CN104056813A - Dust removal device - Google Patents
Dust removal device Download PDFInfo
- Publication number
- CN104056813A CN104056813A CN201410256009.9A CN201410256009A CN104056813A CN 104056813 A CN104056813 A CN 104056813A CN 201410256009 A CN201410256009 A CN 201410256009A CN 104056813 A CN104056813 A CN 104056813A
- Authority
- CN
- China
- Prior art keywords
- dust
- depressed part
- dust arrester
- air
- dust granule
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
- B08B15/04—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area from a small area, e.g. a tool
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- Laser Beam Processing (AREA)
Abstract
The invention relates to the technical field of liquid crystal display manufacturing, and discloses a dust removal device. The dust removal device comprises a body, a pneumatic gun and a gas pressure detection device, wherein the body is provided with a sunken part and a gas exhaust passage; an opening of the sunken part is located in a first side face of the body; one end of the gas exhaust passage is communicated with the sunken part to form a dust absorbing hole; a vacuum tube interface is formed in the other end of the gas exhaust passage; the pneumatic gun is installed in the body; a gas blowing end of the pneumatic gun is located inside the sunken part; the gas blowing direction of the pneumatic gun faces the opening of the sunken part; the gas pressure detection is installed in the body to detect gas pressure inside and outside the sunken part. By applying the dust removal device, secondary pollution can be prevented from occurring in the course of blowing out dust particles.
Description
Technical field
The present invention relates to liquid crystal display preparing technical field, relate in particular to a kind of dust arrester.
Background technology
In current TFT-LCD preparation technology, there is dust granule (PT, Particle) owing to producing line, before mask plate mask plate uses, must blow down its lip-deep dust granule.
Current, on mask plate, adopt manually of the blowing of PT blown down more, and staff holds air gun PT blowing operation is carried out to by the mode of all standing in mask plate surface.
But, blow down in operation artificial, because personnel are exposed to mask plate surface, the air-flow producing in blowing PT process is easy to the PT with it or in surrounding environment by personnel and takes mask plate surface to, produces secondary pollution.
Summary of the invention
The invention provides a kind of dust arrester, this dust arrester can avoid dust granule blowing process to produce secondary pollution.
For achieving the above object, the invention provides following technical scheme:
A kind of dust arrester, comprising:
Body, described body has opening and is positioned at the depressed part of described body the first side, and one end is communicated with to form dust and draws hole, the other end and form the bleed-off passage of vacuum tube interface with described depressed part;
Be installed on described body and blow and hold the air gun that is positioned at described depressed part, the blowing direction of described air gun is towards the opening of described depressed part;
Be installed on described body, to detect the pressure test device of described depressed part inner and outer air pressure information.
Above-mentioned dust arrester is in the time of work, and the first side and the mask plate surface of above-mentioned body are just right, and the depressed part that body arranges and mask plate surface engagement form the blowing chamber just right with depressed part, and the vacuum tube interface that bleed-off passage forms connects vacuum extractor; The gas that air gun blows out just blows down the dust granule in region with depressed part mask plate surface, and the dust that vacuum extractor forms by bleed-off passage is drawn hole by air the extraction indoor blowing of depressed part and the formation of mask plate surface engagement; Detect depressed part inner and outer air pressure information by pressure test device simultaneously, blow down the pressure information of indoor and outdoor, the air-blowing quantity of air gun and the rate of air sucked in required of vacuum extractor are mated, and then the balance of the blowing indoor and outdoor air pressure of guarantee depressed part and the formation of mask plate surface engagement, prevent from producing air-flow between depressed part and the blowing indoor-outdoor air of mask plate surface engagement formation, therefore can avoid dust granule blowing process to produce secondary pollution.
In preferred embodiment, described dust arrester also comprises:
For detection of the first dust granule checkout gear of dust granule information in region to be blown down, mask plate surface, described the first dust granule checkout gear is installed on described body.
In preferred embodiment,
Described the first dust granule checkout gear comprises infrared laser light source and infrared inductor.
, can there is scattering in infrared laser light source emitting linear light, scattered light can be received by the infrared inductor of infrared laser light source the same side in the time that light is irradiated to dust granule, thereby can know existence and the position of dust granule.
In preferred embodiment,
The laser beam that described infrared laser light source sends is crossing with the air-flow that described air gun blows out, and the first side of being positioned at described body, crossing position deviates from a side of described depressed part bottom.
Therefore, detecting after dust granule, opening air gun and just can directly realize fixed point blowing.
In preferred embodiment,
The laser emitting mouth of described infrared laser light source and the exit portal of air gun are linear pattern, and the laser beam that sends of described infrared laser light source and described air gun blow out intersection and described body first parallel sided of air-flow.
Larger to the area of detection on mask plate surface in the rectilinear infrared laser light source exit portal unit interval, meanwhile, larger to the blowing area on mask plate surface in the rectilinear air gun exit portal unit interval.
In preferred embodiment,
Described dust arrester also comprises that described the second dust granule checkout gear is installed on described body for detection of the second dust granule checkout gear of dust granule information in the region of having been blown down by described air gun air-flow in mask plate surface.
In preferred embodiment,
Described the second dust granule checkout gear comprises infrared laser light source and infrared inductor; If inductor does not receive optical signal, can prove that dust granule is blown down.
In preferred embodiment,
Described pressure test device comprises at least one first gas pressure detector for detection of pressure information inside described depressed part, and at least one is for detection of the second gas pressure detector of described depressed part external pressure information; Described the first gas pressure detector and described the second gas pressure detector are installed on described body.
In preferred embodiment, described dust arrester also comprises:
Crossbeam, described body is installed on described crossbeam, and can move along the length direction of described crossbeam;
Longeron, described longeron and described crossbeam are slidably matched, and described crossbeam can move along the length direction of described longeron, and are setting angle between the length direction of described longeron and the length direction of described crossbeam.
Can realize the comprehensive covering scanning of dust arrester to mask plate surface with entablature and longeron.
In preferred embodiment, the setting angle between described crossbeam and the length direction of longeron is 90 degree.
In preferred embodiment,
The angle that the first place, side plane of the direction of the air-flow that air gun blows out and described body is is less than 90 degree for being greater than 0 degree.
Brief description of the drawings
The dust arrester schematic cross-section that Fig. 1 provides for the embodiment of the present invention;
The dust arrester schematic diagram that Fig. 2 provides for the another kind of embodiment of the present invention;
The dust arrester schematic diagram that Fig. 3 provides for the another kind of embodiment of the present invention.
Detailed description of the invention
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is clearly and completely described, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiment.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtaining under creative work prerequisite, belong to the scope of protection of the invention.
Please refer to Fig. 1, the dust arrester schematic cross-section that Fig. 1 provides for the embodiment of the present invention.
As shown in Figure 1, a kind of dust arrester that the embodiment of the present invention provides, comprising:
Body 1, body 1 has opening and is positioned at the depressed part 2 of body 1 first side, can carry out the blowing of dust granule 10 in the inside of depressed part 2; And one end is communicated with to form the bleed-off passage 5 of dust absorption hole 4, other end formation vacuum tube interface 6 with depressed part 2.
Be installed on body 1 and blow and hold the air gun 3 that is positioned at depressed part 2, the blowing direction of air gun 3 is towards the opening of depressed part 2.
Be installed on body 1, to detect the pressure test device of depressed part 2 inner and outer air pressure information.
Above-mentioned dust arrester is in the time of work, the first side of above-mentioned body 1 and mask plate 9 surfaces are just right, the depressed part 2 that body 1 arranges forms the blowing chamber just right with depressed part 2 with mask plate 9 surface engagement, and the vacuum tube interface 6 that bleed-off passage 5 forms connects vacuum extractor; The gas that air gun 3 blows out just blows down the dust granule 10 in region with depressed part 2 mask plate 9 surfaces, and air indoor to depressed part 2 and the blowing of mask plate 9 surface engagement formation is extracted in the dust absorption hole 4 that vacuum extractor forms by bleed-off passage 5 out; Detect the inner and outer air pressure information of the blowing chamber of depressed part 2 and mask plate 9 surface engagement formation by pressure test device simultaneously, the air-blowing quantity of air gun 3 and the rate of air sucked in required of vacuum extractor are mated, and then the balance of guarantee depressed part 2 inner and outer air pressures, prevent from producing air-flow between depressed part 2 and the blowing indoor-outdoor air of mask plate 9 surface engagement formation, therefore can avoid dust granule 10 blowing processes to produce secondary pollutions.
In a kind of specific embodiment, dust arrester also comprises:
The first dust granule checkout gear 81, the first dust granule checkout gears 81 for detection of dust granule 10 information in mask plate 9 regions to be blown down, surface are installed on body 1.Concrete, aforementioned mask plate 9 regions to be blown down, surface refer to the region just right with depressed part 2, mask plate 9 surfaces.
When the first dust granule checkout gear 81 detects that region memory to be blown down is at dust granule 10, open air gun 3 and blow down, blow down the complete air cavity 3 of closing, can reduce like this use amount of Compressed Gas.
In a kind of specific embodiment, on the basis of above-described embodiment, dust arrester also comprises:
The second dust granule checkout gear 82, the second dust granule checkout gears 82 for detection of dust granule 10 information in the region of having been blown down by air gun 3 air-flows in mask plate 9 surfaces are installed on body 1.
When the second dust granule checkout gear 82 detects that the region memory being blown down by air gun 3 air-flows, at dust granule 10, needs this region to re-start blowing, to ensure that a dust granule 10 removes totally.
In a kind of specific embodiment, on the basis of above each embodiment, the first dust granule checkout gear 81 and the second dust granule checkout gear 82 can be following several mode:
Mode one, the first dust granule checkout gear 81 and the second dust granule checkout gear 82 can comprise infrared laser light source and infrared inductor; Wherein,, can there is scattering in infrared laser light source emitting linear light in the time that light is irradiated to dust granule 10, and scattered light can be received by the infrared inductor of infrared laser light source the same side, thereby can know existence and the position of dust granule 10.
Mode two, the first dust granule checkout gears 81 and the second dust granule checkout gear 82 can be ultrasonic detector.
Mode three, the first dust granule checkout gears 81 and the second dust granule checkout gear 82 can be micro-camera.
In a kind of specific embodiment, in the above-described embodiments on the basis of mode one,
In the first dust granule checkout gear 81, the laser beam that infrared laser light source sends is crossing with the air-flow that air gun 3 blows out, and the first side of being positioned at body 1, crossing position deviates from a side of depressed part 2 bottoms.Therefore, detecting after dust granule 10, opening air gun 3 and just can directly realize fixed point blowing.
In a kind of specific embodiment, on the basis of above-described embodiment,
As shown in Figure 2, in the first dust granule checkout gear 81, the laser emitting mouth of infrared laser light source and the exit portal of air gun 3 are linear pattern, and the laser beam that sends of infrared laser light source and air gun 3 blow out intersection and body 1 first parallel sided of air-flow.
Larger to the area of detection on mask plate 9 surfaces in the rectilinear infrared laser light source exit portal unit interval, meanwhile, larger to the blowing area on mask plate 9 surfaces in the rectilinear 3 exit portal unit interval of air gun.
In a kind of specific embodiment, on the basis of above each embodiment,
As shown in Figure 1, pressure test device comprises at least one first gas pressure detector for detection of depressed part 2 air pressure inside information, as gas pressure detector in Fig. 1 72 and gas pressure detector 74; With at least one the second gas pressure detector for detection of depressed part 2 external pressure information, as gas pressure detector in Fig. 1 71 and gas pressure detector 73; Gas pressure detector 71, gas pressure detector 72, gas pressure detector 73 and gas pressure detector 74 are installed on body.
In a kind of specific embodiment, on the basis of above each embodiment, as shown in Figure 3, dust arrester also comprises:
Crossbeam 11, body 1 is installed on crossbeam 11, and can move along the length direction of crossbeam 11;
Longeron 12, longeron 12 is slidably matched with crossbeam 11, and crossbeam 11 can move along the length direction of longeron 12, and between the length direction of longeron 12 and the length direction of crossbeam 11, is setting angle β.
Can realize the comprehensive covering scanning of dust arrester to mask plate 9 surfaces with entablature 11 and longeron 12.
In a kind of specific embodiment, on the basis of above-described embodiment,
Setting angle β between the length direction of crossbeam 11 and longeron 12 is 90 degree.
In a kind of specific embodiment, on the basis of above each embodiment,
The angle α that the first place, side plane of the direction of the air-flow that air gun 3 blows out and body 1 is is less than 90 degree for being greater than 0 degree, α specifically can 5 degree, 10 degree, 15 degree, 20 degree, 25 degree, 30 degree, 35 degree, 40 degree, 45 degree, 50 degree, 55 degree, 60 degree, 65 degree, 70 degree, 75 degree, 80 degree, 85 degree etc.
Obviously, those skilled in the art can carry out various changes and modification and not depart from the spirit and scope of the present invention the embodiment of the present invention.Like this, if these amendments of the present invention and within modification belongs to the scope of the claims in the present invention and equivalent technologies thereof, the present invention is also intended to comprise these changes and modification interior.
Claims (11)
1. a dust arrester, is characterized in that, comprising:
Body, described body has opening and is positioned at the depressed part of described body the first side, and one end is communicated with to form dust and draws hole, the other end and form the bleed-off passage of vacuum tube interface with described depressed part;
Be installed on described body and blow and hold the air gun that is positioned at described depressed part, the blowing direction of described air gun is towards the opening of described depressed part;
Be installed on described body, to detect the pressure test device of described depressed part inner and outer air pressure information.
2. dust arrester according to claim 1, is characterized in that, also comprises:
For detection of the first dust granule checkout gear of dust granule information in region to be blown down, mask plate surface, described the first dust granule checkout gear is installed on described body.
3. dust arrester according to claim 2, is characterized in that, described the first dust granule checkout gear comprises infrared laser light source and infrared inductor.
4. dust arrester according to claim 3, is characterized in that, the laser beam that described infrared laser light source sends is crossing with the air-flow that described air gun blows out, and the first side of being positioned at described body, crossing position deviates from a side of described depressed part bottom.
5. dust arrester according to claim 4, it is characterized in that, the laser emitting mouth of described infrared laser light source and the exit portal of air gun are linear pattern, and the laser beam that sends of described infrared laser light source and described air gun blow out intersection and described body first parallel sided of air-flow.
6. dust arrester according to claim 2, is characterized in that, also comprises:
For detection of the second dust granule checkout gear of dust granule information in the region of having been blown down by described air gun air-flow in mask plate surface, described the second dust granule checkout gear is installed on described body.
7. dust arrester according to claim 6, is characterized in that, described the second dust granule checkout gear comprises infrared laser light source and infrared inductor.
8. dust arrester according to claim 1, it is characterized in that, described pressure test device comprises at least one first gas pressure detector for detection of pressure information inside described depressed part, and at least one is for detection of the second gas pressure detector of described depressed part external pressure information; Described the first gas pressure detector and described the second gas pressure detector are installed on described body.
9. according to the dust arrester described in claim 1～8 any one, it is characterized in that, also comprise:
Crossbeam, described body is installed on described crossbeam, and can move along the length direction of described crossbeam;
Longeron, described longeron and described crossbeam are slidably matched, and described crossbeam can move along the length direction of described longeron, and are setting angle between the length direction of described longeron and the length direction of described crossbeam.
10. dust arrester according to claim 9, is characterized in that, described setting angle is 90 degree.
11. according to the dust arrester described in claim 1～8 any one, it is characterized in that, the angle that the first place, side plane of the direction of the air-flow that described air gun blows out and described body is is less than 90 degree for being greater than 0 degree.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410256009.9A CN104056813B (en) | 2014-06-10 | 2014-06-10 | A kind of dust arrester |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410256009.9A CN104056813B (en) | 2014-06-10 | 2014-06-10 | A kind of dust arrester |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104056813A true CN104056813A (en) | 2014-09-24 |
| CN104056813B CN104056813B (en) | 2015-12-02 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410256009.9A Expired - Fee Related CN104056813B (en) | 2014-06-10 | 2014-06-10 | A kind of dust arrester |
Country Status (1)
| Country | Link |
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| CN (1) | CN104056813B (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105195907A (en) * | 2015-07-20 | 2015-12-30 | 广东正业科技股份有限公司 | Dust removal device and laser machining device and method using same |
| CN105499213A (en) * | 2016-01-19 | 2016-04-20 | 浙江捷峰电子有限公司 | Automatic cleaning banknote counting and distinguishing machine and cleaning method |
| CN105725917A (en) * | 2015-08-25 | 2016-07-06 | 罗杰芝 | Portable carpet dust remover |
| CN106076976A (en) * | 2016-08-30 | 2016-11-09 | 陆敏 | Remote controlled cleaning system |
| CN106308677A (en) * | 2016-08-30 | 2017-01-11 | 陆敏 | Cleaning device with shakable air outlet heads |
| CN106391578A (en) * | 2016-08-30 | 2017-02-15 | 陆敏 | Cleaning device with easy-to-fold rack body |
| CN106739449A (en) * | 2016-11-21 | 2017-05-31 | 武汉华星光电技术有限公司 | Printing film formation device and system |
| CN113629001A (en) * | 2020-05-09 | 2021-11-09 | 长鑫存储技术有限公司 | Carrying platform device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105195907A (en) * | 2015-07-20 | 2015-12-30 | 广东正业科技股份有限公司 | Dust removal device and laser machining device and method using same |
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| CN106076976A (en) * | 2016-08-30 | 2016-11-09 | 陆敏 | Remote controlled cleaning system |
| CN106308677A (en) * | 2016-08-30 | 2017-01-11 | 陆敏 | Cleaning device with shakable air outlet heads |
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| CN113629001A (en) * | 2020-05-09 | 2021-11-09 | 长鑫存储技术有限公司 | Carrying platform device |
| CN113629001B (en) * | 2020-05-09 | 2024-05-14 | 长鑫存储技术有限公司 | Carrier device |
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| Publication number | Publication date |
|---|---|
| CN104056813B (en) | 2015-12-02 |
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Granted publication date: 20151202 Termination date: 20200610 |