multiple 3rd Meta Materials feature board includes:Including medium substrate and In the composite plate of conductive layer thereon, conductive layer pattern is melted into micro structure array.
Preferably, in the process, after the step of Meta Materials lamination is cut into bar, in addition to:Along Stacking direction stretches Meta Materials lamination.
Preferably, in the process, Meta Materials keriotheca is fixed on the first Meta Materials feature board and the second Meta Materials Include between feature board:First Meta Materials feature board and the second Meta Materials feature board are placed in parallel;Meta Materials keriotheca is pressed from both sides Between the first Meta Materials feature board and the second Meta Materials feature board so that the plane of the multiple 3rd Meta Materials feature board is hung down Directly in the plane of the first Meta Materials feature board and the second Meta Materials feature board;And Meta Materials keriotheca is bonded in On first Meta Materials feature board and the second Meta Materials feature board.
According to the metamaterial composite structure of above-mentioned steps manufacture not only in the first Meta Materials feature board and the second Meta Materials work( Energy plate includes micro structure array, and also includes micro structure array in Meta Materials keriotheca.During Meta Materials keriotheca is used as Interbed, the effect for improving mechanical strength is not only acted as, and further improve electromagnetic penetration performance as Meta Materials.
In a preferred embodiment, micro structure array is formed in Meta Materials keriotheca in the side wall of cellular unit.Super material Expect keriotheca together with the first Meta Materials feature board and the second Meta Materials feature board, provided on three-dimensional dimension two kinds orientation Micro structure array.Therefore, the electromagnetic wave penetrance of working frequency range can be improved according to the metamaterial composite structure of the present invention.
In addition, even if the incident angle of electromagnetic wave is not perpendicular to main surface (i.e. the first Meta Materials of metamaterial composite structure The main surface of feature board), Meta Materials keriotheca is it is also possible that the electromagnetic wave of working frequency range is easier to penetrate.Therefore, the super material Material composite construction can improve the incident angle of electromagnetic wave.
Brief description of the drawings
By the description to the embodiment of the present invention referring to the drawings, above-mentioned and other purpose of the invention, feature and Advantage will be apparent from, in the accompanying drawings:
Fig. 1 to 7 shows the perspective in each stage of the manufacture method of metamaterial composite structure according to an embodiment of the invention Figure;
Fig. 8 shows the electromagnetic wave transmission characteristic curve of metamaterial composite structure according to an embodiment of the invention.
Embodiment
The present invention is more fully described hereinafter with reference to accompanying drawing.In various figures, identical element is using similar attached Icon is remembered to represent.For the sake of clarity, the various pieces in accompanying drawing are not necessarily to scale.Furthermore, it is possible to it is not shown some Known part.For brevity, the structure that can be obtained described in a width figure after several steps.
It should be appreciated that in the structure of outlines device, it is referred to as when by a floor, a region positioned at another floor, another area When domain " above " or " top ", can refer to above another layer, another region, or its with another layer, it is another Other layers or region are also included between individual region.Also, if device overturn, this layer, a region will be located at it is another Layer, another region " following " or " lower section ".
If, herein will be using " A is directly on B in order to describe located immediately at another layer, another region above scenario Face " or the form of presentation of " A is on B and abuts therewith ".In this application, " A is in B " represents that A is located in B, and Non- A is located in the doped region formed in B.
In this application, term " intermediate structure " refer to manufacture metamaterial composite structure each step in formed it is whole The general designation of structure, including all layers formed or region.In addition, term " plane of Meta Materials feature board " refers to Meta Materials work( Plane where the main surface of energy plate.
Describe hereinafter the present invention many specific details, such as micro-structural, material, size, handling process and Technology, to be more clearly understood that the present invention.But just as the skilled person will understand, can not be according to this Some specific details realize the present invention.
The present invention can be presented in a variety of manners, some of examples explained below.
Fig. 1 to 7 shows the perspective in each stage of the manufacture method of metamaterial composite structure according to an embodiment of the invention Figure.Before metamaterial composite structure is manufactured, according to required electromagnetic wave transmission characteristic, micro-structural list is obtained using design of Simulation The shape of member and distribution.Micro structure array includes multiple microstructure units.Each microstructure unit can be square shape, six sides Shape, box-shaped, cross, snowflake shape or its any combination.According to being actually needed, the chi of the microstructure unit in micro structure array It is very little can be with identical or different.
This method starts from the composite plate shown in Fig. 1, and composite plate includes medium substrate 111 and positioned at medium substrate 111 Conductive layer 112 on one surface.Medium substrate 111 can be made up of any suitable dielectric material, such as:Glass fibre, Ceramics, polytetrafluoroethylene (PTFE), ferroelectric material, ferrite material.Medium substrate 111 can be commercially available medium substrate, such as The medium substrate of model FR4, TP1.Conductive layer 112 can be made up of any suitable metal material, such as:Gold, silver, copper, Aluminium or its alloy, or be made up of any suitable non-metallic conducting material, such as:DOPOS doped polycrystalline silicon, graphite, CNT, Tin indium oxide.
Composite plate can also be commercially available printed circuit board (PCB) (PCB).PCB includes medium substrate and had been formed over Metal level thereon.
Then, according to advance simulation result, using micro fabrication, conductive layer 112 is patterned to micro structure array, As shown in Figure 2.Medium substrate 111 and micro structure array thereon form Meta Materials feature board 110 together.As an example, in Fig. 2 In show that the micro structure array of Meta Materials feature board 110 includes 6 × 6 microstructure units.In addition, as an example, show in fig. 2 Going out the microstructure unit of micro structure array includes the Part I 112-1 of square shape and the square positioned at the inside of Part I The Part II 112-2 of shape.It is appreciated that Meta Materials feature board 110 can include more or less microstructure units, and The shape of each microstructure unit can be the arbitrary shape based on simulation result.
Above-mentioned micro fabrication includes but is not limited to laser engraving and etching, preferably etches.The etching can use Dry etching, such as ion beam milling etching, plasma etching, reactive ion etching, laser ablation, or by using etchant solutions Selectivity wet etching.Before etching, using photoetching technique, formed on the surface of conductive layer 112 and include specific pattern The photoresist mask of case.A part of surface of exposure conductive layer 112 in the pattern openings of photoresist mask.Then enter Row etching, the expose portion of conductive layer 112 is removed via pattern openings.Gone after the etching by dissolving or being ashed in a solvent Except photoresist mask.
Then, bonding agent is smeared on a part of surface of Meta Materials feature board 110, so as in Meta Materials feature board 110 Upper formation adhesive linkage.Adhesive linkage includes multiple bar 121-1 to 121-3 arranged in parallel spaced apart, as shown in Figure 3.It is viscous Connecing layer can be made up of the bonding agent of any conventional heat cure or photocuring, such as epoxy resin.
Then, multiple Meta Materials feature boards are stacked, so as to utilize the adhesive linkage between adjacent Meta Materials feature board will Multiple Meta Materials feature boards are bonded together, and form Meta Materials lamination, as shown in Figure 4.According to the property of bonding agent, can pass through Heating or light irradiation cause bonding agent to solidify.
In Meta Materials lamination, adjacent Meta Materials feature board is separated by adhesive linkage.The bar edge of adjacent adhesive linkage It is parallel to each other its length bearing of trend.By the stacking direction of Meta Materials lamination (i.e. perpendicular to the side of Meta Materials feature board plane To) Z-direction is expressed as, the length bearing of trend of bar is expressed as X-direction, the width bearing of trend of bar is expressed as Y-direction.Preferably, the bar of adjacent adhesive linkage is staggered in the Y direction, strong so as to advantageously provide three-dimensional machinery Degree.As an example, Fig. 4 shows that the Meta Materials feature board 110-510 of 5 aspects is glued using the adhesive linkage 120-420 of 4 aspects Together, the respective bar spacing of adjacent adhesive linkage 120-420 is equal, and at least one of each adhesive linkage for knot Shape thing is located at the centre position of the two neighboring bar of another adjacent adhesive linkage.It is appreciated that more can be included The Meta Materials feature board and adhesive linkage of aspect, and the bar spacing of the adhesive linkage of every aspect can be with unequal.For example, institute The bar for stating the adhesive linkage of the odd number aspect of multiple adhesive linkages separates the first spacing, the bar of the adhesive linkage of even number aspect every The second spacing is opened, wherein the first spacing is more than the second spacing.
Then, for example with high-speed cutting machine, Meta Materials lamination is cut into bar, shape along stacking direction (i.e. Z-direction) Into Meta Materials keriotheca 100, as shown in Figure 5.The length L and thickness H of Meta Materials keriotheca 100 can cut into institute as needed The size needed.The length L of Meta Materials keriotheca 100 direction is parallel with bar 121-1 width bearing of trend Y, Meta Materials The thickness H of keriotheca 100 direction is parallel with bar 121-1 length bearing of trend X.The width W of Meta Materials keriotheca 100 Direction it is parallel with the stacking direction Z of Meta Materials lamination, and width W is corresponding with the thickness of Meta Materials lamination.Preferably, The length L and thickness H of Meta Materials keriotheca 100 cut into the integral multiple of microstructure unit size, so that it is guaranteed that microstructure unit Integrality, such as length L is 6 times of microstructure unit size, and thickness H is 2 times of microstructure unit size.Meta Materials honeycomb One cellular unit of layer 100 is by the two neighboring bar of same adhesive linkage and the two neighboring super material of the adhesive linkage both sides Expect that functional layer limits.
Then, as preferred step, using mechanical device, (hung down along the width W of Meta Materials keriotheca 100 Directly in the direction of Meta Materials feature board plane) carry out mechanical stretching.Mechanical stretching further expands Meta Materials keriotheca 100, makes The size increase of cellular unit is obtained, as shown in Figure 6.The mechanical stretching step can further improve final Meta Materials composite junction The strength-weight ratio of structure.It should be noted that mechanical stretching is acted predominantly on adhesive linkage, the thickness of the bar of adhesive linkage will be with Amount of tension and increase.Therefore, amount of tension should control the bar for adhesive linkage to be not the degree of fracture and be limited.
Then, using similar to the step with reference to described in Fig. 1 and 2, make the first Meta Materials feature board 130 and the second surpass material Expect feature board 230.First Meta Materials feature board 130 and the second Meta Materials feature board 230 are placed in parallel.First Meta Materials function The orientation of the micro structure array of plate 130 is equally oriented with the micro structure array of the second Meta Materials feature board 230.Then, will be super Material keriotheca 100 is clipped between the first Meta Materials feature board 130 and the second Meta Materials feature board 230 so that Meta Materials honeycomb The Meta Materials feature board 110-510 of layer 100 plane and the length bearing of trend of bar thereon with the first Meta Materials The plane of the Meta Materials feature board 230 of feature board 130 and second is vertical.The Meta Materials feature board 110-510 of Meta Materials keriotheca 100 Micro structure array formed in the side wall of the cellular unit of the Meta Materials keriotheca 100, its be orientated with the first Meta Materials work( The orientation of the micro structure array of the energy Meta Materials feature board 230 of plate 130 and second is vertical.
Using the method for pressing or using bonding agent, Meta Materials keriotheca 100 is fixed on the first Meta Materials feature board 130 and second between Meta Materials feature board 230, forms the metamaterial composite structure 1000 of sandwich structure, as shown in Figure 7.Make For example, respective two sides of Meta Materials feature board 110-510 of Meta Materials keriotheca 100 are bonded in the first Meta Materials respectively On the Meta Materials feature board 230 of feature board 130 and second, two ends of adhesive linkage 120-420 each bar are bonded respectively On the first Meta Materials feature board 130 and the second Meta Materials feature board 230.
Micro structure array of the first Meta Materials feature board 130 including medium substrate 131 and thereon.Figure 7 illustrates The micro structure array of one Meta Materials feature board 130 includes 3 × 3 microstructure unit 132-1 respectively.As an example, show in the figure 7 The microstructure unit 132-1 for going out the micro structure array of the first Meta Materials feature board 130 is regular hexagon ring.It is appreciated that first Meta Materials feature board 130 can include more or less microstructure units, and the shape of each microstructure unit can be Arbitrary shape based on simulation result.As an example, the first Meta Materials feature board 130 and the second Meta Materials feature board 230 is micro- The shape of array of structures is identical with distribution.Alternatively, the first Meta Materials feature board 130 and the second Meta Materials feature board 230 is micro- The shape of array of structures and distribution can be different.
According to the metamaterial composite structure of above-mentioned steps manufacture not only in the first Meta Materials feature board and the second Meta Materials work( Energy plate includes micro structure array, and also includes micro structure array in Meta Materials keriotheca.As an example, Meta Materials honeycomb The orientation and the orientation of the first Meta Materials feature board and the micro structure array of the second Meta Materials feature board of micro structure array in layer Vertically.As long as however, it is to be appreciated that the orientation of micro structure array in Meta Materials keriotheca and the first Meta Materials feature board and the The orientation of the micro structure array of two Meta Materials feature boards is different, it is possible to the micro-structural of two kinds of orientations is provided on three-dimensional dimension Array.Therefore, Meta Materials keriotheca not only acts as the effect for improving mechanical strength, and enter as Meta Materials as intermediate layer One step improves electromagnetic penetration performance.
Because the metamaterial composite structure of the present invention includes Meta Materials keriotheca, therefore the electromagnetism of working frequency range can be improved Ripple penetrance, and good filtering characteristic can be shown, suppress the Electromgnetically-transparent of adjacent band.In addition, utilize super material Expect the micro structure array orientation of keriotheca, it is possible to achieve wide-angle Electromgnetically-transparent.
Fig. 8 shows the electromagnetic wave transmission characteristic curve of metamaterial composite structure according to an embodiment of the invention.For mould Intend electromagnetic wave transmission characteristic, using metamaterial composite structure 1000 as shown in Figure 7.
Metamaterial composite structure 1000 includes the first Meta Materials feature board 130, the second Meta Materials feature board 230 and is clipped in two Meta Materials keriotheca 100 between person.The micro structure array of first Meta Materials feature board 130 and the second Meta Materials feature board 230 Identical, each microstructure unit is shaped as the regular hexagon that outer side size range is 5-10 millimeters, width range is 1-3 millimeters Ring.In the micro structure array of Meta Materials keriotheca 100, the size range of each microstructure unit is 5-10 millimeters, Mei Gewei Construction unit is shaped as the square loop and middle side that outer side size range is 5-10 millimeters, width range is 1-1.5 millimeters Long scope is the combined shaped of the box-shaped of 1-2 millimeters.Meta Materials keriotheca 100, the first Meta Materials feature board 130 and the second surpass The microstructure unit of material function plate 230 forms by the metal material of such as gold, silver, copper etc, thickness range 0.01- 0.03 millimeter.
Covering (not shown) is covered each by the upper and lower surface of metamaterial composite structure 1000.Covering as sheathing material, Such as it is made up of glass fibre or epoxy resin.Assuming that the material relative dielectric constant scope of covering is 2.5-3.2, exhaustion range For 0.003-0.007, thickness range is 0.4-0.8 millimeters, and honeycomb relative dielectric constant scope is 0.8-1.2, and exhaustion range is 0.0035-0.0055.Simulation result is as shown in figure 8, the metal micro structure battle array of the combined shaped formed in Meta Materials keriotheca 100 Row play a part of solid air in the side wall of cellular unit to 12.5-17.5GHz electromagnetic waves.Therefore, on the one hand, super Material keriotheca 100 provides mechanical strength.On the other hand, because Meta Materials keriotheca 100 includes metal micro structure, Meta Materials honeybee Nest layer 100 causes electromagnetic wave to be more easy to penetrate metamaterial composite structure 100.
The one side of metamaterial composite structure 1000 of the present invention ensure that the high wave transparent in working frequency range, and to working frequency range Outer signal serves the effect of filtering, and more excellent environmental protection is provided for the normal work of antenna.
In the above description, the ins and outs such as the patterning for each layer, etching are not described in detail.But It is it will be appreciated by those skilled in the art that can be by various technological means, to form the layer of required shape, region etc..In addition, In order to form same structure, those skilled in the art can be devised by and process as described above not fully identical side Method.In addition, although respectively describing each embodiment more than, but it is not intended that the measure in each embodiment can not have It is used in combination sharply.
Embodiments of the invention are described above.But the purpose that these embodiments are merely to illustrate that, and It is not intended to limit the scope of the present invention.The scope of the present invention is limited by appended claims and its equivalent.This hair is not departed from Bright scope, those skilled in the art can make a variety of alternatives and modifications, and these alternatives and modifications should all fall the present invention's Within the scope of.

Claims (13)

1. a kind of metamaterial composite structure, including:
First Meta Materials feature board, including first medium substrate and the first micro structure array on first medium substrate;
Second Meta Materials feature board, including second medium substrate and the second micro structure array on second medium substrate;With And
Meta Materials keriotheca between the first Meta Materials feature board and the second Meta Materials feature board,
Wherein, the Meta Materials keriotheca includes the multiple 3rd Meta Materials feature boards stacked, also, the multiple the three surpasses material Each in material feature board includes the 3rd medium substrate and the 3rd micro structure array on the 3rd medium substrate,
The Meta Materials keriotheca also includes multiple adhesive linkages, and the multiple adhesive linkage is by the multiple 3rd Meta Materials feature board It is bonded together, each in the multiple adhesive linkage includes multiple bars arranged in parallel spaced apart,
The cellular unit of the Meta Materials keriotheca includes the two neighboring bar of adhesive linkage and one adhesive linkage The two neighboring 3rd Meta Materials feature board of both sides, described two 3rd Meta Materials feature boards are parallel to each other,
The 3rd Meta Materials feature board forms a part of side wall of the cellular unit, and the bar forms the Meta Materials At least another part side wall of cellular unit.
2. metamaterial composite structure according to claim 1, wherein the plane of the first Meta Materials feature board with it is described The plane of second Meta Materials feature board is parallel.
3. metamaterial composite structure according to claim 2, wherein the plane of the multiple 3rd Meta Materials feature board that This is parallel, and the plane of the first Meta Materials feature board is vertical with the plane of the multiple 3rd Meta Materials feature board.
4. metamaterial composite structure according to claim 1, wherein, the thickness of the Meta Materials keriotheca is the 3rd micro- knot The integral multiple of the microstructure unit size of structure array.
5. metamaterial composite structure according to claim 1, wherein the bar in the multiple adhesive linkage is grown along it It is parallel to each other to spend bearing of trend.
6. metamaterial composite structure according to claim 5, wherein adjacent adhesive linkage in the multiple adhesive linkage Bar is staggered along its width bearing of trend.
7. metamaterial composite structure according to claim 5, wherein the adjacent adhesive linkage in the multiple adhesive linkage is each From bar spacing it is equal.
8. metamaterial composite structure according to claim 6, wherein each adhesive linkage in the multiple adhesive linkage At least one bar is located at the centre position of the two neighboring bar of another adjacent adhesive linkage.
9. metamaterial composite structure according to claim 5, wherein the adhesive linkage of the odd number aspect of the multiple adhesive linkage Bar separate the first spacing, the bar of the adhesive linkage of even number aspect separates the second spacing, wherein the first spacing is more than the Two spacing.
10. metamaterial composite structure according to claim 5, wherein the length bearing of trend of the bar of the adhesive linkage It is vertical with the plane of the first Meta Materials feature board and the second Meta Materials feature board.
11. a kind of method for manufacturing metamaterial composite structure, including:
Form multiple 3rd Meta Materials feature boards;
The multiple 3rd Meta Materials feature board is bonded together using multiple adhesive linkages, forms Meta Materials lamination;
Meta Materials lamination is cut into bar along stacking direction, so as to form Meta Materials keriotheca;
The bar of the adhesive linkage is stretched along stacking direction;And
Meta Materials keriotheca is fixed between the first Meta Materials feature board and the second Meta Materials feature board,
Wherein, the first Meta Materials feature board includes first medium substrate and the first micro-structural battle array on first medium substrate Row,
Second Meta Materials feature board includes second medium substrate and the second micro structure array on second medium substrate, and
Each in the multiple 3rd Meta Materials feature board includes the 3rd medium substrate and on the 3rd medium substrate 3rd micro structure array,
Each adhesive linkage in the multiple adhesive linkage includes multiple bars arranged in parallel spaced apart,
The cellular unit of the Meta Materials keriotheca includes the two neighboring bar of adhesive linkage and one adhesive linkage The two neighboring 3rd Meta Materials feature board of both sides, described two 3rd Meta Materials feature boards are parallel to each other,
The 3rd Meta Materials feature board forms a part of side wall of the cellular unit, and the bar forms the Meta Materials At least another part side wall of cellular unit.
12. according to the method for claim 11, wherein forming the multiple 3rd Meta Materials feature board includes:
In the composite plate of conductive layer including medium substrate and thereon, conductive layer pattern is melted into micro structure array.
13. according to the method for claim 11, wherein Meta Materials keriotheca is fixed on into the first Meta Materials feature board and the Include between two Meta Materials feature boards:
First Meta Materials feature board and the second Meta Materials feature board are placed in parallel;
Meta Materials keriotheca is clipped between the first Meta Materials feature board and the second Meta Materials feature board so that the multiple 3rd Plane of the plane of Meta Materials feature board perpendicular to the first Meta Materials feature board and the second Meta Materials feature board;And
Meta Materials keriotheca is bonded on the first Meta Materials feature board and the second Meta Materials feature board.
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