CN104181084B - Aerosol sensor - Google Patents

Aerosol sensor Download PDF

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CN104181084B
CN104181084B CN201410425996.0A CN201410425996A CN104181084B CN 104181084 B CN104181084 B CN 104181084B CN 201410425996 A CN201410425996 A CN 201410425996A CN 104181084 B CN104181084 B CN 104181084B
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aerosol
charge detection
particle
unit
subelement
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CN104181084A (en
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朱荣
杨文明
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Tsinghua University
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Tsinghua University
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Abstract

The invention provides an aerosol sensor, comprising an aerosol inlet, an aerosol electrifying unit, a sedimentation unit, a charge detection unit, a control unit, a signal processing unit, and an aerosol outlet, wherein the aerosol inlet, the aerosol electrifying unit, the sedimentation unit, the charge detection unit and the aerosol outlet are sequentially connected; the charge detection unit is connected with the signal processing unit; the control unit is respectively connected with the sedimentation unit and the charge detection unit; the charge detection unit comprises at least one charge detection sub-unit; the at least one charge detection sub-unit is sequentially connected; and each charge detection sub-unit is connected with the control unit, and is connected with the signal processing unit. The measurement of aerosol particles within a large particle size measurement range can be achieved through the aerosol sensor provided by the invention, and meanwhile, the aerosol sensor is easy to miniaturize.

Description

A kind of aerosol sensor
Technical field
The present invention relates to gasoloid technical field, more particularly to a kind of aerosol sensor.
Background technology
Aerosol is that a kind of liquid or solid particle are suspended in the suspension system formed in gas medium, wherein particle phase Characteristic diameter size be generally 1nm to 100 μm, but particle due to particle diameter more than 1 μm is easily settled, the stable suspersion time compared with Short, particle of the particle diameter less than 10nm is difficult to detect again, so the measurement in real time of general aerosol is just for the μ ms of 10nm to 1 Aerosol particle.
Concentration and particle diameter are two most important indexs of aerosol, and the existing aerosol for the two indexs is surveyed in real time Amount method mainly has the method based on optical principle and the method based on electrical principles.Traditional instrument master based on optical principle Have optical particle counter and a laser particle counter, and due to size less than the particulate of optical wavelength light scattering very It is weak, so the simple general particle only to particle diameter more than 0.3 μm of optical means is effective.Measuring instrument master based on electrical principles There are differential electrical mobility analysis device, the scanning electricity of the principle that is inversely proportional using charged particle electromobility in the electric field and particle diameter Mobility spectrometer (being used in combination with nuclei of condensation corpuscular counter) etc., and using certain size scope particle carried charge with Particle diameter has aerosol electric explorer of determination exponential relationship etc..
In the prior art, the instrument that can realize the measurement in real time of wide scope aerosol is nearly all baroque large-scale instrument Device equipment, it is impossible to meet multiple spot, the Distributed Application requirement in limited-space environment.And the gasoloid instrument of some miniaturizations The measurement range of device is smaller.
The content of the invention
The invention provides a kind of aerosol sensor, the survey of the aerosol particle compared with wide particle diameter measurement range can be realized Amount, while being easy to miniaturization.
The invention provides a kind of aerosol sensor, including:
Aerosol entrance, aerosol charged elements, sedimentation unit, charge detection unit, control unit, signal transacting list Unit, aerosol outlet;
It is the aerosol entrance, the aerosol charged elements, the sedimentation unit, the charge detection unit, described Aerosol outlet is sequentially connected, and the charge detection unit is connected with the signal processing unit, described control unit respectively with The sedimentation unit is connected with the charge detection unit;
The charge detection unit includes at least one charge detection subelement, and the charge detection subelement connects successively Connect, each described charge detection subelement is connected with described control unit respectively, each described charge detection subelement respectively with The signal processing unit is connected;
The aerosol charged elements, for making the aerosol particle in the aerosol to be measured of inflow powered;
The sedimentation unit, for particle diameter in the powered aerosol particle for retaining inflow less than or equal to initial default Aerosol particle;
The charge detection subelement, this electric charge is less than or equal to for particle diameter in the powered aerosol particle for retaining inflow The aerosol particle of the preset value of detection sub-unit, and export the induced-current of generation;
Described control unit, for according to the initial default to the sedimentation unit apply square-wave voltage, and according to The preset value of each charge detection subelement applies perseverance corresponding with the preset value respectively to charge detection subelement each described Determine voltage;
The signal processing unit, for the induced-current and resolution table that are exported according to all charge detection subelements The average grain diameter and number concentration of the aerosol particle being trapped in each charge detection subelement are calculated up to formula, wherein, institute It is to meet between the induced-current and the average grain diameter, the number concentration of default required precision to state analytical expression Multinomial;
Or, the signal processing unit, for the induced-current exported according to all charge detection subelements and god The average grain diameter and number concentration of the aerosol particle being trapped in each charge detection subelement are calculated through network model, its In, the neural network model is used to draw the average grain diameter and the number concentration according to the induced-current of input;
Wherein, the low level of the square-wave voltage meets:Flow into grain in the powered aerosol particle of the sedimentation unit Footpath is all trapped in the sedimentation unit less than or equal to the aerosol particle of the initial default;
The high level of the square-wave voltage meets:Flow into the powered aerosol particle of the sedimentation unit except particle diameter is small All it is trapped in the sedimentation unit in the aerosol particle equal to the initial default, also part particle diameter is more than institute The aerosol particle for stating initial default is also trapped within the sedimentation unit;
The corresponding constant voltage of preset value of the charge detection subelement meets:Flow into each described charge detection single Particle diameter all cuts less than or equal to the aerosol particle of the preset value of the charge detection subelement in the powered aerosol particle of unit Stay in the described charge detection subelement;
Wherein, at least one is more than the initial default in all preset values.
Further, the aerosol enter it is intraoral filter membrane is installed, the filter membrane is used to filter particle diameter more than or equal to default The aerosol particle of particle diameter threshold value, the predetermined size threshold value is equal to maximum preset value.
Further, the aerosol charged elements be pin-plate ionic source, the pin-plate ionic source just extremely Conductive tip, negative pole is plate electrode.
Further, the conductive tip, including:The one-dimensional nano structure of conduction, surface are coated with the exhausted of metal level The one-dimensional nano structure of edge, surface are coated with the one-dimensional nano structure of the semiconductor of metal level.
Further, the one-dimensional nano structure includes:Nano wire, nanotube, nanometer rods.
Further, the aerosol charged elements be line-cartridge type ion gun, the line-cartridge type ion gun just extremely Conductive filament, negative pole is cylinder electrode.
Further, the sedimentation unit includes two pieces of parallel battery lead plates, one of electrode plate earthing, another block of electricity Pole plate is connected with described control unit.
Further, each described charge detection subelement includes two pieces of parallel battery lead plates and galvanometer, one of Battery lead plate is connected with described control unit, and another electrode plate is connected with galvanometer, and galvanometer connects with the signal processing unit Connect, the galvanometer is used to measure induced-current and exports the faradic size for measuring.
Further, the charge detection subelement being connected with the aerosol outlet is Faraday cup or Faraday plate.
Further, the aerosol sensor also includes:Driver element, for driving aerosol to be measured to be passed in aerosol Flowing in sensor, the driver element is connected with the aerosol entrance, or, the driver element and the aerosol outlet phase Even.
A kind of aerosol sensor that the present invention is provided, by the measurement in a closed series of multiple charge detection subelements, and passes through Analytical expression or neural network model carry out Data Fusion, Neng Goushi to the induced-current of each charge detection subelement Now the particle diameter distribution compared with the aerosol particle of wide particle diameter measurement range is measured, while being easy to miniaturization.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing The accompanying drawing to be used needed for having technology description is briefly described, it should be apparent that, drawings in the following description are the present invention Some embodiments, for those of ordinary skill in the art, on the premise of not paying creative work, can also basis These accompanying drawings obtain other accompanying drawings.
Fig. 1 is a kind of structural representation of aerosol sensor that one embodiment of the invention is provided;
Fig. 2 is the structural representation of another aerosol sensor that one embodiment of the invention is provided;
Fig. 3 is a kind of structure chart of neural network model that one embodiment of the invention is provided.
Specific embodiment
To make the purpose, technical scheme and advantage of the embodiment of the present invention clearer, below in conjunction with the embodiment of the present invention In accompanying drawing, the technical scheme in the embodiment of the present invention is clearly and completely described, it is clear that described embodiment is A part of embodiment of the present invention, rather than whole embodiments, based on the embodiment in the present invention, those of ordinary skill in the art The every other embodiment obtained on the premise of creative work is not made, belongs to the scope of protection of the invention.
The invention provides a kind of aerosol sensor, referring to Fig. 1, including:
Aerosol entrance 101, aerosol charged elements 102, sedimentation unit 103, charge detection unit 104, control unit 105th, signal processing unit 106, aerosol outlet 107.
The aerosol entrance 101, the aerosol charged elements 102, the sedimentation unit 103, the charge detection Unit 104, the aerosol outlet 107 are sequentially connected, the charge detection unit 104 and the phase of the signal processing unit 106 Even, described control unit 105 is connected with the sedimentation unit 103 and the charge detection unit 104.
The charge detection unit 104 includes at least one charge detection subelement, and the charge detection subelement is successively Connection, each described charge detection subelement is connected with described control unit respectively, each charge detection subelement respectively with institute Signal processing unit is stated to be connected;The charge detection subelement 1041 shown in figure is to charge detection subelement 104n.
Wherein, aerosol to be measured enters from the aerosol entrance 101, flow successively through the aerosol charged elements 102, The sedimentation unit 103, the charge detection unit 104, flow out from aerosol outlet 107, in the charge detection unit, Aerosol to be measured flows successively through each charge detection subelement, i.e., aerosol to be measured flows successively through electricity from after sedimentation unit outflow Lotus detection sub-unit 1041 from after charge detection subelement 104n outflows, flows into aerosol and goes out to charge detection subelement 104n Mouth 107.
The aerosol charged elements 102, for making the aerosol particle in the aerosol to be measured of inflow powered.
Specifically, aerosol particle flows through powered by spreading powered or field side after the aerosol charged elements 102 Formula is all powered.The carried charge of aerosol particle is relevant with the particle size of aerosol particle.
The sedimentation unit 103, initial preset is less than or equal to for particle diameter in the powered aerosol particle for retaining inflow The aerosol particle of value.
1041~104n of the charge detection subelement, is less than for particle diameter in the powered aerosol particle for retaining inflow Equal to the aerosol particle of the preset value of this charge detection subelement, and export the induced-current of generation.
Specifically, one preset value of each charge detection subelement correspondence, for example:The correspondence of charge detection subelement 1,041 the One preset value, charge detection subelement 104n the n-th preset values of correspondence, each corresponding preset value of charge detection subelement is basis Requirement to the measurement range of particulate determines.When aerosol flows through current charge detection subelement, particle diameter Aerosol particle less than or equal to the corresponding preset value of charge detection subelement will be trapped within this charge detection subelement It is interior.
Described control unit 105, for applying square-wave voltage to the sedimentation unit 103 according to the initial default, And applied respectively and the preset value pair to charge detection subelement each described according to the preset value of each charge detection subelement The constant voltage answered.Wherein, after powered aerosol particle enters sedimentation unit, when the voltage added by sedimentation unit is low level When, particle diameter is trapped within sedimentation unit less than or equal to the aerosol particle of initial default, when the voltage added by sedimentation unit During for high level, except particle diameter is trapped within sedimentation unit less than or equal to the aerosol particle of initial default, also part grain Footpath is also trapped within sedimentation unit more than the aerosol particle of initial default.
Specifically, sedimentation unit 103 and 1041~104n of each charge detection subelement will be realized to aerosol particle Retention by the voltage of control unit applying, it is necessary to be realized.Control unit is applied to the sedimentation unit and every by regulation Voltage on individual charge detection subelement meets the aerosol trapped in sedimentation unit and each charge detection subelement The requirement of the particle size of grain.For the different initial default of sedimentation unit, control unit will apply corresponding voltage, just Beginning preset value can be obtained with the corresponding relation of voltage by experiment.Different for each charge detection subelement are preset Value, control unit will apply different voltages, and the preset value can be obtained with the corresponding relation of voltage by experiment.
The signal processing unit 106, the induced-current for being exported according to all charge detection subelements is conciliate Analysis expression formula calculates the average grain diameter and number concentration of the aerosol particle being trapped in each charge detection subelement, its In, the analytical expression is the induced-current and the average grain diameter, the number concentration for meeting default required precision Between multinomial;
Or, the signal processing unit 106, for the induced-current that is exported according to all charge detection subelements and Neural network model calculates the average grain diameter and number concentration of the aerosol particle being trapped in each charge detection subelement, Wherein, the neural network model is used to show that the average grain diameter and the quantity are dense according to the induced-current of input Degree.
Wherein, the low level of the square-wave voltage meets:In flowing into the powered aerosol particle of the sedimentation unit 103 Particle diameter is all trapped in the sedimentation unit less than or equal to the aerosol particle of the initial default.The square-wave voltage High level meet:Flow into the powered aerosol particle of the sedimentation unit 103 except particle diameter is initial pre- less than or equal to described If the aerosol particle of value is all trapped in the sedimentation unit, also part particle diameter is more than the gas of the initial default Sol particle is also trapped within the sedimentation unit.Preferably, the low level of the square-wave voltage meets:Flow into the deposition Only have particle diameter all to be cut less than or equal to the aerosol particle of the initial default in the powered aerosol particle of unit 103 Stay in the sedimentation unit.
The corresponding constant voltage of preset value of the charge detection subelement meets:Flow into each described charge detection single Particle diameter all cuts less than or equal to the aerosol particle of the preset value of the charge detection subelement in the powered aerosol particle of unit Stay in the described charge detection subelement;
Wherein, at least one is more than the initial default in all preset values.
A kind of aerosol sensor that the present embodiment is provided, is surveyed by the combination of more than two charge detection subelements Amount, and Data Fusion is carried out to induced-current by analytical expression or neural network model, grain wider can be realized The measurement of the aerosol particle of footpath measurement range, while being easy to miniaturization.In addition, the present embodiment passes through multiple charge detection lists Unit can make measurement result more fine, accurate.
When thering is particle diameter to be more than or equal to the aerosol particle of maximum preset value in the aerosol being passed through, part aerosol is had Particle can not be trapped in aerosol sensor, and this can cause the measurement to aerosol inaccurate, in order that aerosol sensor Measurement is more accurate, it is necessary to be filtered to aerosol.The aerosol enter it is intraoral filter membrane is installed, the filter membrane is used to filter grain More than or equal to the aerosol particle of predetermined size threshold value, the predetermined size threshold value is equal to maximum preset value in footpath.
In a kind of possible implementation, the aerosol charged elements are pin-plate ionic source, the pin-board-like The just extremely conductive tip of ion gun, negative pole is plate electrode.Wherein, the conductive tip, including:A conductive wiener Rice structure, surface are coated with the wiener that the one-dimensional nano structure of the insulation of metal level, surface are coated with the semiconductor of metal level Rice structure.The one-dimensional nano structure includes:Nano wire, nanotube, nanometer rods.The metal level high temperature resistant and work function compared with It is low.
The conductive tip can also be the nanoscale tip completely by micro Process.The tip of the positive pole connects height Level, the plate electrode connects low level or ground connection.In addition, aerosol charged elements can be using needle-tip corona electric discharge conduct Ion gun, wherein needlepoint electrode can use tungsten needle or nano wire, nanotube, nanometer rods.
Or, the aerosol charged elements are line-cartridge type ion gun, the line-cartridge type ion gun it is just extremely conductive Filament, negative pole is cylinder electrode.
In a kind of possible implementation, the sedimentation unit includes two pieces of parallel battery lead plates, one of electrode Plate earthing, another electrode plate is connected with described control unit.
In a kind of possible implementation, each described charge detection subelement includes two pieces of parallel battery lead plates and electricity Flowmeter, one of battery lead plate is connected with described control unit, and another electrode plate is connected with galvanometer, galvanometer and the letter Number processing unit connection, the galvanometer is used to measure induced-current and exports the faradic size for measuring.Wherein, with institute It can be Faraday cup or Faraday plate to state the connected charge detection subelement of aerosol outlet.
In a kind of possible implementation, the charge detection unit is by the first charge detection subelement and the second electric charge Detection sub-unit is constituted;The first charge detection subelement is connected with the sedimentation unit, and the second charge detection is single It is first to be connected with the first charge detection subelement.
Wherein, the signal processing unit, for the induced-current that is exported according to all charge detection subelements and Analytical expression calculates the average grain diameter and number concentration of the aerosol particle being trapped in each charge detection subelement, its In, the analytical expression is the induced-current and the average grain diameter, the number concentration for meeting default required precision Between multinomial.
Wherein, the analytical expression can draw by the following method:
S11:Gather the aerosol sensor measurement and demarcate the induced-current that aerosol draws, wherein, demarcate aerosol Average grain diameter and number concentration be known;
S12:Induced-current and average grain diameter, the multinomial of number concentration are set.
S13:Using multinomial described in least square fitting, the parameter of the multinomial is obtained;
S14:Average grain diameter and number concentration that the multinomial is exported and the aerosol demarcated in aerosol Grain average grain diameter and number concentration be compared, if the multinomial output average grain diameter and number concentration with it is described Error between the average grain diameter and number concentration of the aerosol particle demarcated in aerosol is less than or equal to the first predetermined threshold value, then Fitting terminates, and otherwise, corrects the number of times of the multinomial and returns to S13.
The signal processing unit, can be also used for the induced-current that is exported according to all charge detection subelements and Neural network model calculates the average grain diameter and number concentration of the aerosol particle being trapped in each charge detection subelement, Wherein, the neural network model is used to show that the average grain diameter and the quantity are dense according to the induced-current of input Degree.Wherein, the neural network model can be BP neural network model.
Wherein, the modeling method of the neural network model is as follows:
S21:Gather the aerosol sensor measurement and demarcate the induced-current that aerosol draws, wherein, demarcate aerosol Average grain diameter and number concentration be known;
S22:Neural network model is set, and the neural network model is demarcated;
S23:Each output induced-current of the aerosol sensor is input into the calibrated neural network model, is obtained To the average grain diameter and number concentration of neural network model output.
Wherein, the neural network model is demarcated in step S22, is specifically included:
S221:Neural network model is set, initialize the neural network model, including the neural network model is set Weight parameter W1And W2Initial value;
S222:Gather the aerosol sensor measurement and demarcate the induced-current that aerosol draws;
S223:The weight parameter in neural network model is learnt using Learning Algorithm, by the sensing The neural network model that electric current is input into after the study, the average grain diameter and quantity for obtaining the output of the neural network model is dense Degree;
S224:The average grain diameter and number concentration that the neural network model is exported are molten with the gas of the demarcation aerosol The average grain diameter and number concentration of glue particle are compared, if the average grain diameter and number concentration of neural network model output And the error between the average grain diameter and number concentration of the aerosol particle of the demarcation aerosol is less than or equal to the second default threshold Value, then demarcate and terminate, and otherwise, returns to S223.
Above-mentioned two kinds of signal processing units are using the method for data fusion according to being measured on each charge detection subelement Induced-current inverting obtains the particle diameter distribution and number concentration of aerosol particle to be measured, breaches in Fuch diffusion zone electric theories Simple linear approximate relationship between grain carried charge and particle diameter is only effectively limited in the range of 10-300nm, is extended simple The measurement range of the aerosol sensor based on electrical principles.
In addition, the aerosol sensor also includes:Driver element, for driving aerosol to be measured in aerosol sensor Interior flowing, the driver element is connected with the aerosol entrance, or, the driver element is connected with the aerosol outlet. Wherein, the driver element can be micropump;The driver element can also be fan or compressor.
The aerosol sensor also includes:Output unit, for exporting the average grain diameter and the number concentration.
Fig. 2 shows a kind of aerosol sensor, and the aerosol sensor includes:
It is provided with aerosol entrance 6 and aerosol outlet 7 on aerosol sensor shell 5, aerosol entrance 6 Filter membrane 10;Aerosol entrance 6, aerosol charged elements 1, sedimentation unit 2, the first charge detection subelement 3, the second charge detection Subelement 4, aerosol outlet 7 are sequentially connected;
Wherein, aerosol charged elements 1 are pin-board-like positive corona discharge ion gun, and aerosol particle flows through the ion gun Afterwards by spreading the whole positively chargeds of the powered mode in powered or field, the positive pole tip of the ion gun is by the humidifying of electric field-assisted ZnO nano-wire 16 prepared by method, the nano wire 16 can be grown directly upon on battery lead plate 17, it is also possible to by receiving for having grown in advance Rice noodles are transferred on pole plate 17, and cover high temperature resistant and the relatively low metal level of work function, such as tungsten metal in the nanowire surface Layer.Nano wire 16 during measurement as positive pole tip meets high voltage V through battery lead plate 170, plane electrode 12 corresponding thereto connects low Voltage or ground connection.Battery lead plate 17 and battery lead plate 12 are arranged on aerosol sensor shell through insulant 18 and insulant 14 respectively On 5.
Sedimentation unit 2 includes:Battery lead plate 21 and battery lead plate 22, battery lead plate 21 and battery lead plate 22 are parallel to each other, and pass through respectively Insulant 23 and insulant 24 are arranged on aerosol sensor shell 5, and battery lead plate 21 is connected with control unit 8.
First charge detection subelement 3 includes:Battery lead plate 31, battery lead plate 32, galvanometer 35, battery lead plate 31 and battery lead plate 32 It is parallel to each other, and respectively through insulant 33 and insulant 34 on aerosol sensor shell 5, battery lead plate 31 is single with control Unit 8 connects, and battery lead plate 32 is connected with galvanometer 35, and galvanometer 35 is connected with signal processing unit 9.
Second charge detection subelement 4 includes:Battery lead plate 41, battery lead plate 42, galvanometer 45, battery lead plate 41 and battery lead plate 42 It is parallel to each other, and respectively through insulant 43 and insulant 44 on aerosol sensor shell 5, battery lead plate 41 is single with control Unit 8 connects, and battery lead plate 42 is connected with galvanometer 45, and galvanometer 45 is connected with signal processing unit 9.
It should be noted that:Filter membrane 10 is used to filter particle diameter more than or equal to the second preset value d3Aerosol particle.
After aerosol is entered by aerosol entrance 6, aerosol charged elements 1 are flowed through, aerosol particle is by aerosol band It is powered after electric unit 1;Control unit 8 applies low level for V on battery lead plate 211, high level be V2Square-wave voltage, battery lead plate 22 ground connection.The low level V of square-wave voltage1, high level V2It is E to produce intensity respectively between battery lead plate 21 and battery lead plate 221And E2 Electric field, enters into the aerosol particle of positively charged of sedimentation unit 2 in electric field E1And E2In the presence of, can be deflected to battery lead plate 22. Because the less charged aerosol particle of particle diameter has larger electromobility, so control unit 8 applies and initial default d1Corresponding low level V1May be such that now particle diameter is less than or equal to d1All charged aerosol particles be deposited on battery lead plate 22 On.And particle diameter is more than d1Charged aerosol particle due to its relatively small electromobility in low level V1When be not deposited And the first charge detection subelement 3 is fully entered, while high level V2Particle diameter at this moment is set to be more than d1Charged aerosol particle in Some is deposited on battery lead plate 22, and remaining particle diameter is more than d1Charged aerosol particle to enter the first charge detection single Unit 3.So, due to being added in the conversion of the square-wave voltage low and high level of sedimentation unit 2 so that the band for flowing through sedimentation unit 2 is electrically molten Glue particle realizes two kinds of conversion of various concentrations.
Control unit 8 applies constant voltage V on battery lead plate 313, constant voltage V3So that in battery lead plate 31 and battery lead plate 32 Between produce intensity be E3Electric field, enter into the aerosol particle of positively charged of the first charge detection subelement 3 in electric field E3's Under effect, can be deflected to battery lead plate 32, while inducing induced-current in galvanometer 35.Control unit 8 applies pre- with first If value d2Corresponding V3So that particle diameter is less than or equal to d2Charged aerosol particle be all deposited on battery lead plate 32, and particle diameter is big In d2Voltage of the charged aerosol particle in sedimentation unit 2 fully enter the second charge detection subelement 4 when being low level, Particle diameter is more than d when voltage in sedimentation unit 2 is high level2Charged aerosol particle be partially depositing in battery lead plate 22 and 32 Above, the second charge detection subelement 4 is partly entered.Simultaneously because the effect of the square-wave voltage of sedimentation unit 2 so that flow into first The particle diameter of the charged aerosol particle in charge detection subelement 3 is more than d1And have in a measure the cycle two kinds it is different Number concentration, so inducing high/low currents respectively I in galvanometer 351And I2Square wave current.In addition, particle diameter is more than d2 Charged aerosol particle during the first charge detection subelement 3 is flowed through also can in galvanometer 35 induced-current, institute With electric current I1And I2In not only comprising particle size range be d1<d<d2Aerosol particle characteristic information, further comprises particle diameter and be more than d2Charged aerosol particle characteristic information.
Control unit 8 applies constant voltage V on battery lead plate 414, constant voltage V4So that in battery lead plate 41 and battery lead plate 42 Between produce intensity be E4Electric field, enter into the aerosol particle of positively charged of the second charge detection subelement 4 in electric field E4's Under effect, can be deflected to battery lead plate 42, while inducing induced-current in galvanometer 45.Control unit 8 applies pre- with second If value d3Corresponding V4So that all charged aerosol particles entered into the second charge detection subelement 4 are all deposited on electricity On pole plate 42.Simultaneously because the particle diameter that the square-wave voltage of sedimentation unit 2 is realized is more than d1Charged aerosol particle outflow The height change of concentration after sedimentation unit 2, and particle diameter is retained in the first charge detection subelement 3 less than or equal to d2Whole gas The effect of sol particle so that the particle size range for flowing into the aerosol particle of positively charged of second charge detection from unit 4 is d2<d<d3And there are two kinds of different number concentrations in a measure the cycle, so inducing high/low currents in galvanometer 45 Respectively I3And I4Square wave current.And I3And I4In only comprising particle size range be d2<d<d3Charged aerosol particle spy Reference ceases.
Signal processing unit 9 obtains the induced-current I1、I2、I3And I4, particle diameter is obtained according to the induced-current respectively Scope is d1<d<d2Aerosol particle average grain diameter and number concentration, and particle size range be d2<d<d3Aerosol The average grain diameter and number concentration of grain.
Due to the measurement range of aerosol sensor of the invention exceeded in Fuch diffusion zone electric theories grain diameter with Linear scope (10-300nm) between carried charge, and the sensing in the first charge detection subelement 3 induced-current I1And I2In coupled particle diameter more than d2Charged aerosol particle information so that in induced-current I1And I2With d1<d<d2Model Do not possess general simple relation formula between the average grain diameter and number concentration of the aerosol particle in enclosing, so in signal transacting Polynary multinomial analytic expression or neural Network Data Fusion algorithm are used in unit 8 by the sensing on the first charge detection subelement 3 Electric current I1And I2And the second induced-current I on charge detection subelement 43And I4Particle size range is converted to for d1<d<d2Gas Sol particle average grain diameter dav,1With number concentration N1And particle size range is d2<d<d3Aerosol particle average grain diameter dav,2 With number concentration N2, its data fusion principle using neural network model when can use three-layer neural network knot as shown in Figure 3 Structure represents, I1And I2And I3And I4Constitute the input node of network, average grain diameter dav,1、dav,2With number concentration N1、N2Constitute net The output node of network.
Signal processing unit using BP neural network model carry out data fusion when, BP neural network model set up step Suddenly include:
S1:Gather the aerosol sensor measurement and demarcate the induced-current that aerosol draws, wherein, demarcate aerosol Average grain diameter and number concentration are known;
S2:Construction BP neural network model, and the BP neural network model is demarcated;
S3:Each output induced-current of the aerosol sensor is input into the calibrated BP neural network model, Obtain the average grain diameter d of aerosol particleav,1、dav,2With number concentration N1、N2
Wherein, it is necessary to each parameter (W of neural network model before gasoloid is carried out using sensor1And W2) Demarcated, namely neutral net parameter learning, step S2 includes:
S21:Construction BP neural network model, and the BP neural network model is initialized, including the BP nerves are set The weighting parameters W of network model1And W2Initial value;
S22:For the particle diameter and number concentration of demarcating aerosol, m and n sample point are extracted respectively:dav,1、…、 dav,m, N1、…、Nn, the whole measurement range of these sample points covering aerosol sensor, the collection aerosol sensing The induced-current that aerosol draws is demarcated in device measurement, specifically, will be in known each average grain diameter dav,1、…、dav,mIt is dense with quantity Degree N1、…、NnUnder collect each output current group of aerosol sensorAs data sample, Wherein i=1,2 ..., m, j=1,2 ..., n, output current group be one group of induced-current;
S23:Weight parameter is learnt using BP learning algorithms, each output current group of the aerosol sensor is defeated Enter the BP neural network model after study, obtain the average grain diameter and number concentration of the BP neural network model output;
S24:The output data of the BP neural network model is average with the aerosol particle of the demarcation aerosol Particle diameter and number concentration are respectively correspondingly compared, if the average grain diameter and quantity of the output of the BP neural network model are dense Error between degree and the average grain diameter and number concentration of the aerosol particle for demarcating aerosol is preset less than or equal to second Threshold value, then demarcate and terminate, and otherwise, corrects the weight parameter of the BP neural network model and returns to S23;Wherein, nerve net is corrected Network parameter is concretely comprised the following steps the average grain diameter and number concentration of the output of the BP neural network model and the demarcation gas After the average grain diameter and number concentration of the aerosol particle of colloidal sol are accordingly compared, the mean square deviation minimum principle according to error Calculate weighting parameters W1、W2Correction value [Δ W1, Δ W2], by W1+ΔW1、W2+ΔW2As new weighting parameters.
After completing to demarcate, when the measurement of aerosol average grain diameter and number concentration is carried out using sensor, by Real-time Collection Each electric current output I for arriving1、I2、I3、I4Input to neutral net, the output of network model is the average of aerosol particle to be measured Particle diameter dav,1、dav,2With number concentration N1、N2
Using one-dimensional nano structures such as nano wires as electric discharge in the aerosol charged elements of above-mentioned aerosol sensor Anode, other electrode structures use simple flat plate structure so that sensor construction is simple, handling ease, is capable of achieving to sensor Micro Process, further realize miniature aerosol sensor, meet aerosol multiple spot in the confined space, distributed measurement will Ask.
It should be noted that herein, such as first and second etc relational terms are used merely to an entity Or operation makes a distinction with another entity or operation, and not necessarily require or imply these entities or exist between operating Any this actual relation or order.And, term " including ", "comprising" or its any other variant be intended to it is non- It is exclusive to include, so that process, method, article or equipment including a series of key elements not only include those key elements, But also other key elements including being not expressly set out, or also include by this process, method, article or equipment are solid Some key elements.In the absence of more restrictions, the key element limited by sentence " including ", does not arrange Except also there is other identical factor in the process including the key element, method, article or equipment.
One of ordinary skill in the art will appreciate that:Realizing all or part of step of above method embodiment can pass through Programmed instruction related hardware is completed, and foregoing program can be stored in the storage medium of embodied on computer readable, the program Upon execution, the step of including above method embodiment is performed;And foregoing storage medium includes:ROM, RAM, magnetic disc or light Disk etc. is various can be with the medium of store program codes.
It is last it should be noted that:Presently preferred embodiments of the present invention is the foregoing is only, skill of the invention is merely to illustrate Art scheme, is not intended to limit the scope of the present invention.All any modifications made within the spirit and principles in the present invention, Equivalent, improvement etc., are all contained in protection scope of the present invention.

Claims (8)

1. a kind of aerosol sensor, it is characterised in that including:
Aerosol entrance, aerosol charged elements, sedimentation unit, charge detection unit, control unit, signal processing unit, gas Colloidal sol is exported;
The aerosol entrance, the aerosol charged elements, the sedimentation unit, the charge detection unit, the gas are molten Gel outlet is sequentially connected, and the charge detection unit is connected with the signal processing unit, described control unit respectively with it is described Sedimentation unit is connected with the charge detection unit;
The charge detection unit includes multiple charge detection subelements, and the multiple charge detection subelement is sequentially connected, often The individual charge detection subelement is connected with described control unit respectively, each described charge detection subelement respectively with the letter Number processing unit is connected;
The aerosol charged elements, for making the aerosol particle in the aerosol to be measured of inflow powered;
The sedimentation unit, it is molten less than or equal to the gas of initial default for particle diameter in the powered aerosol particle for retaining inflow Glue particle;
Wherein, the sedimentation unit includes two pieces of parallel battery lead plates, one of electrode plate earthing, another electrode plate and institute State control unit connection;
The charge detection subelement, this charge detection is less than or equal to for particle diameter in the powered aerosol particle for retaining inflow The aerosol particle of the preset value of subelement, and export the induced-current of generation;
Wherein, each described charge detection subelement include two pieces of parallel battery lead plates and galvanometer, one of battery lead plate with Described control unit is connected, and another electrode plate is connected with galvanometer, and galvanometer is connected with the signal processing unit, the electricity Flowmeter is used to measure induced-current and exports the faradic size for measuring;The combination of each charge detection subelement is surveyed Amount can be realized being measured compared with the particle diameter distribution of the aerosol particle of wide particle diameter measurement range, obtain the distribution relation of particle diameter;
Described control unit, for applying square-wave voltage to the sedimentation unit according to the initial default, and according to each The preset value of charge detection subelement applies constant electricity corresponding with the preset value respectively to charge detection subelement each described Pressure;
The signal processing unit, for the induced-current and analytical expression that are exported according to all charge detection subelements The average grain diameter and number concentration of the aerosol particle being trapped in each charge detection subelement are calculated, wherein, the solution Analysis expression formula is to meet polynary between the induced-current and the average grain diameter, the number concentration of default required precision Multinomial;
Or, the signal processing unit, for the induced-current and nerve net that are exported according to all charge detection subelements Network model calculates the average grain diameter and number concentration of the aerosol particle being trapped in each charge detection subelement, wherein, The neural network model is used to draw the average grain diameter and the number concentration according to the induced-current of input;
Wherein, the low level of the square-wave voltage meets:Particle diameter is small in flowing into the powered aerosol particle of the sedimentation unit All it is trapped in the sedimentation unit in the aerosol particle equal to the initial default;
The high level of the square-wave voltage meets:Flow into the powered aerosol particle of the sedimentation unit except particle diameter less than etc. All it is trapped in the sedimentation unit in the aerosol particle of the initial default, also part particle diameter is first more than described The aerosol particle of beginning preset value is also trapped within the sedimentation unit;
The corresponding constant voltage of preset value of the charge detection subelement meets:Flow into each charge detection subelement Particle diameter is all trapped in less than or equal to the aerosol particle of the preset value of the charge detection subelement in powered aerosol particle In the described charge detection subelement;
Wherein, at least one is more than the initial default in all preset values.
2. aerosol sensor according to claim 1, it is characterised in that the aerosol enter it is intraoral filter membrane is installed, The filter membrane is used to filter aerosol particle of the particle diameter more than or equal to predetermined size threshold value, and the predetermined size threshold value is equal to maximum Preset value.
3. aerosol sensor according to claim 1, it is characterised in that the aerosol charged elements are pin-board-like Ion gun, the just extremely conductive tip in the pin-plate ionic source, negative pole is plate electrode.
4. aerosol sensor according to claim 3, it is characterised in that the conductive tip, including:Conductive one Dimension nanometer construction, surface are coated with that the one-dimensional nano structure of the insulation of metal level, surface are coated with the semiconductor of metal level Dimension nanometer construction.
5. aerosol sensor according to claim 4, it is characterised in that the one-dimensional nano structure includes:Nano wire, Nanotube, nanometer rods.
6. aerosol sensor according to claim 1, it is characterised in that the aerosol charged elements are line-cartridge type Ion gun, the just extremely conductive filament of the line-cartridge type ion gun, negative pole is cylinder electrode.
7. aerosol sensor according to claim 1, it is characterised in that the electric charge inspection being connected with the aerosol outlet It is Faraday cup or Faraday plate to survey subelement.
8. aerosol sensor according to claim 1, it is characterised in that the aerosol sensor also includes:Drive Unit, for driving aerosol to be measured to be flowed in aerosol sensor, the driver element is connected with the aerosol entrance, Or, the driver element is connected with the aerosol outlet.
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