CN104157585B - A kind of OLED luminescent layer test device and method of testing - Google Patents
A kind of OLED luminescent layer test device and method of testing Download PDFInfo
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- CN104157585B CN104157585B CN201410370433.6A CN201410370433A CN104157585B CN 104157585 B CN104157585 B CN 104157585B CN 201410370433 A CN201410370433 A CN 201410370433A CN 104157585 B CN104157585 B CN 104157585B
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/70—Testing, e.g. accelerated lifetime tests
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Abstract
The invention discloses a kind of OLED luminescent layer test device and method of testing, seal cavity, right angle coordinate manipulator, driving smelting tool, thermal infrared imager, Manipulator Controller, matrix switch controller, driving power supply able to programme and host computer including detection；The OLED luminescent layer test device of the present invention and method of testing, it is possible to quickly detect OLED luminescent layer heat condition and thickness.
Description
Technical field
The present invention relates to OLED Display Technique field, be specifically related to a kind of OLED luminescent layer test device and method of testing.
Background technology
Organic material evaporation is that we manufacture the core process of OLED, and during evaporation, device substrate is deposited with machine cavity
The clamping apparatus on body top is fixed and rotates, and organic material is placed in the evaporation boat of evaporator cavity bottom, is made by electrical heating
Organic material undergoes phase transition, and organic molecule gasification or distillation postadhesion are on device substrate, thus define the luminescent layer of device；
But the one-tenth film uniformity that this evaporation mode makes organic material is not good enough, owing to during evaporation, substrate is constantly in rotation status,
The center line velocity of substrate is zero, and edge line speed is maximum, and the reason of evaporation mask plate, and actual measurement thickness difference is more than 6%,
And substrate size is the biggest, evaporation difference on effect is the most obvious；By research film forming situation, research and development engineer can carry out device architecture
The design that optimizes overcome the inherent shortcoming of evaporation process, in order to obtain the film forming situation of luminescent layer organic material, generally use
Method is destructive testing, inefficient and with high costs.
Summary of the invention
Present invention aim to address the problems referred to above, it is provided that the test dress of a kind of quick detection OLED luminescent layer heat condition and thickness
Put and method of testing.
For solving above-mentioned technical problem, the technical scheme is that a kind of OLED luminescent layer test device, close including detecting
Envelope cavity, right angle coordinate manipulator, driving smelting tool, thermal infrared imager, Manipulator Controller, matrix switch controller, can
Programming drives power supply and host computer；Described right angle coordinate manipulator, driving smelting tool and thermal infrared imager are respectively positioned on detection annular seal space
Internal portion；Driving smelting tool to be positioned at detection and seal cavity bottom surface, thermal infrared imager is fixedly connected on right angle coordinate manipulator, directly
Angular coordinate mechanical hand is fixed on detection and seals on cavity, and thermal infrared imager receives one end of radiation and is positioned at the top driving smelting tool；
Host computer connects thermal infrared imager, Manipulator Controller, matrix switch controller and driving power supply able to programme respectively；Mechanical hand
Controller is connected with right angle coordinate manipulator, and matrix switch controller is connected with driving smelting tool, driving power supply able to programme and matrix
Switch controller is connected.
Preferably, described test device also includes nitrogen valve and the vacuum valve being connected with host computer, nitrogen valve one end and source of the gas phase
Even, the other end seals cavity by trachea with detection and is connected, and vacuum valve one end is connected with vaccum-pumping equipment, and the other end passes through gas
Pipe seals cavity with detection and is connected.
Preferably, described driving smelting tool and detection seal and are provided with insulated substrate between cavity bottom surface, and right angle coordinate manipulator is fixed
On insulated substrate.
Preferably, the quantity of described driving power supply able to programme is three, and three driving power supplys able to programme are in parallel, and correspondence is treated respectively
Survey the light emitting pixel that oled substrate RGB three class is different.
A kind of method of testing using above-mentioned test device to carry out OLED luminescent layer test, comprises the following steps:
Step 1, oled substrate to be measured is installed to drive smelting tool in and put into detection seal cavity insulated substrate on and close
Detection seals cavity；
Step 2, right angle coordinate manipulator position reset and correct, and the one end making thermal infrared imager receive radiation is directed at OLED to be measured
Substrate center；
Step 3, opened vacuum valve extracting vacuum by host computer, close vacuum valve after completing and open nitrogen valve and be filled with nitrogen,
Nitrogen valve is closed after completing；
Step 4, open driving power supply able to programme by host computer and driving signal is set, by PC control matrix switch control
The passage of pixel region to be detected opened by device processed；
Step 5, thermal infrared imager is made to be directed at pixel region to be detected start red by PC control right angle coordinate manipulator
Outer thermal imaging system；
Step 6, by host computer start drive signal input, thermal infrared imager carries out thermal image detection；
Step 7, host computer record thermal image detection data also compare thermal field thickness graph of a relation and draw OLED luminescent layer thickness, gained
Ten groups of data take median as determining film thickness value；
Step 8, repetition step 4 to step 7 complete the thermal image detection under different driving signal.
Preferably, described driving signal includes the signal of telecommunication for driving oled substrate red pixel to be measured, drives green pixel
The signal of telecommunication and drive blue pixel the signal of telecommunication.
Preferably, described driving signal voltage is incremented to 5V from 0.5V, increases 0.5V every time.
In sum, OLED luminescent layer provided by the present invention test device and method of testing, it is possible to quickly detect OLED
Luminescent layer heat condition and thickness.
Accompanying drawing explanation
Fig. 1 is the overall structure schematic diagram of the present invention.
Fig. 2 is the test flow chart of the present invention.
Fig. 3 is the control principle drawing of the present invention.
Fig. 4 is the thermal field thickness graph of a relation of the present invention.
Description of reference numerals: 1, detection seals cavity；2, right angle coordinate manipulator；3, smelting tool is driven；4, thermal infrared imager；
5, Manipulator Controller；6, matrix switch controller；7, driving power supply able to programme；8, host computer；9, nitrogen valve；10、
Vacuum valve；11, insulated substrate.
Detailed description of the invention
The present invention is described further with specific embodiment below in conjunction with the accompanying drawings:
As shown in figures 1 and 3, the OLED luminescent layer test device of the present invention, seal cavity 1, rectangular coordinate including detection
Mechanical hand 2, driving smelting tool 3, thermal infrared imager 4, Manipulator Controller 5, matrix switch controller 6, driving electricity able to programme
Source 7, host computer 8, nitrogen valve 9, vacuum valve 10 and insulated substrate 11；Right angle coordinate manipulator 2, drive smelting tool 3 and red
Outer thermal imaging system 4 is respectively positioned on detection and seals cavity 1 inside；Insulated substrate 11 is positioned at detection and seals cavity 1 bottom surface, drives smelting tool
3 are positioned on insulated substrate 11, and thermal infrared imager 4 is fixedly connected on right angle coordinate manipulator 2, right angle coordinate manipulator 2
Being fixed on insulated substrate 11, thermal infrared imager 4 receives one end of radiation and is positioned at the top driving smelting tool 3, rectangular coordinate machine
Tool hands 2 can realize being accurately positioned of thermal infrared imager 4；Host computer 8 connect respectively thermal infrared imager 4, Manipulator Controller 5,
Matrix switch controller 6, driving power supply 7 able to programme, nitrogen valve 9 and vacuum valve 10, various instructions are passed by host computer 8 respectively
It is defeated by thermal infrared imager 4, Manipulator Controller 5, matrix switch controller 6, driving power supply 7 able to programme, nitrogen valve 9 and
Vacuum valve 10, and the signal of thermal infrared imager 4 feedback is processed；Manipulator Controller 5 and right angle coordinate manipulator 2
Being connected, the control information that host computer 8 is inputted by Manipulator Controller 5 is converted into the executable signal of right angle coordinate manipulator 2；
Matrix switch controller 6 is connected with driving smelting tool 3, drives tool 3 to be used for fixing oled substrate to be measured and making OLED to be measured
The electrode of substrate is connected, in order to the input of the signal of telecommunication and control；It is different that matrix switch controller 6 controls oled substrate to be measured
The power-on switch state of the device of light-emitting zone；Driving power supply 7 able to programme is connected with matrix switch controller 6, able to programme drives
Galvanic electricity source 7 is three groups, the light emitting pixel that corresponding oled substrate RGB three class to be measured is different respectively, three driving electricity able to programme
Source 7 is in parallel, and the control information that host computer 8 is inputted by driving power supply 7 able to programme is converted into power supply signal to light OLED to be measured
Substrate；Nitrogen valve 9 one end is connected with source of the gas, and the other end seals cavity 1 by trachea with detection and is connected, vacuum valve 10 one end
Being connected with vaccum-pumping equipment, the other end seals cavity 1 by trachea with detection and is connected, and host computer 8 controls nitrogen by instruction
Valve 9 and the switch of vacuum valve 10.
As shown in Figure 2 and Figure 4, the method for testing of OLED luminescent layer described in the present embodiment, comprise the following steps:
Step 1, oled substrate to be measured is installed to drive smelting tool 3 in and put into detection seal cavity 1 insulated substrate 11 on
And close detection sealing cavity 1；
Step 2, right angle coordinate manipulator 2 position reset and correct, and the one end making thermal infrared imager 4 receive radiation is directed to be measured
Oled substrate center is also set as reference position；
Step 3, opened vacuum valve 10 extracting vacuum by host computer 8, close vacuum valve 10 after completing and open nitrogen valve 9
It is filled with nitrogen 20 to 30 minutes, after completing, closes nitrogen valve 9, to set and to keep measuring the temperature of environment；
Step 4, opened driving power supply 7 able to programme by host computer 8 and be provided for driving oled substrate red pixel to be measured
Driving signal, control matrix switch controller 6 by host computer 8 and open the passage of pixel region to be detected；
Step 5, controlled right angle coordinate manipulator 2 by host computer 8 and make thermal infrared imager 4 be directed at pixel region to be detected also
Start thermal infrared imager 4；
Step 6, by host computer 8 start drive signal input, drive signal voltage be incremented to 5V from 0.5V, increase every time
0.5V, thermal infrared imager 4 carries out ten thermal image detection under this driving voltage respectively；
Step 7, host computer 8 record thermal image detection data and compare thermal field thickness graph of a relation and draw OLED luminescent layer thickness, institute
Obtain ten groups of data and take median as determining film thickness value；
Step 8, step 4 to the step 7 that repeats be respectively arranged to drive the driving signal of oled substrate green pixel to be measured and
The driving signal of blue pixel, completes thermal image detection.
Described in the present embodiment, OLED luminescent layer luminescent material is preferably 8-hydroxyquinoline aluminum, carries out redness respectively under driving signal
Pixel light emission layer, green pixel luminescent layer and the thermal image detection of blue pixel luminescent layer, gained thermal field data are as shown in table 1:
| Red (DEG C) | Green (DEG C) | Blue (DEG C) | |
| 0.5V | 16 | 10.5 | 19.6 |
| 1V | 16.5 | 9.9 | 19.2 |
| 1.5V | 17.5 | 9.7 | 18.7 |
| 2V | 17.7 | 9.9 | 18.6 |
| 2.5V | 17.9 | 10.3 | 18.9 |
| 3V | 18.3 | 11.5 | 20.6 |
| 3.5V | 19.6 | 11.3 | 22.9 |
| 4V | 20.9 | 11.8 | 23.4 |
| 4.5V | 22.6 | 12.4 | 26.7 |
| 5V | 24.6 | 12.1 | 29.3 |
Table 1
As shown in table 1,0.5V drives the temperature of thermal field recording red pixel luminescent layer under signal to be 16 DEG C, and Fig. 4 is 0.5V
Driving the thermal field thickness graph of a relation of red pixel luminescent layer under signal, this thermal field thickness graph of a relation is the test of early stage considerable damage
Obtained by, obtain corresponding luminescent layer thickness by destructive testing after i.e. recording temperature of thermal field under different driving signal；
Compareing this figure and can obtaining red pixel luminescent layer thickness under 0.5V driving signal is 150nm；The different voltage drive signals of comparison respectively
Under the thermal field thickness graph of a relation of each pixel light emission layer, just can draw the luminescent layer thickness of correspondence, gained thickness data such as table 2 institute
Show:
| Red (nm) | Green (nm) | Blue (nm) | |
| 0.5V | 150 | 65 | 360 |
| 1V | 140 | 77 | 375 |
| 1.5V | 150 | 71 | 330 |
| 2V | 144 | 66 | 334 |
| 2.5V | 126 | 79 | 345 |
| 3V | 133 | 77 | 388 |
| 3.5V | 165 | 63 | 412 |
| 4V | 120 | 62 | 437 |
| 4.5V | 130 | 81 | 396 |
| 5V | 150 | 75 | 386 |
Table 2
Due to reasons such as signal of telecommunication fluctuation, mechanical vibration, human error, during device uses and measures, may go out
The value that more existing deviations are bigger, takes median and is contemplated to reject these extreme values, make measurement result more accurate；Respectively to often group
Data take median, and can obtain red pixel luminescent layer thickness is 142nm, and green pixel luminescent layer thickness is 73nm, blue picture
Element luminescent layer thickness is 380.5nm.
Those of ordinary skill in the art is it will be appreciated that embodiment described here is to aid in the reader understanding present invention's
Principle, it should be understood that protection scope of the present invention is not limited to such special statement and embodiment.This area common
It is various specifically that technical staff can make various other without departing from essence of the present invention according to these technology disclosed by the invention enlightenment
Deformation and combination, these deformation and combination are the most within the scope of the present invention.
Claims (7)
1. an OLED luminescent layer test device, it is characterised in that: include that detection seals cavity (1), rectangular coordinate machinery
Hands (2), drive smelting tool (3), thermal infrared imager (4), Manipulator Controller (5), matrix switch controller (6), can
Programming drives power supply (7) and host computer (8)；Described right angle coordinate manipulator (2), driving smelting tool (3) and infrared thermal imagery
Instrument (4) is respectively positioned on detection and seals cavity (1) inside；Drive smelting tool (3) to be positioned at detection and seal cavity (1) bottom surface, red
Outer thermal imaging system (4) is fixedly connected on right angle coordinate manipulator (2), and right angle coordinate manipulator (2) is fixed on detection and seals
On cavity (1), thermal infrared imager (4) receives one end of radiation and is positioned at the top driving smelting tool (3)；Host computer (8)
Connect thermal infrared imager (4), Manipulator Controller (5), matrix switch controller (6) and driving power supply able to programme (7) respectively；
Manipulator Controller (5) is connected with right angle coordinate manipulator (2), and matrix switch controller (6) has (3) with driving smelting
Being connected, driving power supply (7) able to programme is connected with matrix switch controller (6).
Test device the most as claimed in claim 1, it is characterised in that: also include the nitrogen valve being connected with host computer (8)
And vacuum valve (10) (9), nitrogen valve (9) one end is connected with source of the gas, and the other end seals cavity (1) by trachea with detection
Being connected, vacuum valve (10) one end is connected with vaccum-pumping equipment, and the other end seals cavity (1) by trachea with detection and is connected.
Test device the most as claimed in claim 1, it is characterised in that: described driving smelting tool (3) and detection seal cavity
(1) being provided with insulated substrate (11) between bottom surface, right angle coordinate manipulator (2) is fixed on insulated substrate (11).
Test device the most as claimed in claim 1, it is characterised in that: the quantity of described driving power supply (7) able to programme is
Three, three driving power supplys (7) able to programme are luminescence picture in parallel, that corresponding oled substrate RGB three class to be measured is different respectively
Element.
5. use the test device as described in claim 1-4 is arbitrary to carry out a method of testing for OLED luminescent layer test,
It is characterized in that comprising the following steps:
Step 1, oled substrate to be measured is installed to drive smelting tool (3) in and put into detection seal cavity (1) insulation base
Plate (11) is upper and closes detection sealing cavity (1)；
Step 2, right angle coordinate manipulator (2) position reset and correct, and make thermal infrared imager (4) receive one end alignment of radiation
Oled substrate center to be measured；
Step 3, open vacuum valve (10) extracting vacuum by host computer (8), close vacuum valve (10) after completing and beat
Open nitrogen valve (9) and be filled with nitrogen, after completing, close nitrogen valve (9)；
Step 4, open driving power supply (7) able to programme by host computer (8) and driving signal is set, by host computer (8)
Control matrix switch controller (6) and open the passage of pixel region to be detected；
Step 5, by host computer (8) control right angle coordinate manipulator (2) make thermal infrared imager (4) be directed to be detected
Pixel region also starts thermal infrared imager (4)；
Step 6, by host computer (8) start drive signal input, thermal infrared imager (4) carries out thermal image detection；
Step 7, host computer (8) record thermal image detection data also compare thermal field thickness graph of a relation and draw OLED luminescent layer thickness,
Ten groups of data of gained take median as determining film thickness value；
Step 8, repetition step 4 to step 7 complete the thermal image detection under different driving signal.
6. method of testing as claimed in claim 5, it is characterised in that: described driving signal includes for driving OLED to be measured
The signal of telecommunication of substrate red pixel, the signal of telecommunication driving green pixel and the signal of telecommunication of driving blue pixel.
7. method of testing as claimed in claim 5, it is characterised in that: described driving signal voltage is incremented to 5V from 0.5V,
Increase 0.5V every time.
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| CN107833549A (en) * | 2017-12-11 | 2018-03-23 | 苏州广林达电子科技有限公司 | The soft screen CELL tools of OLED |
| CN112612317A (en) * | 2020-12-31 | 2021-04-06 | 北京立禾物联科技有限公司 | Control system of intelligent storage cabinet and intelligent storage cabinet |
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| CN103579032A (en) * | 2012-07-20 | 2014-02-12 | 中国科学院电工研究所 | Method and system for testing power semiconductor module packaging technology |
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| CN103579032A (en) * | 2012-07-20 | 2014-02-12 | 中国科学院电工研究所 | Method and system for testing power semiconductor module packaging technology |
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