CN104036063B - Data transfer device, image forming system and recording medium - Google Patents
Data transfer device, image forming system and recording medium Download PDFInfo
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- CN104036063B CN104036063B CN201410038129.1A CN201410038129A CN104036063B CN 104036063 B CN104036063 B CN 104036063B CN 201410038129 A CN201410038129 A CN 201410038129A CN 104036063 B CN104036063 B CN 104036063B
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
- G03F7/70508—Data handling in all parts of the microlithographic apparatus, e.g. handling pattern data for addressable masks or data transfer to or from different components within the exposure apparatus
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70283—Mask effects on the imaging process
- G03F7/70291—Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
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- G—PHYSICS
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- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F12/00—Accessing, addressing or allocating within memory systems or architectures
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- G06F12/08—Addressing or allocation; Relocation in hierarchically structured memory systems, e.g. virtual memory systems
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- G06F12/02—Addressing or allocation; Relocation
- G06F12/08—Addressing or allocation; Relocation in hierarchically structured memory systems, e.g. virtual memory systems
- G06F12/0802—Addressing of a memory level in which the access to the desired data or data block requires associative addressing means, e.g. caches
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- G06F30/00—Computer-aided design [CAD]
- G06F30/30—Circuit design
- G06F30/39—Circuit design at the physical level
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/41—Bandwidth or redundancy reduction
- H04N1/411—Bandwidth or redundancy reduction for the transmission or storage or reproduction of two-tone pictures, e.g. black and white pictures
- H04N1/413—Systems or arrangements allowing the picture to be reproduced without loss or modification of picture-information
- H04N1/417—Systems or arrangements allowing the picture to be reproduced without loss or modification of picture-information using predictive or differential encoding
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- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Compression Of Band Width Or Redundancy In Fax (AREA)
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- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
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Abstract
A kind of data transfer device, image forming system and recording medium.In data conversion device, when the input data being layered is converted into output data, second buffer efficiency of the first buffer efficiency and the data conversion efficiency rising degree of the second situation of expression of the data conversion efficiency rising degree for representing the first situation is compared, first situation is the situation for the first reference graphical element for having cached the reference in the parent figure as the pattern represented by input data, and the second situation is to have cached the situation first with reference to the second reference graphical element of reference in graphical element.After the big reference graphical element of the efficiency rising degree for having cached data conversion, with the reference sweep length of the reference graphical element of caching, changed from input data to output data.Appropriate reference graphical element is cached thereby, it is possible to rise by the efficiency of data conversion.As a result, it is possible to appropriately improve the efficiency that data conversion is carried out from input data to output data.
Description
Technical field
The input data being layered for representing multiple graphical elements is converted into being used as sweep length the present invention relates to a kind of
Data（run length data）Output data technology.
Background technology
In the past, by the glass in semiconductor substrate, printed base plate or plasma display system, liquid crystal display device
Glass substrate etc.（Hereinafter referred to as " substrate "）The photosensitive material irradiation light of upper formation, to draw pattern.In recent years, along with pattern
High Qinghua, use a kind of pattern describing device for directly drawing pattern using light beam scanning on photosensitive material.
In the design phase, generally, CAD is utilized（CAD）The vector data of data etc. shows this pattern,
When drawing pattern using pattern describing device, following raster image processing is carried out（RIP：Raster Image
Processing）：The scan width data that the vector data is converted into be used by pattern describing device（run length
data）Deng raster data.At present, the technology of the time in pattern describing device needed for shortening data conversion is pursued.
For example, in Japanese Unexamined Patent Publication 2010-80777 publications（Document 1）In, it is proposed that following technology：It is extracted in and draws
Recurrent setting pattern in pattern, generation exposure setting raster data, will be solid when exposure device is exposed action
Figuratum pattern data is converted into intrinsic raster data, and synthesizes exposure setting raster data and intrinsic raster data,
Thus, exposure raster data is generated.
In Japanese Unexamined Patent Publication 2008-225187 publications（Document 2）In similarly propose following technology：By vector
When the design data of form is rasterized, the part as structural element recorded repeatedly in design data is extracted in, for
Each part, only rasterizes a part, and be converted into part raster data.In document 2, in addition, in bull
（multi head）Describing device in, according to overall raster data for each record it is first-born into raster data when, it is right
The data volume of first method and second method is inferred and compared that, to judge to select any method, the first method is
Finger includes the method for part and layout information, and the second method refers to arrange the side of simultaneously compound component according to layout information
Method.
In Japanese Unexamined Patent Publication 2007-208057 publications（Document 3）In, it is proposed that following method：For input data institute
Comprising graph data key element, the processing that rectangular partition processing has been carried out in retrieval terminates the databases of Data Elements, in inspection
Measure in the case that corresponding processing terminates Data Elements, the processing is terminated into Data Elements and includes output data, is not being examined
Measure in the case that corresponding processing terminates Data Elements, rectangular partition processing, generation processing knot are carried out to graph data key element
After beam data key element, the key element is included into output data.
Here, generally, the vector data of pattern shows as the set of the data block with hierarchy.Each data block includes
Information for the graphical element with reference to represented by more than one graphical element or other data blocks.Above-mentioned document 1~
In the technology that document 3 is proposed, when this vector data is converted into raster data, recurrent data block is only carried out one
Secondary rasterisation, generation（That is, cache）With reference to raster data, for congener data block, using with reference to raster data.
However, in the case where recurrent data block has hierarchy, in cache during one data block,
Time for data conversion, it is possible to turn when becoming than the data block of the data block institute reference in cache for data
The time changed is long.In other words, it is cached according in the different layerings in hierarchy, data conversion efficiency can also be sent out
Changing.
The content of the invention
The present invention provides a kind of input data being layered using the multiple graphical elements of expression and is converted into being used as sweep length
The data transfer device of the output data of data.The present invention also provides a kind of image forming system that pattern is drawn on substrate.This hair
A kind of bright record of offer has to be converted into being used as scan width data using the input data as vector data of multiple graphical elements
Output data program recording medium.It is an object of the invention to improve data conversion efficiency.
A kind of data transfer device of the present invention has：（a）Process, based on input data, is obtained in the first case
First buffer efficiency, first buffer efficiency represents what the efficiency changed from the input data to the output data rose
Degree, the input data includes：Parent graph data block, it represents parent figure；First with reference to graph data block, and it is represented
The first referenced reference graphical element in the parent graph data block；Second with reference to graph data block, and it is represented in institute
First is stated with reference to the second reference graphical element referenced in graph data block；First situation refers to：Assuming that will be individually right
Described first is scanned first obtained after width coding processing with reference to graphical element is stored at a high speed with reference to sweep length
In buffer storage, when being changed from the input data to output data, it is configured with all in the parent figure
In described first the first reference area with reference to graphical element, the situation of the first reference sweep length is all configured,（b）Work
Sequence, based on the input data, obtains the second buffer efficiency in a second situation, second situation refers to：Assuming that will be single
Solely obtain after width coding processing second is scanned with reference to graphical element to described second to be stored in reference to sweep length
In the cache memory, when being changed from the input data to the output data, it is configured with described in all
Parent figure and described first is all configured with reference in described second the second reference area with reference to graphical element in graphical element
The situation of the second reference sweep length,（c）Process, is more than the feelings of second buffer efficiency in first buffer efficiency
Under condition, according to described first with reference to graph data block, described first is generated with reference to sweep length, and as wide with reference to scanning
Spend and be stored in the cache memory；It is less than the situation of second buffer efficiency in first buffer efficiency
Under, according to described second with reference to graph data block, described second is generated with reference to sweep length, and as described with reference to scanning
Width is stored in the cache memory,（d）Process, in the parent figure, it is all be configured with it is described
With reference in the corresponding reference area with reference to graphical element of sweep length, configure described with reference to sweep length, and carry out from institute
Input data is stated to the conversion of the output data；Described（a）In process, by the way that fisrt feature amount is multiplied by into first number,
To obtain first buffer efficiency, the fisrt feature amount is represented at the described first run-length coding with reference to graphical element
Time needed for reason, first number refers to, by described first in the parent graph data block with reference to graphical element
Number of times obtained from reference count subtracts 1, described（b）In process, by the way that second feature amount is multiplied by into second number, to obtain
Second buffer efficiency, the second feature amount represents described second with reference to needed for the run-length coding processing of graphical element
Time, second number refer to, by the parent graph data block and described first with reference to described the of graph data block
Two with reference to obtained from the reference count of graphical element subtracts 1 number of times.Thereby, it is possible to improve data conversion efficiency.
Another data transfer device of the present invention has：（a）Process, based on input data, is obtained in the first case
The first buffer efficiency, first buffer efficiency represents that efficiency from the input data to the output data that changed from rises
Degree, the input data includes：Parent graph data block, it represents parent figure；First with reference to graph data block, its table
Show referenced the first reference graphical element in the parent graph data block；Second with reference to graph data block, and it is represented
Described first with reference to the second reference graphical element referenced in graph data block；First situation refers to：Assuming that will be independent
Obtained after width coding processing first is scanned with reference to graphical element be stored in height with reference to sweep length to described first
In fast buffer storage, when being changed from the input data to output data, it is configured with all in the parent figure
It is described first with reference to graphical element the first reference area in, all configure it is described first with reference to sweep length situation,（b）Work
Sequence, based on the input data, obtains the second buffer efficiency in a second situation, second situation refers to：Assuming that will be single
Solely obtain after width coding processing second is scanned with reference to graphical element to described second to be stored in reference to sweep length
In the cache memory, when being changed from the input data to the output data, it is configured with described in all
Parent figure and described first is all configured with reference in described second the second reference area with reference to graphical element in graphical element
The situation of the second reference sweep length,（c）Process, first buffer efficiency be more than second buffer efficiency and
In the case of also greater than defined efficiency threshold, according to described first with reference to graph data block, described first is generated with reference to scanning
Width, and be stored in as with reference to sweep length in the cache memory；It is less than in first buffer efficiency
In the case that second buffer efficiency and second buffer efficiency are more than the efficiency threshold, according to second reference
With reference to sweep length, and as described, with reference to sweep length to be stored in the high speed slow for graph data block generation described second
Rush in memory,（d）Process, described（c）In the case of the reference sweep length is stored in process, in the parent figure
In shape, it is configured with all with the reference area with reference to graphical element corresponding with reference to sweep length, configuring described
With reference to sweep length, and carry out from the input data to the conversion of the output data；Described（c）Do not deposited in process
In the case of the storage reference sweep length, carry out from the input data to the conversion of the output data；Described（a）Work
In sequence, by the way that fisrt feature amount is multiplied by into first number, to obtain first buffer efficiency, the fisrt feature amount represents institute
Stated for the first time with reference to needed for the run-length coding processing of graphical element, first number refers to, by the parent figure
In graphic data block described first with reference to obtained from the reference count of graphical element subtracts 1 number of times；Described（b）In process,
By the way that second feature amount is multiplied by into second number, to obtain second buffer efficiency, the second feature amount represents described
Two time with reference to needed for the run-length coding processing of graphical element, second number refers to, by the parent figure number
According to block and described first with reference to graph data block described second with reference to graphical element reference count subtract 1 obtained from time
Number.Thereby, it is possible to improve data conversion efficiency.
The present invention one preferred embodiment in, described first with reference to sweep length and it is described second reference sweep
Retouch in width, the direction that multiple sweep lengths are each extended over is as first direction, by the direction vertical with the first direction
As second direction, the graphical element group that the fisrt feature amount is included with reference to graphical element by described first is described second
Width on direction it is total, the graphical element group that the second feature amount is included with reference to graphical element by described second is in institute
State adding up to for the width in second direction.
The present invention another preferred embodiment in, in the parent graph data block, with reference to multiple first
Include multiple graphical elements with reference to graphical element with reference to graphical element, each first, in the data transfer device, described
（a）Also there is the process for synthesizing the multiple graphical element before process.
The present invention another preferred embodiment in, described first with reference in graph data block, with reference to multiple
Second includes multiple graphical elements with reference to graphical element, each second with reference to graphical element, in the data transfer device, in institute
State（b）Also there is the process for synthesizing the multiple graphical element before process.
A kind of image forming system of the present invention has：Data conversion device, it will be inputted using defined data transfer device
Data conversion is into output data, describing device, and it is based on the output data generated by the data conversion device, in substrate
On draw pattern；The data transfer device has：（a）Process, based on input data, obtains first delaying in the first case
Efficiency is deposited, first buffer efficiency represents the degree that the efficiency changed from the input data to the output data rises,
The input data includes：Parent graph data block, it represents parent figure；First with reference to graph data block, and it is represented in institute
State the first reference graphical element referenced in parent graph data block；Second with reference to graph data block, and it is represented described the
One with reference to the second reference graphical element referenced in graph data block；First situation refers to：Assuming that will be individually to described
First is scanned obtained after width coding processing first with reference to graphical element is stored in speed buffering with reference to sweep length
In memory, when being changed from the input data to output data, described in all be configured with the parent figure
In first the first reference area with reference to graphical element, the situation of the first reference sweep length is all configured,（b）Process, base
In the input data, the second buffer efficiency in a second situation is obtained, second situation refers to：Assuming that will be individually to institute
State second second obtained after width coding processing is scanned with reference to graphical element and with reference to sweep length be stored in the height
In fast buffer storage, when being changed from the input data to the output data, the parent figure is configured with all
Shape and described first is with reference in described second the second reference area with reference to graphical element in graphical element, all configuring described the
The situation of two reference sweep lengths,（c）Process, in the case where first buffer efficiency is more than second buffer efficiency,
According to described first with reference to graph data block, described first is generated with reference to sweep length, and as with reference to sweep length
It is stored in the cache memory；In the case where first buffer efficiency is less than second buffer efficiency, root
According to described second with reference to graph data block, described second is generated with reference to sweep length, and as described with reference to sweep length
It is stored in the cache memory,（d）Process, in the parent figure, is configured with and the reference in all
In the corresponding reference area with reference to graphical element of sweep length, configure described with reference to sweep length, and carry out from described defeated
Enter data to the conversion of the output data；Described（a）In process, by the way that fisrt feature amount is multiplied by into first number, to ask
Go out first buffer efficiency, the fisrt feature amount represents the run-length coding processing institute of the first reference graphical element
The time needed, first number refers to, by reference of described first in the parent graph data block with reference to graphical element
Number of times obtained from number of times subtracts 1, described（b）It is described to obtain by the way that second feature amount is multiplied by into second number in process
Second buffer efficiency, the second feature amount represent it is described second with reference to graphical element run-length coding processing needed for when
Between, second number refers to, the parent graph data block and described first are joined with reference to described the second of graph data block
According to graphical element reference count subtract 1 obtained from number of times；The describing device has：Board holder, it keeps described
Substrate, optical modulation element, it is to the substrate irradiation light, irradiation position travel mechanism, and it makes to export from the optical modulation element
Light irradiation position on the substrate moved relative to the substrate, optical modulation element control unit, it is based on the output
Data, control the optical modulation element modulation light.Thereby, it is possible to improve data conversion efficiency.
Another image forming system of the present invention has：Data conversion device, it, will be defeated using defined data transfer device
Enter data conversion into output data, describing device, it is based on the output data generated by the data conversion device, in base
Pattern is drawn on plate；The data transfer device has：（a）Process, based on input data, obtains first in the first case
Buffer efficiency, first buffer efficiency represents the journey that the efficiency changed from the input data to the output data rises
Degree, the input data includes：Parent graph data block, it represents parent figure；First with reference to graph data block, and it is represented
The first referenced reference graphical element in the parent graph data block；Second with reference to graph data block, and it is represented described
First with reference to the second reference graphical element referenced in graph data block；First situation refers to：Assuming that will be individually to institute
State first and first obtained after width coding processing is scanned with reference to graphical element and is stored in reference to sweep length and delay at a high speed
Rush in memory, when being changed from the input data to output data, in all institutes being configured with the parent figure
State in first the first reference area with reference to graphical element, all configure the situation of the first reference sweep length,（b）Process,
Based on the input data, the second buffer efficiency in a second situation is obtained, second situation refers to：Assuming that will be individually right
Described second with reference to graphical element be scanned width coding processing after obtain second be stored in reference to sweep length described in
In cache memory, when being changed from the input data to the output data, the parent is configured with all
Figure and described first is all configured described with reference in described second the second reference area with reference to graphical element in graphical element
The situation of second reference sweep length,（c）Process, is more than second buffer efficiency and also big in first buffer efficiency
In the case of defined efficiency threshold, according to described first with reference to graph data block, described first is generated with reference to sweep length,
And be stored in as with reference to sweep length in the cache memory；It is less than described the in first buffer efficiency
In the case that two buffer efficiencies and second buffer efficiency are more than the efficiency threshold, according to the second reference picture figurate number
According to block generation described second with reference to sweep length, and with reference to sweep length the caches are stored in as described
In device,（d）Process, described（c）In the case of the reference sweep length is stored in process, in the parent figure,
It is configured with all with the reference area with reference to graphical element corresponding with reference to sweep length, configuring the reference and sweeping
Width is retouched, and is carried out from the input data to the conversion of the output data；Described（c）It is described without storage in process
In the case of with reference to sweep length, carry out from the input data to the conversion of the output data；Described（a）In process,
By the way that fisrt feature amount is multiplied by into first number, to obtain first buffer efficiency, the fisrt feature amount represents described
One time with reference to needed for the run-length coding processing of graphical element, first number refers to, by the parent figure number
According to described first in block with reference to obtained from the reference count of graphical element subtracts 1 number of times, described（b）In process, pass through
Second feature amount is multiplied by second number, to obtain second buffer efficiency, the second feature amount represents second ginseng
According to the time needed for the run-length coding processing of graphical element, second number refers to, by the parent graph data block
And described first with reference to graph data block described second with reference to graphical element reference count subtract 1 obtained from number of times；Institute
Stating describing device has：Board holder, its described substrate of holding, optical modulation element, it irradiates position to the substrate irradiation light
Travel mechanism is put, it makes the irradiation position of light on the substrate derived from the optical modulation element be moved relative to the substrate
It is dynamic, optical modulation element control unit, it is based on the output data, controls the optical modulation element modulation light.Thereby, it is possible to improve
Data conversion efficiency.
Computer is performed following process, thus, record is performed by the computer and remembered in a kind of of the present invention
Program in recording medium, these processes include：（a）Process, based on input data, obtains the first caching effect in the first case
Rate, first buffer efficiency represents the degree that the efficiency changed from the input data to the output data rises, described
Input data includes：Parent graph data block, it represents parent figure；First with reference to graph data block, and it is represented in the father
The first referenced reference graphical element in class graph data block；Second with reference to graph data block, and it is represented in the described first ginseng
According to the second reference graphical element referenced in graph data block；First situation refers to：Assuming that will be individually to described first
Obtained after width coding processing first, which is scanned, with reference to graphical element is stored in caches with reference to sweep length
In device, when being changed from the input data to output data, all be configured with the parent figure described first
In the first reference area with reference to graphical element, the situation of the first reference sweep length is all configured,（b）Process, based on institute
Input data is stated, the second buffer efficiency in a second situation is obtained, second situation refers to：Assuming that will be individually to described the
Two are scanned obtained after width coding processing second with reference to graphical element, and to be stored in the high speed with reference to sweep length slow
Rush in memory, when being changed from the input data to the output data, it is all be configured with the parent figure and
Described first, with reference in described second the second reference area with reference to graphical element in graphical element, all configures described second and joins
According to the situation of sweep length,（c）Process, in the case where first buffer efficiency is more than second buffer efficiency, according to
Described first with reference to graph data block, generates described first with reference to sweep length, and store as with reference to sweep length
In the cache memory；In the case where first buffer efficiency is less than second buffer efficiency, according to institute
Second is stated with reference to graph data block, described second is generated with reference to sweep length, and stored as described with reference to sweep length
In the cache memory,（d）Process, in the parent figure, is configured with described with reference to scanning in all
In the corresponding reference area with reference to graphical element of width, configure described with reference to sweep length, and carry out from the input number
According to the conversion to the output data；Described（a）In process, by the way that fisrt feature amount is multiplied by into first number, to obtain
State the first buffer efficiency, the fisrt feature amount represents described first with reference to needed for the run-length coding processing of graphical element
Time, first number refers to, by reference count of described first in the parent graph data block with reference to graphical element
Number of times obtained from subtracting 1, described（b）In process, by the way that second feature amount is multiplied by into second number, to obtain described second
Buffer efficiency, the second feature amount represented for the described second time with reference to needed for the run-length coding processing of graphical element,
Second number refers to, by second reference picture of the parent graph data block and the first reference graph data block
Number of times obtained from the reference count of shape key element subtracts 1.Thereby, it is possible to improve data conversion efficiency.
Computer is performed following process, thus, record is performed in the another of the present invention by the computer
Program in recording medium, these processes include：（a）Process, based on input data, obtains the first caching in the first case
Efficiency, first buffer efficiency represents the degree that the efficiency changed from the input data to the output data rises, institute
Stating input data includes：Parent graph data block, it represents parent figure；First with reference to graph data block, and it is represented described
The first referenced reference graphical element in parent graph data block；Second with reference to graph data block, and it is represented described first
With reference to the second reference graphical element referenced in graph data block；First situation refers to：Assuming that will be individually to described the
One, which is scanned first obtained after width coding processing with reference to graphical element, is stored in speed buffering with reference to sweep length and deposits
In reservoir, when being changed from the input data to output data, all be configured with the parent figure described
In one the first reference area with reference to graphical element, the situation of the first reference sweep length is all configured,（b）Process, is based on
The input data, obtains the second buffer efficiency in a second situation, and second situation refers to：Assuming that will be individually to described
Second is scanned obtained after width coding processing second with reference to graphical element is stored in the high speed with reference to sweep length
In buffer storage, when being changed from the input data to the output data, the parent figure is configured with all
And in described first the second reference area with reference to the second reference graphical element in graphical element, all configure described second
With reference to the situation of sweep length,（c）Process, is more than second buffer efficiency in first buffer efficiency and also greater than advises
In the case of fixed efficiency threshold, according to described first with reference to graph data block, described first is generated with reference to sweep length, and will
It is stored in the cache memory as with reference to sweep length；It is less than described second in first buffer efficiency to delay
Deposit efficiency and second buffer efficiency is more than in the case of the efficiency threshold, according to described second with reference to graph data block
Described second is generated with reference to sweep length, and with reference to sweep length the cache memory is stored in as described
It is interior,（d）Process, described（c）In the case of the reference sweep length is stored in process, in the parent figure,
All is configured with the reference area with reference to graphical element corresponding with the reference sweep length, configures described with reference to scanning
Width, and carry out from the input data to the conversion of the output data；Described（c）Without the storage ginseng in process
In the case of sweep length, carry out from the input data to the conversion of the output data, described（a）In process, lead to
Cross and fisrt feature amount is multiplied by first number, to obtain first buffer efficiency, the fisrt feature amount represents described first
Time with reference to needed for the run-length coding processing of graphical element, first number refers to, by the parent graph data
In block described first with reference to obtained from the reference count of graphical element subtracts 1 number of times, described（b）In process, by inciting somebody to action
Second feature amount is multiplied by second number, and to obtain second buffer efficiency, the second feature amount represents second reference
Time needed for the run-length coding processing of graphical element, second number refer to, by the parent graph data block and
Described first with reference to graph data block described second with reference to graphical element reference count subtract 1 obtained from number of times.Thus,
Data conversion efficiency can be improved.
Below, the detailed description carried out by referring to accompanying drawing to the present invention, comes clearly above-mentioned purpose and other mesh
, feature, form and advantage.
Brief description of the drawings
Fig. 1 is the figure of the structure for the image forming system for representing an embodiment.
Fig. 2 is the side view of describing device.
Fig. 3 is the top view of describing device.
Fig. 4 is the figure of enlarged representation spatial light modulator.
Fig. 5 A are the figures for the section for representing optical modulation element.
Fig. 5 B are the figures for the section for representing optical modulation element.
Fig. 6 is the figure for the structure for representing data conversion device.
Fig. 7 A are the figures for the flow for representing data conversion.
Fig. 7 B are the figures of a part for the flow for representing data conversion.
Fig. 8 is the figure for representing parent figure.
Fig. 9 is the figure for representing the first reference graphical element.
Figure 10 is the figure for representing the second reference graphical element.
Figure 11 is the concept map for representing parent figure.
Figure 12 is the concept map for representing the first reference graphical element.
Figure 13 is the figure for representing the first reference graphical element.
Figure 14 is the figure for representing the second reference graphical element.
Figure 15 is the figure for representing parent figure.
Figure 16 is the figure for representing processing time.
Figure 17 is the figure for representing parent figure.
Figure 18 is the concept map for representing parent figure.
Figure 19 is the figure for representing graphical element.
Figure 20 is the figure for representing graphical element.
Figure 21 is the concept map for representing the first reference graphical element.
Figure 22 is the figure of a part for the flow for representing data conversion.
Figure 23 is the concept map for representing parent figure.
Figure 24 is the concept map for representing the first reference graphical element.
Figure 25 is the figure for representing processing time.
Figure 26 is the figure of a part for the flow for representing data conversion.
Figure 27 is the figure of a part for the flow for representing data conversion.
Wherein, description of reference numerals is as follows：
1 describing device,
3 board holders,
7 data conversion devices,
9 substrates,
25 main scanning mechanisms,
61 optical modulation element control units,
75 cache memories,
81st, 81a parents figure,
82nd, 82a first is with reference to graphical element,
83rd, 83a second is with reference to graphical element,
100 image forming systems,
461 optical modulation elements,
707 programs,
811~815,813a, 813b graphical element,
S11~S16, S110~S113, S120, S131, S132 step.
Embodiment
Fig. 1 is the figure of the structure for the image forming system 100 for representing an embodiment of the invention.Image forming system 100 is profit
Use up the glass substrate in liquid crystal display device（Below, referred to as " substrate "）On photosensitive material on draw pattern be
System.As shown in figure 1, image forming system 100 has data conversion device 7, describing device 1.Data conversion device 7 will be used as expression figure
The input data of the vector data of case is converted into the output data as scan width data（That is, rasterization process is carried out）.Retouch
Picture device 1 draws pattern based on the output data generated by data conversion device 7 on substrate.In Fig. 1, number is shown in the lump
According to each function of conversion equipment 7.Below, after being illustrated for describing device 1, for data conversion device 7 and by
The data of the processing of data conversion device 7 are illustrated.
Fig. 2 and Fig. 3 are the side view and top view for representing describing device 1 respectively.As shown in Figures 2 and 3, describing device 1
With maintaining part travel mechanism 2, board holder 3, illumination part 4, frame 12.Board holder 3,（+ Z）The master of side
Face 91（Hereinafter referred to as " upper surface 91 "）The upper substrate 9 for keeping being formed with photosensitive material layer.Maintaining part travel mechanism 2 is arranged on
On base station 11, board holder 3 is set to be moved to the X-direction vertical with Z-direction and Y-direction.Frame 12 is with across board holder 3
And the mode of maintaining part travel mechanism 2 is fixed on base station 11.Illumination part 4 is arranged in frame 12, to photosensitive on substrate 9
Light after material irradiation modulation.In addition, as shown in Fig. 2 describing device 1 has to maintaining part travel mechanism 2, illumination part 4 etc.
The control unit 6 that is controlled of each structure.
As shown in Figures 2 and 3, board holder 3 has objective table 31, objective table rotating mechanism 32, supporting plate 33.Substrate
9 are positioned on objective table 31.Supporting plate 33 supports the objective table 31 in the way of it can rotate objective table 31.Objective table rotates
Mechanism 32, in supporting plate 33 centered on the rotary shaft 321 vertical with the upper surface 91 of substrate 9, carrys out rotatable stage 31.
Maintaining part travel mechanism 2 has subscan mechanism 23, substrate 24, main scanning mechanism 25.Subscan mechanism 23 makes base
X-direction of the plate maintaining part 3 into Fig. 2 and Fig. 3（Hereinafter referred to as " sub-scanning direction "）It is mobile.Substrate 24 is by subscan mechanism
23 are supported to supporting plate 33.Main scanning mechanism 25 makes board holder 3 with substrate 24 in the lump in the Y vertical with X-direction
Direction（Hereinafter referred to as " main scanning direction "）Upper movement.In describing device 1, by maintaining part travel mechanism 2, protect substrate
Portion 3 is held to move on the main scanning direction and sub-scanning direction parallel with the upper surface 91 of substrate 9.
As shown in Figures 2 and 3, subscan mechanism 23 has linear motor 231, a pair of linear guides 232.Linear motor
231 in the downside of supporting plate 33（That is,（-Z）Side）, along the main surface parallel with objective table 31 and vertical with main scanning direction
Sub-scanning direction extension.A pair of linear guides 232 are in linear motor 231（+ Y）Side and（-Y）Side is along subscan
Direction extends.Main scanning mechanism 25 has linear motor 251, a pair of air slides（air slider）252.Linear motor 251
In the downside of substrate 24, extend along with the main scanning direction of the main surface parallel of objective table 31.A pair of air slides 252 are linear
Motor 251（+ X）Side and（-X）Side extends along main scanning direction.
As shown in figure 3, illumination part 4 is with multiple（In the present embodiment, it is 8）Optical head 41, the plurality of light
Head 41 is learned to be arranged at equal intervals and be arranged in frame 12 along sub-scanning direction.In addition, as shown in Fig. 2 illumination part 4 has
There is the UV of the light source optical system 42 being connected with each optical head 41, outgoing ultraviolet（Ultraviolet ray filter）Light source 43 and light source
Drive division 44.UV light sources 43 are solid state laser.By driving light source drive part 44, from a length of 355nm of the outgoing wave of UV light sources 43
Ultraviolet, and ultraviolet is guided to optical head 41 via light source optical system 42.
Each optical head 41 has exit portion 45, optical system 451,47, spatial light modulator 46.Exit portion 45 is under
Light of the square outgoing from UV light sources 43.451 pairs of light from exit portion 45 of optical system are reflected and direct it to space
Optical modulator 46.46 pairs of spatial light modulator irradiates the light from exit portion 45 come via optical system 451 and is modulated
And reflected.Optical system 47 guides the light after the modulation from spatial light modulator 46 to the upper table for being arranged at substrate 9
On the photosensitive material in face 91.
Fig. 4 is the figure of enlarged representation spatial light modulator 46.As shown in figure 4, spatial light modulator 46 has diffraction grating
Multiple optical modulation elements 461 of type, the plurality of optical modulation element 461 comes from UV light sources 43 by exit portion 45 by what irradiation came
（Reference picture 2）Light guide to the upper surface 91 of substrate 9.Optical modulation element 461 is manufactured using semiconductor device manufacturing technology, should
Optical modulation element 461 is that can change the diffraction grating of grating depth.Replaced in optical modulation element 461 in mode arranged in parallel
It is formed with multiple flexible belts（ribbon）461a and multiple fixing band 461b, multiple flexible belt 461a are arranged with respect to behind
Reference plane can be individually（Along the direction perpendicular to reference plane）Move up and down, multiple fixing band 461b are relative to benchmark
Face is fixed.As the optical modulation element of diffraction grating type, for example, as it is known that there is GLV（Grating Light Valve：Grating light
Valve）（Silicon Light Machines（California Sen Niweier）Registration mark）.
Fig. 5 A and Fig. 5 B are to represent the optical modulation element 461 on the face vertical with flexible belt 461a and fixing band 461b
The figure of section.As shown in Figure 5A, it is located at sustained height relative to reference plane 461c in flexible belt 461a and fixing band 461b（That is,
Flexible belt 461a not flexural deformations）In the case of, the surface of optical modulation element 461 is located in same level, by incident light L1
Reflected light be used as zero order light L2 export.On the other hand, as shown in Figure 5 B, compared with fixing band 461b, flexible belt 461a to
In the case that reference plane 461c curvings are deformed, flexible belt 461a is changed into the bottom surface of the groove of diffraction grating, has incidence from incidence
The light L1 export first-order diffraction light of optical modulation element 461 L3（And then, Advanced Diffraction light can be exported）, zero order light disappearance.Like this,
Optical modulation element 461 carries out light modulation using diffraction grating.
In the illumination part 4 shown in Fig. 2, the light from UV light sources 43 is changed into Line of light by light source optical system 42（Light
Beam section is the light of wire）, and then the multiple of wire that are arranged in for exposing to spatial light modulator 46 via exit portion 45 scratch
Property band 461a and fixing band 461b（On reference picture 5A and Fig. 5 B.In optical modulation element 461, by adjacent each flexible belt
461a and fixing band 461b is as a pair with right, and a picture element of pattern of the band pair of more than three with being drawn is corresponding.
In optical modulation element 461, based on from the optical modulation element control unit 61 being connected with each spatial light modulator 46
Signal, corresponding with each picture element of pattern band pair is controlled respectively（Paired band）Flexible belt 461a, make these flexible belts
461a can change between the state as shown in Fig. 5 A and the state as shown in Fig. 5 B, and the state as shown in Fig. 5 A refers to, with
The corresponding band of each picture element is to outgoing zero order light（Normal reflection light）State, the state as shown in Fig. 5 B refers to that outgoing non-zeroth order is spread out
Penetrate light（Predominantly first-order diffraction light（（+ 1）Rank diffraction light and（-1）Rank diffraction light））State.In addition, by making flexible belt
461a flexural deformations are in optical modulation element 461 to the state between the state shown in the state shown in Fig. 5 A and Fig. 5 B
The state of the outgoing zero order light smaller than state strength shown in Fig. 5 A.
Zero order light from the outgoing of optical modulation element 461 is guided to optical system 47, by first-order diffraction light guide to light
The different direction of system 47.In addition, in order to prevent from being changed into veiling glare, first-order diffraction is covered by illustrating the light shielding part omitted
Light.Zero order light from optical modulation element 461 is directed to the upper surface 91 of substrate 9 via optical system 47, thus, in base
On the upper surface 91 of plate 9, in X-direction（That is, sub-scanning direction）Multiple irradiation positions of upper arrangement irradiate after modulation respectively
Light.
In the describing device 1 shown in Fig. 2 and Fig. 3, from the optical modulation element 461 of illumination part 4, to being moved by maintaining part
Light after the irradiation modulation of substrate 9 that the main scanning mechanism 25 of mechanism 2 drives and moved on main scanning direction.In other words, master sweeps
Mechanism 25 is retouched as irradiation position travel mechanism, it makes to guide the photograph to the light of substrate 9 on substrate 9 from optical modulation element 461
Position is penetrated to move on main scanning direction relative to substrate 9.In addition, in describing device 1, for example, can not moving substrate 9,
But by making optical modulation element 461 be moved on main scanning direction, to make the irradiation position on substrate 9 on main scanning direction
It is mobile.The one side of describing device 1 makes substrate 9 be moved on main scanning direction, while passing through the light modulation of the control unit 6 shown in Fig. 2
Element control unit 61, based on the output data exported from data conversion device 7 to describing device 1, control optical modulation element 461 is adjusted
Light processed, thus, draws the pattern represented by the input data inputted to data conversion device 7 on substrate 9.
Then, illustrated for data conversion device 7.Fig. 6 is the figure for the structure for representing data conversion device 7.With leading to
Similarly, data conversion device 7 is the structure for being connected to following part to normal computer：Carry out the CPU of various calculation process
（Central processing unit）701st, the program that storage is performed or the RAM of the operating area as calculation process（Random access memory）
702nd, the ROM of base program is stored（Read-only storage）703rd, store the fixed disk 704 of various information, shown respectively to operator
Plant input unit 706 of display 705, keyboard, the mouse of information etc. etc..Contain and filled by data conversion in the internal memory of fixed disk 704
Put the program 707 of 7 execution.Program 707 is to convert input data into the output data as scan width data（That is, enter
Line raster）Program, wherein input data draw the vector data of the estimated pattern on substrate for expression.
In Fig. 1, the CPU701 of data conversion device 7 is represented using functional block（Reference picture 6）Deng by according to program 707
To carry out calculation process etc.（That is, program 707 is performed by data conversion device 7）And the function of realizing.Data reception portion in Fig. 1
71st, graphical element combining unit 72, buffer efficiency operational part 73, buffer unit 74, cache memory 75, output data generating unit
76th, form converter section 77, data output section 78 are equivalent to the function by realizations such as CPU701.In addition, these functions can be by more
Platform computer is realized.
Then, illustrate to turn using the data from input data to output data that the data conversion device 7 shown in Fig. 1 is carried out
Change.Below, first, illustrated for the data conversion carried out without using graphical element combining unit 72, hereafter, for using
The data conversion of graphical element combining unit 72, is illustrated.Fig. 7 A and Fig. 7 B are represented without using graphical element combining unit 72
The figure of the flow of data conversion.In data conversion device 7, first, received by the data reception portion 71 shown in Fig. 1 as vector
The input data of data.
Fig. 8 is the pattern for representing to be represented by input data（Hereinafter referred to as " parent figure 81 "）Figure.In input data
In, it is multiple on the basis of the multiple graphical elements of seizure are used as the parent figure 81 drawn in defined configuring area 80
Graphical element shows as the data block as vector data respectively.The data block include the shape for representing corresponding graphical element and
The information of position on substrate 9, for information etc. with reference to data block corresponding with other graphical elements.Actual data
7 pairs of conversion equipment data block corresponding with multiple graphical elements that input data is included carries out processing described later, following
In explanation, in order to make it easy to understand, graphical element itself is illustrated as the process object of processing.In addition, generally, it is actual
Input data include the data block for representing multiple graphical elements of diversified shape.
Parent figure 81 include two rectangular graphical elements 811, the graphical element 812 of two triangles, six put down
The graphical element 813 of row quadrangle, trapezoidal graphical element 814, the graphical element 815 of rhombus.It is total 12
Graphical element 811~815 is arranged in the rectangular of the row of 4 rows × 3.The Breadth Maximum of graphical element 811~815 is equal to each other, all
For " 1 ".In fig. 8, each graphical element of parallel diagonal lines full-filling is utilized.In the same accompanying drawing of others described later, also using flat
Row oblique line full-filling graphical element.
In the parent graph data block for representing parent figure 81, with reference to four figures of the first row from the left side in Fig. 8
Shape key element, now, using one first the first reference with reference to graphical element 82 of expression shown in this four graphical elements as Fig. 9
Graph data block.First includes each graphical element 811,812, two graphical elements 813 with reference to graphical element 82.In addition,
In parent graph data block, referring also to four graphical elements of the secondary series from the left side in Fig. 8, now, by this four figures
Shape key element is used as the first reference graph data block for representing the first reference graphical element 82.
In parent graph data block, with reference to two of the downside in the tertial graphical element from the left side in Fig. 8
Graphical element 813, now, will with reference to figure using the two graphical elements 813 as the expression one second shown in Figure 10
The second of element 83 is with reference to graph data block.Second includes a graphical element 813 with reference to graphical element 83.Representing the first reference
The first of graphical element 82 is with reference in graph data block, two graphical elements 813 of the downside in reference picture 9, now, by this two
Individual graphical element 813 is respectively as one second the second reference graph data with reference to graphical element 83 of expression shown in Figure 10
Block.
In addition, for reference to the data block in input data, graphical element is zoomed in or out sometimes to be joined
According to, or make graphical element rotation change direction to carry out reference.In data conversion device 7, will not this reference be carried out
Graphical element is regarded as with reference to graphical element, only in the case of using original size and towards reference graphical element, just regards ginseng as
According to graphical element.However, will be obtaining with original figure after the reference for rotating graphical element by being repeated a number of times
Key element is also regarded as with reference to graphical element towards identical and equal-sized graphical element.
Figure 11 is to consider above-mentioned reference relation, conceptually represents the parent figure 81 represented using parent graph data block
Figure.Parent figure 81 includes two first to be wanted with reference to graphical element 82, two the second reference graphical elements 83, each figures
Element 814,815.Figure 12 is to consider above-mentioned reference relation, conceptually represents first represented using first with reference to graph data block
With reference to the figure of graphical element 82.First includes two second with reference to graphical element 82 will with reference to graphical element 83, each figure
Element 811,812.
Input data includes representing parent graph data block, first with reference to graph data block, the second reference picture figurate number respectively
According to the data block of block.Input data is layered as parent graph data block, first with reference to graph data block and second with reference to figure
Data block.
In fig. 8, from the upside in figure towards the direction of downside（Hereinafter referred to as " first direction "）Shown with Fig. 2 and Fig. 3
Describing device 1 from（+ Y）Side direction（-Y）The main scanning direction correspondence of side, from the left side in figure towards the side on right side
To（That is, it is the direction vertical with first direction, hereinafter referred to as " second direction "）With describing device 1 from（+ X）Side direction
（-X）The sub-scanning direction correspondence of side.
If receiving input data, buffer efficiency operational part 73（Reference picture 1）Based on input data, obtain Fig. 9 and show
First with reference to graphical element 82 the first buffer efficiency（Step S11）.First buffer efficiency is represented in the case of following
The value for the degree that the efficiency changed from input data to output data rises, the situation refers to：Will be individually to first with reference to figure
Key element 82 is scanned width coding processing（Run Length Encoding）First obtained afterwards stores with reference to sweep length
In cache memory 75, when being changed from input data to output data, it is assumed that be configured with parent figure in all
In first the first reference area with reference to graphical element 82 in 81, first is all configured with reference to sweep length.
For calculating the first buffer efficiency, first, obtaining will with reference to figure with reference to first in parent graph data block
The number of times of element 82（Fig. 7 B：Step S111）.As shown in figure 11, in the parent graph data block for representing parent figure 81, reference
The number of times of first reference graphical element 82 is twice.Then, obtain expression and be scanned width with reference to graphical element 82 to first
The fisrt feature amount of time needed for coded treatment（Step S112）.Fisrt feature amount is with to the first reference graphical element 82
Time needed for being scanned width coding processing is elongated and becomes big amount.For example, it is possible to use in reality to the first reference picture
Shape key element 82 is scanned the time needed in the case that width coding is handled, and is used as fisrt feature amount.
In the case where width coding processing is scanned with reference to graphical element 82 to first, first, as shown in figure 13, profit
With a plurality of straight line 801 along a first direction, first is divided with reference to graphical element 82 with Rack.Thus, setting is along the
Two directions are arranged with multiple regions 800 of the Rack.Straight line 801 is the parallel with main scanning direction straight of describing device 1
Line, hereinafter referred to as " scan line 801 ".Above-mentioned Rack is the width for drawing resolution ratio to determine based on describing device 1
Degree, hereinafter referred to as " unit width ".In addition, it is following, region 800 is referred to as " unit area 800 ".
Then, according to first the first reference graphical element 82 that constituent parts region 800 is represented with reference to the generation of graph data block
Sweep length unit sweep length.Then, by these unit sweep lengths and representing corresponding unit area 800
The data of position set up association, to generate represent the first reference graphical element 82 first with reference to sweep length, first reference
The first of graphical element 82 is with reference to the set that sweep length is the multiple sweep lengths extended along a first direction.
In addition, for calculating the first buffer efficiency, it is possible to use the face of the boundary rectangle of the first reference graphical element 82
Product, first are wanted with reference to the quantity of the graphical element that graphical element 82 is included, the first figure included with reference to graphical element 82
The width of the graphical element group that the sum on the summit of element, first are included with reference to graphical element 82 in a second direction adds up to,
It is used as fisrt feature amount.In the present embodiment, the first graphical element group included with reference to graphical element 82 is utilized（That is,
One graphical element 811, graphical element 812, two graphical elements 813）Width in a second direction it is total, to make
For fisrt feature amount.
If obtaining fisrt feature amount, fisrt feature amount is multiplied by specific times, thus, to obtain the first buffer efficiency
（Step S113）, the specific times refer to, obtained in step S111 first is subtracted with reference to the reference count of graphical element 82
Number of times obtained from going 1.As described above, reference count is twice, fisrt feature amount is the Breadth Maximum of four graphical elements
Total, i.e., " 4 ", therefore, the first buffer efficiency is " 4 ".
If obtaining the first buffer efficiency, buffer efficiency operational part 73 is based on input data, and obtaining second will with reference to figure
Second buffer efficiency of element 83（Step S12）.Second buffer efficiency be represent in the case of following from input data to defeated
Go out the value of the degree of the efficiency rising of data conversion, the situation refers to：Individually the second reference is scanned to graphical element 83
What is obtained after width coding processing second is stored in cache memory 75 with reference to sweep length, from input data to
When output data is changed, it is assumed that in all the second references being configured with parent figure 81 and in the first reference graphical element 82
In second reference area of graphical element 83, second is all configured with reference to sweep length.
The process and the process of the above-mentioned buffer efficiency of calculating first for calculating the second buffer efficiency are essentially identical.Just calculate the
For two buffer efficiencies, first, obtain with reference to parent graph data block and first with reference to the second reference picture in graph data block
The number of times of shape key element 83.As shown in figure 11, in the parent graph data block for representing parent figure 81, with reference to second with reference to figure
The number of times of key element 83 is twice.In addition, as shown in figure 12, representing the first reference graph data of the first reference graphical element 82
In block, reference second is twice with reference to the number of times of graphical element 83.As shown in figure 11, in parent graph data block, with reference to two
Secondary first with reference to graphical element 82, therefore, because with two first reference graph data blocks, so total with reference to four times second ginsengs
According to graphical element 83.Therefore, with reference to parent graph data block and the second reference graphical element 83 of the first reference graph data block
Number of times be six times.
Then, obtain and represent to be scanned width coding handles the required time second with reference to graphical element 83 to second
Characteristic quantity.Second feature amount is with elongated to the second time with reference to needed for graphical element 83 is scanned width coding processing
And become big amount.Using the amount same with fisrt feature amount, it is used as second feature amount.In the present embodiment, second is utilized
The graphical element group included with reference to graphical element 83（That is, one graphical element 813）Width in a second direction it is total,
It is used as second feature amount.
As long as second feature amount is using the amount same with fisrt feature amount, for example, it is possible to use in reality to second
Time needed in the case of being scanned width coding processing with reference to graphical element 83, it is used as second feature amount.With it is above-mentioned
To first with reference to graphical element 82 carry out run-length coding processing similarly, swept to second with reference to graphical element 83
Retouch width coding processing.In the case where width coding processing is scanned with reference to graphical element 83 to second, as shown in figure 14,
Second is divided into multiple unit areas 800 with reference to graphical element 83, and according to second with reference to graph data block, generation represents each list
Unit sweep length of the second of position region 800 with reference to the sweep length of graphical element 83.Then, by being scanned to these units
Width is set up with the data for the position for representing corresponding unit area 800 and associated, and generation represents second with reference to graphical element 83
Second with reference to sweep length, and this is second with reference to the second more for what is extended along a first direction with reference to sweep length of graphical element 83
The set of individual sweep length.Furthermore it is possible to utilize the second area, the second reference figure with reference to the boundary rectangle of graphical element 83
The quantity for the graphical element that key element 83 is included, the sum on the summit of the second graphical element included with reference to graphical element 83,
It is used as second feature amount.
If obtaining second feature amount, second feature amount is multiplied by specific times, thus, to obtain the second buffer efficiency,
The specific times refer to, only subtract 1 with reference to the reference count of graphical element 83 by obtained in step S111 second and obtain
Number of times.As described above, reference count is six times, second feature amount is the Breadth Maximum of a graphical element 813, i.e., " 4 ", because
This, the second buffer efficiency is " 5 ".In addition, the calculating of the second buffer efficiency, calculating that can be with the first buffer efficiency（Step
S11）Carry out, can also be carried out before step S11 simultaneously.
If obtaining the first buffer efficiency and the second buffer efficiency, the first buffer efficiency is compared with the second buffer efficiency
Compared with（Step S13）.In the case where the first buffer efficiency is more than the second buffer efficiency, buffer unit 74（Reference picture 1）According to expression
The first of first reference graphical element 82 is with reference to graph data block, to generate first with reference to sweep length, and is scanned as reference
Width is stored in cache memory 75（Step S14）.On the other hand, it is less than the second buffer efficiency in the first buffer efficiency
In the case of, according to the second reference graph data block for representing the second reference graphical element 83, second is generated with reference to sweep length,
And be stored in as with reference to sweep length in cache memory 75（Step S15）.
In other words, in the case where the first buffer efficiency is more than the second buffer efficiency, the reference graphical element 82 of caching first,
In the case where the first buffer efficiency is less than the second buffer efficiency, caching second is with reference to graphical element 83.In the first buffer efficiency
In the case of equal to the second buffer efficiency, in the present embodiment, step S15 is carried out, but it is also possible to carry out step S14.
As described above, the first buffer efficiency is " 4 ", the second buffer efficiency is " 5 ", therefore, the according to Figure 14
Two scan the second reference with reference to sweep length with reference to the reference graph data block of graphical element 83 corresponding second, generation second
Width is stored in cache memory 75 as with reference to sweep length.
If in the memory storage of cache memory 75 with reference to sweep length, as shown in figure 15, output data generating unit 76
The configuring area 80 of parent figure 81 is divided into multiple unit areas 800.Then, for constituent parts region 800, generation is represented
The unit sweep length of the sweep length of the graphical element overlapping with constituent parts region 800.
When generating unit sweep length, for corresponding with reference to graphical element with reference to sweep length（In this embodiment party
It is the second reference graphical element 83 in formula）, according to the reference sweep length in cache memory 75, read and unit area
The overlapping part in domain 800, and unit sweep length is included into the part.In addition, for being wanted with reference to the figure beyond graphical element
Element, based on the data block for representing the graphical element, obtains the letter of the starting point and terminal in the region overlapping with unit area 800 etc.
Breath, and the information is included into unit sweep length.
Then, pair unit sweep length corresponding with constituent parts region 800 and the position in expression constituent parts region 800 are passed through
Data set up association, generate output data（That is, scan width data）（Step S16）, the output data is along first party
To the set of multiple sweep lengths of extension.In other words, using output data generating unit 76, in parent figure 81, all
Be configured with corresponding with reference to graphical element with reference to sweep length（In the present embodiment, second with reference to graphical element 83）'s
In reference area, configuration is stored in reference sweep length in cache memory 75, and carries out from input data to defeated
Go out the conversion of data.
If data conversion terminates, changed the output data is entered into row format by form converter section 77, be converted into fitting
After the form for the processing for closing describing device 1, the output after being changed by data output section 78 to the output format of describing device 1
Data.Describing device 1 changed based on form after data, from the optical modulation element control unit 61 of the control unit 6 shown in Fig. 2 to
Each spatial light modulator 46 sends signal, and main scanning mechanism 25 makes substrate 9 on main scanning direction（That is, with substrate 9
The corresponding direction of above-mentioned first direction）It is mobile, thus, drawn on the photosensitive material on substrate 9 and be input to data conversion device 7
Pattern represented by interior input data.
As described above, in data conversion device 7, being compared to the first buffer efficiency and the second buffer efficiency, first
Buffer efficiency represents the degree that the efficiency of the data conversion in the case where being cached with first with reference to graphical element 82 rises, and second delays
Deposit efficiency and represent the degree that the efficiency of the data conversion in the case where being cached with second with reference to graphical element 83 rises.Then, exist
Cache after the relatively large reference graphical element of degree that the efficiency of data conversion rises, utilized the reference figure cached
The reference sweep length of key element, carries out the data conversion from input data to output data.Thereby, it is possible to pass through data conversion
Efficiency rises to cache appropriate reference graphical element.Its result is that can rightly improve from input data to output data
Carry out the efficiency of data conversion.
If here, considering the rectangle to the ratio of long side and short side more than greatly to a certain degree（That is, elongated is rectangular
Shape）Graphical element be scanned width coding processing, then graphical element is configured to long side and the first party of the graphical element
To parallel, in this case, the quantity of the overlapping unit area 800 of graphical element tails off, therefore, run-length coding processing institute
It is short that the time needed becomes comparison.On the other hand, it is parallel with second direction on the long side that graphical element is configured to the graphical element
In the case of, the number of the overlapping unit area 800 of graphical element becomes many, therefore, the when anaplasia needed for run-length coding processing
It is long.
If area, summit quantity using the first reference graphical element 82 and second with reference to the boundary rectangle of graphical element 83
Deng being used as fisrt feature amount and second feature amount when obtaining the first buffer efficiency and the second buffer efficiency, then in parent
In the case that figure 81 includes that above-mentioned elongated rectangular graphical element, make scanning wide because of the direction of graphical element
The difference that the time occurs the need for degree coded treatment, will not be reflected into the first buffer efficiency and the second buffer efficiency.
In contrast, in the data conversion device 7 of present embodiment, fisrt feature amount is first with reference to graphical element 82
Comprising graphical element group width in a second direction it is total, second feature amount is wrapped by second with reference to graphical element 83
The width of the graphical element group contained in a second direction it is total.Thus, even in elongated rectangular graphical element etc.
Because being comprised in parent figure 81 towards time phase difference the need for handling run-length coding different very big graphical element
In the case of interior, on the premise of the influence of this graphical element is considered, also can accurately obtain the first buffer efficiency and
Second buffer efficiency.Its result is that further can rightly improve the progress data conversion from input data to output data
Efficiency.
In addition, with being scanned width with reference to graphical element 83 with reference to graphical element 82 and second to first using in reality
The time is used as fisrt feature amount the need in the case of coded treatment and the situation of second feature amount is compared, and can shorten and obtain
Time needed for fisrt feature amount and second feature amount.Its result is that can shorten and enter line number from input data to output data
According to the time needed for conversion.
Figure 16 is represented to by the time needed for the progress data conversion of data conversion device 7（That is, processing time）With leading to
The data conversion device for crossing comparative example carries out the figure that is compared of processing time of data conversion.Filled in the data conversion of comparative example
In putting, do not account for buffer efficiency, for input data, cache it is all have references to four times above by reference to graphical element.Respectively
The position of the downside of column diagram represents the time needed for caching graphical element, and the position of upside is to pattern represented by input data
It is scanned the time needed for width coding processing.In the data conversion device 7 of present embodiment, turn with the data of comparative example
Changing device is compared, although the time needed for run-length coding processing is slightly increased, but the time needed for caching is greatly reduced.
Its result is, compared with the data conversion device of comparative example, can reduce the time needed for data conversion.
Then, enter for the data conversion for carrying out the input data for representing another parent figure 81a to output data
Row explanation.Figure 17 is the parent figure 81a figure for representing to represent using the input data that is received by data reception portion 71.In parent
In figure 81a, each graphical element 813 of the parent figure 81 shown in substitution Fig. 8 is configured with graphical element 813a and graphical element
813b combination.Position relationship between the graphical element 813a and graphical element 813b that respectively combine is mutually the same.In addition, and father
Class figure 81 similarly, including graphical element 811,812,814,815.
Graphical element 813a is substantially is in the graphical element of L-shaped, with full-filling attribute.Graphical element 813b is than figure
What key element 813a small one was enclosed is substantially in the graphical element of L-shaped, with hollow property（It is cut into hollow）.Graphical element 813b
It is configured to overlap on graphical element 813a.In describing device 1, in substrate corresponding with the graphical element with full-filling attribute
Drawn, do not drawn in region corresponding with the graphical element of hollow property in region on 9.With regard to graphical element
For 813a, 813b, in graphical element 813a, on the substrate 9 corresponding to region not overlapping with graphical element 813b
In region, drawn.In fig. 17, in graphical element 813a, 813b, in the region with to be drawn on substrate 9
Corresponding region full-filling parallel diagonal lines.
Figure 18 is to consider reference relation, conceptually represents parent figure 81a figure.Parent figure 81a includes two the
One with reference to graphical element 82a, two the 3rd reference graphical elements 84, two the 4th reference graphical elements 85, a graphical elements
814th, a graphical element 815.4th is configured to overlap the 3rd with reference on graphical element 84 with reference to graphical element 85.Figure 19 and
Figure 20 is to represent the 3rd respectively with reference to figure of the graphical element 84 and the 4th with reference to graphical element 85.3rd wraps with reference to graphical element 84
A graphical element 813a is included, the 4th includes a graphical element 813b with reference to graphical element 85.Figure 21 is to consider reference relation,
Conceptually represent the first reference graphical element 82a figure.First with reference to graphical element 82a include each graphical element 811,
812nd, two the 3rd reference graphical elements 84, two the 4th reference graphical elements 85.
Utilizing the method shown in Fig. 7 A（That is, without using the method for the graphical element combining unit 72 shown in Fig. 1）To representing
In the case that parent figure 81a input data carries out data conversion, the 3rd will with reference to figure with reference to graphical element 84 and the 4th
Element 85 does not have the relation of reference each other, therefore, while performing the 3rd caching with reference to graphical element 84 and the 4th reference
The caching of graphical element 85.Then, for generation step S16 output data, it is configured with all in parent figure 81a
The 3rd reference area with reference to graphical element 84 in, be configured with cached the 3rd with reference to graphical element 84 reference scanning it is wide
Degree, in all reference areas for being configured with the 4th reference graphical element 85（That is, with being configured with the 3rd with reference to graphical element 84
The overlapping region of reference area）It is interior, it is configured with the reference sweep length of the 4th reference graphical element 85 cached.Hereafter, exist
In each reference area, two are synthesized with reference to sweep length.Even in this case, as described above, remaining able to rightly
Improve the efficiency that data conversion is carried out from input data to output data.
On the other hand, in the case of using graphical element combining unit 72 in data conversion device 7, as shown in figure 22,
, specifically, will come synthesising pattern by graphical element combining unit 72 between step S11 and step S12 before step S12
Plain 813a, 813b（Step S120）.As shown in Figure 23 and Figure 24, in parent figure 81a and each first with reference to graphical element 82a
In, with reference to each graphical element 813a, 813b after synthesis, it is used as second with reference to graphical element 83a.In other words, each second
Include two graphical elements 813a, 813b with reference to graphical element 83a, in the step s 120, synthesize graphical element 813a,
813b。
Then, in step s 12, the second reference graphical element 83a the second buffer efficiency is obtained（That is, after synthesis
Graphical element 813a, 813b buffer efficiency）.As described above, what second feature amount was included by second with reference to graphical element 83a
The width of graphical element group in a second direction it is total.In the present embodiment, by the width of the graphical element 813a before synthesis
Total " 2 " of degree " 1 " and graphical element 813b width " 1 " are used as second feature amount.Second feature amount " 2 " is multiplied by from reference
Number of times obtained from number of times subtracts 1（Five times）, thus, it is " 10 " to draw the second buffer efficiency.In addition, first with reference to graphical element
82a the first buffer efficiency by by fisrt feature amount " 6 " be multiplied by from reference count subtract 1 obtained from number of times（Once）, by
This, it is " 6 " to draw the first buffer efficiency.
Then, in step S13, S15, to second with reference to graphical element 83a（Graphical element 813a i.e., after synthesis,
813（b）Width coding processing is scanned, is stored in as with reference to sweep length in cache memory 75.Hereafter,
For generation step S16 output data, the graphical element in all parent figure 81a being configured with shown in Figure 17
In 813a, 813b reference area, the second reference graphical element 83a cached reference sweep length is configured with.
Figure 25 be in graphical element combining unit 72 whether the processing of the data conversion in the case of synthesising pattern key element
The figure that time is compared.The position of the downside of each column diagram represents the time needed for the caching of graphical element, the position of upside
For the time needed for the run-length coding processing of the pattern represented by input data.By using graphical element combining unit 72
The synthesis of graphical element is carried out, compared with without the situation of the synthesis of graphical element, the time needed for caching is basically unchanged, but
Time needed for run-length coding processing is reduced.Its result is, by carrying out the synthesis of graphical element before caching, with not entering
Comparing for the synthesis of row graphical element, can shorten the time needed for data conversion.In addition, second with reference to graphical element 83a institutes
Comprising multiple graphical element 813a, 813b necessarily overlap.Can be only overlapping one between graphical element 813a, 813b
Point, can also each other from（It is not overlapping）.
17~Figure 25 of reference picture, for multiple second include respectively with reference to graphical element 83a multiple graphical element 813a,
Data conversion in the case of 813b is illustrated, and includes multiple graphical elements respectively with reference to graphical element multiple first
In the case of data conversion similarly.In addition, the position relationship of each first multiple graphical elements included with reference to graphical element
It is mutually the same.In this case, as shown in figure 26, before step S11, multiple figures are synthesized by graphical element combining unit 72
Key element, is used as first with reference to graphical element（Step S110）.
In the step S11 shown in Fig. 7 A, for multiple graphical elements after synthesis, buffer efficiency is obtained, is used as
First buffer efficiency of one reference graphical element.Then, in step s 13, it is being judged as the first buffer efficiency than the second caching
In the case that efficiency is big, in step S14, to entering as first of the graphical element after above-mentioned synthesis with reference to graphical element
Row run-length coding is handled, and be scanned after width coding is handled first is used as with reference to scanning with reference to graphical element
Width is stored in cache memory 75.Hereafter, for generation step S16 output data, it is configured with all
In the first region with reference to graphical element in parent figure, the reference scanning for configuring the first reference graphical element cached is wide
Degree.Its result is, with the feelings synthesized to second multiple graphical element 813a, 813b included with reference to graphical element 83a
Condition similarly, compared with without the situation of the synthesis of graphical element, can shorten the time needed for data conversion.In addition,
In the case that first includes multiple graphical elements respectively with reference to graphical element and second with reference to graphical element, step can be carried out
Two steps of S110 and step S120.
Then, an example of the data conversion in the case where input data includes a variety of parent figures is illustrated.Each father
Class figure is at least with reference to first with reference to graphical element, and first with reference to graphical element reference the second reference graphical element.Each parent figure
The first reference graphical element and second in shape can be and first in other parent figures with reference to figure with reference to graphical element
Key element and second is with reference to graphical element identical graphical element, or different graphical element.In other words, number is inputted
According to including the multiple combinations of parent graph data block, the first reference graph data block and second with reference to graph data block.
If the quantity increase for the combination that input data is included, the reference being stored in cache memory 75 is swept
The data volume for retouching width also increases.Then, for each combination（That is, for each parent figure）, carried out step S11, S12 it
Afterwards, as shown in figure 27, the first buffer efficiency is compared with the second buffer efficiency（Step S13）, it is big in the first buffer efficiency
In the case of the second buffer efficiency, the first buffer efficiency is compared with defined efficiency threshold（Step S131）.
If the first buffer efficiency is more than efficiency threshold, according to the first reference picture figurate number for representing the first reference graphical element
According to block, generation first is stored in cache memory 75 with reference to sweep length as with reference to sweep length（Fig. 7 A：Step
Rapid S14）.In other words, caching first is with reference to graphical element.Then, in parent figure, it is configured with and with reference to scanning in all
Width is corresponding with reference to graphical element（First with reference to graphical element）Reference area in, configuration be stored in cache memory
Reference sweep length in 75, and carry out the conversion from input data to output data（Step S16）.On the other hand,
In the case that one buffer efficiency is below the efficiency threshold, first is not cached with reference to graphical element, in step s 16, with others
Graphical element similarly, is also scanned width coding processing to first with reference to graphical element.
In the case where the first buffer efficiency is below the second buffer efficiency, the second buffer efficiency and efficiency threshold are carried out
Compare（Step S132）.If the second buffer efficiency is more than efficiency threshold, according to the second ginseng for representing the second reference graphical element
According to graph data block generation second with reference to sweep length, and it is stored in as with reference to sweep length in cache memory 75
（Step S15）.In other words, caching second is with reference to graphical element.Then, in parent figure, it is configured with and reference in all
Sweep length is corresponding with reference to graphical element（Second with reference to graphical element）Reference area in, configuration is stored in speed buffering and deposited
Reference sweep length in reservoir 75, and carry out the conversion from input data to output data（Step S16）.On the other hand,
In the case where the second buffer efficiency is below efficiency threshold, second is not cached with reference to graphical element, in step s 16, with it
Its image-element similarly, is also scanned width coding processing to second with reference to graphical element.
That is, in data conversion device 7, to buffer efficiency relatively large in the first buffer efficiency and the second buffer efficiency
It is compared with efficiency threshold, in the case where the buffer efficiency is more than efficiency threshold, carries out ginseng corresponding with the buffer efficiency
According to the caching of graphical element（Step S14 or step S15）.On the other hand, in above-mentioned buffer efficiency below efficiency threshold
In the case of, do not cache corresponding with the buffer efficiency with reference to graphical element.Caching is with reference to graphical element, in cache memory
In the case that 75 memory storages are with reference to sweep length, using the reference sweep length cached, carry out from input data to output
The data conversion of data（Step S16）.In the case where no storage is with reference to sweep length, in step s 16, with others figure
Shape key element similarly, pair with this with reference to sweep length it is corresponding with reference to graphical element be scanned width coding processing.
Like this, in data conversion device 7, the reference picture of defined efficiency threshold is more than by only caching buffer efficiency
Shape key element, the data volume increase for the reference sweep length that can suppress to be stored in cache memory 75, and improve from
Input data carries out the efficiency of data conversion to output data.In addition, by changing efficiency threshold, can be deposited with reference to speed buffering
The capacity of reservoir 75, carries out appropriate caching.In addition, for the above-mentioned data conversion that make use of efficiency threshold, can also
As using Figure 17~Figure 25 explanations, multiple graphical elements that synthesis second is included with reference to graphical element.Similarly, may be used
To synthesize the first multiple graphical elements included with reference to graphical element.
Above-mentioned image forming system 100 can carry out various changes.
In data conversion device 7, it can be wrapped before step S13 for the parent figure 81 shown in Fig. 8~Figure 11
All graphical elements 811~815, first contained, with reference to graphical element 83, obtain buffer efficiency with reference to graphical element 82 and second,
It is compared in step s 13, but is not once by the reference count of the graphical element of other graphical element references, caching
Efficiency is zero.Therefore, substantially, obtain and compare the first caching with reference to graphical element 82 and second with reference to graphical element 83 and imitate
Rate.
In the above-described embodiment, input data is layered as parent figure 81, first with reference to graphical element 82 and second
With reference to three layerings of graphical element 83, the layering of more than four can also be separated into.In this case, will be by other figures
One graphical element of key element reference is as first with reference to graphical element, and the figure by the first reference graphical element institute reference will
Element, with reference to graphical element, carries out above-mentioned data conversion as second.Need not be from parent figure directly with reference to the first reference picture
Shape key element, reference is carried out by other graphical elements indirectly.
In image forming system 100, data conversion device 7 can not also enter row format conversion to output data, will export number
According to output to describing device 1, row format conversion is entered using describing device 1.
The input data for being converted into output data by data conversion device 7 is not limited to expression and drawn in liquid crystal display device use
Glass substrate on pattern data, for example, can be to represent draw other FPD in plasma display system etc.
The data of pattern on the glass substrate of device or photomask, can be LSI（Large scale integrated circuit）Pattern numbers
According to.In addition, the input data for other various purposes is converted into output data using data conversion device.
Describing device 1 is not limited to above-mentioned structure, as long as being entered based on the output data as scan width data
The device that row is drawn.For example, the illumination part 4 of describing device 1 can also be included with other light modulations beyond GLV
The spatial light modulator of element.
The structure of above-mentioned embodiment and each flexural deformation example can under the premise of reconcilable each other suitably carry out group
Close.
Describe in detail and illustrate invention, but above-mentioned explanation is exemplary, and non-limiting.Therefore, do not departing from
On the premise of the scope of the present invention, various flexural deformations or mode can be carried out.
Claims (16)
1. a kind of data transfer device, the input data being layered for representing multiple graphical elements is converted to and is used as sweep length
The output data of data, it is characterised in that
Have：
(a) process, based on input data, obtains the first buffer efficiency in the first case, first buffer efficiency is represented
The degree that the efficiency changed from the input data to the output data rises, the input data includes：Parent figure number
According to block, it represents parent figure；First with reference to graph data block, and it is represented referenced the in the parent graph data block
One with reference to graphical element；Second with reference to graph data block, and it is represented described first with reference in graph data block referenced the
Two with reference to graphical element；First situation refers to：Assuming that width individually will be scanned with reference to graphical element to described first
First obtained after coded treatment is stored in cache memory with reference to sweep length, from the input data to defeated
When going out data conversion, in all be configured with the parent figure described first the first reference area with reference to graphical element
In, the situation of the first reference sweep length is all configured,
(b) process, based on the input data, obtains the second buffer efficiency in a second situation, second situation refers to：
Assuming that obtained after width coding processing second individually will be scanned with reference to scanning width with reference to graphical element to described second
Degree is stored in the cache memory, when being changed from the input data to the output data, is matched somebody with somebody in all
The parent figure and described first is equipped with reference to second reference area of described second in graphical element with reference to graphical element
In, the situation of the second reference sweep length is all configured,
(c) process, in the case where first buffer efficiency is more than second buffer efficiency, according to first reference picture
Graphic data block, generates described first with reference to sweep length, and as being stored in the speed buffering with reference to sweep length
In memory；In the case where first buffer efficiency is less than second buffer efficiency, according to described second with reference to figure
Data block, generates described second with reference to sweep length, and with reference to sweep length is stored in the speed buffering as described
In memory,
(d) process, in the parent figure, is wanted in all reference figures corresponding with the reference sweep length that is configured with
In the reference area of element, configure described with reference to sweep length, and carry out turning from the input data to the output data
Change；
It is described to obtain first buffer efficiency by the way that fisrt feature amount is multiplied by into first number in (a) process
Fisrt feature amount represented for the described first time with reference to needed for the run-length coding processing of graphical element, and first number is
Refer to, by described first in the parent graph data block with reference to obtained from the reference count of graphical element subtracts 1 number of times,
It is described to obtain second buffer efficiency by the way that second feature amount is multiplied by into second number in (b) process
Second feature amount represented for the described second time with reference to needed for the run-length coding processing of graphical element, and second number is
Refer to, by the reference time of the parent graph data block and the second reference graphical element of the first reference graph data block
Number of times obtained from number subtracts 1.
2. a kind of data transfer device, the input data being layered for representing multiple graphical elements is converted to and is used as sweep length
The output data of data, it is characterised in that
Have：
(a) process, based on input data, obtains the first buffer efficiency in the first case, first buffer efficiency is represented
The degree that the efficiency changed from the input data to the output data rises, the input data includes：Parent figure number
According to block, it represents parent figure；First with reference to graph data block, and it is represented referenced the in the parent graph data block
One with reference to graphical element；Second with reference to graph data block, and it is represented described first with reference in graph data block referenced the
Two with reference to graphical element；First situation refers to：Assuming that width individually will be scanned with reference to graphical element to described first
First obtained after coded treatment is stored in cache memory with reference to sweep length, from the input data to defeated
When going out data conversion, in all be configured with the parent figure described first the first reference area with reference to graphical element
In, the situation of the first reference sweep length is all configured,
(b) process, based on the input data, obtains the second buffer efficiency in a second situation, second situation refers to：
Assuming that obtained after width coding processing second individually will be scanned with reference to scanning width with reference to graphical element to described second
Degree is stored in the cache memory, when being changed from the input data to the output data, is matched somebody with somebody in all
The parent figure and described first is equipped with reference to second reference area of described second in graphical element with reference to graphical element
In, the situation of the second reference sweep length is all configured,
(c) process, is more than second buffer efficiency in first buffer efficiency and is also greater than defined efficiency threshold
In the case of, according to described first with reference to graph data block, described first is generated with reference to sweep length, and as with reference to scanning
Width is stored in the cache memory；It is less than second buffer efficiency and described in first buffer efficiency
In the case that second buffer efficiency is more than the efficiency threshold, according to described second with reference to graph data block generation second ginseng
It is stored according to sweep length, and as described with reference to sweep length in the cache memory,
(d) process, in the case of the reference sweep length is stored in (c) process, in the parent figure,
All is configured with the reference area with reference to graphical element corresponding with the reference sweep length, configures described with reference to scanning
Width, and carry out from the input data to the conversion of the output data；Without the storage ginseng in (c) process
In the case of sweep length, carry out from the input data to the conversion of the output data,
It is described to obtain first buffer efficiency by the way that fisrt feature amount is multiplied by into first number in (a) process
Fisrt feature amount represented for the described first time with reference to needed for the run-length coding processing of graphical element, and first number is
Refer to, by described first in the parent graph data block with reference to obtained from the reference count of graphical element subtracts 1 number of times,
It is described to obtain second buffer efficiency by the way that second feature amount is multiplied by into second number in (b) process
Second feature amount represented for the described second time with reference to needed for the run-length coding processing of graphical element, and second number is
Refer to, by the reference time of the parent graph data block and the second reference graphical element of the first reference graph data block
Number of times obtained from number subtracts 1.
3. data transfer device as described in claim 1 or 2, it is characterised in that
Described first is that multiple scannings for extending along a first direction are wide with reference to sweep length with reference to sweep length or described second
The set of degree, using the direction vertical with the first direction as second direction,
Graphical element group that the fisrt feature amount is included with reference to graphical element by described first is in this second direction
Width it is total, the graphical element group that the second feature amount is included with reference to graphical element by described second is in the second party
Upward width it is total.
4. data transfer device as claimed in claim 3, it is characterised in that
In the parent graph data block, with reference to multiple first with reference to graphical element, each first reference graphical element includes many
Individual graphical element,
In the data transfer device, also there is the process for synthesizing the multiple graphical element before (a) process.
5. data transfer device as claimed in claim 4, it is characterised in that
In the described first reference graph data block, with reference to multiple second with reference to graphical elements, each second with reference to graphical element bag
Multiple graphical elements are included,
In the data transfer device, also there is the process for synthesizing the multiple graphical element before (b) process.
6. data transfer device as described in claim 1 or 2, it is characterised in that
In the parent graph data block, with reference to multiple first with reference to graphical element, each first reference graphical element includes many
Individual graphical element,
In the data transfer device, also there is the process for synthesizing the multiple graphical element before (a) process.
7. data transfer device as claimed in claim 6, it is characterised in that
In the described first reference graph data block, with reference to multiple second with reference to graphical elements, each second with reference to graphical element bag
Multiple graphical elements are included,
In the data transfer device, also there is the process for synthesizing the multiple graphical element before (b) process.
8. data transfer device as described in claim 1 or 2, it is characterised in that
In the described first reference graph data block, with reference to multiple second with reference to graphical elements, each second with reference to graphical element bag
Multiple graphical elements are included,
In the data transfer device, also there is the process for synthesizing the multiple graphical element before (b) process.
9. a kind of image forming system, it draws pattern on substrate, it is characterised in that
Have：
Data conversion device, it converts input data into output data using defined data transfer device,
Describing device, it draws pattern based on the output data generated by the data conversion device on substrate；
The data transfer device has：
(a) process, based on input data, obtains the first buffer efficiency in the first case, first buffer efficiency is represented
The degree that the efficiency changed from the input data to the output data rises, the input data includes：Parent figure number
According to block, it represents parent figure；First with reference to graph data block, and it is represented referenced the in the parent graph data block
One with reference to graphical element；Second with reference to graph data block, and it is represented described first with reference in graph data block referenced the
Two with reference to graphical element；First situation refers to：Assuming that width individually will be scanned with reference to graphical element to described first
First obtained after coded treatment is stored in cache memory with reference to sweep length, from the input data to defeated
When going out data conversion, in all be configured with the parent figure described first the first reference area with reference to graphical element
In, the situation of the first reference sweep length is all configured,
(b) process, based on the input data, obtains the second buffer efficiency in a second situation, second situation refers to：
Assuming that obtained after width coding processing second individually will be scanned with reference to scanning width with reference to graphical element to described second
Degree is stored in the cache memory, when being changed from the input data to the output data, is matched somebody with somebody in all
The parent figure and described first is equipped with reference to second reference area of described second in graphical element with reference to graphical element
In, the situation of the second reference sweep length is all configured,
(c) process, in the case where first buffer efficiency is more than second buffer efficiency, according to first reference picture
Graphic data block, generates described first with reference to sweep length, and as being stored in the speed buffering with reference to sweep length
In memory；In the case where first buffer efficiency is less than second buffer efficiency, according to described second with reference to figure
Data block, generates described second with reference to sweep length, and with reference to sweep length is stored in the speed buffering as described
In memory,
(d) process, in the parent figure, is wanted in all reference figures corresponding with the reference sweep length that is configured with
In the reference area of element, configure described with reference to sweep length, and carry out turning from the input data to the output data
Change；
It is described to obtain first buffer efficiency by the way that fisrt feature amount is multiplied by into first number in (a) process
Fisrt feature amount represented for the described first time with reference to needed for the run-length coding processing of graphical element, and first number is
Refer to, by described first in the parent graph data block with reference to obtained from the reference count of graphical element subtracts 1 number of times,
It is described to obtain second buffer efficiency by the way that second feature amount is multiplied by into second number in (b) process
Second feature amount represented for the described second time with reference to needed for the run-length coding processing of graphical element, and second number is
Refer to, by the reference time of the parent graph data block and the second reference graphical element of the first reference graph data block
Number of times obtained from number subtracts 1；
The describing device has：
Board holder, it keeps the substrate,
Optical modulation element, its to the substrate irradiation light,
Irradiation position travel mechanism, its make derived from the optical modulation element irradiation position of light on the substrate relative to
The substrate movement,
Optical modulation element control unit, it is based on the output data, controls the optical modulation element modulation light.
10. a kind of image forming system, it draws pattern on substrate, it is characterised in that
Have：
Data conversion device, it converts input data into output data using defined data transfer device,
Describing device, it draws pattern based on the output data generated by the data conversion device on substrate；
The data transfer device has：
(a) process, based on input data, obtains the first buffer efficiency in the first case, first buffer efficiency is represented
The degree that the efficiency changed from the input data to the output data rises, the input data includes：Parent figure number
According to block, it represents parent figure；First with reference to graph data block, and it is represented referenced the in the parent graph data block
One with reference to graphical element；Second with reference to graph data block, and it is represented described first with reference in graph data block referenced the
Two with reference to graphical element；First situation refers to：Assuming that width individually will be scanned with reference to graphical element to described first
First obtained after coded treatment is stored in cache memory with reference to sweep length, from the input data to defeated
When going out data conversion, in all be configured with the parent figure described first the first reference area with reference to graphical element
In, the situation of the first reference sweep length is all configured,
(b) process, based on the input data, obtains the second buffer efficiency in a second situation, second situation refers to：
Assuming that obtained after width coding processing second individually will be scanned with reference to scanning width with reference to graphical element to described second
Degree is stored in the cache memory, when being changed from the input data to the output data, is matched somebody with somebody in all
The parent figure and described first is equipped with reference to second reference area of described second in graphical element with reference to graphical element
In, the situation of the second reference sweep length is all configured,
(c) process, is more than second buffer efficiency in first buffer efficiency and is also greater than defined efficiency threshold
In the case of, according to described first with reference to graph data block, described first is generated with reference to sweep length, and as with reference to scanning
Width is stored in the cache memory；It is less than second buffer efficiency and described in first buffer efficiency
In the case that second buffer efficiency is more than the efficiency threshold, according to described second with reference to graph data block generation second ginseng
It is stored according to sweep length, and as described with reference to sweep length in the cache memory,
(d) process, in the case of the reference sweep length is stored in (c) process, in the parent figure,
All is configured with the reference area with reference to graphical element corresponding with the reference sweep length, configures described with reference to scanning
Width, and carry out from the input data to the conversion of the output data；Without the storage ginseng in (c) process
In the case of sweep length, carry out from the input data to the conversion of the output data,
It is described to obtain first buffer efficiency by the way that fisrt feature amount is multiplied by into first number in (a) process
Fisrt feature amount represented for the described first time with reference to needed for the run-length coding processing of graphical element, and first number is
Refer to, by described first in the parent graph data block with reference to obtained from the reference count of graphical element subtracts 1 number of times,
It is described to obtain second buffer efficiency by the way that second feature amount is multiplied by into second number in (b) process
Second feature amount represented for the described second time with reference to needed for the run-length coding processing of graphical element, and second number is
Refer to, by the reference time of the parent graph data block and the second reference graphical element of the first reference graph data block
Number of times obtained from number subtracts 1；
The describing device has：
Board holder, it keeps the substrate,
Optical modulation element, its to the substrate irradiation light,
Irradiation position travel mechanism, its make derived from the optical modulation element irradiation position of light on the substrate relative to
The substrate movement,
Optical modulation element control unit, it is based on the output data, controls the optical modulation element modulation light.
11. the image forming system as described in claim 9 or 10, it is characterised in that
Described first is that multiple scannings for extending along a first direction are wide with reference to sweep length with reference to sweep length or described second
The set of degree, using the direction vertical with the first direction as second direction,
Graphical element group that the fisrt feature amount is included with reference to graphical element by described first is in this second direction
Width it is total, the graphical element group that the second feature amount is included with reference to graphical element by described second is in the second party
Upward width it is total.
12. image forming system as claimed in claim 11, it is characterised in that
In the parent graph data block, with reference to multiple first with reference to graphical element, each first reference graphical element includes many
Individual graphical element,
In the data transfer device, also there is the process for synthesizing the multiple graphical element before (a) process.
13. image forming system as claimed in claim 12, it is characterised in that
In the described first reference graph data block, with reference to multiple second with reference to graphical elements, each second with reference to graphical element bag
Multiple graphical elements are included,
In the data transfer device, also there is the process for synthesizing the multiple graphical element before (b) process.
14. the image forming system as described in claim 9 or 10, it is characterised in that
In the parent graph data block, with reference to multiple first with reference to graphical element, each first reference graphical element includes many
Individual graphical element,
In the data transfer device, also there is the process for synthesizing the multiple graphical element before (a) process.
15. image forming system as claimed in claim 14, it is characterised in that
In the described first reference graph data block, with reference to multiple second with reference to graphical elements, each second with reference to graphical element bag
Multiple graphical elements are included,
In the data transfer device, also there is the process for synthesizing the multiple graphical element before (b) process.
16. the image forming system as described in claim 9 or 10, it is characterised in that
In the described first reference graph data block, with reference to multiple second with reference to graphical elements, each second with reference to graphical element bag
Multiple graphical elements are included,
In the data transfer device, also there is the process for synthesizing the multiple graphical element before (b) process.
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| JP2013043982A JP6175253B2 (en) | 2013-03-06 | 2013-03-06 | Data conversion method, drawing system, and program |
| JP2013-043982 | 2013-03-06 |
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| JP (1) | JP6175253B2 (en) |
| KR (1) | KR101567164B1 (en) |
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| TWI590978B (en) | 2016-05-06 | 2017-07-11 | 溫芫鋐 | A brake for a bicycle |
| CN112328513B (en) * | 2020-10-14 | 2024-02-02 | 合肥芯碁微电子装备股份有限公司 | Scanning exposure system and data caching and scheduling method and device thereof |
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| JP3676257B2 (en) * | 2001-05-21 | 2005-07-27 | 松下電器産業株式会社 | Data processing device |
| JP4085204B2 (en) * | 2003-09-05 | 2008-05-14 | 株式会社オーク製作所 | Method for processing drawing vector data and drawing apparatus |
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| JP2007208057A (en) * | 2006-02-02 | 2007-08-16 | Dainippon Screen Mfg Co Ltd | Data converting method and program |
| JP2007271743A (en) * | 2006-03-30 | 2007-10-18 | Fujifilm Corp | Image processing method, image processing device and drawing device using the same |
| JP4834565B2 (en) * | 2007-02-19 | 2011-12-14 | 株式会社東芝 | Communication system and service providing method in mobile communication system |
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| JP5357483B2 (en) * | 2008-09-26 | 2013-12-04 | 株式会社オーク製作所 | Exposure apparatus and exposure method |
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| CN101276152A (en) * | 2007-03-30 | 2008-10-01 | 日立比亚机械股份有限公司 | Drawing apparatus |
| CN101677011A (en) * | 2008-09-16 | 2010-03-24 | 建兴电子科技股份有限公司 | Optical record carrier as well as an apparatus and method for reading/writing image data from/at a visually detectable pattern at an optical record carrier |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20140109789A (en) | 2014-09-16 |
| JP6175253B2 (en) | 2017-08-02 |
| JP2014174196A (en) | 2014-09-22 |
| CN104036063A (en) | 2014-09-10 |
| KR101567164B1 (en) | 2015-11-06 |
| TW201447497A (en) | 2014-12-16 |
| TWI505044B (en) | 2015-10-21 |
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