Summary of the invention
Based on this, be necessary for the problems referred to above, provide a kind of durability good and the laser process equipment that working (machining) efficiency is high.
A kind of laser processing is also provided.
A kind of laser process equipment, comprise control system, laser controller, laser instrument, light path system, galvanometer scanning system, condenser lens and localization tool, described control system is for controlling the selection of the workflow of described laser process equipment, the drafting of processing graphic pattern and machined parameters; Described laser controller is for controlling generation and the interruption of laser; Described laser instrument is at least two, and each laser instrument generates beam of laser light beam; Described laser beam forms light path independent of each other in described light path system; The number of the galvanometer scanning device in described galvanometer scanning system and one_to_one corresponding identical with the number of the independent optical paths formed in described light path system; Described condenser lens and described galvanometer scanning device one_to_one corresponding; Described laser instrument produces laser beam under the control of described laser controller, and described laser beam edge independently light path enters into the galvanometer scanning device corresponding with described light path and processes towards processed products after the focusing of described condenser lens; Described localization tool is used for positioning the processed product in laser processing procedure, comprise the first panel, and be arranged at microscope carrier, the first locating piece, the second locating piece, the 3rd locating piece, the first positioning component and the second positioning component on described first panel; Described first locating piece, described second locating piece are fixedly installed on the side of described microscope carrier, and are formed to roll with described processed product and be connected; Described 3rd locating piece is fixedly installed on side adjacent with described second fixed block on described microscope carrier; Described first positioning component is arranged at side relative with described first locating piece on described microscope carrier, and described second positioning component is arranged at side relative with described 3rd locating piece on described microscope carrier; Described first positioning component and described second positioning component include cylinder, running fix block and flexible member; Described running fix block and described processed product are for being slidably connected; Described running fix block to be used for when described first cylinder charge by described cylinder supports away from described microscope carrier, and described flexible member is used for shrinking when the venting of described cylinder making described first locating piece near described microscope carrier and fixing described processed product.
Wherein in an embodiment, described microscope carrier is vacuum microscope carrier.
Wherein in an embodiment, described localization tool also comprises water cooling plant; Waterway is provided with in described first panel; Described water cooling plant is for reducing the temperature of described localization tool.
Wherein in an embodiment, described localization tool also comprises the second panel, rotational structure, height adjusting structure and fixed structure; Described second panel is arranged at the side described first panel not being arranged microscope carrier, and is connected with described first panel by height adjusting structure and fixed structure; Described rotational structure is arranged on a corner position place on described second panel, for rotating described second panel to correct position; Described height adjusting structure is for regulating described first panel to preset height and being fixed by described fixed structure.
Wherein in an embodiment, described height adjusting structure is screw thread pair, and described fixed structure is the parallel flexible member of at least two arranged.
Wherein in an embodiment, described localization tool also comprises Mobile base, and described Mobile base and described second plate contact, for regulating the position of described localization tool.
Wherein in an embodiment, also comprise linear motion platform; Described localization tool is arranged on described linear motion platform; Described localization tool and described linear motion platform are removable connection; Described localization tool is mobile with the movement of described linear motion platform; Described linear motion platform is provided with the first station tool group and the second station tool group; Described first station tool group and described second station tool group set gradually along the length direction of described linear motion platform; The number of the localization tool in described first station tool group and described second station tool group all with the number one_to_one corresponding of described galvanometer scanning device.
Wherein in an embodiment, also comprise laser smog cleaning system and handpiece Water Chilling Units; Described laser smog cleaning system is for purifying the dust produced in laser processing procedure; Described handpiece Water Chilling Units is used for cooling to described laser process equipment.
A laser processing for laser process equipment according to above-mentioned any one, comprises step: start laser instrument by laser controller, and access control system; Start described control system, described control system is initialized; Draw processing graphic pattern and carry out the selection of machined parameters; Processed product is positioned on the microscope carrier of the localization tool in the first localization tool group; The cylinder venting of the first positioning component in localization tool is made the running fix block in the first positioning component draw close to described processed product under the contraction of flexible member and is fixed on by described processed product between described first locating piece, the second locating piece and described first positioning component; To the cylinder venting of the second positioning component, the running fix block in the second positioning component is drawn close under the contraction of flexible member to described processed product, and described processed product is fixed between described first locating piece, described second locating piece, described 3rd locating piece, described first positioning component and described second positioning component, complete location towards processed products; Product is processed.
Wherein in an embodiment, adding man-hour to the product in the localization tool in the first localization tool group, processed product is fixed in the second localization tool, and waits for that the Product processing in the first localization tool group completes; The first localization tool machined is shifted out from Working position, the second localization tool group is moved to Working position place simultaneously and process, complete one and take turns processing.
Above-mentioned laser process equipment, in position fixing process, first locating piece of localization tool is connected for rolling with processed product with the second locating piece, with the running fix block in the first positioning component for being slidably connected, and processed product and the 3rd locating piece and the second positioning component produce without rubbing in whole position fixing process, the frictional force of processed product and locating piece can be reduced, and reduce because of fricative the wearing and tearing of locating piece, make locating piece durable, thus make localization tool have the advantage of durable, and make laser process equipment have good durability.Above-mentioned laser process equipment, by arranging at least two laser instruments and form separate light path in light path system, effectively reduce the complexity of light path, light path simply makes light path control simple and easy to do, and the unstability of equipment reduces.Produce at least two bundle laser beams by least two laser instruments simultaneously and form independently laser beam by independently light path and process towards processed products, effectively improve working (machining) efficiency.Further, by multiple laser instrument is set and corresponding formed many independently light path can process multiple product simultaneously, can operating personnel be reduced while improve efficiency, reduce production cost.
Detailed description of the invention
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.
The invention provides a kind of laser process equipment, comprise control system, laser controller, laser instrument, light path system, galvanometer scanning system, condenser lens and localization tool.Control system is for controlling the selection of the workflow of laser process equipment, the drafting of processing graphic pattern and machined parameters.Laser controller is for controlling generation and the interruption of laser.Laser instrument is at least two, and each laser instrument generates beam of laser light beam.Laser beam forms light path independent of each other in light path system.The number of the galvanometer scanning device in galvanometer scanning system and one_to_one corresponding identical with the number of the independent optical paths formed in light path system.Condenser lens and described galvanometer scanning device one_to_one corresponding.Laser instrument produces laser beam under the control of laser controller, and laser beam edge independently light path enters into the galvanometer scanning device corresponding with light path and processes towards processed products after the focusing of condenser lens.
Refer to accompanying drawing, wherein Fig. 1 is the structure chart of the laser process equipment in a specific embodiment; Fig. 2 is the partial enlarged drawing in 200 regions in Fig. 1; Fig. 3 be embodiment illustrated in fig. 1 in linear motion platform 670 and the partial enlarged drawing of localization tool 610.Fig. 4 is the top view of the localization tool in an embodiment in laser process equipment; Fig. 5 is the side view of the localization tool in an embodiment; Fig. 6 is the upward view of the first panel 210 of middle localization tool embodiment illustrated in fig. 5; Fig. 7 is the side view of the localization tool in another embodiment.
Refer to Fig. 4.Figure 4 shows that the structural representation of the localization tool in an embodiment.Localization tool is used for positioning the processed product in laser processing procedure.Localization tool comprises the first panel 110, first locating piece 120, second locating piece 130, the 3rd locating piece 140, first positioning component 150 and the second positioning component 160.First panel 110 is provided with microscope carrier 112, for placing processed product.In the present embodiment, microscope carrier 112 is vacuum microscope carrier, can provide Incision Machine's, realizes the steadiness ensureing product orientation on the basis of not destroy product.First locating piece 120 and the second locating piece 130 are fixedly installed on the side of microscope carrier 112, the 3rd locating piece 140 is fixedly installed on side adjacent with the second locating piece 130 on microscope carrier 112.First positioning component 150 is arranged at side relative with the first locating piece 120 on microscope carrier 112.Second positioning component 160 is arranged at side relative with the 3rd locating piece 140 on microscope carrier 112.In the present embodiment, the first locating piece 120 and the second locating piece 130 are fixed block, are formed to roll to be connected with processed product.Particularly, the first locating piece 120 and the second locating piece 130 include rotating shaft and rotating body, and rotating body rotates around rotating shaft.Rotating body can be cylinder or spheroid.3rd locating piece 140 is fixed block, can be connected with processed product for being slidably connected or rolling.
First positioning component 150 and the second positioning component 160 include cylinder, running fix block and flexible member.In the present embodiment, flexible member is extension spring.Particularly, the first positioning component 150 comprises cylinder 152, running fix block 154 and extension spring 156.Second positioning component 160 comprises cylinder 162, running fix block 164 and extension spring 166.Cylinder 152 can carry out inflate and exit (or oppositely inflating), and cylinder 152 comprises push rod 153, and cylinder 162 comprises push rod 163.When cylinder 152 is inflated, the push rod 153 of cylinder 152 supports running fix block 154 away from microscope carrier 112, realizes location release towards processed products.When cylinder 152 is exitted, the push rod 153 of cylinder 152 leaves running fix block 154, no longer plays a supportive role to running fix block 154.Running fix block 154 is drawn close to microscope carrier 112 under the contraction of extension spring 156, and is fixed on by processed product between the first locating piece 120, second locating piece 130 and the first positioning component 150.Adopt extension spring to compress equipment to be processed, make it have certain elasticity, processed product will be out of shape because thrust is too large, cause machining accuracy error.Meanwhile, the tension speed of extension spring can be subject to the constraint of cylinder 152 contraction speed, and the impact caused when compressing towards processed products can well control.
In the present embodiment, localization tool, in position fixing process, first carries out the motion of the first positioning component 150, then carries out the motion of the second positioning component 160.Be fixed on after between the first locating piece 120, second locating piece 130 and the first positioning component 150 by processed product at the first positioning component 150, the cylinder 162 of the second positioning component 160 is exitted, and push rod 163 is away from running fix block 164.Running fix block 164 is drawn close to microscope carrier 112 under the contraction of extension spring 166, and promotes processed product and move to the 3rd locating piece 140.In moving process, processed product is connected for rolling with the first locating piece 120, second locating piece 130, produces rolling friction, the running fix block 154 in processed product and the first positioning component 150 for being slidably connected, generation sliding friction.This structure can effectively reduce the frictional force of processed product and locating piece, and reduce because of fricative to the wearing and tearing of locating piece, make locating piece durable, and then make localization tool have the advantage of durable.Meanwhile, because running fix block 154 pairs of location precision of the first positioning component 150 are very micro-, therefore can adopt and be convenient for changing and convenient sliding friction form of installing.Processed product is constantly drawn close to the 3rd locating piece 140 by the second positioning component 160, finally make processed product be fixed between the first locating piece 120, second locating piece 130, the 3rd locating piece 140, first positioning component 150 and the second positioning component 160, realize location towards processed products.
Above-mentioned localization tool first locating piece 120 in position fixing process is connected for rolling with processed product with the second locating piece 130, with the running fix block 154 in the first positioning component 150 for being slidably connected, and processed product and the 3rd locating piece 140 and the second positioning component 160 produce without rubbing in whole position fixing process.Above-mentioned localization tool can reduce the frictional force of workpiece and locating piece, and reduce because of fricative to the wearing and tearing of locating piece, make locating piece durable, thus make localization tool have the advantage of durable.
In the present embodiment, localization tool also comprises water cooling plant.The bottom (not arranging the side of the first microscope carrier) of the first panel 110 is provided with waterway (not shown), and the sidepiece of the first panel 110 is then provided with waterway cold water import/export 172 and 174.Can produce a large amount of heats in laser processing procedure, high temperature can make localization tool produce slight deformation and affect machining accuracy.By arranging water cooling plant in localization tool, by the cold water in waterway, the heat produced in laser processing procedure can be taken away, to reduce the slight deformation that high temperature produces tool, can mismachining tolerance be reduced.
Fig. 5 is the localization tool side view in an embodiment.In the present embodiment, localization tool comprises first surface panel 210, also comprises the second panel 220, rotational structure 230, height adjusting structure 240 and fixed structure 250.Rotational structure 230 is arranged at a corner position place of the second panel 220, for being realized the adjustment to the second panel 220 position by rotation.Arrangement for adjusting height 240, for regulating the height of the first panel 210, makes it adjust to the plane of machining need.Fixture 250 for being fixed it after the height of arrangement for adjusting height 240 to the first panel 210 regulates.In the present embodiment, rotational structure 230 is a steel ball, and height adjusting structure 240 is screw thread pair structure.Particularly, height adjusting structure 240 is that fine thread is secondary.Fixed structure 250 is flexible member.In the present embodiment, flexible member is spring.Fixed structure 250 comprises the parallel spring 252,254,256 and 258 arranged.In other examples, height adjusting structure 240 and fixed structure 250 also can adopt other can realize the structure of identical function.First panel 210 and the second panel 220 are strained by spring 252,254,256 and 258, making it when regulating plane not because contact gap produces deviation, effectively improve the precision of location.
Fig. 6 be embodiment illustrated in fig. 5 in the upward view of the first panel 210 of localization tool, i.e. the polycrystalline substance schematic diagram of the first panel 210.As shown in Figure 6, be provided with the support level 310 of whirligig, the installation position 320 of height adjusting structure 240, the installation position 330 of fixed structure 250 and cold water cavity 260 in the bottom of the first panel 210, also have cold water cavity cold water import/export 262 and 264.
Fig. 7 is the side view of the localization tool in another embodiment.In the present embodiment, localization tool comprises the first panel 410, second panel 420, Mobile base 430 and mount pad 440.Mobile base 430 is arranged between mount pad 440 and the second panel 420, and for regulating the position of localization tool, the height realized between processed product and condenser lens regulates, and makes product be in processing focal position place.
Refer to Fig. 1, laser process equipment in Fig. 1 comprises aforesaid localization tool 610, also comprises control system (not shown), laser controller 620, laser instrument 630, light path system, galvanometer scanning system 650 and condenser lens 660 and linear motion platform 670, laser smog cleaning system and handpiece Water Chilling Units 690.Laser instrument 630 comprises two in the present embodiment, forms the first separate light path L1 and the second light path in light path system.In the present embodiment, the first light path L1 and the second light path symmetrical.Galvanometer scanning system 650 comprises coming two independently galvanometer scanning devices.Condenser lens 660 is two, lays respectively at the outlet of the laser beam of galvanometer scanning device, for generation of high-octane focal beam spot.In the present embodiment, laser controller 620 is two, for carrying out independent control to laser instrument 630.Laser controller 620 can carry out unified control by control system.In other examples, laser controller 620 also can be one, to realize controlling the unified of laser instrument 630.
Optical smoke cleaning system comprises optical smoke clarifier 682 and optical smoke purification assembly 684.In laser processing procedure, because high-energy hot spot is radiated on product, make object illumination position transient evaporation, and condensation forms dust in atmosphere.Use fume cleaning system can effectively purify the dust produced in laser processing procedure, the possibility of the camera lens pollution because dust causes and hot spot instability is reduced greatly, effectively ensure that the degree of accuracy of processing.Handpiece Water Chilling Units 690, for cooling to laser process equipment, ensures the normal operation of equipment.In the present embodiment, equipment bay 692 and table top 694 is also comprised.Wherein, table top 692 is marble material.Equipment bay 692 and table top 694 are played a supporting role.
Fig. 2 is the partial enlarged drawing in 200 regions in Fig. 1.As shown in Figure 2, in the present embodiment, light path system comprises the first optical inversion mirror 641, the second optical inversion mirror 642, optical gate 643, the 3rd optical inversion mirror 644 and the wave plate 645 that distribute in turn along each independently light path.First optical inversion mirror 641 is arranged at the dead ahead of the laser beam outlet of laser instrument 630.3rd optical inversion mirror 644 and wave plate 645 are set in turn in the porch of galvanometer scanning system.Optical gate 643 is for cutting off or through light path.The laser beam that laser instrument 630 produces is delivered in galvanometer scanning system by arranging multiple optical inversion mirror by light path system, and can ensure that laser beam is injected in galvanometer scanning system accurately, improves the efficiency of equipment.
In the present embodiment, localization tool is arranged on linear motion platform 670, is connected for removable with linear motion platform 670.Localization tool can move with the motion of linear motion platform 670.Wherein, linear motion platform 670 is high accuracy linear motion platform, has the features such as inertia is little, acceleration is fast.Also be provided with grating scale (not shown) in linear motion platform 670 as additional feedback, make positioning precision, repetitive positioning accuracy and efficiency all reach higher level.Fig. 3 is the partial enlarged drawing of Fig. 2 linear movement platform 670 and localization tool 610.As shown in Figure 3, linear motion platform 670 is provided with comprises the first station tool group and the second station tool group.The move along a straight line direction of motion of platform 670 of first station tool group and the second station tool group distributes successively.First station tool group and the second station tool group are respectively arranged with the localization tool of identical number.
In the present embodiment, the first station tool group comprises localization tool 602 and 604, and the second station tool group comprises localization tool 606 and 608.Particularly, when the first station tool group is with linear motion platform 670 motion assigned address (Working position), laser instrument 630 produces laser beam and processes the processed product on localization tool 602 and 604 in the first station tool group after light path system, galvanometer scanning system 650 and condenser lens 660.Meanwhile, carry out adding man-hour when the first station tool group enters into processing district, the second station tool group is then left processing district and is entered into loading and unloading district.The product that second station tool group has processed takes out and waits for that processing district machines after changing to product to be processed by operating personnel.After processing district machines, the second station tool group is moved to processing district by linear motion platform 670, processes towards processed products.Meanwhile, the first station tool group then enters into loading and unloading district, and the product that the first station tool group has processed takes out and changes to processed product by operating personnel, and waits for that processing district machines, and carries out and so forth.By arranging double tool group, realizing double and processing in turn, greatly can reduce the time waste brought because of loading and unloading, even can avoid the time waste because loading and unloading produce, can process time be saved, effectively improve working (machining) efficiency and output.
Above-mentioned laser process equipment, has the high and simple advantage of light path of working (machining) efficiency, and the stability of equipment is better, can ensure crudy, be particularly suitable for applying on the extensive large batch of production line of needs high accuracy.
The present invention also provides a kind of laser processing according to aforementioned laser process equipment, for processing the processed product in laser processing procedure.A kind of laser processing, as shown in Figure 8, comprises the following steps.
S810, starts laser instrument by laser controller, and access control system.
Start laser instrument by laser controller, laser controller can control laser instrument separately or simultaneously.
S820, starts control system, initializes control system.
In the present embodiment, control system is realized by computer.That is, start-up simulation machine, and carry out the control of system initialization rear tube laser instrument.
S830, draws processing graphic pattern and carries out the selection of machined parameters.
Draw output pattern by the machining software in computer, and adjust machined parameters to target component.
S840, is positioned over processed product on the microscope carrier of the localization tool in the first localization tool group.
S850, is fixed on processed product between the first locating piece in localization tool, the second locating piece and the first positioning component.
Cylinder in first positioning component is exitted.First cylinder shrinks and makes its push rod away from the first positioning component.Running fix block in first positioning component is drawn close to processed product under the contraction of flexible member, until processed product is fixed between the first locating piece, the second locating piece and the first positioning component.
S860, is fixed on processed product between the first locating piece in localization tool, the second locating piece, the 3rd locating piece, the first positioning component and the second positioning component.
Cylinder in second positioning component is exitted.Cylinder venting makes its push rod away from the running fix block in the second positioning component.Running fix block is drawn close to processed product under the contraction of flexible member, and processed product is constantly pushed to the 3rd locating piece.In pushing course, processed product is connected for rolling with the first locating piece, the second locating piece, produces rolling friction, the running fix block in processed product and the first positioning component then for being slidably connected, generation sliding friction.The frictional force of processed product and locating piece can be effectively reduced like this, and reduce because of fricative to the wearing and tearing of locating piece, make locating piece durable, effectively extend the service life of localization tool.Processed product is constantly drawn close to the 3rd locating piece 1 by the second positioning component, finally make processed product be fixed between the first locating piece, the second locating piece, the 3rd locating piece, the first positioning component and the second positioning component, realize location towards processed products.
S870, processes product.
Above-mentioned laser processing, in position fixing process, the first locating piece is connected for rolling with processed product with the second locating piece, with the running fix block in the first positioning component for being slidably connected, and processed product and the 3rd locating piece and the second positioning component produce without rubbing in whole position fixing process.Above-mentioned localization method can reduce the frictional force of workpiece and locating piece, and reduce because of fricative to the wearing and tearing of locating piece, make locating piece durable, effectively extend the service life of localization tool.
Fig. 9 is the laser processing in another embodiment, after step S870, also comprise step S910 and S920.
S910, adding man-hour to the product in the localization tool in the first localization tool group, is fixed on processed product in the second localization tool, and waits for that the Product processing in the first localization tool group completes.
Laser instrument produces laser, after producing required image, product is carried out to the processing of true-to-shape by two galvanometer scanning systems.Meanwhile, the running of laser smog cleaning system purifies adding the dust produced man-hour.While the product on the first work localization tool is processed, loading and unloading are carried out to the second localization tool, the loading and unloading in turn of two stations can be realized, save process time greatly, improve working (machining) efficiency.
S920, shifts out the first localization tool machined from Working position, and the second localization tool group is moved to Working position place simultaneously and processes, complete one and take turns processing.
Above-mentioned laser processing, by the processing in turn of double, can greatly can reduce the time waste brought because of loading and unloading, even can avoid the time waste because loading and unloading produce, can process time be saved, effectively improve working (machining) efficiency and output.
The above embodiment only have expressed several embodiment of the present invention, and it describes comparatively concrete and detailed, but therefore can not be interpreted as the restriction to the scope of the claims of the present invention.It should be pointed out that for the person of ordinary skill of the art, without departing from the inventive concept of the premise, can also make some distortion and improvement, these all belong to protection scope of the present invention.Therefore, the protection domain of patent of the present invention should be as the criterion with claims.