CN104246248A - Actuator, and precision machinery provided with same - Google Patents
Actuator, and precision machinery provided with same Download PDFInfo
- Publication number
- CN104246248A CN104246248A CN201380002394.8A CN201380002394A CN104246248A CN 104246248 A CN104246248 A CN 104246248A CN 201380002394 A CN201380002394 A CN 201380002394A CN 104246248 A CN104246248 A CN 104246248A
- Authority
- CN
- China
- Prior art keywords
- guide rail
- fixed
- actuator
- pedestal
- fixed plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H19/00—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion
- F16H19/02—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion for interconverting rotary or oscillating motion and reciprocating motion
- F16H19/06—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion for interconverting rotary or oscillating motion and reciprocating motion comprising flexible members, e.g. an endless flexible member
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/008—Systems with a plurality of bearings, e.g. four carriages supporting a slide on two parallel rails
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/004—Fixing of a carriage or rail, e.g. rigid mounting to a support structure or a movable part
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/04—Ball or roller bearings
- F16C29/06—Ball or roller bearings in which the rolling bodies circulate partly without carrying load
- F16C29/0633—Ball or roller bearings in which the rolling bodies circulate partly without carrying load with a bearing body defining a U-shaped carriage, i.e. surrounding a guide rail or track on three sides
- F16C29/0635—Ball or roller bearings in which the rolling bodies circulate partly without carrying load with a bearing body defining a U-shaped carriage, i.e. surrounding a guide rail or track on three sides whereby the return paths are provided as bores in a main body of the U-shaped carriage, e.g. the main body of the U-shaped carriage is a single part with end caps provided at each end
- F16C29/0638—Ball or roller bearings in which the rolling bodies circulate partly without carrying load with a bearing body defining a U-shaped carriage, i.e. surrounding a guide rail or track on three sides whereby the return paths are provided as bores in a main body of the U-shaped carriage, e.g. the main body of the U-shaped carriage is a single part with end caps provided at each end with balls
- F16C29/064—Ball or roller bearings in which the rolling bodies circulate partly without carrying load with a bearing body defining a U-shaped carriage, i.e. surrounding a guide rail or track on three sides whereby the return paths are provided as bores in a main body of the U-shaped carriage, e.g. the main body of the U-shaped carriage is a single part with end caps provided at each end with balls with two rows of balls, one on each side of the rail
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H19/00—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion
- F16H19/02—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion for interconverting rotary or oscillating motion and reciprocating motion
- F16H19/06—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion for interconverting rotary or oscillating motion and reciprocating motion comprising flexible members, e.g. an endless flexible member
- F16H2019/0681—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion for interconverting rotary or oscillating motion and reciprocating motion comprising flexible members, e.g. an endless flexible member the flexible member forming a closed loop
- F16H2019/0686—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion for interconverting rotary or oscillating motion and reciprocating motion comprising flexible members, e.g. an endless flexible member the flexible member forming a closed loop the flexible member being directly driven by a pulley or chain wheel
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Bearings For Parts Moving Linearly (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Transmission Devices (AREA)
Abstract
This actuator is provided with: a drive belt (1); a guide rail (2); a slider (3); and a liner guidance device (4). In the actuator, a bearing of the linear guidance device (4) is fixed to an end at a drive pulley (52) side, said end being one end of the guide rail (2) in a length direction. A guidance rail of the linear guidance device (4) is used in a state of being fixed to a base (7).
Description
Technical field
This invention relates to actuator, the standby driving by band of described actuating device and along the reciprocating slide mass of guide rail.
Background technique
In the past, use actuator in high-precision manufacturing installation, testing fixture, the conveying device etc., the slide mass of this actuator drives by the band based on electric rotating machine and along guide rail to-and-fro motion.The slide mass forming this actuator possesses the bearing for guide rail.Rotating band hangs around between driving pulley and driven pulley.As the conventional example of such actuator, there are in patent documentation 1 and patent documentation 2 and record structure.
The actuator being recorded in patent documentation 1 and patent documentation 2 has main bearing (slide mass of fixing carrying object) along respective guide rail movement and supplementary bearing (slide mass).These bearings have Hydrostatic Cushion, between described Hydrostatic Cushion and each guide rail, form pressure-feed air bearing.
Such actuator uses usually under following state: length direction one end of guide rail utilizes bolt to be fixed in the driving pulley side of pedestal, and the other end utilizes bolt to be fixed in driven pulley side.
Thus, when because guide rail is different from the material of pedestal, the difference of thermal expansion coefficient is larger, because temperature variation causes generation between guide rail and pedestal flexible poor.And even if guide rail is identical with the material of pedestal, it is flexible poor also to produce when both produce temperature difference.Further, stretch if produce between guide rail and pedestal poor, then can produce deformation at guide rail, therefore, need the countermeasure implementing to prevent this situation.
In patent documentation 3, following content is described: the groove that the bottom of inserting track is set at the base (pedestal) of the track for installing linear guidance device as its countermeasure, the bottom of track is inserted in this groove, and, arrange pressing component, at least one side of track presses to groove inner side surface by this pressing component.
Prior art document
Patent documentation
Patent documentation 1: Japanese Unexamined Patent Publication 2001-248703 publication
Patent documentation 2: Japanese Unexamined Patent Publication 2008-101642 publication
Patent documentation 3: Japanese Unexamined Patent Publication 2002-349564 publication
Summary of the invention
The problem that invention will solve
But in the countermeasure being recorded in patent documentation 3, the kinematic accuracy of linear guidance device depends on the bottom surface of the groove being arranged on pedestal and the surface accuracy of side, thus the craspedodrome precision (straightness accuracy) of slide mass likely reduces.Therefore, be not only bottom surface and the side of the groove of pedestal, and the face of the track contacted with these faces also needs to process accurately, thus processing cost increases.In addition, special track is needed according to the material of pedestal.
Thus, for the countermeasure being recorded in patent documentation 3, the leeway be still improved in cost.
The problem of this invention is, possessing by band driving along in the actuator of the reciprocating slide mass of guide rail, make guide rail produce the problem of deformation during difference flexible for generation between pedestal, can prevent with the countermeasure lower than the countermeasure cost being recorded in patent documentation 3.
For solving the means of problem
In order to solve above-mentioned problem, the actuator of a mode of this invention has: (1) rotating band, and it hangs around between driving pulley and driven pulley; (2) guide rail, itself and described rotating band configure side by side; (3) slide mass, it has Hydrostatic Cushion, between described Hydrostatic Cushion and described guide rail, form pressure-feed air bearing, described slide mass by described rotating band driving and along described guide rail to-and-fro motion; And (4) linear guidance device, it has bearing, guide rail and rolling element, (5) described actuator uses under following state: described bearing is fixed on length direction one end of described guide rail and the end of described driving pulley side, and described guide rail is fixed in pedestal.
That is, the actuator of a mode of this invention is according to the actuator with described key element (1) ~ (3), it is characterized in that, has described key element (4) and meets described key element (5).
In the actuator of a mode of this invention, pedestal is fixed on via linear guidance device in the end of the length direction one end and driving pulley side (heating source) with the guide rail of the actuator of described structure (1) ~ (3), thus, relatively moved linearly relative to guide rail by the bearing of linear guidance device, the flexible difference produced at guide rail and pedestal is absorbed.Thus, when guide rail and pedestal produce flexible difference, guide rail is prevented to produce deformation.
In the actuator of a mode of this invention, general linear guidance device is set in length direction one end of guide rail and the end of driving pulley side, thus, implements to prevent the countermeasure producing deformation due to the flexible difference with pedestal at guide rail.This countermeasure can realize with the cost lower than the countermeasure being recorded in patent documentation 3.
The actuator of a mode of this invention guides actuator to be suitable use as the straight line of precision optical machinery (precision processing machine, close examination machinery, precision sweep device, semiconductor device manufacturing apparatus, flat panel display manufacturing apparatus etc.).
Invention effect
The actuator of this invention is the countermeasure lower than the countermeasure cost being recorded in patent documentation 3, when producing flexible difference between guide rail and pedestal, can prevent from producing deformation at guide rail.
Accompanying drawing explanation
Fig. 1 is the plan view of the actuator represented in mode of execution.
Fig. 2 is the side view of the actuator represented in mode of execution.
Fig. 3 is the sectional view along the A-A line in Fig. 2.
Fig. 4 is the sectional view along the B-B line in Fig. 2.
Embodiment
Below, this working of an invention mode is described, but this invention is not limited to this mode of execution.
As depicted in figs. 1 and 2, the actuator in this mode of execution is formed by with lower part: rotating band 1, guide rail 2, slide mass 3, linear guidance device 4, driven pulley 51, driving pulley 52 and driving pulley 52 is carried out to the motor 6 of rotary actuation.Rotating band 1 hangs around driven pulley 51 and driving pulley 52.Guide rail 2 has the sectional shape of the concavity that upside is opened wide, and guide rail 2 is made up of base plate 22 and opposed two side components 21.
Length direction one end of guide rail 2 is fixed on driving side fixed plate 25, and the housing 52a of driving pulley 25 is fixed on this driving side fixed plate 25.The length direction the other end of guide rail 2 is fixed on slave end fixed plate 26, and the housing 51a of driven pulley 51 is fixed on this slave end fixed plate 26.Driving side fixed plate 25 is installed on pedestal 7 via linear guidance device 4.Guide rail 2 such as the pottery such as aluminium oxide is made or iron and steel is made, pedestal 7 such as stone material make, iron and steel makes or aluminum alloy is made.
As shown in Figure 3, linear guidance device 4 is made up of guide rail 41, two bearings 42 and ball (rolling element) 43, and bearing 42 utilizes bolt 75 to be fixed on driving side fixed plate 25.Guide rail 41 utilizes bolt 76 to be fixed on base side fixed plate 71.Base side fixed plate 71 utilizes bolt 77 to be fixed on pedestal 7.In addition, as shown in Figure 4, slave end fixed plate 26 utilizes bolt 78 to be fixed on protuberance 7a, and this protuberance 7a is formed higher than the baseline L of pedestal 7.
That is, length direction one end of guide rail 2 and the end of driving pulley 52 side are installed on pedestal 7 via driving side fixed plate 25, linear guidance device 4 and base side fixed plate 71.Further, the length direction the other end of guide rail 2 and the end winding support of driven pulley 51 side are in the protuberance 7a being formed higher than the baseline L of pedestal 7.
As shown in Figure 3 and Figure 4, slide mass 3 is formed by with lower part: upper plate 31, and it is configured at the upside of guide rail 2; Base plate 32, it is configured at the downside of the base plate 22 of guide rail 2; And pair of side plates 33,34, they are configured at the outside of each side component 21 of guide rail 2.
And, in the upper and lower of the both end sides (position opposed with the upper surface of each side component 21 of guide rail 2) of the lower surface of upper plate 31, the both end sides (position opposed with the upper surface of each side component 21 of guide rail 2) of the upper surface of base plate 32 and the internal surface of pair of side plates 33,34, be configured with the Hydrostatic Cushion 31a ~ 34a formed by porous graphite respectively.Pressure-feed air bearing is formed between described Hydrostatic Cushion 31a ~ 34a and each side component 21 of guide rail 2.
As shown in Figure 2 to 4, the lower side of rotating band 1 is configured in the recess of guide rail 2.The fixing part (being configured at the part of the central authorities in the slide mass 3 of lower side) 10 of rotating band 1 is fixed on the upper plate 31 of slide mass 3 via assembly 8.
As shown in Figure 3, assembly 8 possesses plate part 81, lower plate member 82 and leaf spring 83, and wherein, plate part 81 and lower plate member 82 clip the fixing part 11 of rotating band 1 from above-below direction.The fixing part 10 of rotating band 1 is configured in the recess 82a of lower plate member 82, and plate part 81 utilizes bolt 91 to be fixed on lower plate member 82.Further, a pair lower end sheet 83a of leaf spring 83 utilizes bolt 92 to be fixed on plate part 81, and the top board 83b of leaf spring 83 utilizes bolt 93 to be fixed on the upper plate 31 of slide mass 3.
According to the actuator in this mode of execution, relatively moved linearly relative to guide rail 41 by the bearing 42 of linear guidance device 4, absorbed, therefore, it is possible to prevent from producing deformation at guide rail 2 in the flexible difference that guide rail 2 and pedestal 7 produce along with the difference of material or temperature difference.
Further, by arranging general linear guidance device 4, the countermeasure preventing from producing deformation at guide rail 2 due to the flexible difference with pedestal 7 is implemented.This countermeasure can realize with the cost lower than the countermeasure being recorded in patent documentation 3.
In addition, in this embodiment, use there are two bearings 42 and the rolling element linear guidance device that is ball as linear guidance device, but the kind of the quantity of bearing and rolling element is not limited to this.
Label declaration
1: rotating band;
10: the fixing part of rotating band;
2: guide rail;
21: side component;
22: base plate;
25: driving side fixed plate;
26: slave end fixed plate;
3: slide mass;
31: the upper plate of slide mass;
32: the base plate of slide mass;
33,34: the side plate of slide mass;
31a ~ 34a: the Hydrostatic Cushion of slide mass;
4: linear guidance device;
41: guide rail;
42: bearing;
43: ball (rolling element);
51: driven pulley;
52: driving pulley;
6: motor;
7: pedestal;
71: base side fixed plate;
8: assembly;
81: plate part;
82: lower plate member;
82a: the recess of lower plate member;
83: leaf spring;
83a: the lower end sheet of leaf spring;
83b: the top board of leaf spring.
Claims (5)
1. an actuator, it has:
Rotating band, it hangs around between driving pulley and driven pulley;
Guide rail, itself and described rotating band configure side by side;
Slide mass, it has Hydrostatic Cushion, between described Hydrostatic Cushion and described guide rail, form pressure-feed air bearing, described slide mass by described rotating band driving and along described guide rail to-and-fro motion; And
Linear guidance device, it has bearing, guide rail and rolling element,
Described actuator uses under following state: described bearing is fixed on length direction one end of described guide rail and the end of described driving pulley side, and described guide rail is fixed in pedestal.
2. actuator according to claim 1, wherein,
Described guide rail is that pottery is made or iron and steel is made,
Described pedestal is that stone material is made, iron and steel is made or aluminum alloy is made.
3. actuator according to claim 1, wherein,
Length direction one end of described guide rail is fixed on driving side fixed plate, and the housing of described driving pulley is fixed on this driving side fixed plate,
The length direction the other end of described guide rail is fixed on slave end fixed plate, and the housing of described driven pulley is fixed on this slave end fixed plate,
Described slave end fixed plate is directly fixed on described pedestal,
Described driving side fixed plate is fixed on described pedestal via described linear guidance device.
4. actuator according to claim 3, wherein,
Described slave end fixed plate is fixed on protuberance, and described protuberance is formed higher than the baseline of described pedestal.
5. a precision optical machinery, it actuator possessed described in any one in Claims 1 to 4 guides actuator as straight line.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013042087A JP5780251B2 (en) | 2013-03-04 | 2013-03-04 | Actuator and precision machine equipped with the same |
| JP2013-042087 | 2013-03-04 | ||
| PCT/JP2013/007297 WO2014136165A1 (en) | 2013-03-04 | 2013-12-11 | Actuator, and precision machinery provided with same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104246248A true CN104246248A (en) | 2014-12-24 |
Family
ID=51490734
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201380002394.8A Pending CN104246248A (en) | 2013-03-04 | 2013-12-11 | Actuator, and precision machinery provided with same |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5780251B2 (en) |
| KR (1) | KR20150128791A (en) |
| CN (1) | CN104246248A (en) |
| WO (1) | WO2014136165A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108254073A (en) * | 2017-12-27 | 2018-07-06 | 苏州科爱佳自动化科技有限公司 | A kind of scanning means to operate steadily |
| CN108750980A (en) * | 2018-04-13 | 2018-11-06 | 上海大学 | A kind of platform of lifting and translation |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5833934B2 (en) * | 1979-05-22 | 1983-07-23 | 日本精工株式会社 | Rolling bearing device |
| JPS6330817Y2 (en) * | 1983-03-30 | 1988-08-17 | ||
| JPH05116002A (en) * | 1991-10-30 | 1993-05-14 | Makino Milling Mach Co Ltd | Main spindle device for machine tool |
| JP2001248703A (en) * | 2000-03-07 | 2001-09-14 | Nsk Ltd | Actuator |
| JP2002349564A (en) * | 2001-05-31 | 2002-12-04 | Thk Co Ltd | Track rail mounting structure of linear guide device |
| CN2791362Y (en) * | 2005-03-10 | 2006-06-28 | 上海大学 | Differential wheel linear driving device based on synchronous toothed belt |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62138505U (en) * | 1986-02-21 | 1987-09-01 | ||
| JP2008101642A (en) * | 2006-10-17 | 2008-05-01 | Nsk Ltd | Actuator |
-
2013
- 2013-03-04 JP JP2013042087A patent/JP5780251B2/en active Active
- 2013-12-11 CN CN201380002394.8A patent/CN104246248A/en active Pending
- 2013-12-11 WO PCT/JP2013/007297 patent/WO2014136165A1/en active Application Filing
- 2013-12-11 KR KR1020157027297A patent/KR20150128791A/en not_active Application Discontinuation
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5833934B2 (en) * | 1979-05-22 | 1983-07-23 | 日本精工株式会社 | Rolling bearing device |
| JPS6330817Y2 (en) * | 1983-03-30 | 1988-08-17 | ||
| JPH05116002A (en) * | 1991-10-30 | 1993-05-14 | Makino Milling Mach Co Ltd | Main spindle device for machine tool |
| JP2001248703A (en) * | 2000-03-07 | 2001-09-14 | Nsk Ltd | Actuator |
| JP2002349564A (en) * | 2001-05-31 | 2002-12-04 | Thk Co Ltd | Track rail mounting structure of linear guide device |
| CN2791362Y (en) * | 2005-03-10 | 2006-06-28 | 上海大学 | Differential wheel linear driving device based on synchronous toothed belt |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108254073A (en) * | 2017-12-27 | 2018-07-06 | 苏州科爱佳自动化科技有限公司 | A kind of scanning means to operate steadily |
| CN108750980A (en) * | 2018-04-13 | 2018-11-06 | 上海大学 | A kind of platform of lifting and translation |
| CN108750980B (en) * | 2018-04-13 | 2020-01-17 | 上海大学 | Platform capable of lifting and translating |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2014136165A1 (en) | 2014-09-12 |
| JP5780251B2 (en) | 2015-09-16 |
| KR20150128791A (en) | 2015-11-18 |
| JP2014169752A (en) | 2014-09-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4510007B2 (en) | XY guide table | |
| US8047095B2 (en) | XY table actuator | |
| US20070257564A1 (en) | Sliding device with onboard moving-magnet linear motor | |
| CN103010725A (en) | Transfer mechanism | |
| WO2016106980A1 (en) | Self-adjusting static pressure plane guide rail | |
| CN101681683A (en) | X-y table actuator | |
| KR101243659B1 (en) | Cocking structure of actuator sliding block | |
| CN108533612B (en) | High-precision air-floating shaft system based on glass guide rail and glass guide rail processing method thereof | |
| CN104246248A (en) | Actuator, and precision machinery provided with same | |
| CN108015564A (en) | A kind of ultrasonic wave added overcomes friction linear motion platform | |
| CN103731005A (en) | Permanent magnet motor, components thereof and permanent magnet motor platform | |
| CN102632491B (en) | Full-enclosed type three-dimensional direct-driving motor platform device | |
| CN105846648A (en) | Precise bonding device for array magnet steel of linear motor | |
| US20140157915A1 (en) | Gantry apparatus | |
| CN111664323A (en) | Assembly comprising a main support, an intermediate support arranged on the main support and a scale arranged on the intermediate support | |
| CN108278957B (en) | Shape measuring device and moving mechanism | |
| CN204075213U (en) | A kind of rotation power spreading device manufacturing three-dimensional body for dusty material | |
| CN206997567U (en) | A kind of material-changing device of multi-station punch | |
| CN203887630U (en) | Air floating type linear grating ruler device | |
| CN203534534U (en) | Novel bicylinder guide rail grid stroke displacement sensor | |
| US20090101769A1 (en) | Arrangement for mounting a linear electric motor stand | |
| JP2012146944A (en) | Component mounting device | |
| CN108626243B (en) | Linear guide system, linear guide device, control device and control method thereof | |
| WO2014136164A1 (en) | Actuator, and precision machinery provided with same | |
| JP2009038909A (en) | Method and stopper device for deciding origin in actuator |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20141224 |
|
| WD01 | Invention patent application deemed withdrawn after publication |