CN104215201B - A kind of reduce the method for Multi-Path Effects in phase measuring profilometer - Google Patents

A kind of reduce the method for Multi-Path Effects in phase measuring profilometer Download PDF

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CN104215201B
CN104215201B CN201410507715.6A CN201410507715A CN104215201B CN 104215201 B CN104215201 B CN 104215201B CN 201410507715 A CN201410507715 A CN 201410507715A CN 104215201 B CN104215201 B CN 104215201B
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phase
difference
region
modulation parameter
value
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CN104215201A (en
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刘凯
孙伟文
杨洋
郑晓军
吴炜
杨晓敏
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Sichuan University
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Abstract

Present invention relate to how to reduce the phase error that multipath effect causes when using phase measuring profilometer to carry out three-dimensional measurement.Conventional phase is used to measure technology of profiling (Phase measuring profilometry, PMP) system, intensification modulation parameter is obtained with tradition PMP algorithm, difference distribution situation is obtained after it is carried out difference calculating, determine by the part that Multi-Path Effects is serious from difference distribution situation, then the phase value according to other parts estimates the phase value of impacted mounting portion, finally uses the phase value after correction to calculate three-dimensional data.The present invention is improved in tradition PMP algorithm, it is to avoid uncertain error that the external model of introducing may cause and additional effect, and method is directly effective, can comprehensively reduce the phase error of all directions, improves the accuracy of three-dimensional measurement.

Description

A kind of reduce the method for Multi-Path Effects in phase measuring profilometer
Technical field
The present invention relates to optical three-dimensional measurement technical field, especially with the three-dimensional measurement of phase measuring profilometer.
Technical background
The present invention relates to a kind of real-time optical method for three-dimensional measurement, i.e. phase measuring profilometer (phase measuring Profilometry, PMP), it is the method being widely used in each field three-dimensional measurement, has measuring speed fast, certainty of measurement High feature.Phase measuring profilometer belongs to optical projection type D profile detection, by projected position, image capture location and survey The triangle relation that amount object space is constituted determines the three-dimensional depth information of measured object.It measures system mainly by scialyscope, photograph Machine and computer processing unit are constituted.System by the raster pattern of the some sinusoidal codings of projector to testee surface, Captured by camera testee surface is caused the sinusoidal grating figure of deformation, then computer processing unit by body form simultaneously Gained digit optical information is carried out computing thus obtains the three-dimensional depth information on testee surface.
The multipath effect of photographing unit refers to, charge coupled cell in photographing unit (Charge-coupled Device, CCD) can realize converting optical signals to the signal of telecommunication, and the digital imaging process of photographing unit can regard the mistake of an integration as Journey, simultaneously because each unit size on CCD element can not be as each photon, so in this digital integration imaging During, the intensity signal of each pixel the most necessarily comprises the intensity signal of other pixels about, thus causes final There is error in calculated measurement result, affects certainty of measurement.Xiang Zhou et al. is at paper " Effect of the modulation transfer function of a digital image-acquisition device on phase- Measuring profilometry [J]. APPLIED OPTICS, 1994,33 (35): 8210-8215 " middle by photograph The multipath effect of machine is described by modulation transfer function (MTF) (Modulation Transfer Function, MTF), And give new Method for Phase Difference Measurement and phase error formula.Document " perhaps it is familiar with, Wang Yongchang, Liu Kai. multiple path routing model Impact [J] on phase measuring profilometer. computer-aided design and graphics journal, 2014,26 (4) " multipath is proposed Effect this concept, the appearance situation of preliminary study multipath effect and producing cause, have employed a kind of 3 × 3 smooth cover Film substitutes into the expression formula of tradition PMP method with the impact of optical signal on obtaining of the Multipexer footpath effect, then employs one The method that phase place merges carries out phase error corrections.The deficiency of its method is mainly manifested in: it is flat that (1) does not has definite experiment to prove Sliding mask can truly reduce the impact that multipath effect brings, and directly uses the smooth mask of 3 × 3 to be simulated, such It is the highest that accuracy applied mechanically by model;(2) from experimental result it can be seen that phase place blending algorithm achieves on some specific direction Certain correction phase error, and yet suffer from certain error in the other direction, there is no complete solution multipath effect band The impact come.The scheme mentioned of the application present invention, can avoid introducing uncertain error that external model may cause and Extra error, and method is directly effective, can comprehensively revise the phase error of all directions, it is ensured that higher accuracy and can Row.
Summary of the invention
It is an object of the invention to cause PMP measurement result for multipath effect present in photographing unit digital imaging process Problem error occur, proposes one and effectively determines range of error, and the method thus realizing revising to error component.
For realizing the purpose of the present invention, the invention provides techniques below scheme:
Directly utilize tradition PMP system and carry out the three-dimensional measurement of testee, in the digital information obtained, brightness is adjusted Parameter processed carries out difference calculating, according to difference condition, the digital information of measured object is carried out effective range screening, so that it is determined that deposit Region in error.For error band, the LINEAR CONTINUOUS relation having due to adjacent pixel, by utilizing effective district The phase value of the pixel in territory determines the phase value of error pixel, finally utilizes the three-dimensional computations of tradition PMP method to obtain Three-dimensional data.
Compared with prior art, the present invention has the following advantages:
The present invention can effectively reduce the phase error that multipath effect causes, and improves the accurate of PMP three-dimensional measuring result Degree.The present invention is improved on the basis of tradition PMP method, it is to avoid use the uncertain mistake that other templates may be brought Difference and additional effect, it is ensured that the reliability of measurement data, and phase error correction in all directions can be realized, method is direct Effectively, comparing tradition PMP method can make measurement result reach have higher precision.
Accompanying drawing explanation
Fig. 1 is the flow chart of the present invention.
Fig. 2 is to use conventional phase to measure technology of profiling in this example to rebuild front view and the partial side of the target obtained Figure;
Fig. 3 rebuilds, after being the use of the method for the present invention, the target front view and partial side view obtained.
Detailed description of the invention
In order to make the purpose of invention, technical scheme and advantage clearer, below in conjunction with drawings and Examples, to this Invention is further elaborated.Should be appreciated that specific embodiment described herein, and need not only in order to explain the present invention In limiting the present invention.
In three-dimension measuring system used by the present invention use equipment include a CASIO XJ-A155V type scialyscope, Prosilica GC650C type photographing unit and a Daepori amount to calculation machine composition.Wherein, the resolution of scialyscope is 800 × 600, The resolution of photographing unit is 640 × 480.
This example to be embodied as step as follows:
(1) building three-dimension measuring system, regulation photographing unit can capture the overall picture of calibration target, then, adjusts The joint position of scialyscope, focal length etc., to guarantee that the PMP template for displaying launched is clearly correct, can be completely covered target and measured object Body, regulates the parameter such as the aperture of photographing unit, time of exposure simultaneously and gets rid of the impact of camera lens overflow underflows, it is ensured that image capture clear Clear, obtain the parameter matrix of photographing unit and the parameter matrix of scialyscope finally by calibration three-dimension measuring system.
(2) utilize formula (1) calculate photographing unit image capture intensification modulation parameter:
, (1)
Wherein,It is the brightness case of the image arrested,It is intensification modulation parameter,It it is sinusoidal grating used The sum of picture.
(3) difference condition of intensification modulation parameter is calculated.Our calculated intensification modulation parameter is one in instances The matrix of individual 480 × 640, uses rear a line of matrix to compare with previous row and obtains luminance parameter difference value, i.e. forward difference behaviour Making, specific practice can be represented by formula (2):
, (2)
Wherein,It is the of intensification modulation differenceiOK,WithIt is the of intensification modulation parameter respectivelyi+ 1 row andi OK.After such operation, with a zero row supplyBMake its first row, be allowed to keep the matrix form of 480 × 640.
(4) the intensification modulation difference obtained is used,B, the phase condition obtaining primary Calculation screens.Due in face Complexion changedization obvious marginal portion intensification modulation Parameters variation is big, and the difference that difference obtains after calculating is the biggest, and becomes in color Change the difference that mild part obtains the least, so utilizing the size of difference, threshold value (being 3 in this example) is set, will be by multichannel The part that footpath effects is big is set to 0, other parts be set to 1 carry out binaryzation after obtain, remake the phase place for primary Calculation Value, carries out the operation of formula (3) and filters by the big part of Multi-Path Effects:
, (3)
Wherein,It is the phase value that obtains of primary Calculation,It is to eliminate by after the serious part of Multi-Path Effects Phase value.Now the phase value by the serious part of Multi-Path Effects is 0, and remainder phase value keeps constant.
(5) forMiddle phase value is the pixel of 0, and the front and rear in the position of its place rectangular array respectively looks for a phase The pixel of place value non-zero, is worth the phase value of pixel, i.e. linear interpolation and calculates according to the linear estimation of their phase place 0 Phase value, specifically can be expressed by formula (4):
, (4)
Wherein,It is pixel respectivelyPhase place Value.
(6) phase value obtained after using correctionThe three-dimensional reconstruction calculating bringing tradition PMP method into can be obtained by more Three-dimensional result close to truth.
Example described above is only the preferable result of the present invention, not in order to limit the present invention, all the present invention's Any amendment, equivalent and the improvement etc. made within spirit and principle, should be included within the scope of the present invention.

Claims (1)

1. one kind is reduced the method for Multi-Path Effects in phase measuring profilometer, it is characterised in that first bright to obtain Secondly degree modulation parameter carries out difference calculating, carries out region according to phase place to trying to achieve of the difference condition of described intensification modulation parameter Screening, filters by the strong region of Multi-Path Effects, then estimates according to the phase value of surrounding pixel point and filters region Phase condition, then carried out three-dimensional reconstruction by the phase place obtained after estimating;Wherein, the described intensification modulation parameter to obtaining is carried out Difference calculates, and refers to deduct the intensification modulation parameter matrix obtained by the value of a line thereafter the value of previous row, obtained difference Value constitutes a new matrix;The difference condition according to the described intensification modulation parameter phase place to trying to achieve carries out region screening, filters By the region that Multi-Path Effects is strong, refer to that the change of its intensification modulation parameter of the obvious marginal portion of color change is big The change of mild its intensification modulation parameter of marginal portion, color change its intensification modulation of obvious marginal portion is changed in color The difference that parameter obtains after difference calculates changes, also greater than color, the difference that mild marginal portion is corresponding, so utilizing difference Size determine by the region that Multi-Path Effects is big, when the size of difference is more than when arranging threshold value, be defined as by many The region that path effects impact is big, filters described region;Phase value estimation refers to find the pixel place matrix filtering part Previous effective pixel points and the later effective pixel points of row estimate its phase value with linear relationship, thus complete filtering portion The phase value estimation divided.
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