CN104037318A - Flexible thermoelectric power generation microcell structure - Google Patents

Flexible thermoelectric power generation microcell structure Download PDF

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Publication number
CN104037318A
CN104037318A CN201410223834.9A CN201410223834A CN104037318A CN 104037318 A CN104037318 A CN 104037318A CN 201410223834 A CN201410223834 A CN 201410223834A CN 104037318 A CN104037318 A CN 104037318A
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CN
China
Prior art keywords
type thermoelectric
thermoelectric arm
flexible
circular cavity
power generation
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Pending
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CN201410223834.9A
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Chinese (zh)
Inventor
梅德庆
刘海燕
姚喆赫
陈子辰
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Zhejiang University ZJU
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Zhejiang University ZJU
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Priority to CN201410223834.9A priority Critical patent/CN104037318A/en
Publication of CN104037318A publication Critical patent/CN104037318A/en
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Abstract

The invention discloses a flexible thermoelectric power generation microcell structure. Multi-rows and multiple even lines of honeycomb circular cavities are formed in a substrate, except two lines of circular cavities at edges, micro holes are formed at the bottoms of other circular cavities, the circular cavities formed with the micro holes are coated with silver-based nano particle ink , the silver-based nano particle ink is filled in the micro holes and covers the bottom of the circular cavities, the middles of each row of circular cavities are filled with P-type thermoelectric arms and N-type thermoelectric arms, the top ends of each pair of P-type thermoelectric arms and N-type thermoelectric arms are respectively connected via upper-layer copper wires, each row of the N-type thermoelectric arms and P-type thermoelectric arms which are formed with the micro holes form a group, the outer bottom faces of the circular cavities formed with the micro holes are respectively connected with lower-layer copper wires to form the flexible thermoelectric power generation microcell structure. The flexible thermoelectric power generation microcell structure has high flexibility and stability, and when a thermoelectric power generation unit is subjected to impact, a bismuth telluride thermoelectric material having poor ductility can be prevented from being broken and disabled by the substrate wrapping the thermoelectric arms. The flexible thermoelectric power generation microcell structure can supply energy to an in-vivo implanted medical micro device and has promotion and application values.

Description

Flexible thermo-electric generation micro unit structure
Technical field
The present invention relates to a kind of temperature difference electricity generation device, relate in particular to a kind of flexible thermo-electric generation micro unit structure.
Background technology
The application of vivo implantation type medical treatment device is more and more extensive, and such as cardiac pacemaker, defibrillator, drug efflux pump etc., can replace or improve the function of organ or treat certain disease.One of world today study hotspot and a difficult problem for implantable medical device provides the energy supply of lasting stability.Several power supplys that are applied to implantable medical device mainly contain at present: lithium battery, biological fuel cell, nuclear battery, wireless energy transfer etc.Miniature lithium cell often the life-span short, patient also needs to change for a long time battery, brings many miseries; Nuclear battery working life can more than ten year, but general volume is larger, and human body is had to toxicity and radiation; Biological fuel cell utilizes enzyme or microbe as catalyst, converts the chemical energy of the bio-fuels such as glucose to electric energy, but generally only has several days for electric life; Wireless energy transfer is charged to vivo implantation type power supply by wireless transmission methods such as electromagnetic wave, electromagnetic coupled, ultrasonic wave, light waves or directly power supply, adopt the method often to need patient to wear for a long time outside additional mechanism providing additional operation, make troubles to patient's daily life and activity.
Thermo-electric generation utilizes the Seebeck effect of thermoelectric semiconductor, heat energy can be converted into electric energy.Due to thermoelectric power generation device have without moving-member, pollution-free, simple in structure, be easy to the advantages such as miniaturization, simultaneously, due in normal human's thermostasis and body and there is the less temperature difference between body surface, and thermo-electric generation is to the not requirement of the lower limit of the temperature difference, therefore the temperature difference that, can directly utilize human body to exist is generated electricity.
Existing miniature flexible thermo-electric generation member normally directly arranges in substrate that thermoelectric arm or the minisize thermoelectric storeroom employing at block flexibly connect, because human internal environment has many curved surfaces and physical activity to have flexibility, the thermoelectric arm impacts such as stretching that often can be squeezed, this class thermoelectric generator stability is inadequate, so just needs thermo-electric generation member to have better flexibility; Adopt bismuth telluride and alloy thereof can improve the generated output of temperature difference electricity generation device, still, bismuth telluride (BiTe) material mechanical performance is poor, material is more crisp, when being stressed or impacting, directly bismuth telluride and the alloy material thereof of processing in flexible substrates easily ruptures, and makes thermo-electric generation element failure.Therefore, exploitation one can reduce to impact, and reliable and stable, flexible thermo-electric generation micro unit structure is preferably very necessary.
Summary of the invention
The object of the present invention is to provide a kind of flexible thermo-electric generation micro unit structure, have reliable and stable, conversion efficiency of thermoelectric is high, be suitable for curved surface, can be processed into the features such as the thermoelectric generator of various ways.
The technical solution used in the present invention is:
In substrate, have the honeycomb type circular cavity of many rows and many even columns, except edge two row circular cavities, other circular cavity bottom has a micropore, and the circular cavity inner bottom part that has micropore drips and is coated with the described micropore of money base nano particle ink filling, and covers circular cavity bottom; Equal alternate P type thermoelectric arm and N-type thermoelectric arms of being filled with in every row's circular cavity, the top of the every pair of P type thermoelectric arm and N-type thermoelectric arm is connected with upper strata copper conductor respectively, upper copper wire is laid on below the flexible PCB of upper strata, the N-type thermoelectric arm and the P type thermoelectric arm that often arrange micropore are one group, the circular cavity outer bottom that has micropore is connected with lower floor's copper conductor respectively, then, form successively flexible thermo-electric generation micro unit structure with identical connected mode.
The material of described P type thermoelectric arm and N-type thermoelectric arm is the bismuth telluride of doping.
The material of described substrate and upper strata flexible PCB is polyimides.
The beneficial effect that the present invention has is:
The present invention adopts polyimides honeycomb type substrate parcel thermoelectric arm and lower floor's copper conductor to become warp architecture to make thermo-electric generation unit have highly flexible, can be out of shape in multiple directions.In the time that thermo-electric generation unit recurring structure is out of shape, circular polyimides cavity parcel thermoelectric arm can avoid the bismuth telluride thermoelectric material of poor ductility to rupture, and avoids the inefficacy of thermo-electric generation unit.This invention, mainly for the energy supply of vivo implantation type medical treatment microdevice, has application value.
Brief description of the drawings
Fig. 1 is that the positive axle that waits of structure of the present invention is surveyed view.
Fig. 2 is that the axles such as the structure of the present invention back side are surveyed view.
Fig. 3 is structure rear elevation view of the present invention.
Fig. 4 is the D-D cutaway view of Fig. 3.
Fig. 5 is P type and N-type thermoelectric arm distribution schematic diagram.
Fig. 6 is upper strata flexible PCB schematic diagram.
Tu7Shi lower floor flexible PCB rear elevation view.
Fig. 8 is the H-H cutaway view of Fig. 7.
Fig. 9 is the die drawing of honeycomb type polyimides substrate.
Figure 10 is the required mask plate figure of sputter lower floor copper conductor.
Figure 11 is toward inkjet printing thermoelectric material schematic diagram in circular cavity.
In figure: 1, substrate, 2, money base nano particle ink, 3, P type thermoelectric arm, 4, N-type thermoelectric arm, 5, upper strata flexible PCB, 6, upper copper wire, 7, lower floor's copper conductor, 8, the patrix of polyimide-based bottom die, 9, the lower film of polyimide-based bottom die, 10, mask plate, 11, syringe needle.
Embodiment
Below in conjunction with drawings and Examples, the present invention is further illustrated.
As shown in Figure 9, the present invention is at the interior cast polyimides of lower film 9 of polyimide-based bottom die, pushes with the patrix 8 of polyimide-based bottom die, is solidified into the substrate 1 of honeycomb type circular cavity.As shown in Fig. 2, Fig. 3, Fig. 4, Fig. 5, Fig. 6, Fig. 7, Fig. 8, the honeycomb type circular cavity that the present invention has many rows and many even columns in substrate 1 (has four rows and four columns circular cavity in figure, only needing can increase columns as two row in the middle of Fig. 2 carry out array), except edge two row circular cavities, other circular cavity bottom has a micropore, as shown in figure 11, the circular cavity inner bottom part that has a micropore in the circular cavity of perforate drips and is coated with money base nano particle ink 2 and fills described micropore and cover circular cavity bottom.Equal alternate P type thermoelectric arm 3 and N-type thermoelectric arms 4 of being filled with in row's circular cavity as every in Fig. 5, the top of the every pair of P type thermoelectric arm 3 and N-type thermoelectric arm 4 is connected with upper strata copper conductor 6 respectively, upper copper wire is laid on (as shown in Figure 6) below upper strata flexible PCB 5, the P type thermoelectric arm 3 and the N-type thermoelectric arm 4 that often arrange micropore are one group, the circular cavity outer bottom that has micropore is connected with lower floor's copper conductor 7 respectively, then, form successively flexible thermo-electric generation micro unit structure with identical connected mode.
The material of described P type thermoelectric arm 3 and N-type thermoelectric arm 4 is the bismuth telluride of doping.
The material of described substrate 1 and upper strata flexible PCB 5 is polyimides.
Drip and be coated with the described micropore of money base nano particle ink 2 fillings and cover circular cavity bottom, as alternate with drop-coating filling P type thermoelectric arm 3 and N-type thermoelectric arm 4 in each round chamber in Fig. 5, the top of every pair of P type thermoelectric arm 3 of every row and N-type thermoelectric arm 4 is connected with the upper copper wire 6 of sputter, the every pair of P type thermoelectric arm 3 with micropore and the back side of N-type thermoelectric arm 4, connect with lower floor's copper conductor 7 of mask plate sputter as shown in figure 10, money base nano particle ink 2 and 7 conductings of lower floor's copper conductor, make the bottom of wrapped N-type thermoelectric arm 4 and the bottom conducting of adjacent P type thermoelectric arm 3, form successively flexible thermo-electric generation micro unit structure with identical connected mode, the external part of upper strata flexible PCB 5 connects with external circuit, this cellular construction is fitted on human body can utilize human body thermoelectric generating.
The material of described thermoelectric arm is bismuth telluride and the alloy thereof of doping, P type thermoelectric arm 3 and N-type thermoelectric arm 4 alternative arrangements, and the substrate of honeycomb type polyimides can make the abundant flexibility of device.
Flexible thermo-electric generation micro unit structure, can be bent into required form, then by the flexible material of the heat conductive insulatings such as encapsulation laminated film, the temperature difference electricity generation device that forming energy density is high.
Filling micropore and thermoelectric material technique is drop-coating as shown in figure 11: the syringe needle 11 of point gum machine first enters in micropore by money base nano particle droplets of ink and covers circular cavity bottom, alternate P type thermoelectric material powder and binding agent and N-type thermoelectric material powder and binding agent, the at room temperature curing molding of splashing in every row's circular cavity again.The processing technology of upper strata flexible PCB: spread layer copper conductor 6 with method for printing screen in the flexible PCB substrate of upper strata, lower floor's copper conductor can obtain with mask plate sputter as shown in figure 10: be coated with positive photoresist at backside of substrate, with copper mask plate 10 exposure imagings, with copper target as sputter wire pattern, copper conductor has removed photoresist.Every row P type thermoelectric arm and N-type thermoelectric arm alternative arrangement, composition thermocouple is parallel to each other.Material and the structure of flexible temperature difference electricity generation device all have highly flexible, the curved surface of can fitting.
Operation principle of the present invention is:
By Seebeck effect, the temperature difference of P type and N-type thermoelectric arm can produce voltage difference at two ends, the voltage producing due to single thermocouple is very low, therefore, can adopt the mode of " hot road parallel connection; circuit series connection ", thereby the thermocouple of P type and N-type thermoelectric arm composition design and arranges that formation is single multipair or arrange the electrothermal module raising output voltage values of array type more.
Realize in flexible polyimide substrate circular cavity, fill thermoelectric arm, polyimides physics, stable chemical performance, with glass or silicon base comparison, can make structural flexibility and light, increased robustness, its flexibility can adapt to different curve.
Under room temperature, the thermoelectric figure of merit of bismuth telluride material is higher, adopts bismuth telluride and alloy thereof can improve the generated output of temperature difference electricity generation device.But, because bismuth telluride (BiTe) material mechanical performance is poor, easily fracture.Make the directly bismuth telluride material of processing in flexible substrates easily rupture and cause thermo-electric generation element failure.So, bismuth telluride material is wrapped in to polyimides circular cavity the inside, the flexibility that substrate itself has reduces applied pressure and impact on bismuth telluride material, thereby avoids thermoelectric material fracture to cause thermo-electric generation element failure.
Above-mentioned embodiment is used for the present invention that explains, instead of limits the invention, and in the protection range of spirit of the present invention and claim, any amendment and change that the present invention is made, all fall into protection scope of the present invention.

Claims (3)

1. a flexible thermo-electric generation micro unit structure, it is characterized in that: the honeycomb type circular cavity that has many rows and many even columns in substrate (1), except edge two row circular cavities, other circular cavity bottom has a micropore, interior the dripping of circular cavity that has micropore is coated with the described micropore of money base nano particle ink (2) filling, and covers bottom circular cavity; Equal alternate P type thermoelectric arm (3) and N-type thermoelectric arms (4) of being filled with in every row's circular cavity, the top of every pair of P type thermoelectric arm (3) and N-type thermoelectric arm (4) is connected with upper strata copper conductor respectively, upper copper wire is laid on upper strata flexible PCB (5) below, the P type thermoelectric arm (3) and the N-type thermoelectric arm (4) that often arrange micropore are one group, the circular cavity outer bottom that has micropore is connected with lower floor's copper conductor respectively, then, form successively flexible thermo-electric generation micro unit structure with identical connected mode.
2. the flexible thermo-electric generation micro unit of one according to claim 1 structure, is characterized in that: the material of described P type thermoelectric arm (3) and N-type thermoelectric arm (4) is the bismuth telluride of doping.
3. the flexible thermo-electric generation micro unit of one according to claim 1 structure, is characterized in that: the material of described substrate (1) and upper strata flexible PCB (5) is polyimides.
CN201410223834.9A 2014-05-23 2014-05-23 Flexible thermoelectric power generation microcell structure Pending CN104037318A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108925053A (en) * 2018-06-29 2018-11-30 武汉华星光电半导体显示技术有限公司 Mask, flexible circuit board and preparation method thereof

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5952728A (en) * 1995-11-13 1999-09-14 Ngk Insulators, Ltd. Thermoelectric conversion module having channels filled with semiconducting material and insulating fillers
CN101755492A (en) * 2007-06-27 2010-06-23 3M创新有限公司 In the thermoformed polymeric substrate, form the Apparatus and method for of thin film electronic device
WO2013161645A1 (en) * 2012-04-27 2013-10-31 リンテック株式会社 Thermoelectric conversion material and method for manufacturing same
CN103888026A (en) * 2014-02-18 2014-06-25 浙江大学 Flexible temperature difference generation micro-unit structure
CN203871377U (en) * 2014-05-23 2014-10-08 浙江大学 Flexible temperature difference generation micro-unit structure

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5952728A (en) * 1995-11-13 1999-09-14 Ngk Insulators, Ltd. Thermoelectric conversion module having channels filled with semiconducting material and insulating fillers
CN101755492A (en) * 2007-06-27 2010-06-23 3M创新有限公司 In the thermoformed polymeric substrate, form the Apparatus and method for of thin film electronic device
WO2013161645A1 (en) * 2012-04-27 2013-10-31 リンテック株式会社 Thermoelectric conversion material and method for manufacturing same
CN103888026A (en) * 2014-02-18 2014-06-25 浙江大学 Flexible temperature difference generation micro-unit structure
CN203871377U (en) * 2014-05-23 2014-10-08 浙江大学 Flexible temperature difference generation micro-unit structure

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108925053A (en) * 2018-06-29 2018-11-30 武汉华星光电半导体显示技术有限公司 Mask, flexible circuit board and preparation method thereof

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Application publication date: 20140910