CN104089704A - 半导体薄膜反应腔辅助温度校准方法 - Google Patents
半导体薄膜反应腔辅助温度校准方法 Download PDFInfo
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104726841A (zh) * | 2015-03-09 | 2015-06-24 | 北京智朗芯光科技有限公司 | 半导体薄膜生长反应腔辅助温度校准装置及校准方法 |
CN108562378A (zh) * | 2018-03-30 | 2018-09-21 | 中国计量科学研究院 | 一种温度校准的装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH0843209A (ja) * | 1994-08-01 | 1996-02-16 | Nec Corp | 画像処理装置 |
US20060255017A1 (en) * | 2005-05-16 | 2006-11-16 | Markle David A | Methods and apparatus for remote temperature measurement of a specular surface |
CN102155994A (zh) * | 2011-05-03 | 2011-08-17 | 中国兵器工业第二〇五研究所 | 红外辐射计校准装置及其校准方法 |
CN102353454A (zh) * | 2011-06-10 | 2012-02-15 | 北京航空航天大学 | 一种光学红外辐射高温校准装置及其自校准方法 |
CN103712695A (zh) * | 2012-10-09 | 2014-04-09 | 甘志银 | 化学气相沉积设备的红外辐射测温校准装置及其校准方法 |
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0843209A (ja) * | 1994-08-01 | 1996-02-16 | Nec Corp | 画像処理装置 |
US20060255017A1 (en) * | 2005-05-16 | 2006-11-16 | Markle David A | Methods and apparatus for remote temperature measurement of a specular surface |
CN102155994A (zh) * | 2011-05-03 | 2011-08-17 | 中国兵器工业第二〇五研究所 | 红外辐射计校准装置及其校准方法 |
CN102353454A (zh) * | 2011-06-10 | 2012-02-15 | 北京航空航天大学 | 一种光学红外辐射高温校准装置及其自校准方法 |
CN103712695A (zh) * | 2012-10-09 | 2014-04-09 | 甘志银 | 化学气相沉积设备的红外辐射测温校准装置及其校准方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104726841A (zh) * | 2015-03-09 | 2015-06-24 | 北京智朗芯光科技有限公司 | 半导体薄膜生长反应腔辅助温度校准装置及校准方法 |
CN108562378A (zh) * | 2018-03-30 | 2018-09-21 | 中国计量科学研究院 | 一种温度校准的装置 |
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