CN104184039B - A kind of high power CO2The quick start system and method for laser - Google Patents
A kind of high power CO2The quick start system and method for laser Download PDFInfo
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- CN104184039B CN104184039B CN201410387157.4A CN201410387157A CN104184039B CN 104184039 B CN104184039 B CN 104184039B CN 201410387157 A CN201410387157 A CN 201410387157A CN 104184039 B CN104184039 B CN 104184039B
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Abstract
The present invention relates to high power CO2A kind of field of lasers, there is provided high power CO2The quick start system and method for laser, the system include sensing detection unit, control unit and execution unit；Methods described includes：A, start low-tension supply, open vavuum pump, extract N in resonator2, air pressure in the resonator is gradually reduced；B, when air pressure is down to the first preset pressure in the resonator, vavuum pump is closed, and opens He and CO simultaneously2Control valve, He and CO is filled with into the resonator2, gradually rise its air pressure inside；C, when air pressure rises to operating air pressure in the resonator, drive device, high voltage power supply and electronic shutter are started.Resonance intracavity gas are not evacuated to perfect vacuum during startup, only need very short time can be to reach；It is being filled with He and CO2During gas, also not since vacuum state, so can shorten so that gas is charged into operating air pressure and start the time quickly.
Description
Technical field
The present invention relates to high power CO2A kind of field of lasers, and in particular to high power CO2The quick startup system of laser
System and method.
Background technology
High power CO2Laser passes through years development, and technology maturation, output is stable, is widely used in industrial production.Especially
It is that axle flows CO soon2Laser, with good beam quality, power stability, high conversion efficiency and as current sheet metal cutting industry
Main force's type.But high power CO2The startup time of laser is long, and typically at 15 minutes, even the longer time could
Realize and start completely.Although current control system can realize automatic start, the longer startup time still has influence on
The efficiency of processing.This point is compared particularly evident with the plug-in light extraction Starting mode of solid state laser.
High power CO2Laser is with He, N2And CO2Three kinds of gases are used as working gas after being mixed according to certain ratio.Swash
Three kinds of working gas of light device, choke valve is delivered to from respective gas cylinder (or other sources of the gas) through decompression, through the valve regulating flow that throttles
After mix, be then sent to resonator for laser produce laser.The on off operating mode of gas is controlled by magnetic valve, with per minute
Work carrys out the desultory working gas new to supplement in resonator several times.It is charged into after new working gas because chamber pressure is higher than just
Standing setting value, so vavuum pump can be extracted outside a part of gas discharge resonator, mainly by CO in the course of work2Due to quilt
CO caused by ionization and O are discharged.Thus maintain resonator pressure, and constantly discharge to laser works be harmful to CO and
O, reach the process of a dynamic equilibrium.
During normal work, air pressure about 100mBar, close to vacuum state.Under stopped status, resonator is normally filled with air pressure
Close to the nitrogen of external atmosphere pressure, ambient atmos can so be reduced or avoided and leak into resonator.It is assumed that the work of laser
Air pressure is 100mBar, and the basic step of laser start is as shown in Figure 1.
Although present control system can be completed all to work shown in Fig. 1, whole start process is more very long.Time
Main consumption is in vavuum pump by the high purity N in resonator2, vacuum state (one is evacuated to from the pressure value close to an atmospheric pressure
As in the case of be evacuated to 0mBar).In most cases, due in resonator of once starting shooting working gas purity not enough, it is necessary to carry out
Restarting, that is, repeat above-mentioned start basic procedure.Start shooting twice, it is even more serious in terms of laser start efficiency is influenceed.
The content of the invention
The technical problem to be solved in the present invention is, for the drawbacks described above of prior art, there is provided a kind of high power CO2Swash
The quick start method and system of light device, overcome prior art high power CO2Laser starts time length, influences processing efficiency
Defect.
The technical solution adopted for the present invention to solve the technical problems is：A kind of high power CO is provided2Laser it is quick
Startup method, the laser includes resonator, vavuum pump is connected with resonator, the driving of gas flowing fills in driving resonator
Put and control He, N respectively2And CO2Gas enters the control valve of resonator, and the quick start method comprises the following steps：
A, start low-tension supply, open vavuum pump, extract N in resonator2, air pressure in the resonator is gradually reduced；
B, when air pressure is down to the first preset pressure in the resonator, vavuum pump is closed, and opens He and CO simultaneously2
Control valve, He and CO is filled with into the resonator2, gradually rise its air pressure inside；
C, when air pressure rises to operating air pressure in the resonator, drive device, high voltage power supply and electronic shutter are started.
Further preferred embodiments of the present invention is：The step C is specifically included, when air pressure rises in the resonator
During two preset pressures, start the drive device, and continue to be filled with He and CO2To operating air pressure, then start high voltage power supply and
Electronic shutter.
Further preferred embodiments of the present invention is：The drive device is turbofan.
Further preferred embodiments of the present invention is：First preset pressure is 10-70 millibars.
Further preferred embodiments of the present invention is：Second preset pressure is 70-95 millibars, and the operating air pressure is
95-125 millibars.
A kind of high power CO is also provided2The quick start system of laser, including,
Sensing detection unit, for detecting air pressure in resonator, produce corresponding detection signal；
Control unit, receive and handle detection signal caused by sensing detection unit, and with the first preset pressure, second pre-
If air pressure and operating air pressure are contrasted, corresponding control signal is produced；
Execution unit, the control signal of reception control unit, perform corresponding action.
Further preferred embodiments of the present invention is：The sensing detection unit is pressure sensor.
Further preferred embodiments of the present invention is：Described control unit is single-chip microcomputer or PLC；The control signal bag
Include,
First control signal, produced when air pressure is down to the first preset pressure in the resonator, for closing vavuum pump
And control He and CO2The unlatching of control valve；
Second control signal, produced when air pressure rises to the second preset pressure in the resonator, for starting driving dress
Put, and keep He and CO2The opening of control valve；
3rd control signal, produced when air pressure rises to operating air pressure in the resonator, for start high voltage power supply and
Electronic shutter.
Further preferred embodiments of the present invention is：The execution unit is magnetic valve, described He, N2And CO2Gas fills
By single solenoid valve control when entering resonator.
The beneficial effects of the present invention are when laser starts, by vavuum pump by N in resonator2It is pre- to be evacuated to first
If air pressure, and non-vacuum, He and CO are just filled with into resonator2It is complete to restart high voltage power supply etc. to operating air pressure for gas
Into start-up course.Resonance intracavity gas not are evacuated into perfect vacuum during startup only needs very short time being filled with to reach
He and CO2Also not since vacuum state during gas, so quickly startup can be shortened so that gas is charged into operating air pressure
Time, improve processing efficiency.
Brief description of the drawings
Below in conjunction with drawings and Examples, the invention will be further described, in accompanying drawing：
Fig. 1 is prior art CO2Laser start basic procedure schematic diagram；
Fig. 2；The control schematic diagram of resonator gas pressure is adjusted for stopped status of the present invention
Fig. 3 is CO of the present invention2The schematic flow sheet of laser quick start method；
Fig. 4 is CO of the present invention2Laser start basic procedure schematic diagram；
Fig. 5 is CO of the present invention2Laser gas cell operation schematic diagram；
Fig. 6 is CO of the present invention2Laser quick start system theory diagram.
Embodiment
In conjunction with accompanying drawing, presently preferred embodiments of the present invention is elaborated.
As shown in Figure 2,3, high power CO of the present invention2Laser includes resonator, vavuum pump is connected with resonator, driving is humorous
The drive device of the intracavity gas that shake flowing and respectively control He, N2And CO2Gas enters the control valve of resonator.Described
Resonator is inside and outside to be provided with pressure sensor, the air pressure inside and outside for detecting resonator.Control unit passes to two pressure
The signal of sensor output is compared, and N is controlled according to comparative result2The action of magnetic valve.When laser is shut down, electromagnetic valve I
Open, electromagnetic valve II, III is closed, and high purity N is poured into resonator2, make the gas pressure in resonator is micro- to be all the time higher than
Resonator external pressure.When gas pressure value is less than or equal to external atmosphere pressure in resonator, control unit opens N2's
Electromagnetic valve I, N is poured into resonator2.When intracavitary air pressure is higher than air pressure certain numerical value such as 20mBar outside chamber, electromagnetic valve I is closed
Close.The purpose for the arrangement is that keep the air pressure in resonator to be slightly higher than external atmosphere pressure, it is outside in laser stopped status
Gaseous impurity will not leak into laser resonant cavity.
As shown in Figure 4,5, the embodiment of the present invention provides a kind of high power CO2The quick start method of laser, including with
Lower step：
Step S10, start low-tension supply, open vavuum pump, extract N in resonator2, make air pressure in the resonator gradual
Reduce；
Step S20, when air pressure is down to the first preset pressure in the resonator, vavuum pump is closed, and opens He simultaneously
And CO2Control valve, He and CO is filled with into the resonator2, gradually rise its air pressure inside；
Step S30, when air pressure rises to operating air pressure in the resonator, start drive device, high voltage power supply and electronics
Optical gate.Specifically, when air pressure rises to the second preset pressure in the resonator, start the drive device, and continue to be filled with
He and CO2To operating air pressure, then start high voltage power supply and electronic shutter, start to export laser.
The drive device is turbofan.The drive device is alternatively roots blower.First preset pressure is 10-
70 millibars, preferably 40 millibars；Second preset pressure is 70-95 millibars, preferably 90 millibars；The operating air pressure is
95-125 millibars, preferably 100 millibars.
That is a number of nitrogen is advanced in resonator on startup, how much needs of reservation are according to resonance
Gas ratio needed for the volume and laser of chamber determines, and is accurately controlled by flow valve and be filled with He and CO in resonator2's
Volume, so as to realize N2, He and CO2Three kinds of gases reach the proportioning of requirement.Above-mentioned startup method not takes out resonance intracavity gas
To perfect vacuum, therefore it can significantly compress the available machine time.Reason is vavuum pump when vacuumizing, and more meets 0mBar and is more difficult to
Take out, it is necessary to more times.Therefore by N in resonator2Pressure is arranged on a higher numerical value, for example during 40mBar, only needs
Very short time can be to reach.Other two kinds of working gas are poured not since 0mBar vacuum state, so quickly
So that gas is charged into operating air pressure.
As shown in fig. 6, the embodiment of the present invention also provides a kind of high power CO2The quick start system of laser, including：Pass
Feel detection unit, for detecting air pressure in resonator, produce corresponding detection signal；Control unit, receive and handle sensing inspection
Detection signal caused by unit is surveyed, and is contrasted with the first preset pressure, the second preset pressure and operating air pressure, is produced corresponding
Control signal；Execution unit, the control signal of reception control unit, perform corresponding action.The sensing detection unit is
Pressure sensor.Described control unit is single-chip microcomputer or PLC；The control signal includes：First control signal, when the resonance
Intracavitary air pressure produces when being down to the first preset pressure, for close vavuum pump and control He and CO2The unlatching of control valve；The
Two control signals, produced when air pressure rises to the second preset pressure in the resonator, for starting drive device, and keep He
And CO2The opening of control valve；3rd control signal, produce, use when air pressure rises to operating air pressure in the resonator
In startup high voltage power supply and electronic shutter.The execution unit is magnetic valve, the N2, He and CO2Gas is filled with equal during resonator
Pass through single solenoid valve control.
High power CO of the embodiment of the present invention2When laser starts, vavuum pump extracts N in resonator2, make air pressure in resonator
Gradually reduce, be arranged on the change of air pressure in the pressure sensor I detection resonators in resonator, and produce corresponding detection letter
Number, single-chip microcomputer or PLC receive the detection signal, and are carried out pair with the first preset pressure, the second preset pressure and operating air pressure
Than.When air pressure is down to the first preset pressure in resonator, the single-chip microcomputer or PLC produce the first control signal, first control
Signal control vavuum pump processed is closed, and stops N2Extraction, while open control He and CO2Electromagnetic valve II and electromagnetic valve II I, make He
And CO2Into resonator, He and CO2Entrance so that the air pressure in resonator gradually rises；When air pressure rises in resonator
During two preset pressures, the single-chip microcomputer or PLC produce the second control signal, and second control signal control turbofan starts,
Gas flowing in resonator is driven, now He and CO2Still going successively to resonator；When air pressure rises to operating air pressure in resonator
When, the single-chip microcomputer or PLC produce the 3rd control signal, and the 3rd control signal control high voltage power supply starts, and then starts electricity
Sub-light lock, start to export laser, complete whole start-up course.
It should be appreciated that the above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations, to ability
For field technique personnel, the technical scheme described in above-described embodiment can be modified, or it is special to which part technology
Sign carries out equivalent substitution；And these are changed and are replaced, it should all belong to the protection domain of appended claims of the present invention.
Claims (5)
- A kind of 1. high power CO2The quick start method of laser, the laser include resonator, connected with resonator it is true The drive device and control He, N respectively that gas flows in empty pump, driving resonator2And CO2Gas enters the control of resonator Valve, the quick start method comprise the following steps：A, start low-tension supply, open vavuum pump, extract N in resonator2, air pressure in the resonator is gradually reduced；B, when air pressure is down to the first preset pressure in the resonator, vavuum pump is closed, and opens He and CO simultaneously2Control Valve, He and CO is filled with into the resonator2, gradually rise its air pressure inside, first preset pressure is 10-70 millis Bar；C, when air pressure rises to the second preset pressure in the resonator, start the drive device, and continue to be filled with He and CO2Extremely Operating air pressure, then starts high voltage power supply and electronic shutter, and the operating air pressure is 95-125 millibars, second preset pressure For 70-95 millibars.
- 2. quick start method according to claim 1, it is characterised in that：The drive device is turbofan.
- A kind of 3. high power CO2The quick start system of laser, it is characterised in that：Including,Sensing detection unit, for detecting air pressure in resonator, produce corresponding detection signal；Control unit, receive and handle detection signal caused by sensing detection unit, and gas is preset with the first preset pressure, second Pressure and operating air pressure are contrasted, and produce corresponding control signal；Execution unit, the control signal of reception control unit perform corresponding action, and the execution unit is magnetic valve, He, N2 And CO2By single solenoid valve control when gas is filled with resonator.
- 4. quick start system according to claim 3, it is characterised in that：The sensing detection unit is pressure sensing Device.
- 5. quick start system according to claim 4, it is characterised in that：Described control unit is single-chip microcomputer or PLC；Institute Stating control signal includes,First control signal, produced when air pressure is down to the first preset pressure in the resonator, for closing vavuum pump and control He and CO processed2The unlatching of control valve；Second control signal, produced when air pressure rises to the second preset pressure in the resonator, for starting drive device, and Keep He and CO2The opening of control valve；3rd control signal, produced when air pressure rises to operating air pressure in the resonator, for starting high voltage power supply and electronics Optical gate.
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| CN201410387157.4A CN104184039B (en) | 2014-08-07 | 2014-08-07 | A kind of high power CO2The quick start system and method for laser |
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| CN104716550B (en) * | 2015-03-12 | 2017-12-01 | 大族激光科技产业集团股份有限公司 | Laser Control Method and system and laser device, laser process equipment |
| CN112290361A (en) * | 2020-10-29 | 2021-01-29 | 中国航发贵州黎阳航空动力有限公司 | Remove laser cutting machine CO2Method for laser ventilation alarm |
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| JPS62232183A (en) * | 1986-04-02 | 1987-10-12 | Toshiba Corp | Supplying method of gas laser media for gas |
| JPS6425585A (en) * | 1987-07-22 | 1989-01-27 | Komatsu Mfg Co Ltd | Exchange of laser medium gas for gas laser |
| JPS6464384A (en) * | 1987-09-04 | 1989-03-10 | Mitsubishi Heavy Ind Ltd | Sealing of gas for laser oscillator |
| JP3824092B2 (en) * | 1993-12-24 | 2006-09-20 | 株式会社小松製作所 | Gas supply method for excimer laser device |
| CN1538256A (en) * | 2003-10-24 | 2004-10-20 | 武汉华工恒信激光有限公司 | Large power CO2 laser PLC control method |
| CN101377666B (en) * | 2007-08-28 | 2011-04-06 | 深圳市大族激光科技股份有限公司 | Control method of high power laser |
| CN202395299U (en) * | 2011-12-25 | 2012-08-22 | 深圳市大族激光科技股份有限公司 | Intelligent control device for laser gas flow rate ratio |
| JP5637160B2 (en) * | 2012-03-12 | 2014-12-10 | パナソニック株式会社 | Laser oscillation device and laser processing machine |
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Address after: No. 9988 Nanshan District Shennan Road Shenzhen city Guangdong province 518000 Applicant after: HANS LASER TECHNOLOGY INDUSTRY GROUP CO., LTD. Address before: 518000 Shenzhen Province, Nanshan District high tech park, North West New Road, No. 9 Applicant before: Dazu Laser Sci. & Tech. Co., Ltd., Shenzhen |
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