CN104216426A - Liquid quantitative dropping control system and method - Google Patents
Liquid quantitative dropping control system and method Download PDFInfo
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- CN104216426A CN104216426A CN201410484264.9A CN201410484264A CN104216426A CN 104216426 A CN104216426 A CN 104216426A CN 201410484264 A CN201410484264 A CN 201410484264A CN 104216426 A CN104216426 A CN 104216426A
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Abstract
The invention discloses a liquid quantitative dropping control system and method. The system comprises a storing container, a PID (Proportion Integration Differentiation) control unit, a liquid outlet pipeline and an air inlet pipeline, wherein the liquid outlet pipeline and the air inlet pipeline are respectively communicated with the liquid storing container; a flow meter is mounted on the liquid outlet pipeline and used for acquiring flow rate information of liquid in the liquid outlet pipeline and transmitting to the PID control unit; the PID control unit sends a control signal according to the flow rate information; an electrical proportional value is mounted on the air inlet pipeline and used for adjusting the gear according to a control signal; the electrical proportional value is kept in normal-open state before starting to drop the liquid, and thus the dropping rate of the liquid is close to the preset value at the beginning of dropping. According to the liquid quantitative dropping control system and method, the electrical proportional value is always kept in the normal-open state before starting dropping the liquid, so that the air pressure in the storing container is maximized; when starting to drop the liquid, the dropping rate of the liquid can reach the preset value within a short time due to large air pressure in the storing container, and as a result, the transition time in the dropping period can be reduced, and the waiting time is also decreased.
Description
Technical field
The present invention relates to technical field of automation in industry, particularly a kind of liquid quantitative drips control system and method.
Background technology
The frequency etc. of consumption and the interpolation added materials to each processing technology is often needed to control in commercial production, the control of particularly drip for liquid type material frequency and flow.Existing conventional liquid quantitative control system of dripping mainly is divided into following two types:
The first system can keep constant rate, this system comprises flow regulator, pressure unit, electric Proportion valve, Programmable Logic Controller and human-computer exchange machine, wherein pressure unit is arranged on the import and export of flow controller, pressure unit collects analog signals and is transferred to Programmable Logic Controller, this analog signals is become digital quantity through analog to digital conversion (i.e. AD conversion) by Programmable Logic Controller, and calculate with the parameter comparison that human-computer exchange device is arranged, and be that analog output is to electric Proportion valve by the results conversion of calculating, the pressure of electric Proportion valve control flow check amount controller ensures the size of top hole pressure, thus ensure the constant of fluid flow.
The second system can control fluid flow, and this system comprises discharge pump motor 1, current transformer 2, current sensor 3, frequency converter CPU (central processing unit) 4, target signal input 5 and driving circuit 6, and structural representation as shown in Figure 1.Frequency converter CPU (central processing unit) 4 receives the signal that discharge pump motor 1 is sent by current transformer 2 and current sensor 3, the echo signal that this signal and target signal input 5 input is compared, and export control signal to driving circuit 6 according to comparative result, the frequency of operation of discharge pump motor 1 is controlled by driving circuit 6.By being optimized regulating circuit, make the running current of discharge pump be stabilized in target set point, thus realize the automatic control of transport pump flow, be stabilized in a target set point.
But for liquid crystal display industry, do not need liquid (such as alignment liquid Polyimide, also PI liquid is claimed) constantly drip according to firm discharge, and need quantitatively to drip according to certain time interval, if the time interval (namely interval is to the transitional period of spraying phase) that only can realize under directly utilizing the first Systematical control PI drop is 1-2 minute, but the situation being less than to 1 minute the time interval then cannot realize, and namely the first system cannot meet the requirement of high precision time interval.Although system can realize the control to flow in second, but control procedure current transformer or current sensor may have electric arc, electric spark or produce heat, can not be used for the conveying of flammable liquid in liquid crystal display industry, therefore above-mentioned two kinds of systems of the prior art are not all suitable for flammable liquid control of dripping at regular time and quantity in liquid crystal display industry.
Summary of the invention
For solve existing system can not be applicable to flammable liquid drip at regular time and quantity control technical matters, on the one hand,
The invention provides a kind of liquid quantitative to drip control system, comprising:
Liquid storage container, proportion integration differentiation PID control module, the fluid pipeline be communicated with respectively with described Liquid storage container and gas feeding pipe;
Described fluid pipeline is provided with flowmeter, and described flowmeter gathers the flow information of liquid in described fluid pipeline and sends described PID control module to;
Described PID control module sends control signal according to described flow information;
Described gas feeding pipe is provided with electric Proportion valve, and described electric Proportion valve adjusts gear according to described control signal; And before liquid starts to drip, described electric Proportion valve keeps normally open, when making liquid start to drip in described Liquid storage container the speed of dripping of liquid close to preset value.
Optionally, described flow counts ultrasonic flow meter, and in fluid pipeline described in Real-time Collection, the flow information of liquid is as the speed of dripping of liquid in described Liquid storage container, obtains measured value, and described measured value is sent to described PID control module.
Optionally, described PID control module comprises parameter setting module, for performing ratio, integration, the programmable logic controller (PLC) PLC of differential and input/output module, described parameter setting module is for setting the preset value of speed under fluid drips, described PLC obtains operating value according to described preset value compared with described measured value, and described operating value is sent to described electric Proportion valve with the form of control signal by described input/output module.
Optionally, described fluid pipeline is also provided with switch, described switch receives the start signal of described PID control module and stop signal to control the break-make under fluid drips, it is the phase of dripping that wherein said PID control module sends start signal to the period sent between stop signal, and it is interval that described PID control module sends stop signal to the period sent between start signal.
Optionally, the folding condition of described electric Proportion valve is fed back to described control module in the phase of dripping and stores by described electric Proportion valve; Suspending the interval under fluid drips, described PID control module transmits control signal to described electric Proportion valve according to the folding condition of described electric Proportion valve in the previous phase of dripping.
Optionally, described electric Proportion valve is reversal electric Proportion valve, the reversal electric Proportion valve described in the phase that drips is in normally open, and reversal electric Proportion valve described in interval is according to the operating value adjustment gear in described control signal, thus the speed of dripping of rearrange liquids.
Optionally, also comprise gas container, described gas container is communicated with described gas feeding pipe, and the gas feeding pipe between described gas container and described electric Proportion valve is also provided with pressure regulator valve, for adjusting the gaseous tension entering into described Liquid storage container.
Optionally, the gas in described gas container is inert gas.
On the other hand,
Present invention also offers a kind of liquid quantitative to drip control method, above-described liquid quantitative is adopted to drip control system, before liquid starts to drip, electric Proportion valve keep normally open, when making liquid start to drip in Liquid storage container the speed of dripping of liquid close to preset value.
Optionally, also comprise: also comprise: the folding condition of described electric Proportion valve is fed back to PID control module in the phase of dripping and stores by described electric Proportion valve; Suspending the interval under fluid drips, described PID control module transmits control signal to described electric Proportion valve according to the folding condition of described electric Proportion valve in the previous phase of dripping.
To drip control system and method based on liquid quantitative provided by the invention, before in Liquid storage container, liquid starts to drip, electric Proportion valve keeps normally open always, and Liquid storage container internal gas pressure is maximum; When liquid starts to drip, due to air pressure existing larger in Liquid storage container before, therefore the speed of dripping of liquid can reach preset value within a short period of time, shortens the transit time of first phase of dripping, and reduces the stand-by period, is conducive to raising the efficiency.
Accompanying drawing explanation
Fig. 1 is that the second liquid quantitative provided in prior art drips the structural representation of system;
Fig. 2 is that a kind of liquid quantitative that embodiment one provides drips the structural representation of control system;
Fig. 3 is the composition schematic diagram of PID control module in embodiment one;
Fig. 4 is the circuit diagram forming PID feedback in embodiment one;
Fig. 5 is reversal electric Proportion valve input-output characteristic figure in embodiment one.
Embodiment
Below in conjunction with drawings and Examples, the specific embodiment of the present invention is described in further detail.Following examples for illustration of the present invention, but are not used for limiting the scope of the invention.
Embodiment one
Present embodiments provide a kind of liquid quantitative to drip control system, structural representation as shown in Figure 2, comprising:
Liquid storage container 100, proportion integration differentiation PID control module 200, the fluid pipeline 300 be communicated with respectively with Liquid storage container 100 and gas feeding pipe 400;
Fluid pipeline 300 is provided with flowmeter 500, flowmeter 500 gathers the flow information of liquid in fluid pipeline 300 and sends PID control module 200, PID control module 200 to and send control signal according to flow information;
Gas feeding pipe 400 has installed electric Proportion valve 600, and electric Proportion valve 600 adjusts gear according to control signal;
Before liquid starts to drip, electric Proportion valve 600 keeps normally open, when making liquid start to drip in Liquid storage container 100 speed of dripping of liquid close to preset value.This means Liquid storage container 100 and kept the certain air pressure equal with admission line before liquid starts to drip, thus when making liquid start to drip in Liquid storage container 100 speed of dripping of liquid close to preset value, in general slightly larger than or equal preset value, be greater than 0% to 20% of preset value for good.It should be appreciated by those skilled in the art that required air pressure size can be obtained by test.
Simultaneously, also it should be noted that, wherein fluid pipeline 300 is entity pipeline, for discharging liquid, flowmeter 300 is arranged on fluid pipeline 300, to detect in real time speed under fluid drips in real time, gas feeding pipe 400 is also entity pipeline, for carrying gas in Liquid storage container 100, to adjust the air pressure in Liquid storage container 100 in fluid drips next period and interval, indirectly speed under fluid drips is adjusted; And be connected between flowmeter 300 with PID control module 200 and between electric Proportion valve 600 with PID control module 200 by signal wire or wireless mode, for transmitting electric signal, such as flowmeter 500 is as a kind of sensor of fluid flow, can to wirelessly by gather electric signal transmission to PID control module 200.
Based on above-mentioned, before in Liquid storage container 100, liquid starts to drip, electric Proportion valve 600 keeps normally open always, and Liquid storage container 100 internal gas pressure is maximum; Liquid starts to drip, larger air pressure is had because Liquid storage container 100 is interior before, therefore the speed of dripping of liquid can reach preset value within a short period of time, and in prior art due to liquid start to drip before Liquid storage container internal gas pressure is not adjusted, upon receiving the control signal, liquid can not start to drip immediately, but need to wait for Liquid storage container internal gas pressure increase to can so that liquid is extruded in Liquid storage container time just have fluid drips, the stand-by period that the phase of therefore dripping really can drip is longer.The present embodiment just can have liquid to start to drip upon the reception of control signals immediately, shortens the transit time of first phase of dripping, and reduces the stand-by period on streamline, is conducive to the working (machining) efficiency improving streamline, thus improves production capacity.
In the present embodiment for the liquid in Liquid storage container 100 for alignment liquid (PI liquid), Liquid storage container 100 has two pipe interfaces, a pipe interface connects into feed channel, for inputting gas in Liquid storage container 100; Another pipe interface connects liquid-transport pipe-line, for outwards oozing liquid from Liquid storage container 100.
Optionally, the flowmeter 300 in the present embodiment is preferably ultrasonic flow meter, and in Real-time Collection fluid pipeline 300, the flow information of liquid is as the speed of dripping of liquid in Liquid storage container 100, obtains measured value, and this measured value is sent to PID control module 200.Ultrasonic flow meter is a kind of contactless instrument, both can measure the fluid flow of Large Diameter Pipeline, also may be used for the measurement of the liquid not easily contacting and observe, and especially for flammable liquid, the accuracy of measurement result is higher simultaneously.
Optionally, PID control module 200 in the present embodiment controls based on proportion integration differentiation PID circuit, composition schematic diagram as shown in Figure 3, comprise parameter setting module 201, execution ratio, integration, the programmable logic controller (PLC) PLC202 of differential and input/output module 203, parameter setting module 201 is for setting the preset value of speed under fluid drips, operating value according to preset value setting operation value compared with measured value, and is sent to electric Proportion valve 600 with the form of control signal by input/output module 203 by PLC202.
Preferably, parameter setting module 201 in the present embodiment can be a personal-machine interface, by the preset value that man-machine interface infusion fluid drips, preset value herein refers to speed under fluid drips, namely can be adjusted the air pressure being input to liquid in Liquid storage container 100 by electric Proportion valve 600, and then speed under fluid drips is adjusted.Afterwards, the preset value that PLC202 sends according to parameter setting module 201, flows to electric Proportion valve 600 by input/output module 203.It should be noted that, also comprise in PID control module 200: analog-to-digital conversion module 204 and D/A converter module 205, this preset value also needs by after the analog to digital conversion (i.e. AD conversion) of analog-to-digital conversion module 204 and the digital-to-analog conversion (i.e. DA conversion) of D/A converter module 205, preset value is flowed to electric Proportion valve 600, so that electric Proportion valve 600 can control the gas be passed in Liquid storage container 100 according to this predetermined amount with the analog quantity corresponding to electric Proportion valve 600.
Optionally, fluid pipeline 300 is also provided with switch 310, switch 310 receives the start signal of PID control module 200 and stop signal to control the break-make under fluid drips, wherein PID control module 200 sends start signal to the period sent between stop signal is the phase of dripping, it is interval that PID control module 200 sends stop signal to the period sent between start signal, namely drips the phase: start signal-stop signal; Interval: stop signal-start signal.See Fig. 1, also can be connected by signal wire between switch 310 and PID control module 200, further, PID control module 200 is connected to solenoid valve (not shown) by signal wire, solenoid valve is also connected with switch, and the start signal that PID control module 200 is sent and stop signal can also be by the control of solenoid valve realization to switch 310 break-make.When control signal sends, PID control module 200 (particularly input/output module 203) sends start signal to solenoid valve, and solenoid control switch 310 is opened, and the liquid in Liquid storage container 100 starts to drip, and the phase of dripping starts timing.
In addition, can also set the time of the phase of dripping at parameter setting module 201, time phase of dripping that PLC202 sends according to parameter setting module 201 afterwards sets timer, as PLC202 by input/output module 203 to after switch 310 sends start signal, this timer starts timing, namely starts timing to the phase of dripping.When the time under fluid drips reach drip phase timing time time, input/output module 203 sends stop signal to solenoid valve, and solenoid control switch 310 cuts out, and liquid in Liquid storage container 100 stops dripping, and enters interval afterwards.
In the phase of dripping, the flow information of flowmeter 300 Real-time Collection liquid is as speed under fluid drips, i.e. measured value, and convert measured value to curtage simulating signal, and send this curtage simulating signal to PID control module 200, first PID control module 200 carries out analog to digital conversion (A D conversion), converts the analog quantity that flowmeter 300 gathers to digital quantity and sends PLC202 to.PLC202 carries out PID FEEDBACK CONTROL according to measured value and preset value, by portfolio ratio action (P), integral action (I) and differential action (D) calculating operation value, makes measured value rapidly, correctly level off to preset value.Afterwards, digital-to-analog conversion (i.e. D/A conversion) is carried out to the operating value calculated, convert operating value to analog quantity corresponding to electric Proportion valve 600 by digital quantity, and send electric Proportion valve 600 to.Electric Proportion valve 600, by controlling to carry gas to change Liquid storage container 100 internal gas pressure to Liquid storage container 100, reaches the object controlling speed under fluid drips in Liquid storage container.
Wherein PID is specifically comprised by portfolio ratio action (P), integral action (I) and differential action (D) calculating operation value:
When the difference of the measured value PV of flowmeter 300 and preset value SV increases, increase operating value MV, promptly makes the measured value PV of flowmeter 300 level off to preset value SV;
When the measured value PV of flowmeter 300 and the difference of preset value SV diminish, reduce operating value MV, gently, correctly by measured value PV be adjusted to identical with preset value SV.
Wherein carry out the circuit diagram of PID feedback as shown in Figure 4, except comprising PLC202, flowmeter 500, electric Proportion valve 600 and the Liquid storage container 100 in PID control module 200, also comprise in PID control module 200: be connected to the analog-to-digital conversion module 204 between electric Proportion valve 600 and PLC202, and be connected to the D/A converter module 205 between flowmeter 500 and PLC202.
Optionally, the folding condition of electric Proportion valve 600 is fed back to PID control module 200 in the phase of dripping and stores by electric Proportion valve 600; Suspending the interval under fluid drips, PID control module 200 transmits control signal to electric Proportion valve 600 according to the folding condition of electric Proportion valve 600 in the previous phase of dripping.Concrete, the simulating signal of electric Proportion valve 600 folding condition feeds back to PLC202 after becoming digital quantity signal after A/D conversion, the digital quantity signal that the electric Proportion valve 600 that PLC202 received the phase of dripping feeds back stores, also the folding condition of electric Proportion valve 600 is controlled the interval after the phase of dripping according to this digital quantity signal, therefore the air pressure in Liquid storage container 100 can be enable no matter to keep substantially identical in the phase of dripping or interval, there will not be larger change, when entering into the phase of dripping of next control cycle, drip transitional period of phase can effectively be shortened equally, avoid the problem occurring cannot realizing interval drip because the transitional period being oversize.
Optionally, electric Proportion valve 600 is reversal electric Proportion valve, its input-output characteristic figure as shown in Figure 4, namely when input signal is 0, rated pressure is maximum, along with the increase of input signal, rated pressure reduces gradually, wherein input signal is the control signal that PID control module 200 is carried, and see Fig. 4, when input signal is 100, rated pressure is reduced to 0.Drip the phase, electric Proportion valve 600 is in normally open; Interval, electric Proportion valve 600 is according to the operating value adjustment gear in control signal, thus the speed of dripping of liquid in Indirect method Liquid storage container 100.
Optionally, system in the present embodiment also comprises gas container 700, gas container 700 is communicated with gas feeding pipe 400, and the gas feeding pipe 400 between gas container 700 and electric Proportion valve 600 is also provided with pressure regulator valve 800, for adjusting the gaseous tension entering into Liquid storage container 100.
Optionally, the gas in gas container 700 is inert gas, and in the present embodiment, preferred inert gas is nitrogen (i.e. N
2).Because 78.12% of the volume fraction duty gas total amount of nitrogen, produce easily, and nitrogen has chemical inertness, be difficult to and other material generation chemical reaction under normal temperature, use N
2the output safety that drips controlling flammable liquid is reliable.Whether be that inert gas is not restricted to the gas in gas container 700 for the liquid not easily reacted with gas.
It should be noted that, be only for PI liquid in the present embodiment, then the gas in gas container can select nitrogen.But the system that the present embodiment provides is suitable for too for other flammable liquid, all can avoid being subject to the impacts such as the electric spark in liquid output procedure.
In sum, adopt the liquid quantitative that provides of the present embodiment to drip controlling party system, before in Liquid storage container, liquid starts to drip, electric Proportion valve keeps normally open always, and Liquid storage container internal gas pressure is maximum; When the switch is opened, state is opened by closing to switch to rapidly, liquid starts to drip, due to air pressure existing larger in Liquid storage container before, therefore the speed of dripping of liquid can reach preset value within a short period of time, can realize the fixing quantity under fluid drips, shortens the transit time of first phase of dripping, reduce the stand-by period, be conducive to raising the efficiency.Simultaneously, also control the folding condition of electric Proportion valve according to the digital quantity signal of the phase of dripping in interval, therefore the air pressure in Liquid storage container can be enable no matter to keep substantially identical in the phase of dripping or interval, pressure in Liquid storage container is avoided to there will not be change greatly when the phase of dripping and interval change, when entering into the phase of dripping of next control cycle, drip transitional period of phase can effectively be shortened equally, avoid the problem occurring cannot realizing interval drip because the transitional period being oversize, therefore can realizing quantitatively drips to liquid timing (according to the time interval) in Liquid storage container controls.
Embodiment two
Based on said system, the present embodiment additionally provides a kind of liquid quantitative and to drip control method, comprising:
Before liquid starts to drip, electric Proportion valve keep normally open, when making liquid start to drip in Liquid storage container the speed of dripping of liquid close to preset value.Afterwards, during switch opens, liquid starts to drip, due to air pressure existing larger in Liquid storage container before, therefore the speed of dripping of liquid can reach preset value within a short period of time, can realize the fixing quantity under fluid drips, shortens the transit time of first phase of dripping, reduce the stand-by period, be conducive to raising the efficiency.
Optionally, also comprise: the folding condition of electric Proportion valve is fed back to control module in the phase of dripping and stores by electric Proportion valve; Suspending the interval under fluid drips, PID control module transmits control signal to electric Proportion valve according to the folding condition of electric Proportion valve in the previous phase of dripping.The air pressure in Liquid storage container can be enable so no matter to keep substantially identical in the phase of dripping or interval, pressure in Liquid storage container is avoided to there will not be change greatly when the phase of dripping and interval change, when entering into the phase of dripping of next control cycle, drip transitional period of phase can effectively be shortened equally, avoid the problem occurring cannot realizing interval drip because the transitional period being oversize, therefore can realizing quantitatively drips to liquid timing (according to the time interval) in Liquid storage container controls.
Based on above-mentioned, the present embodiment can realize the technique effect identical with embodiment one, repeats no more herein.
Certainly, based on the function of system and the characteristic of each composition device, method in the present embodiment can also be comprised by the preset value of speed under the parameter setting module of PID control module setting fluid drips, to be adjusted air pressure by pressure regulator valve, under fluid drips period drip speed to setting value etc. by PID control module rearrange liquids, do not repeat them here.
Above embodiment is only for illustration of the present invention; and be not limitation of the present invention; the those of ordinary skill of relevant technical field; without departing from the spirit and scope of the present invention; can also make a variety of changes and modification; therefore all equivalent technical schemes also belong to category of the present invention, and scope of patent protection of the present invention should be defined by the claims.
Claims (10)
1. liquid quantitative drips a control system, it is characterized in that, comprising: Liquid storage container, proportion integration differentiation PID control module, the fluid pipeline be communicated with respectively with described Liquid storage container and gas feeding pipe;
Described fluid pipeline is provided with flowmeter, and described flowmeter gathers the flow information of liquid in described fluid pipeline and sends described PID control module to;
Described PID control module is used for sending control signal according to described flow information;
Described gas feeding pipe is provided with electric Proportion valve, and described electric Proportion valve adjusts gear according to described control signal; And before liquid starts to drip, described electric Proportion valve keeps normally open, when making liquid start to drip in described Liquid storage container the speed of dripping of liquid close to preset value.
2. the system as claimed in claim 1, it is characterized in that, described flow counts ultrasonic flow meter, and in fluid pipeline described in Real-time Collection, the flow information of liquid is as the speed of dripping of liquid in described Liquid storage container, obtain measured value, and described measured value is sent to described PID control module.
3. system as claimed in claim 2, it is characterized in that, described PID control module comprises parameter setting module, for performing ratio, integration, the programmable logic controller (PLC) PLC of differential and input/output module, described parameter setting module is for setting the preset value of speed under fluid drips, described PLC obtains operating value according to described preset value compared with described measured value, and described operating value is sent to described electric Proportion valve with the form of control signal by described input/output module.
4. the system as claimed in claim 1, it is characterized in that, described fluid pipeline is also provided with switch, described switch receives the start signal of described PID control module and stop signal to control the break-make under fluid drips, it is the phase of dripping that wherein said PID control module sends start signal to the period sent between stop signal, and it is interval that described PID control module sends stop signal to the period sent between start signal.
5. system as claimed in claim 4, is characterized in that, the folding condition of described electric Proportion valve is fed back to described control module in the phase of dripping and stores by described electric Proportion valve; Suspending the interval under fluid drips, described PID control module transmits control signal to described electric Proportion valve according to the folding condition of described electric Proportion valve in the previous phase of dripping.
6. system as claimed in claim 4, it is characterized in that, described electric Proportion valve is reversal electric Proportion valve, the reversal electric Proportion valve described in the phase that drips is in normally open, reversal electric Proportion valve described in interval is according to the operating value adjustment gear in described control signal, thus the speed of dripping of rearrange liquids.
7. the system as claimed in claim 1, it is characterized in that, also comprise gas container, described gas container is communicated with described gas feeding pipe, gas feeding pipe between described gas container and described electric Proportion valve is also provided with pressure regulator valve, for adjusting the gaseous tension from entering into described Liquid storage container.
8. the system as described in claim 1 or 7, is characterized in that, the gas in described gas container is inert gas.
9. a liquid quantitative drips control method, it is characterized in that, liquid quantitative according to any one of claim 1-8 is adopted to drip control system, before liquid starts to drip, electric Proportion valve keep normally open, when making liquid start to drip in Liquid storage container the speed of dripping of liquid close to preset value.
10. method as claimed in claim 9, is characterized in that, also comprise: the folding condition of described electric Proportion valve is fed back to PID control module in the phase of dripping and stores by described electric Proportion valve; Suspending the interval under fluid drips, described PID control module transmits control signal to described electric Proportion valve according to the folding condition of described electric Proportion valve in the previous phase of dripping.
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| CN201410484264.9A CN104216426B (en) | 2014-09-19 | 2014-09-19 | A kind of liquid quantitative drips control system and method |
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| CN201410484264.9A CN104216426B (en) | 2014-09-19 | 2014-09-19 | A kind of liquid quantitative drips control system and method |
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| US20030098069A1 (en) * | 2001-11-26 | 2003-05-29 | Sund Wesley E. | High purity fluid delivery system |
| JP2012103812A (en) * | 2010-11-08 | 2012-05-31 | Horiba Stec Co Ltd | Mass flow controller |
| CN202975846U (en) * | 2012-11-26 | 2013-06-05 | 浙江泛泰仪器有限公司 | Gas flow controller based on PID algorithm |
| CN203070113U (en) * | 2012-12-17 | 2013-07-17 | 中山Dic色料有限公司 | Automatic adhesive flow monitoring and controlling device after emulsification procedure |
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2014
- 2014-09-19 CN CN201410484264.9A patent/CN104216426B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030098069A1 (en) * | 2001-11-26 | 2003-05-29 | Sund Wesley E. | High purity fluid delivery system |
| CN1592844A (en) * | 2001-11-26 | 2005-03-09 | 美国艾默生电气公司 | High purity fluid delivery system |
| JP2012103812A (en) * | 2010-11-08 | 2012-05-31 | Horiba Stec Co Ltd | Mass flow controller |
| CN202975846U (en) * | 2012-11-26 | 2013-06-05 | 浙江泛泰仪器有限公司 | Gas flow controller based on PID algorithm |
| CN203070113U (en) * | 2012-12-17 | 2013-07-17 | 中山Dic色料有限公司 | Automatic adhesive flow monitoring and controlling device after emulsification procedure |
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