CN104101825A - Semiconductor device troubleshooting method and troubleshooting device - Google Patents
Semiconductor device troubleshooting method and troubleshooting device Download PDFInfo
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- CN104101825A CN104101825A CN201310119811.9A CN201310119811A CN104101825A CN 104101825 A CN104101825 A CN 104101825A CN 201310119811 A CN201310119811 A CN 201310119811A CN 104101825 A CN104101825 A CN 104101825A
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Abstract
The invention provides a semiconductor device troubleshooting method and a troubleshooting device, so as to solve the problem that trouble is caused to troubleshooting as the hardware circuit of the semiconductor device can not be quickly and accurately judged whether to work normally. The semiconductor device troubleshooting method comprises steps: a sign for indicating the state of the hardware circuit is added to the tail end of the hardware circuit of the semiconductor device; an operation command is sent to the hardware circuit, and the hardware circuit sets the sign of the hardware circuit state according to the execution situation of the operation command; the hardware circuit is judged whether to fail according to the sign of the hardware circuit state; and if the hardware circuit does not fail, other parts, expect the hardware circuit, of the semiconductor device are checked. According to the method and the device of the invention, failure can be locked more quickly, the device maintenance time is reduced, and the troubleshooting efficiency is improved.
Description
Technical field
The present invention relates to technical field of semiconductors, particularly relate to a kind of malfunction elimination method and malfunction elimination device of semiconductor equipment.
Background technology
At semicon industry, a lot of equipment is all Long-distance Control, the just computer that serves as man-machine interface that operator faces, and real equipment is in other room.How in man-machine interface, promptly and accurately the state of display device, to equipment is controlled, seems particularly important.The existing control method to semiconductor equipment is as follows, and the vacuum system of take describes as example:
The vacuum system of etching machine comprises that vacuum obtains device and vacuum measuring device, and wherein vacuum acquisition device refers to pump, and its effect is that chamber is extracted into vacuum by atmosphere.Dry etching needs sufficiently high vacuum (millitorr level), therefore must use high vacuum pump, and the high vacuum pump generally using at semicon industry is molecular pump, yet molecular pump can not directly be taken out atmosphere, so just need a forepump, is called dry pump.What state is the vacuum of chamber reach needs measurement mechanism to measure, and the measurement mechanism in general adopting is vacuum gauge.The principle of work of whole vacuum system as shown in Figure 1.Under chamber atmosphere state, first start dry pump, after dry pump startup, open 1 pair of chamber of valve and slightly take out, when reaching certain vacuum tightness and requiring, vacuum gauge can provide a switching signal, this signal triggers the startup of molecular pump, valve 1 cuts out simultaneously, valve 2, and valve 3 is opened, by molecular pump pumping chamber, finally reach the requirement of etching technics to chamber condition of high vacuum degree.
In general opening of valve need to be take valve 1 as example to the voltage of a 24V of valve, opens the schematic diagram of valve 1 as shown in Figure 2, and hardware circuit diagram as shown in Figure 3.The signal that dry pump has been opened dry pump is passed to hardware circuit as an input, and controller is assigned to hardware circuit opening valve order, and hardware circuit, through logic, is given solenoid valve 24 vor signals of driving valve, and solenoid valve can be opened.From Fig. 2, it can also be seen that, dry pump can provide the signal of having opened to controller, and solenoid valve just obtains 24 volts of just actions, and the signal that does not characterize valve opening provides.
When in existing control method design man-machine interface, valve does not leave, it is grey, as long as controller has sent the order of driving valve, just the state of valve in man-machine interface is updated to opening (green), if sent out, open valve order, valve state on interface is shown as unlatching, and actual hardware circuit has problem, do not provide out the 24V of valve, that is to say that valve itself do not open, the state of hardware circuit does not feed back like this, cannot judge fast hardware circuit and whether break down, when problem analysis, easily cause interference.Such as valve on interface shows that after unlatching, chamber vacuum is taken out to get off, can suspect that chamber has leakage or vacuum gauge reading to be forbidden, increased difficulty to the investigation of problem, consume the time and affected equipment capacity.
Summary of the invention
The invention provides a kind of malfunction elimination method and malfunction elimination device of semiconductor equipment, to solve, cannot quick and precisely judge whether the hardware circuit of semiconductor equipment normally works, to malfunction elimination, cause the problem of puzzlement.
In order to address the above problem, the invention discloses a kind of malfunction elimination method of semiconductor equipment, comprising:
At the hardware circuit end of semiconductor equipment, add the sign of the described hardware circuit state of indication;
To described hardware circuit transmit operation order, described hardware circuit arranges the sign of described hardware circuit state according to the implementation status of described operational order;
Sign according to described hardware circuit state judges whether described hardware circuit breaks down;
When described hardware circuit does not break down, the miscellaneous part of the described semiconductor equipment of investigation except described hardware circuit.
Alternatively, the described hardware circuit end at semiconductor equipment adds the sign of the described hardware circuit state of indication, comprising:
Hardware circuit end at semiconductor equipment adds the state that digital input signals is indicated described hardware circuit, and described digital input signals is uploaded to the controller of described semiconductor equipment.
Alternatively, the sign of the described hardware circuit state of described foundation judges that whether described hardware circuit breaks down, and comprising:
The controller of described semiconductor equipment judges according to the reception condition of described digital input signals whether described hardware circuit breaks down;
If the controller of described semiconductor equipment receives described digital input signals, described hardware circuit does not break down;
If the controller of described semiconductor equipment does not receive described digital input signals, described hardware circuit breaks down.
Alternatively, the sign of the described hardware circuit state of described foundation judges that whether described hardware circuit breaks down, and also comprises:
Reception condition according to described digital input signals arranges man-machine interface;
When receiving described digital input signals, man-machine interface viewing hardware circuit is set normal;
When not receiving described digital input signals, man-machine interface viewing hardware fault is set;
Demonstration situation according to described man-machine interface judges whether described hardware circuit breaks down.
Alternatively, the described hardware circuit end at semiconductor equipment adds the sign of the described hardware circuit state of indication, comprising:
Hardware circuit end at semiconductor equipment adds the state that pilot lamp is indicated described hardware circuit.
Alternatively, the sign of the described hardware circuit state of described foundation judges that whether described hardware circuit breaks down, and comprising:
Pilot lamp according to described interpolation judges whether described hardware circuit breaks down;
If described pilot lamp is bright, judge that described hardware circuit does not break down;
If described pilot lamp does not work, judge that described hardware circuit breaks down.
The malfunction elimination device that the invention also discloses a kind of semiconductor equipment, comprising: hardware circuit and controller;
Described hardware circuit comprises:
Add module, for the hardware circuit end at semiconductor equipment, add the sign of the described hardware circuit state of indication;
Described controller comprises:
Sending module, for to described hardware circuit transmit operation order, described hardware circuit arranges the sign of described hardware circuit state according to the implementation status of described operational order;
The first investigation module, judges for the sign according to described hardware circuit state whether described hardware circuit breaks down;
The second investigation module, for when described the first investigation module determines that described hardware circuit does not break down, the miscellaneous part of the described semiconductor equipment of investigation except described hardware circuit.
Alternatively, described interpolation module comprises:
Signal adds submodule, for the hardware circuit end at semiconductor equipment, adds the state that digital input signals is indicated described hardware circuit, and described digital input signals is uploaded to the controller of described semiconductor equipment.
Alternatively, described the first investigation module comprises:
Receive investigation submodule, for the reception condition according to described digital input signals, judge whether described hardware circuit breaks down; If receive described digital input signals, described hardware circuit does not break down; If the controller of described semiconductor equipment does not receive described digital input signals, described hardware circuit breaks down.
Alternatively, described interpolation module comprises:
Pilot lamp adds submodule, for the hardware circuit end at semiconductor equipment, adds the state that pilot lamp is indicated described hardware circuit.
Alternatively, described the first investigation module comprises:
Pilot lamp investigation submodule, judges for the pilot lamp according to described interpolation whether described hardware circuit breaks down; If described pilot lamp is bright, judge that described hardware circuit does not break down; If described pilot lamp does not work, judge that described hardware circuit breaks down.
Compared with prior art, the present invention includes following advantage:
The present invention adds the sign of indication hardware circuit state at the end of semiconductor hardware circuit, hardware circuit arranges the sign of described hardware circuit state according to the implementation status of operational order, and the sign of hardware circuit state is the feedback of hardware circuit implementation status; When fault occurs, sign according to described hardware circuit state judges whether hardware circuit breaks down, more accurately and reliably, do not need maintainer manual testing circuit board to judge whether hardware circuit breaks down, can lock faster fault, reduce the plant maintenance time, improved the efficiency of malfunction elimination.And reduced the requirement to maintainer, fundamentally solved circuit board in when test by the secondary disaster of touching and burning by mistake.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of vacuum system principle of work;
Fig. 2 is out the schematic diagram of valve 1;
Fig. 3 is out the schematic diagram of the hardware circuit of valve;
Fig. 4 is the process flow diagram of the malfunction elimination method of a kind of semiconductor equipment of the embodiment of the present invention;
Fig. 5 is that the embodiment of the present invention is added the schematic diagram of the sign of indication hardware circuit state at hardware circuit end;
Fig. 6 is the process flow diagram of the malfunction elimination method of a kind of semiconductor equipment of another embodiment of the present invention;
Fig. 7 is that the embodiment of the present invention is added the schematic diagram of digital input signals at hardware circuit end;
Fig. 8 is the schematic diagram of embodiment of the present invention signal transmission;
Fig. 9 is the process flow diagram of the malfunction elimination method of a kind of semiconductor equipment of another embodiment of the present invention;
Figure 10 is that the embodiment of the present invention is added the schematic diagram of pilot lamp at hardware circuit end;
Figure 11 is the embodiment of the present invention genuine process flow diagram of finding time;
Figure 12 is the structured flowchart of the malfunction elimination device of a kind of semiconductor equipment of the embodiment of the present invention.
Embodiment
For above-mentioned purpose of the present invention, feature and advantage can be become apparent more, below in conjunction with the drawings and specific embodiments, the present invention is further detailed explanation.
Embodiment mono-:
With reference to Fig. 4, show the process flow diagram of the malfunction elimination method of a kind of semiconductor equipment of the present invention, the present embodiment specifically can comprise the following steps:
Step 100, the sign of adding the described hardware circuit state of indication at the hardware circuit end of semiconductor equipment;
For whether the hardware circuit of understanding semiconductor equipment accurately and timely normally works, to carry out malfunction elimination, the present embodiment has added the sign of indicating described hardware circuit state at the hardware circuit end of semiconductor equipment, as shown in Figure 5, here the sign of said hardware circuit state can be digital signal, can be the physical components such as pilot lamp, can characterize the state of hardware circuit, the present embodiment be restricted this yet.
It should be noted that, the sign why the present embodiment adds above-mentioned hardware circuit state at " end " of hardware circuit, for subsequent step 102 is after hardware circuit transmit operation order, judge whether hardware circuit has correctly carried out described operational order, if the smooth operation command of hardware circuit, operational order trouble-free operation is to the end of hardware circuit, the sign of hardware circuit state will be set up, at circuit " end ", add, accurately whether mirror operation order carries out the end of hardware circuit, and whether hardware circuit normally works.If add above-mentioned sign at " head end " of hardware circuit, can only illustrate that hardware circuit receives operational order, as for operational order, whether correctly carry out and just have no way of learning, therefore the present embodiment adds the sign of the described hardware circuit state of indication at " end " of hardware circuit, can reflect well the actual implementation status of hardware circuit to operational order, thereby recognize whether hardware circuit normally works, and then judge whether hardware circuit breaks down.If hardware circuit is normally worked, illustrate that hardware circuit does not break down, fault occurs on other parts; If the abnormal work of hardware circuit, illustrates that fault has occurred at hardware circuit place, can fix a breakdown by changing the means such as circuit board.
Step 102, to described hardware circuit transmit operation order, described hardware circuit arranges the sign of described hardware circuit state according to the implementation status of described operational order;
Can be to hardware circuit transmit operation order in the present embodiment, operational order can be out valve order, open radio-frequency power supply order etc., and the present embodiment does not limit this.This step, to hardware circuit transmit operation order, is to judge in order whether to carry out this operational order according to hardware circuit whether hardware circuit fault has occurred.Hardware circuit, after receiving operational order, is carried out described operational order.Above-mentioned hardware circuit arranges the sign of described hardware circuit state according to the implementation status of described operational order, specific as follows:
If hardware circuit has correctly been carried out described operational order, operational order arrives the sign place of the hardware circuit state that hardware circuit end adds smoothly, being designated of hardware circuit state is set normal;
If hardware circuit is made mistakes or do not carried out described operational order when operation command, operational order cannot arrive the end of hardware circuit, and the fault that is designated of hardware circuit state is now set.
Step 104, the sign of the described hardware circuit state of foundation judges whether described hardware circuit breaks down;
In the present embodiment, can judge whether described hardware circuit breaks down according to " hardware circuit is according to the sign of the hardware circuit state of the implementation status setting of described operational order ", the method to set up of the sign of hardware circuit state has been described in the explanation of step 102, if the sign of hardware circuit state is set to normally, illustrate that hardware circuit normally works, do not break down; If the sign of hardware circuit state is set to fault, illustrate that fault has occurred hardware circuit, the abnormal work of hardware circuit.
According to the description in step 100, the present embodiment judges according to the sign of hardware circuit state whether hardware circuit has correctly carried out operational order, and then judge whether hardware circuit normally works, fundamentally that feedback according to hardware circuit (sign of the hardware circuit state that hardware circuit arranges according to the implementation status of operational order) judges whether hardware circuit breaks down, therefore this determination methods accurately and reliably, according to the sign of hardware circuit state, also can recognize rapidly whether hardware circuit breaks down, do not need plant maintenance personnel manually to remove testing circuit board, reduced the requirement to maintainer, can quick lock in fault, improved the efficiency of malfunction elimination, and fundamentally solved circuit board in when test by the secondary disaster of touching and burning by mistake.
Step 106, when described hardware circuit does not break down, the miscellaneous part of the described semiconductor equipment of investigation except described hardware circuit.
If judging described hardware circuit in step 104 does not break down, what cause so semiconductor equipment fault is the miscellaneous part of the described semiconductor equipment except hardware circuit, now continues the miscellaneous part of the semiconductor equipment of investigation except hardware circuit.If step 104 has been judged hardware circuit and has been broken down, locked fault, just can take appropriate measures to remove fault.
The present embodiment adds the sign of indication hardware circuit state at the end of semiconductor hardware circuit, hardware circuit arranges the sign of described hardware circuit state according to the implementation status of operational order, the sign of hardware circuit state is the feedback of hardware circuit implementation status; When fault occurs, sign according to described hardware circuit state judges whether hardware circuit breaks down, more accurately and reliably, do not need maintainer manual testing circuit board to judge whether hardware circuit breaks down, can lock faster fault, reduce the plant maintenance time, improved the efficiency of malfunction elimination.And reduced the requirement to maintainer, fundamentally solved circuit board in when test by the secondary disaster of touching and burning by mistake.
Embodiment bis-:
With reference to Fig. 6, show the process flow diagram of the malfunction elimination method of a kind of semiconductor equipment of the present invention, specifically can comprise the following steps:
Step 200, adds at the hardware circuit end of semiconductor equipment the state that digital input signals is indicated described hardware circuit, and described digital input signals is uploaded to the controller of described semiconductor equipment.
The present embodiment selects digital input signals as the sign of indication hardware circuit state, adds the end of hardware circuit to, and after the correct operation command of hardware circuit, described digital input signals is uploaded to the controller of described semiconductor equipment.The operational order of take below describes as example for opening valve order:
What the present embodiment had added digital input signals opens valve hardware circuit as shown in Figure 7, the least significant end that drives as can be seen from Figure 7 solenoid valve is relay, the actuating of relay valve just can receive the voltage signal of 24V, the present embodiment is used another group of relay to get an electric shock and is uploaded to controller as the digital input signals of weighing hardware circuit state.Specifically add this digital input signals of openvalvel circuit ok, if hardware circuit is normally worked, can upload this digital input signals of openvalvel circuit ok to controller.
The Principle of Signal Transmission block diagram of the present embodiment as shown in Figure 8, normally open by solenoid valve, i.e. the normal work of hardware circuit, and digital input signals can be uploaded to controller.Be hardware circuit whether normally work can feed back to controller, the digital input signals that controller can feed back according to hardware circuit like this judges whether hardware circuit has normally worked.
Step 202, to described hardware circuit transmit operation order, described hardware circuit arranges the sign of described hardware circuit state according to the implementation status of described operational order;
Can be to hardware circuit transmit operation order in the present embodiment, operational order can be out valve order, open radio-frequency power supply order etc., and the present embodiment does not limit this.This step, to hardware circuit transmit operation order, is to judge in order whether to carry out this operational order according to hardware circuit whether hardware circuit fault has occurred.Hardware circuit, after receiving operational order, is carried out described operational order.Above-mentioned hardware circuit arranges the sign of described hardware circuit state according to the implementation status of described operational order, specifically can be referring to the associated description in embodiment mono-step 102, and therefore not to repeat here for the present embodiment.
Step 204, the controller of described semiconductor equipment judges according to the reception condition of described digital input signals whether described hardware circuit breaks down;
If the controller of described semiconductor equipment receives described digital input signals in the present embodiment, described hardware circuit does not break down; If the controller of described semiconductor equipment does not receive described digital input signals, described hardware circuit breaks down.
It should be noted that, in the present embodiment, hardware circuit has correctly been carried out after operational order, can send digital input signals to controller, therefore can judge whether hardware circuit has correctly carried out operational order according to whether receiving digital input signals, thereby judge whether hardware circuit normally works.If hardware circuit is operation command correctly, illustrate that hardware circuit does not break down.
In a preferred embodiment of the present invention, this step judges according to the sign of described hardware circuit state whether described hardware circuit breaks down, and can also realize in the following manner,
Reception condition according to described digital input signals arranges man-machine interface;
When receiving described digital input signals, man-machine interface viewing hardware circuit is set normal;
When not receiving described digital input signals, man-machine interface viewing hardware fault is set;
Demonstration situation according to described man-machine interface judges whether described hardware circuit breaks down.
It should be noted that, above-mentioned man-machine interface can be to serve as the computer of man-machine interface, and above-mentioned implementation is especially ineffective at the semiconductor equipment in a room (Long-distance Control) for operator and real equipment.
Step 206, when described hardware circuit does not break down, the miscellaneous part of the described semiconductor equipment of investigation except described hardware circuit.
Adopt the present embodiment to add the later hardware circuit of digital input signals, if semiconductor equipment is out of order, can lock easily fault, convenient investigation.For example, man-machine interface has been sent and has been opened the order that valve vacuumizes, and the vacuum tightness of chamber does not lower, whether first from man-machine interface, have a look out valve order normally carries out on hardware circuit, namely this digital input signals of openvalvel circuit ok has does not have, if this signal does not have, that just illustrates that fault has appearred in hardware circuit, if can change hardware circuit board this digital input signals of openvalvel circuit ok of fixing a breakdown has, illustrate that hardware circuit normally works, hardware circuit does not break down, miscellaneous part beyond investigation hardware circuit.If there is no the feedback (digital input signals) of this hardware circuit state, judging whether hardware circuit breaks down also needs testing hardware circuit board, the complicacy of plant maintenance is higher, also higher to plant maintenance personnel's requirement, the present embodiment makes to judge that hardware circuit becomes convenient and swift, has improved the efficiency of equipment failure investigation.
And, the a lot of equipment of semicon industry is Long-distance Control, computer that serves as man-machine interface of indication that operator faces, real equipment is in other room, above preferred embodiment is uploaded to controller by digital input signals and shows in man-machine interface, when semiconductor equipment breaks down, can in man-machine interface, fully show intuitively the trouble spot of semiconductor equipment, facilitate malfunction elimination, saved the time of plant maintenance, the downtime of board while reducing fault, reduced the impact of fault on equipment capacity, optimized the Long-distance Control of semiconductor equipment.
Embodiment tri-:
With reference to Fig. 9, show the process flow diagram of the malfunction elimination method of a kind of semiconductor equipment of the present invention, specifically can comprise the following steps:
Step 300, adds at the hardware circuit end of semiconductor equipment the state that pilot lamp is indicated described hardware circuit.
The present embodiment selects pilot lamp as the sign of indication hardware circuit state, add the end of hardware circuit to, after the correct operation command of hardware circuit, described pilot lamp is bright, follow-uply can judge whether hardware circuit breaks down according to whether pilot lamp is bright.
It should be noted that, the above-mentioned pilot lamp of selecting is as the sign of hardware circuit state, especially effective in the industry of a spatial operation for operator and board, the present embodiment does not add digital input signals and uploads, but add at the end of hardware circuit the state that a pilot lamp characterizes hardware circuit, can reduce taking control system digital input channel like this, as shown in figure 10, whether this pilot lamp of DS4 just can indicate out this order of valve and correctly carry out in hardware circuit, and DS4 pilot lamp is bright shows out that valve order correctly carried out in hardware circuit; DS4 pilot lamp does not work, and shows out valve order incorrect execution in hardware circuit, and hardware circuit breaks down.
Step 302, to described hardware circuit transmit operation order, described hardware circuit arranges the sign of described hardware circuit state according to the implementation status of described operational order;
This step can be participated in the associated description in embodiment mono-step 102, and therefore not to repeat here for the present embodiment.
Step 304, the pilot lamp of the described interpolation of foundation judges whether described hardware circuit breaks down;
If described pilot lamp is bright in the present embodiment, judge that described hardware circuit does not break down; If described pilot lamp does not work, judge that described hardware circuit breaks down.
Step 306, when described hardware circuit does not break down, the miscellaneous part of the described semiconductor equipment of investigation except described hardware circuit.
The present embodiment selects pilot lamp as the sign of hardware circuit state, especially effective in the industry of a spatial operation for operator and board, the present embodiment does not add digital input signals and uploads, but add at the end of hardware circuit the state that a pilot lamp characterizes hardware circuit, can reduce taking control system digital input channel like this.
It should be noted that, above-described embodiment only be take and is opened valve order and describe as example, and the present invention is not limited to out valve order, can also be applied in and vacuumize in order, and controller sends and vacuumizes order to hardware circuit, and particular flow sheet as shown in figure 11, comprising:
Step 401, opens extraction valve;
Step 402, waits for 5 minutes;
Step 403, judges whether chamber pressure is less than setting;
If chamber pressure is not less than setting, performs step 304 and judge that whether the state of hardware circuit is normal; If chamber pressure is less than setting, finish.
Step 404, judges that whether the state of hardware circuit is normal;
If the state of hardware circuit is normal, perform step 305 investigation miscellaneous parts;
If the state of hardware circuit is undesired, hardware circuit fault is described, execution step 306 is changed circuit board.
Description based on said method embodiment, the present invention also provides corresponding malfunction elimination device, realizes the content described in said method embodiment.Specific as follows:
Embodiment tetra-:
With reference to Figure 12, show the process flow diagram of the malfunction elimination method of a kind of semiconductor equipment of the present invention, specifically can comprise: hardware circuit 10 and controller 12;
Described hardware circuit 10 comprises:
Add module 101, for the hardware circuit end at semiconductor equipment, add the sign of the described hardware circuit state of indication;
In a preferred embodiment of the present invention, described interpolation module 101 comprises:
Signal adds submodule, for the hardware circuit end at semiconductor equipment, adds the state that digital input signals is indicated described hardware circuit, and described digital input signals is uploaded to the controller of described semiconductor equipment.
In another kind of preferred embodiment of the present invention, described interpolation module 101 comprises:
Pilot lamp adds submodule, for the hardware circuit end at semiconductor equipment, adds the state that pilot lamp is indicated described hardware circuit.
Described controller 12 comprises:
Sending module 121, for to described hardware circuit transmit operation order, described hardware circuit arranges the sign of described hardware circuit state according to the implementation status of described operational order;
The first investigation module 122, judges for the sign according to described hardware circuit state whether described hardware circuit breaks down;
In a preferred embodiment of the present invention, described the first investigation module 122 comprises:
Receive investigation submodule, for the reception condition according to described digital input signals, judge whether described hardware circuit breaks down; If receive described digital input signals, described hardware circuit does not break down; If the controller of described semiconductor equipment does not receive described digital input signals, described hardware circuit breaks down.
In another kind of preferred embodiment of the present invention, described the first investigation module 122 comprises:
Pilot lamp investigation submodule, judges for the pilot lamp according to described interpolation whether described hardware circuit breaks down; If described pilot lamp is bright, judge that described hardware circuit does not break down; If described pilot lamp does not work, judge that described hardware circuit breaks down.
The second investigation module 123, for when described the first investigation module determines that described hardware circuit does not break down, the miscellaneous part of the described semiconductor equipment of investigation except described hardware circuit.
For the embodiment of malfunction elimination device, because it is substantially similar to embodiment of the method, so description is fairly simple, relevant part is referring to the part explanation of Fig. 4 embodiment of the method.
Each embodiment in this instructions all adopts the mode of going forward one by one to describe, and each embodiment stresses is the difference with other embodiment, between each embodiment identical similar part mutually referring to.
Above to the malfunction elimination method of a kind of semiconductor equipment provided by the present invention and malfunction elimination device, be described in detail, applied specific case herein principle of the present invention and embodiment are set forth, the explanation of above embodiment is just for helping to understand method of the present invention and core concept thereof; , for one of ordinary skill in the art, according to thought of the present invention, all will change in specific embodiments and applications, in sum, this description should not be construed as limitation of the present invention meanwhile.
Claims (11)
1. a malfunction elimination method for semiconductor equipment, is characterized in that, comprising:
At the hardware circuit end of semiconductor equipment, add the sign of the described hardware circuit state of indication;
To described hardware circuit transmit operation order, described hardware circuit arranges the sign of described hardware circuit state according to the implementation status of described operational order;
Sign according to described hardware circuit state judges whether described hardware circuit breaks down;
When described hardware circuit does not break down, the miscellaneous part of the described semiconductor equipment of investigation except described hardware circuit.
2. method according to claim 1, is characterized in that, the described hardware circuit end at semiconductor equipment adds the sign of the described hardware circuit state of indication, comprising:
Hardware circuit end at semiconductor equipment adds the state that digital input signals is indicated described hardware circuit, and described digital input signals is uploaded to the controller of described semiconductor equipment.
3. method according to claim 2, is characterized in that, the sign of the described hardware circuit state of described foundation judges that whether described hardware circuit breaks down, and comprising:
The controller of described semiconductor equipment judges according to the reception condition of described digital input signals whether described hardware circuit breaks down;
If the controller of described semiconductor equipment receives described digital input signals, described hardware circuit does not break down;
If the controller of described semiconductor equipment does not receive described digital input signals, described hardware circuit breaks down.
4. method according to claim 3, is characterized in that, the sign of the described hardware circuit state of described foundation judges that whether described hardware circuit breaks down, and also comprises:
Reception condition according to described digital input signals arranges man-machine interface;
When receiving described digital input signals, man-machine interface viewing hardware circuit is set normal;
When not receiving described digital input signals, man-machine interface viewing hardware fault is set;
Demonstration situation according to described man-machine interface judges whether described hardware circuit breaks down.
5. method according to claim 1, is characterized in that, the described hardware circuit end at semiconductor equipment adds the sign of the described hardware circuit state of indication, comprising:
Hardware circuit end at semiconductor equipment adds the state that pilot lamp is indicated described hardware circuit.
6. method according to claim 5, is characterized in that, the sign of the described hardware circuit state of described foundation judges that whether described hardware circuit breaks down, and comprising:
Pilot lamp according to described interpolation judges whether described hardware circuit breaks down;
If described pilot lamp is bright, judge that described hardware circuit does not break down;
If described pilot lamp does not work, judge that described hardware circuit breaks down.
7. a malfunction elimination device for semiconductor equipment, is characterized in that, comprising: hardware circuit and controller;
Described hardware circuit comprises:
Add module, for the hardware circuit end at semiconductor equipment, add the sign of the described hardware circuit state of indication;
Described controller comprises:
Sending module, for to described hardware circuit transmit operation order, described hardware circuit arranges the sign of described hardware circuit state according to the implementation status of described operational order;
The first investigation module, judges for the sign according to described hardware circuit state whether described hardware circuit breaks down;
The second investigation module, for when described the first investigation module determines that described hardware circuit does not break down, the miscellaneous part of the described semiconductor equipment of investigation except described hardware circuit.
8. device according to claim 7, is characterized in that, described interpolation module comprises:
Signal adds submodule, for the hardware circuit end at semiconductor equipment, adds the state that digital input signals is indicated described hardware circuit, and described digital input signals is uploaded to the controller of described semiconductor equipment.
9. device according to claim 8, is characterized in that, described the first investigation module comprises:
Receive investigation submodule, for the reception condition according to described digital input signals, judge whether described hardware circuit breaks down; If receive described digital input signals, described hardware circuit does not break down; If the controller of described semiconductor equipment does not receive described digital input signals, described hardware circuit breaks down.
10. device according to claim 7, is characterized in that, described interpolation module comprises:
Pilot lamp adds submodule, for the hardware circuit end at semiconductor equipment, adds the state that pilot lamp is indicated described hardware circuit.
11. install according to claim 10, it is characterized in that, described the first investigation module comprises:
Pilot lamp investigation submodule, judges for the pilot lamp according to described interpolation whether described hardware circuit breaks down; If described pilot lamp is bright, judge that described hardware circuit does not break down; If described pilot lamp does not work, judge that described hardware circuit breaks down.
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Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2673734Y (en) * | 2003-12-27 | 2005-01-26 | 戴一武 | Automobile head lamp socket with display |
| CN1851599A (en) * | 2005-12-02 | 2006-10-25 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Eavcuation valve control device |
| CN101131999A (en) * | 2006-08-25 | 2008-02-27 | 富士通株式会社 | Semiconductor integrated circuit and testing method of same |
| CN201145730Y (en) * | 2007-09-29 | 2008-11-05 | 比亚迪股份有限公司 | Device for detecting circuit board of vehicle mounted charger of electric automobile |
| CN101819438A (en) * | 2009-02-26 | 2010-09-01 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Vacuum measuring device control system and semiconductor processing device |
| CN101825898A (en) * | 2009-03-03 | 2010-09-08 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Control system with fault diagnosis function and method |
| CN201765302U (en) * | 2010-05-26 | 2011-03-16 | 宗申派姆(加拿大)重庆氢能源有限公司 | Device for detecting performances of Hall integrated circuit |
| CN202250932U (en) * | 2011-10-20 | 2012-05-30 | 西安矿用自动化设备有限公司 | Comprehensive automatic control box for flame-proof water pump for mine |
| CN102608518A (en) * | 2012-02-29 | 2012-07-25 | 华为技术有限公司 | Chip testing method and device |
| CN102606491A (en) * | 2012-03-26 | 2012-07-25 | 渤海大学 | Self-priming self-control method and device for centrifugal water pump |
| CN202443104U (en) * | 2012-01-10 | 2012-09-19 | 天津赛恩科技发展有限公司 | Automatic detection platform for IC card water-meter circuit board |
-
2013
- 2013-04-08 CN CN201310119811.9A patent/CN104101825B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2673734Y (en) * | 2003-12-27 | 2005-01-26 | 戴一武 | Automobile head lamp socket with display |
| CN1851599A (en) * | 2005-12-02 | 2006-10-25 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Eavcuation valve control device |
| CN101131999A (en) * | 2006-08-25 | 2008-02-27 | 富士通株式会社 | Semiconductor integrated circuit and testing method of same |
| CN201145730Y (en) * | 2007-09-29 | 2008-11-05 | 比亚迪股份有限公司 | Device for detecting circuit board of vehicle mounted charger of electric automobile |
| CN101819438A (en) * | 2009-02-26 | 2010-09-01 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Vacuum measuring device control system and semiconductor processing device |
| CN101825898A (en) * | 2009-03-03 | 2010-09-08 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Control system with fault diagnosis function and method |
| CN201765302U (en) * | 2010-05-26 | 2011-03-16 | 宗申派姆(加拿大)重庆氢能源有限公司 | Device for detecting performances of Hall integrated circuit |
| CN202250932U (en) * | 2011-10-20 | 2012-05-30 | 西安矿用自动化设备有限公司 | Comprehensive automatic control box for flame-proof water pump for mine |
| CN202443104U (en) * | 2012-01-10 | 2012-09-19 | 天津赛恩科技发展有限公司 | Automatic detection platform for IC card water-meter circuit board |
| CN102608518A (en) * | 2012-02-29 | 2012-07-25 | 华为技术有限公司 | Chip testing method and device |
| CN102606491A (en) * | 2012-03-26 | 2012-07-25 | 渤海大学 | Self-priming self-control method and device for centrifugal water pump |
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