CN104022130B - 硅光电倍增探测器 - Google Patents
硅光电倍增探测器 Download PDFInfo
- Publication number
- CN104022130B CN104022130B CN201410276066.3A CN201410276066A CN104022130B CN 104022130 B CN104022130 B CN 104022130B CN 201410276066 A CN201410276066 A CN 201410276066A CN 104022130 B CN104022130 B CN 104022130B
- Authority
- CN
- China
- Prior art keywords
- silicon
- type
- detector
- apd
- front electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 66
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 66
- 239000010703 silicon Substances 0.000 title claims abstract description 66
- 238000010791 quenching Methods 0.000 claims description 9
- 230000000171 quenching effect Effects 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 8
- 230000005611 electricity Effects 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 5
- 238000000605 extraction Methods 0.000 abstract description 14
- 230000000694 effects Effects 0.000 abstract description 3
- 230000015556 catabolic process Effects 0.000 abstract description 2
- 230000003287 optical effect Effects 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 238000010586 diagram Methods 0.000 description 5
- 239000006117 anti-reflective coating Substances 0.000 description 4
- 235000012239 silicon dioxide Nutrition 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000005684 electric field Effects 0.000 description 2
- 230000005622 photoelectricity Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 241000405965 Scomberomorus brasiliensis Species 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 230000005251 gamma ray Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000003032 molecular docking Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Landscapes
- Light Receiving Elements (AREA)
Abstract
Description
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410276066.3A CN104022130B (zh) | 2014-06-20 | 2014-06-20 | 硅光电倍增探测器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410276066.3A CN104022130B (zh) | 2014-06-20 | 2014-06-20 | 硅光电倍增探测器 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN104022130A CN104022130A (zh) | 2014-09-03 |
CN104022130B true CN104022130B (zh) | 2017-01-25 |
Family
ID=51438800
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201410276066.3A Active CN104022130B (zh) | 2014-06-20 | 2014-06-20 | 硅光电倍增探测器 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN104022130B (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6951254B2 (ja) * | 2015-05-12 | 2021-10-20 | ピクシウム ビジョン エスエー | シャント抵抗体を有する感光性画素 |
CN107219211B (zh) * | 2017-05-11 | 2020-10-13 | 北京师范大学 | 一种拉曼光谱测量方法和系统 |
CN107256899B (zh) * | 2017-06-28 | 2019-03-08 | 泰州巨纳新能源有限公司 | 无源位置灵敏探测器、其制备方法及其测量方法 |
EP3427790A1 (en) | 2017-07-14 | 2019-01-16 | Pixium Vision SA | Photosensitive array |
CN117690936A (zh) * | 2020-06-30 | 2024-03-12 | 中广核京师光电科技(天津)有限公司 | 一种位置灵敏硅光电倍增探测器 |
CN116817752A (zh) * | 2023-07-12 | 2023-09-29 | 钧雷光电有限公司 | 位置传感器 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102334199A (zh) * | 2009-02-24 | 2012-01-25 | 浜松光子学株式会社 | 光电二极管以及光电二极管阵列 |
-
2014
- 2014-06-20 CN CN201410276066.3A patent/CN104022130B/zh active Active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102334199A (zh) * | 2009-02-24 | 2012-01-25 | 浜松光子学株式会社 | 光电二极管以及光电二极管阵列 |
Also Published As
Publication number | Publication date |
---|---|
CN104022130A (zh) | 2014-09-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN104022130B (zh) | 硅光电倍增探测器 | |
US9728667B1 (en) | Solid state photomultiplier using buried P-N junction | |
CN105009289B (zh) | 检测器、pet装置和x射线ct装置 | |
TWI518933B (zh) | Photodiode array | |
CN212907740U (zh) | 位置灵敏硅光电倍增探测器 | |
ITVA20100069A1 (it) | Array fotorilevatore multi-pixel di fotodiodi a valanga geiger-mode | |
CN101752391B (zh) | 具有mos全耗尽漂移通道的雪崩漂移探测器及其探测方法 | |
WO2014180487A1 (en) | A detector configuration with semiconductor photomultiplier strips and differential readout | |
RU2641620C1 (ru) | Лавинный фотодетектор | |
CN104054326B (zh) | 半导体光电倍增元件 | |
CN113871405A (zh) | 位置灵敏硅光电倍增探测器 | |
CN109414231A (zh) | 用于确定x射线检测器错位的方法 | |
JP2019169643A (ja) | 固体撮像素子 | |
US20130206994A1 (en) | High-sensitivity x-ray detector | |
US20160018535A1 (en) | Radiation detector | |
JP6140868B2 (ja) | 半導体光検出素子 | |
JP5823813B2 (ja) | 放射線検出器 | |
US7495201B2 (en) | Charge multiplexed array of solid-state photosensitive detectors | |
CN103235332A (zh) | 一种半导体探测器 | |
CN203204163U (zh) | 一种半导体探测器 | |
CN211577436U (zh) | 一种双读出pet探测器正电子成像系统 | |
WO2016104581A1 (ja) | 光検出装置およびこの光検出装置を備えたct装置 | |
CA3010845C (en) | Selenium photomultiplier and method for fabrication thereof | |
CN114582993B (zh) | 光电传感器及其制备方法、图像传感器中的应用 | |
Sadygov et al. | Microchannel avalanche photodiode with wide linearity range |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
CB03 | Change of inventor or designer information |
Inventor after: Han Dejun Inventor after: Li Chenhui Inventor after: Zhao Tianqi Inventor after: He Ran Inventor before: Han Dejun Inventor before: He Ran Inventor before: Li Chenhui |
|
COR | Change of bibliographic data | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20231121 Address after: Room 437, Aviation Industry Support Center, No.1 Baohang Road, Tianjin Pilot Free Trade Zone (Airport Economic Zone) (Comprehensive Bonded Zone), Binhai New Area, Tianjin, 300303 (under the custody of Tianjin Jiayu Business Secretary Co., Ltd., No. 115) Patentee after: CGN Jingshi Optoelectronic Technology (Tianjin) Co.,Ltd. Address before: 100875, 19, Xinjie street, Haidian District, Beijing Patentee before: BEIJING NORMAL University |
|
TR01 | Transfer of patent right |