CN104155004B - A kind of refraction rotary scanning interference instrument - Google Patents

A kind of refraction rotary scanning interference instrument Download PDF

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CN104155004B
CN104155004B CN201410382154.1A CN201410382154A CN104155004B CN 104155004 B CN104155004 B CN 104155004B CN 201410382154 A CN201410382154 A CN 201410382154A CN 104155004 B CN104155004 B CN 104155004B
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mirror
light beam
refraction
refraction window
window
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CN104155004A (en
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徐亮
冯明春
高闽光
童晶晶
李胜
李相贤
张玉钧
刘建国
刘文清
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Hefei Institutes of Physical Science of CAS
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Abstract

本发明公开了一种折射旋转扫描干涉仪,包括分束器、折射窗片、平面反射镜一、平面反射镜二,抛物面镜一、抛物面镜二、角反射镜一、角反射镜二所述的抛物面镜一的焦点上设有光源,所述的抛物面镜二的焦点上设有光探测系统;分束器将来自光源的光束分成透射光束和反射光束两部分,所述的折射窗片在中心位置连接的电机的带动下高速旋转,透射光束和反射光束在各自光路经过折射窗片并被返回到分束器,带有一定的光程差,并发生干涉,抛面镜二接收该干涉光束并被光探测器系统探测,本发明提高了干涉仪运行过程中的稳定性,并加快了光谱测量速度。

The invention discloses a refraction rotating scanning interferometer, comprising a beam splitter, a refraction window, a plane reflector 1, a plane reflector 2, a parabolic mirror 1, a parabola mirror 2, a corner reflector 1 and a corner reflector 2 The focal point of parabolic mirror 1 is provided with a light source, and the focal point of said parabolic mirror 2 is provided with a light detection system; the beam splitter divides the light beam from the light source into two parts, the transmitted beam and the reflected beam, and the refraction window is Driven by the motor connected to the central position, the high-speed rotation, the transmitted light beam and the reflected light beam pass through the refraction window in their respective optical paths and are returned to the beam splitter, with a certain optical path difference, and interference occurs, and the second parabolic mirror receives the interference The light beam is detected by the optical detector system, and the invention improves the stability of the interferometer during operation and speeds up the spectral measurement speed.

Description

一种折射旋转扫描干涉仪A Refractive Rotating Scanning Interferometer

技术领域technical field

本发明涉及光学领域,具体指一种折射旋转扫描干涉仪。The invention relates to the field of optics, in particular to a refraction rotating scanning interferometer.

背景技术Background technique

傅立叶变换红外光谱(FTIR)仪由于具有高光通量,低噪声,测量速度快等优点,以及可进行实时的多组分同时探测等独特的优势,在环境监测、化学分析、药品成分分析等方面都有广泛的应用。Fourier Transform Infrared Spectroscopy (FTIR) instrument has the advantages of high luminous flux, low noise, fast measurement speed, etc., as well as the unique advantages of real-time multi-component simultaneous detection. It is widely used in environmental monitoring, chemical analysis, and drug composition analysis. There are a wide range of applications.

傅立叶变换红外光谱仪的主要光学部件是经典的迈克尔逊干涉仪,经典迈克尔逊干涉仪要求动镜和定镜严格垂直,但在实际工作环境中,由于动镜在移动中很难保证两个动镜与定镜互相垂直,使得光路产生剪切、倾斜等效应,降低了干涉效率,增加了光谱噪声,限制了系统的应用领域。The main optical component of the Fourier transform infrared spectrometer is the classic Michelson interferometer. The classic Michelson interferometer requires the moving mirror and the fixed mirror to be strictly vertical. It is perpendicular to the fixed mirror, so that the optical path produces effects such as shearing and tilting, which reduces the interference efficiency, increases spectral noise, and limits the application field of the system.

本发明提出的折射旋转扫描干涉仪,用转动代替直线运动来实现光程差的改变,能够克服动镜在直线运动中带来的光路倾斜和剪切影响,同时可以实现快速的光谱测量,具有良好的抗干扰性和稳定性。The refraction rotating scanning interferometer proposed by the present invention uses rotation instead of linear motion to realize the change of optical path difference, can overcome the influence of optical path inclination and shear caused by the moving mirror in linear motion, and can realize fast spectral measurement at the same time, with the advantages of Good anti-interference and stability.

发明内容Contents of the invention

本发明提出一种折射旋转扫描干涉仪,借助于干涉仪中的平面折射窗片的旋转来产生光程差,提高了干涉仪运行过程中的稳定性,并加快了光谱测量速度。The invention proposes a refraction rotating scanning interferometer. The optical path difference is generated by means of the rotation of the plane refraction window in the interferometer, which improves the stability of the interferometer during operation and speeds up the spectral measurement speed.

本发明采用的技术方案是:The technical scheme adopted in the present invention is:

一种折射旋转扫描干涉仪,包括分束器和折射窗片,其特征在于:所述的分束器水平放置,所述的折射窗片位于分束器左侧一定距离间隔处,所述的分束器和折射窗片中间的前后对称位置分别设有平面反射镜一和平面反射镜二,还包括抛物面镜一和抛物面镜二,角反射镜一和角反射镜二,所述的抛物面镜一和抛物面镜二与平面反射镜一和平面反射镜二关于分束器中心对称,所述的角反射镜一和角反射镜二与平面反射镜一和平面反射镜二关于折射窗片中心对称;所述的抛物面镜一的焦点上设有光源,所述的抛物面镜二的焦点上设有光探测系统;A refraction rotating scanning interferometer, comprising a beam splitter and a refraction window, characterized in that: the beam splitter is placed horizontally, the refraction window is located at a certain distance on the left side of the beam splitter, and the The front and rear symmetrical positions in the middle of the beam splitter and the refraction window are respectively provided with a plane mirror one and a plane mirror two, and also includes a parabolic mirror one and a parabolic mirror two, a corner mirror one and a corner mirror two, and the parabolic mirror 1 and parabolic mirror 2 are symmetrical to the center of the beam splitter with plane mirror 1 and plane mirror 2, and the corner mirror 1 and corner mirror 2 are symmetrical to the center of the refraction window ; The focal point of the first parabolic mirror is provided with a light source, and the focal point of the second parabolic mirror is provided with a light detection system;

所述的光源发射的光束经抛物面镜一反射得到平行光束入射到分束器上,所述的分束器将平行光束分为反射光路上的光束一和透射光路上的光束二,所述的反射光路上的光束一依次经过平面反射镜一、折射窗片到达角镜二,所述的透射光路上的光束二依次经过平面反射镜二、折射窗片到达角镜一,所述的折射窗片高速旋转,所述的角镜二和角镜一反射光束一和光束二返回再次经过折射窗片得到光束三和光束四,所述的光束三和光束四之间具有一定的光程差,并根据光路可逆,所述的光束三和光束四沿原路返回到分束器并发生干涉产生干涉光束,所述抛物面镜二接收干涉光束并发送到探测器中进行探测。The beam emitted by the light source is reflected by the parabolic mirror 1 to obtain a parallel beam incident on the beam splitter, and the beam splitter divides the parallel beam into beam 1 on the reflected light path and beam 2 on the transmitted light path. The light beam one on the reflected light path passes through the plane reflector one and the refraction window successively and arrives at the corner mirror two, and the light beam two on the transmitted light path passes through the plane reflector two and the refraction window successively and arrives at the corner mirror one, and the described refraction window The sheet rotates at a high speed, and the beams 1 and 2 are reflected by the corner mirror 2 and the corner mirror 1 and return to pass through the refraction window again to obtain the beam 3 and the beam 4. There is a certain optical path difference between the beam 3 and the beam 4. And according to the reversibility of the optical path, the beams three and four return to the beam splitter along the original path and interfere to generate interference beams, and the parabolic mirror two receives the interference beams and sends them to the detector for detection.

所述的光束一和光束二在折射窗片上交与一交叉点,所述的交叉点与所述的折射窗片中心重合,所述的折射窗片中心安装有连接高速电机的转轴,所述的折射窗片在高速电机的控制下高速旋转。The first beam and the second beam intersect with an intersection on the refraction window, the intersection coincides with the center of the refraction window, and a rotating shaft connected to a high-speed motor is installed at the center of the refraction window. The refraction window rotates at a high speed under the control of a high-speed motor.

所述的抛物面镜一和抛物面镜二为离轴抛物面镜。The first parabolic mirror and the second parabolic mirror are off-axis parabolic mirrors.

所述的干涉光束之间的光程差由折射窗片的厚度d、折射率n以及折射窗片旋转角度θ共同决定,光程差为The optical path difference between the interference beams is determined by the thickness d of the refraction window, the refractive index n and the rotation angle θ of the refraction window. The optical path difference is

δδ == 44 dd [[ nno 22 -- 11 22 -- 11 22 sinsin 22 θθ -- nno 22 -- 11 22 ++ 11 22 sinsin 22 θθ ++ 22 sinsin θθ ]] ..

本发明的优点:Advantages of the present invention:

本发明中的折射窗片通过高速电机旋转使光束产生光程差,每旋转一周获得四幅干涉图,提高了测量速度,通过伺服控制以恒定转速来旋转折射窗片,不需激光参考干涉仪,降低了一定的成本费用。The refraction window in the present invention is rotated by a high-speed motor to generate an optical path difference for the beam, and four interferograms are obtained for each rotation, which improves the measurement speed, and the refraction window is rotated at a constant speed through servo control without a laser reference interferometer. Reduced certain costs.

本发明以旋转方式代替传统的直线或摆臂式干涉仪的工作方式,减少了传统干涉仪的尺寸,便于集成小巧便携的光谱仪,能够满足当前傅立叶变换红外光谱仪在温室气体、挥发性有机物等环境监测的要求,也能满足食品安全,药物分析等其它领域小型化傅立叶变换红外干涉仪的应用要求。The invention replaces the working mode of the traditional linear or swing arm interferometer in a rotating manner, reduces the size of the traditional interferometer, facilitates the integration of a compact and portable spectrometer, and can meet the requirements of the current Fourier transform infrared spectrometer in environments such as greenhouse gases and volatile organic compounds. The monitoring requirements can also meet the application requirements of miniaturized Fourier transform infrared interferometers in other fields such as food safety and drug analysis.

附图说明Description of drawings

图1是本发明的结构示意图。Fig. 1 is a structural schematic diagram of the present invention.

具体实施方式detailed description

如图1所示,一种折射旋转扫描干涉仪,包括分束器3和折射窗片10,所述的分束器3水平放置,所述的折射窗片10位于分束器左侧一定距离间隔处,所述的分束器3和折射窗片10中间的前后对称位置分别设有平面反射镜一8和平面反射镜二6,还包括抛物面镜一1和抛物面镜二4,角反射镜一9和角反射镜二11,所述的抛物面镜一1和抛物面镜二4与平面反射镜一8和平面反射镜二6光于分束器3中心对称,所述的角反射镜一9和角反射镜二11与平面反射镜一8和平面反射镜二6关于折射窗片10中心对称;所述的抛物面镜一1的焦点上设有光源2,所述的抛物面镜二4的焦点上设有光探测系统5;As shown in Figure 1, a refraction rotating scanning interferometer includes a beam splitter 3 and a refraction window 10, the beam splitter 3 is placed horizontally, and the refraction window 10 is located at a certain distance on the left side of the beam splitter At the interval, the front and rear symmetrical positions in the middle of the beam splitter 3 and the refraction window 10 are respectively provided with a plane mirror one 8 and a plane mirror two 6, and also include a parabolic mirror one 1 and a parabolic mirror two 4, corner mirrors One 9 and corner reflector two 11, described parabolic mirror one 1 and paraboloid mirror two 4 and plane reflector one 8 and plane reflector two 6 light are symmetrical in beam splitter 3 centers, described corner reflector one 9 And angle reflector two 11 and plane reflector one 8 and plane reflector two 6 are symmetrical about the center of refraction window 10; The focal point of described parabolic mirror one 1 is provided with light source 2, and the focal point of described parabolic mirror two 4 It is equipped with a light detection system 5;

所述的光源2发射的光束经抛物面镜一1反射得到平行光束入射到分束器3上,所述的分束器3将平行光束分为反射光路上的光束一和透射光路上的光束二,所述的反射光路上的光束一依次经过平面反射镜一8、折射窗片10到达角镜二11,所述的透射光路上的光束二依次经过平面反射镜二6、折射窗片10到达角镜一9,所述的折射窗片10高速旋转,所述的角镜二11和角镜二9反射光束一和光束二返回再次经过折射窗片10得到光束三和光束四,所述的光束三和光束四之间具有一定的光程差,并根据光路可逆,所述的光束三和光束四沿原路返回到分束器3并发生干涉产生干涉光束,所述抛物面镜二4接收干涉光束并发送到探测器5中进行探测。The beam emitted by the light source 2 is reflected by the parabolic mirror 1 to obtain a parallel beam incident on the beam splitter 3, and the beam splitter 3 divides the parallel beam into beam 1 on the reflected light path and beam 2 on the transmitted light path , the light beam one on the reflected light path passes through the plane reflector one 8 and the refraction window 10 and arrives at the corner mirror two 11 successively, and the light beam two on the transmitted light path passes through the plane reflector two 6 and the refraction window 10 successively and arrives Corner mirror one 9, the refraction window 10 rotates at a high speed, and the corner mirror two 11 and corner mirror two 9 reflect beam one and beam two and return to pass through the refraction window 10 again to obtain beam three and beam four. There is a certain optical path difference between the beam three and the beam four, and according to the reversible optical path, the beam three and the beam four return to the beam splitter 3 along the original path and interfere to generate an interference beam, and the parabolic mirror two 4 receives The beam is interfered and sent to the detector 5 for detection.

所述的光束一和光束二在折射窗片10上交与一交叉点7,所述的交叉点7与所述的折射窗片中心重合,所述的折射窗片中心安装有高速电机的转轴,所述的折射窗片在高速电机的控制下高速旋转,使分束器3分开的光束在透射光路和反射光路间产生光程差。The first beam and the second beam intersect with an intersection 7 on the refraction window 10, the intersection 7 coincides with the center of the refraction window, and the center of the refraction window is equipped with a rotating shaft of a high-speed motor , the refraction window is rotated at a high speed under the control of a high-speed motor, so that the beam split by the beam splitter 3 produces an optical path difference between the transmitted light path and the reflected light path.

由于所描述的本系统使用的是小体积折射窗片,能够使整个仪器尺寸减少,同时,折射窗片旋转一周能够得到四幅干涉图,因此提高了测量速度和相应地也要求很快的采集速度。Since the described system uses a small-volume refraction window, the size of the entire instrument can be reduced. At the same time, four interferograms can be obtained by rotating the refraction window for one revolution, so the measurement speed is increased and a correspondingly fast acquisition speed is also required. .

Claims (1)

1. a refraction rotary scanning interference instrument, including beam splitter and refraction window, it is characterised in that: described beam splitter level Placing, described refraction window is positioned on the left of beam splitter at certain distance interval, in the middle of described beam splitter and refraction window Front and back symmetric position is respectively equipped with plane mirror one and plane mirror two, also includes paraboloidal mirror one and paraboloidal mirror two, Angle mirror one and angle mirror two, described paraboloidal mirror one and paraboloidal mirror two and plane mirror one and plane mirror two are about dividing Bundle device centrosymmetry, described angle mirror one and angle mirror two and plane mirror one and plane mirror two are about refraction window center Symmetrical;The focus of described paraboloidal mirror one is provided with light source, and the focus of described paraboloidal mirror two is provided with optical detection system;
The light beam that described light source is launched obtains parallel beam incident to beam splitter through paraboloidal mirror one reflection, described beam splitting Light beam two on light beam one that collimated light beam is divided on reflected light path by device and transmitted light path, the described light beam on reflected light path One sequentially passes through plane mirror one, refraction window arrival angle mirror two, and the light beam two on described transmitted light path sequentially passes through flat Face reflecting mirror two, refraction window arrive angle mirror one, and described refraction window high speed rotating, described angle mirror two and angle mirror one reflect Light beam one and light beam two return again pass by refraction window and obtain light beam three and light beam four, between described light beam three and light beam four There is certain optical path difference, and reversible according to light path, and described light beam three and light beam four and occur along backtracking to beam splitter Interfering and produce interfering beam, described paraboloidal mirror two receives interfering beam and is sent in detector detect;
Described light beam one and light beam two are submitted and a cross point at refraction window, described cross point and described refraction window Center superposition, described refraction window center is provided with the rotating shaft of high-speed electric expreess locomotive, and described refraction window is in the control of high-speed electric expreess locomotive The lower high speed rotating of system;
Described paraboloidal mirror one and paraboloidal mirror two are off axis paraboloidal mirror;
Described optical path difference is by the thickness reflecting window, refractive indexAnd the refraction window anglec of rotationTogether decide on, optical path difference For
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CN106644938B (en) * 2016-11-29 2019-07-12 北京空间机电研究所 A kind of interference-type Fourier transform spectrometer swing arm motion control system
CN110989695B (en) * 2019-12-24 2022-02-11 中国科学院合肥物质科学研究院 A sun automatic tracking device and method on a mobile platform
CN112067580A (en) * 2020-10-09 2020-12-11 南京昆磊泓锐仪器技术有限公司 Fourier near-infrared spectroscopy interferometer and instrument for online material detection
CN114136442B (en) * 2021-11-23 2024-05-14 杭州谱育科技发展有限公司 Interferometer based on continuous rotation and working method thereof

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CN103712691A (en) * 2013-12-23 2014-04-09 聚光科技(杭州)股份有限公司 Fourier transformation spectrograph
CN103712692A (en) * 2013-12-31 2014-04-09 聚光科技(杭州)股份有限公司 Spectrograph and working method

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