CN104236494B - Detect encoder in position - Google Patents

Detect encoder in position Download PDF

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CN104236494B
CN104236494B CN201410436409.8A CN201410436409A CN104236494B CN 104236494 B CN104236494 B CN 104236494B CN 201410436409 A CN201410436409 A CN 201410436409A CN 104236494 B CN104236494 B CN 104236494B
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micro
mentioned
adjustment time
time
encoder
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CN104236494A (en
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加藤庆显
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Mitutoyo Corp
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    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B20/00Signal processing not specific to the method of recording or reproducing; Circuits therefor
    • G11B20/10Digital recording or reproducing
    • G11B20/10009Improvement or modification of read or write signals
    • G11B20/10222Improvement or modification of read or write signals clock-related aspects, e.g. phase or frequency adjustment or bit synchronisation
    • G11B20/10259Improvement or modification of read or write signals clock-related aspects, e.g. phase or frequency adjustment or bit synchronisation simultaneous timing recovery for multiple parallel tracks
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24428Error prevention
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24471Error correction
    • G01D5/24476Signal processing
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/245Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
    • G01D5/2454Encoders incorporating incremental and absolute signals
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/008Recording on, or reproducing or erasing from, magnetic tapes, sheets, e.g. cards, or wires
    • G11B5/00813Recording on, or reproducing or erasing from, magnetic tapes, sheets, e.g. cards, or wires magnetic tapes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34746Linear encoders

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  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Optical Transform (AREA)

Abstract

A kind of displacement detecting encoder, it includes graduated scale and detector, and the position detecting circuit of each positional information with exportable 2 tracks, the displacement detecting encoder include:Velocity checking circuits, it is arranged in above-mentioned detector, and detects the relative velocity of relative scale chi;Postpone generative circuit, by the micro-adjustment time of each positional information based on relative velocity and 2 tracks, between 2 output request signals of the positional information for promoting position detecting circuit 2 tracks of output, be set the time difference.Thus, when detector moves relative to graduated scale, the site error of the caused measure direction of principal axis between multiple tracks can be suppressed by making the position detection moment between multiple tracks consistent.

Description

Detect encoder in position
The cross reference of related application
The Application No. JP Patents 2013- submitted on June 7th, 2013 including specification, drawings and the claims The disclosure of 121291 application, quoted here by reference to its entirety.
Technical field
The present invention relates to position to detect encoder, and in particular, the present invention relates to following positions to detect encoder, the position Detection encoder is suitable for linear encoder, still can be by making when detector relatively moves relative to graduated scale Position detection moment between multiple tracks is consistent, suppresses the site error of the caused measure direction of principal axis between multiple tracks.
Background technology
In TOHKEMY 2009-257891 documents (being referred to as patent document 1 below), following uniform encondings are disclosed Device, it includes being provided with the graduated scale of 2 tracks (ABS illustration case (pattern) and INC patterns (pattern)) and relative to quarter Spend the detector of chi relative movement, and the position detecting circuit of each positional information with exportable 2 tracks.At this In the linear encoder of sample, in order to improve reliability, the identical that position detecting circuit can detect multiple tracks determines axial position Put simultaneously cross reference.That is, in such linear encoder, even if detector is determining direction of principal axis relatively relative to graduated scale It is mobile, when the position detection moment in 2 tracks is consistent, still direction of principal axis position can be determined to detect identical by each track Put.
But in linear encoder as patent document 1, each position detecting circuit for 2 tracks be present The mutually different situation of structure, be substantially difficult to make the position detection moment in 2 tracks identical.In addition, in detector phase For graduated scale when measure direction of principal axis relatively moves, following misgivings be present:If position detection moment differs, root According to the translational speed, the site error between 2 tracks significantly occurs.
The content of the invention
The present invention proposes that problem of the invention is to provide a kind of position detection coding in order to solve the above problems Device, even if detector moves relative to graduated scale, by making the position detection moment between multiple tracks consistent, it can suppress The site error of caused measure direction of principal axis between multiple tracks.
Invention described in the technical scheme 1 of the application is related to a kind of position detection encoder, position detection encoder bag The graduated scale for being provided with multiple tracks and the detector relatively moved relative to the graduated scale are included, there is exportable the plurality of rail The position detecting circuit of each positional information in road, position detection encoder include:Speed detecting component, it is arranged at State in detector, and detect the relative velocity relative to above-mentioned graduated scale;Delay unit, by based on above-mentioned relative velocity and The micro-adjustment time of each positional information in above-mentioned multiple tracks, for promoting above-mentioned position detecting circuit output above-mentioned Between multiple output request signals of the positional information of multiple tracks, the time difference is set, by the program, solves above-mentioned problem.
In the invention described in technical scheme 2 in the application, including arithmetic unit, the arithmetic unit are obtained by above-mentioned more The time diffusion value of each positional information of the individual above-mentioned multiple tracks for exporting request signal and exporting, to the mutual time Difference value between differential value carries out computing, and the time diffusion value of the difference value divided by above-mentioned relative velocity is obtained into division fortune Calculation value, above-mentioned micro-adjustment time determine in the way of the division arithmetic value converges on zero.
In the invention described in technical scheme 3 in the application, division arithmetic value when determining the above-mentioned micro-adjustment time is set For the rolling average for the division arithmetic value obtained in each in multiple positions of above-mentioned graduated scale.
In the invention described in technical scheme 4 in the application, the above-mentioned micro-adjustment time is stored, this micro-adjustment time quilt It is set to continuously close to the micro-adjustment time of last time.
In the invention described in technical scheme 5 in the application, the above-mentioned micro-adjustment time is stored, this micro-adjustment time quilt It is set to the micro-adjustment time close to last time in classification shape.
In the invention described in technical scheme 6 in the application, including arithmetic unit, the arithmetic unit is to by above-mentioned multiple Difference value between each positional information for the above-mentioned multiple tracks for exporting request signal and exporting carries out computing, by the difference Value divided by above-mentioned relative velocity obtain division arithmetic value, and the above-mentioned micro-adjustment time converges on zero side according to the division arithmetic value Formula determines.
In the invention described in technical scheme 7 in the application, division arithmetic value when determining the above-mentioned micro-adjustment time is set For the rolling average for the division arithmetic value obtained in each in multiple positions of above-mentioned graduated scale.
In the invention described in technical scheme 8 in the application, the above-mentioned micro-adjustment time is stored, by this micro-adjustment time It is set to continuously close to the micro-adjustment time of last time.
In the invention described in technical scheme 9 in the application, the above-mentioned micro-adjustment time is stored, by this micro-adjustment time It is set to the micro-adjustment time close to last time in classification shape.
According to the present invention, even if detector moves relative to graduated scale, by detecting the position between multiple tracks Moment is consistent, can suppress the site error of the caused measure direction of principal axis between multiple tracks.
According to the description below preferred embodiment, these and other new feature and advantage of the invention become bright It is aobvious.
Referring to the drawings, the preferred embodiment is illustrated, in the figure, through whole accompanying drawings, using identical Label represents identical part.
Brief description of the drawings
Fig. 1 is the general block diagram of the linear encoder of the 1st embodiment of the present invention.
Fig. 2 is the summary construction diagram for representing graduated scale and detector.
Fig. 3 is the general block diagram of the linear encoder of the 2nd embodiment of the present invention.
Embodiment
With reference to the accompanying drawings, specifically an example of embodiments of the present invention is illustrated.
By Fig. 1, Fig. 2, the 1st embodiment of the present invention is illustrated.
As shown in Figure 1 and Figure 2, linear encoder 100 includes graduated scale 102 (scale) and the phase relative to graduated scale 102 To mobile detector 110.
As shown in Fig. 2 in above-mentioned graduated scale 102,2 tracks (the 1st track 104 and the 2nd track 106) are provided with, this 2 Extend along measure direction of principal axis X individual parallel track.Specifically, the 1st track 104 is ABS tracks, and the 2nd track 106 is INC rails Road, but it is all ABS tracks that the 1st, the 2nd track, which can also be, can also all be INC tracks.
As shown in figure 1, in above-mentioned detector 110, the 1st position detecting circuit 112, the 2nd position detecting circuit are provided with 114th, differential circuit 116,118,124, difference channel 120, velocity checking circuits (speed detecting component) 122, division arithmetic electricity Road 126, more novel circuit 128, delay generative circuit (delay unit) 130 and storage part 132.In addition, arithmetic unit is at least by micro- Parallel circuit 116,118,124, difference channel 120, form with division arithmetic circuit 126.
In the 1st position detecting circuit 112, the 2nd position detecting circuit 114, by output request signal St1 described later, St2, the 1st track 104, each positional information of the 2nd track 106 of graduated scale 102 relative to detector 110 can be exported Xf、Xs.1st position detecting circuit 112 is that the pattern signal of ABS tracks is handled to the 1st track 104, obtains simultaneously carry-out bit Confidence breath Xf (also referred to as Xf (t)).With respect to the situation, the 2nd position detecting circuit 114 is the one of INC tracks to the 2nd track 106 The pattern signal of fixed cycle is handled (counting), obtains simultaneously output position information Xs (also referred to as Xs (t)).Detect 1st position Circuit 112, the 2nd position detecting circuit 114 are respectively from the detection moment of the pattern signal of each track 104,106 to positional information Xf, Xs output time, there is time delay Tf, Ts.That is, time delay Tf, Ts is that the pattern of each track 104,106 is believed Number carry out calculation process time.Herein, (also referred to as accorded with relative velocity v (t) in the relative scale chi 102 of detector 110 When number v) moving, the position X (t0) of moment t0 detector 110 passes through formula (1) and represented.
Mathematical expression 1
But as shown in Fig. 2 if it is considered that the time delay Tf of the 1st position detecting circuit 112, in moment tf from the 1st The positional information Xf (tf) for putting the 1st track 104 that detection circuit 112 exports is by (Fig. 2 void of detector 110 in moment tf-Tf Line) detection positional information.Then, in the positional information of the moment tf detectors 110 obtained by the 1st position detecting circuit 112 Xf (tf) can be represented by formula (2).
Mathematical expression 2
Similarly, if it is considered that the time delay Ts of the 2nd position detecting circuit 114, micro-adjustment is being delayed from moment tf The positional information Xs for the 2nd track 106 that ts (=tf+tadj) exports from the 2nd position detecting circuit 114 at the time of time tadj amount (ts) it is, in the positional information that moment (tf+tadj)-Ts is detected by detector 110.Therefore, detected in moment ts by the 2nd position The positional information Xs (ts) for the detector 110 that circuit 114 obtains can be represented by formula (3).
Mathematical expression 3
In addition, constant Cyaw is represented, because detector 110 causes relative to the unjustified grade in the yaw directions of graduated scale 102 , the 2nd track 106 relative to the measure direction of principal axis X of the 1st track 104 alignment error.
As shown in figure 1, differential circuit 116,118 is connected with the 1st, the 2nd position detecting circuit 112,114 respectively, carry out from The time diffusion of positional information Xf, Xs of 1st, the 2nd position detecting circuit 112,114 output.That is, differential circuit 116,118 is asked Go out the time diffusion of 2 tracks, 104,106 each positional information Xf, Xs by 2 output request signal St1, St2 output Value dXf/dt, dXs/dt.That is, in differential circuit 116,118, according to formula (2), formula (3), formula (4), formula (5) are obtained respectively Value.Its time diffusion value dXf/dt, dXs/dt is input in difference channel 120.
Mathematical expression 4
As shown in figure 1, difference channel 120 is to the difference value (position between mutual time diffusion value dXf/dt, dXs/dt Error E r (=Xs (ts)-Xf (tf)) time diffusion value) dEr/dt progress computings, export to division arithmetic circuit 126.That is, In difference channel 120, according to formula (4), formula (5), the value of formula (6) is obtained.
Mathematical expression 5
Herein, if it is assumed that the position detection from the position detection moment tf-Tf of the 1st track 104 to the 2nd track 106 Moment (tf+tadj)-Ts time is fully short, during this period without relative velocity v change, then in difference channel 120, root The value of formula (7) is obtained according to formula (6).In addition, in formula (7), the poor Ts-Tf of time delay is defined as circuit delay time Td (Td=Ts-Tf).
Mathematical expression 6
On the other hand, as shown in figure 1, velocity checking circuits 122 detect the relatively fast of the relative scale chi 102 of detector 110 V is spent, outputs it to differential circuit 124.Differential circuit 124 obtains relative velocity v time diffusion value dv/dt, outputs it To division arithmetic circuit 126.
As shown in figure 1, division arithmetic circuit 126 is by difference value dEr/dt divided by relative velocity v time diffusion value dv/dt To obtain division arithmetic value dEr/dv, renewal loop 128 is outputed it to.That is, in division arithmetic circuit 126, according to formula (7) To obtain the value of formula (8).
Mathematical expression 7
As shown in figure 1, more novel circuit 128 is connected with delay generative circuit 130, updates and set in generative circuit 130 is postponed Fixed micro-adjustment time tadj.Micro-adjustment time tadj according to if division arithmetic value dEr/dv is zero immovable mode it is true It is fixed.That is, the micro-adjustment time tadjo that can be obtained to last time, this micro-adjustment time tadj is as formula (9) or formula (10) And obtain.That is, in more novel circuit 128, according to the micro-adjustment time tadjo of last time, obtained as formula (9) or formula (10) This micro-adjustment time tadj.In addition, the symbol beta shown in Fig. 1 symbolically represents to use with division arithmetic value dEr/dv's Coefficient or division arithmetic value dEr/dv are the situation of the function of independent variable.
Mathematical expression 8
In other words, micro-adjustment time tadj is determined in the way of division arithmetic value dEr/dv converges on zero.In addition, formula (9) coefficient k is positive real number, can according to handled time interval, micro-adjustment time tadj convergence precision/speed and It is appropriate to determine (formula (15) is also identical).In addition, the function sgn (independent variable) of formula (10) is sign function, by independent variable B (= DEr/dv symbol), be timing output 1 in independent variable B as shown in formula (11), for 0 when export 0, to be negative When export -1 ((formula (16) is also identical).In addition, appropriate coefficient and function sgn (independent variable) can be multiplied.Formula (9) is intended to make this Secondary micro-adjustment time tadj is continuously (progressively) close to the micro-adjustment time tadjo of last time, in contrast, formula (10) is intended Make micro-adjustment time tadjos of this micro-adjustment time tadj in classification shape close to last time.In more novel circuit 128, with this Secondary micro-adjustment time tadj, the micro-adjustment time tadjo of last time is updated, is stored in storage part 132.
Mathematical expression 9
Sgn (B)=1 (B > 0), 0 (B=0), -1 (B < 0) (11)
As shown in figure 1, delay generative circuit 130 is following circuit:Relative to promoting, the 1st position detecting circuit 112 is defeated The 1st output request signal St1 gone out, the 2nd output request signal St2 delays for promoting the 2nd position detecting circuit 114 to export are existed The micro-adjustment time tadj set in more novel circuit 128 amount.That is, delay generative circuit 130 passes through based on the micro- of relative velocity v Each positional information Xf, Xs in adjustment time tadj and 2 tracks 104,106, for promoting the 1st, the 2nd position to detect Circuit 112114 is exported between 2 output request signals St1, St2 of the output of positional information Xf, Xs of 2 tracks 104,106 Time difference is set.The micro-adjustment time, tadj was in more novel circuit 128, updated at any time.That is, in detector 110, difference is monitored The relative velocity v of value dEr/dt and detector 110 time diffusion value dv/dt, the side for being zero according to division arithmetic value dEr/dv Formula carries out feedback control to micro-adjustment time tadj.Thus, according to the position detection time one of the 1st track 104, the 2nd track 106 The mode of cause is controlled.
In addition, the 1st, the 2nd output request signal St1, St2 output request signal St that have been branch signal, it is by from volume The output request circuit (not shown) of output of the outside to request position information Xf, Xs of encoder 100 of code device 100 and it is defeated Go out.
In this way, in the present embodiment, due in the way of division arithmetic value dEr/dv is zero to the micro-adjustment time Tadj carries out feedback control, therefore determines the micro-adjustment time according to the consistent mode of the position detection moment of 2 tracks 104,106 tadj.That is, even if because of the resistance value for the 1st, the 2nd position detecting circuit 112,114, deviation of capacitance etc. in each inspection In the case that time delay Tf, Ts of slowdown monitoring circuit 112,114 have deviation, still without requiring the work for being adjusted operation respectively Husband.Meanwhile by carrying out feedback control, obtain micro-adjustment time tadj with the reckoning only by calculating compared with, can Accurately make position detection moment identical.Thus, it is possible to prevent because of relative velocity v variation and 2 tracks 104,106 it Between caused measure direction of principal axis X site error Er change.
In addition, in the present embodiment, even in producing the 2nd track because of misalignment in yaw directions of detector 110 etc. In the case of the 106 alignment error Cyaw relative to the measure direction of principal axis X of the 1st track 104, the alignment error can be also excluded Cyaw.I.e., additionally it is possible to exclude because the misalignment such as yaw directions independent of relative velocity v the reason for and in 2 tracks 104th, between 106 caused alignment error Cyaw influence.
Therefore, in the present embodiment, even in relative to graduated scale 102 and detector 110 move when, by making 2 Position detection moment between track 104,106 is consistent, thus can suppress the caused measure axle between 2 tracks 104,106 Direction X site error Er.
Above-mentioned embodiment is enumerated, the present invention is described, and still, the present invention is not limited to the 1st embodiment. I.e., it is clear that the change of improvement and design in the substantive scope for not departing from the present invention is even more possible.
Such as in the 1st embodiment, set 3 differential circuits 116,118,124, by division arithmetic circuit 126 and Computing is carried out to division arithmetic value dEr/dv, but the present invention is not limited thereto, such as, or the 2nd embodiment party shown in Fig. 3 Formula.
In the 2nd embodiment, the 1st, the 2nd position detecting circuit 212,214, the output of velocity checking circuits 22 are not entered Row time diffusion, and computing micro-adjustment time tadj.It is described below.In addition, arithmetic unit is at least by difference channel 220, division arithmetic circuit 226 is formed.Below, for the part repeated with the 1st embodiment, latter two of label are identical, The repetitive description thereof will be omitted.
Difference channel 220 to by 2 output request signal St1, St2 and each in 2 tracks 204,206 for exporting Positional information Xf, Xs between difference value (site error) Er carry out computing, output it to division arithmetic circuit 226.That is, In difference channel 220, according to formula (4), formula (5), the value of formula (12) is obtained.
Mathematical expression 10
Herein, if it is assumed that the position detection from the position detection moment tf-Tf of the 1st track 204 to the 2nd track 206 Moment (tf+tadj)-Ts time is fully short, during this period without relative velocity v change, then in difference channel 220, root The value of formula (13) is obtained according to formula (12).
Mathematical expression 11
Er=v (tadj-Td)+Cyaw (13)
On the other hand, as shown in figure 3, velocity checking circuits 222 detect detector 210 relative to the relative of graduated scale 202 Speed v, output it to division arithmetic circuit 226.
As shown in figure 3, difference value Er divided by relative velocity v are obtained division arithmetic value Er/v by division arithmetic circuit 226, Output it to more novel circuit 228.That is, in division arithmetic circuit 226, the value of (14) is obtained according to formula (13).In addition, this When, alignment error Cyaw is minimum (Cyaw < < v) with respect to relative velocity v.
Mathematical expression 12
As shown in figure 3, more novel circuit 228 is connected with delay generative circuit 230, updates and set in generative circuit 230 is postponed Fixed micro-adjustment time tadj.Micro-adjustment time tadj according to if division arithmetic value Er/v is zero immovable mode it is true It is fixed.That is, if the micro-adjustment time that last time is obtained is tadjo, this micro-adjustment time tadj can be such as formula (15) or formula (16) obtain like that.That is, in more novel circuit 228, according to the micro-adjustment time tadjo of last time, such as formula (15) or formula (16) Obtain this micro-adjustment time tadj like that.
Mathematical expression 13
In other words, micro-adjustment time tadj is determined in the way of division arithmetic value Er/v converges to zero.
As shown in figure 3, delay generative circuit 230 is following circuits:Relative to promoting, the 1st position detecting circuit 212 is defeated The 1st output request signal St1 gone out, the 2nd output request signal St2 delays for promoting the 2nd position detecting circuit 214 to export are existed The micro-adjustment time tadj set in more novel circuit 228 amount.That is, the micro-adjustment time tadj and 2 based on relative velocity v is passed through Each positional information Xf, Xs of individual track 204,206, for promoting the 1st, the 2nd position detecting circuit 212214 to export 2 Between 2 output request signals St1, St2 of positional information Xf, Xs of track 204206, the time difference is set.The micro-adjustment time Tadj is momentarily updated by more novel circuit 228.That is, in detector 210, the phase of difference value Er and detector 210 is monitored To speed v, feedback control is carried out to micro-adjustment time tadj in the way of division arithmetic value Er/v is zero.Thus, according to the 1st The consistent mode of track 204, the position detection time of the 2nd track 206 is controlled.
Therefore, equally in the 2nd embodiment, due in the way of division arithmetic value Er/v is zero to the micro-adjustment time Tadj carries out feedback control, therefore determines the micro-adjustment time according to the consistent mode of the position detection moment of 2 tracks 204,206 tadj.That is, even in because being used for the 1st, the 2nd position detecting circuit 212,214 resistance value, capacitance inconsistent etc. and everybody In the case of putting time delay Tf, Ts of detection circuit 212,214 there is deviation, the flower of operation need not be still adjusted respectively Take time and energy.Meanwhile by carrying out feedback control, obtain micro-adjustment time tadj with the reckoning only by calculating compared with, It can accurately make position detection moment identical.Then, can prevent because of relative velocity v changes and between 2 tracks 204,206 Caused measure direction of principal axis X site error Er change.
Further, in the present embodiment, due to operand compared with the 1st embodiment, can be made less, therefore can more at a high speed Ground carries out calculation process, or can reduce the cost of encoder 200.
In addition, in the above-described embodiment, the micro-adjustment time tadj exported from more novel circuit uses to be transported by division Calculate circuit and 1 division arithmetic value of computing and obtain, but the present invention is not limited thereto.For example determine the micro-adjustment time Division arithmetic value during tadj can also be each shifting of division arithmetic value to obtain in multiple positions by graduated scale It is dynamic average.
That is, in the 1st embodiment, more novel circuit can replace formula (9), formula (10), and output passes through formula (17), formula (18) institute The micro-adjustment time tadj shown.In addition, in the 2nd embodiment, more novel circuit can replace formula (15), formula (16), and output passes through Micro-adjustment time tadj shown in formula (19), formula (20).In addition, symbol m represents more than 2 integer.
Mathematical expression 14
, it is determined that division arithmetic value during micro-adjustment time tadj, is set as example being transported by division arithmetic circuit Calculate in the case of the rolling average of each division arithmetic value obtained of multiple positions of graduated scale, certain error detection can be reduced Micro-adjustment time tadj change, can suppress temporary transient messy.
In addition, in the above-described embodiment, position detection encoder is the photo-electric linear encoder of reflection-type, but this Invention is not limited to this.Such as or transmission-type photo-electric linear encoder.Or also can not linearly it be compiled for photo-electric Code device, and it is the magnetic-type position detection encoder with the electrode pattern (pattern) periodically formed, electrostatic capacity type position Put detection encoder, there is the induction position detection coding of the coil pattern (coil pattern) periodically formed The position detection encoder of device etc., other detection mode.
In addition, in the above-described embodiment, track has 2, and position detecting circuit also accordingly has 2, but originally Invention is not limited to this.For example the track of more than 3 in position detection encoder, can be also set.
The utilization possibility of industry
The present invention relates to position detect encoder, the position detection encoder include be provided with multiple tracks graduated scale and The detector relatively moved relative to the graduated scale, the positional information with each track in exportable the plurality of track Position detecting circuit, the present invention can be widely applicable for photoelectric type position detection encoder, magnetic-type position detection encoder, electrostatic Capacity formula position detection encoder, induction position detection encoder.
It will be obvious to those skilled in the art that above-mentioned exemplary embodiment is merely illustrative, its table Show the application of the principle of the present invention.Without departing from the spirit and scope of the present invention, those skilled in the art can hold Easily draw other structures that are a variety of and changing.

Claims (8)

1. encoder is detected in a kind of position, position detection encoder possesses the graduated scale that is provided with multiple tracks and relative to this Graduated scale and the detector relatively moved, and the detection of the position with each positional information that can export the plurality of track Circuit, position detection, which encodes, to be characterised by, including:
Speed detecting component, it is arranged in above-mentioned detector, and detects the relative velocity relative to above-mentioned graduated scale;
Delay unit, during by the micro-adjustment of the positional information of each track based on above-mentioned relative velocity and above-mentioned multiple tracks Between, for promote above-mentioned position detecting circuit export above-mentioned multiple tracks positional information multiple output request signals it Between, the time difference is set;And
Arithmetic unit, obtain by above-mentioned multiple output request signals each positional information of above-mentioned multiple tracks for exporting Time diffusion value, between the mutual time diffusion value difference value carry out computing, it is micro- with the time of above-mentioned relative velocity Score value divided by the difference value obtain division arithmetic value;
The above-mentioned micro-adjustment time determines in the way of the division arithmetic value converges on zero.
2. encoder is detected in position according to claim 1, it is characterised in that
Division arithmetic value when determining the above-mentioned micro-adjustment time be set as multiple positions of above-mentioned graduated scale it is each in obtain Division arithmetic value rolling average.
3. encoder is detected in position according to claim 1, it is characterised in that
The above-mentioned micro-adjustment time is stored, this micro-adjustment time is set as changing from the micro-adjustment Time Continuous of last time.
4. encoder is detected in position according to claim 1, it is characterised in that
The above-mentioned micro-adjustment time is stored, this micro-adjustment time is set as the micro-adjustment time from last time in classification shape change.
5. encoder is detected in position according to claim 1, it is characterised in that including:
Arithmetic unit, to by above-mentioned multiple output request signals and each positional information of above-mentioned multiple tracks for exporting it Between difference value carry out computing, division arithmetic value is obtained with above-mentioned relative velocity divided by the difference value;
The above-mentioned micro-adjustment time determines in the way of the division arithmetic value converges on zero.
6. encoder is detected in position according to claim 5, it is characterised in that
Division arithmetic value when determining the above-mentioned micro-adjustment time be set as multiple positions of above-mentioned graduated scale it is each in obtain Division arithmetic value rolling average.
7. encoder is detected in position according to claim 5, it is characterised in that
The above-mentioned micro-adjustment time is stored, this micro-adjustment time was set to continuously close to the micro-adjustment time of last time.
8. encoder is detected in position according to claim 5, it is characterised in that
The above-mentioned micro-adjustment time is stored, this micro-adjustment time is set to the micro-adjustment time in classification shape close to last time.
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Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6533360B2 (en) * 2013-10-30 2019-06-19 キヤノン株式会社 Position detection device, lens apparatus having the same, and imaging apparatus
JP6517516B2 (en) 2015-01-21 2019-05-22 株式会社ミツトヨ Encoder
CN107063304B (en) * 2017-04-06 2020-05-05 中国科学院光电技术研究所 Photoelectric tracking measurement equipment pointing error verification method
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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101910798A (en) * 2007-11-26 2010-12-08 堡盟霍普纳有限公司 Rotary encoder comprising internal error control and method therefor

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5068529A (en) * 1988-12-22 1991-11-26 Nikon Corporation Absolute position detection encoder
JP4174089B2 (en) * 1997-07-15 2008-10-29 キヤノン株式会社 Lens position detection device
JP2000193489A (en) * 1998-12-25 2000-07-14 Mitsutoyo Corp Position detector and cable used therefor
JP2002333341A (en) * 2001-05-09 2002-11-22 Meidensha Corp Device for detecting location of movable body
US20080052033A1 (en) * 2004-08-12 2008-02-28 University Of Virginia Patent Foundation Method, Apparatus and Computer Program Product of Aliasing Discriminator for Encoder Interfaces
JP5286584B2 (en) * 2007-06-19 2013-09-11 株式会社ミツトヨ Absolute position measuring encoder
JP5203024B2 (en) 2008-04-15 2013-06-05 株式会社ミツトヨ Absolute position measuring encoder
JP5484980B2 (en) 2010-03-24 2014-05-07 株式会社ミツトヨ Optical encoder
US8637805B2 (en) * 2010-03-29 2014-01-28 Mitutoyo Corporation Optical encoder using off-axis imaging through a lens
JP2011226987A (en) * 2010-04-22 2011-11-10 Nikon Corp Encoder
JP5833878B2 (en) * 2011-10-05 2015-12-16 株式会社ミツトヨ Absolute length encoder
JP6071181B2 (en) * 2011-10-14 2017-02-01 キヤノン株式会社 Encoder and device equipped with the same
JP6150462B2 (en) * 2012-05-02 2017-06-21 キヤノン株式会社 Position detection encoder and apparatus using the same
JP5968062B2 (en) * 2012-05-02 2016-08-10 キヤノン株式会社 Position detection encoder and apparatus using the same

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101910798A (en) * 2007-11-26 2010-12-08 堡盟霍普纳有限公司 Rotary encoder comprising internal error control and method therefor

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