CN103995025A - Printed type graphene-based NO2 gas-sensitive element and preparation method thereof - Google Patents
Printed type graphene-based NO2 gas-sensitive element and preparation method thereof Download PDFInfo
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- CN103995025A CN103995025A CN201410209526.0A CN201410209526A CN103995025A CN 103995025 A CN103995025 A CN 103995025A CN 201410209526 A CN201410209526 A CN 201410209526A CN 103995025 A CN103995025 A CN 103995025A
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Abstract
The invention discloses a printed type graphene-based NO2 gas-sensitive element and a preparation method thereof. The preparation method comprises the following step: by fully combining the advantages of intaglio printing technology and graphene, sequentially printing a comb-type interdigital electrode and a graphene sensitive layer on a substrate, thus finally obtaining the printed type graphene-based NO2 gas-sensitive element. The printed type graphene-based NO2 gas-sensitive element has the following advantages that (1) the NO2 gas-sensitive element based on the comb-type interdigital electrode and the graphene sensitive layer has excellent gas-sensitive characteristic and sensitivity on NO2 under the room-temperature condition; (2) the printed type graphene-based NO2 gas-sensitive element is scientific in design, and stable in performance running, and can meet the demands of accurately and continuously monitoring the concentration of NO2 in a life environment in real time; (3) the graphene-based NO2 gas-sensitive element prepared by adopting a printing manner is simple in technology, convenient to operate, low in cost, and suitable for industrial mass production, and technology parameters are easy to control.
Description
Technical field
The present invention relates to gas sensor technical field, be specifically related to the graphene-based NO of a kind of printing formula
2gas sensor and preparation method thereof.
Background technology
In recent years, along with the rapid emergence of China's city automobile consumption market, the environmental problem that oxides of nitrogen (NOx) discharge causes becomes increasingly conspicuous.NO
2be not only one of major pollutants of environmental problems such as causing acid rain, smog, and respiratory tract is had to strong impulse effect, it is healthy that civic in serious threat.Therefore, to the NO in living environment
2concentration is carried out in real time, monitors accurately, continuously very necessary.
Graphene, the hexagonal lattice structure of monolayer carbon atomic arrangement, has large specific surface area, and high conductivity and low signal to noise ratio (S/N ratio) are suitable as NO very much
2sensitive material.With traditional NO
2sensitive material is (as metal oxide SnO
2, WO
3deng) compare, Graphene room temperature electron mobility can reach 15000cm
2v
-1s
-1, be room temperature NO
2response provides possibility.But the air-sensitive response characteristic of Graphene depends on structure and the preparation technology of element to a great extent.At present, a lot of research groups adopt method of chemical immersion or drop method that Graphene is attached to and on substrate, obtains Graphene gas sensor.This preparation method is too coarse, and the thickness of uncontrollable Graphene sensitive layer causes graphene-based gas sensor poor performance.
In recent years, printed electronics is widely used in various electron device manufactures, as, sensor, solar cell, display and circuit version etc.It is by being transferred to functional ink on substrate.In different printing technology, intaglio printing technology is because output is high, and low and cycle of cost is short etc., and advantage becomes a kind of effective process means of preparing electron device.Therefore, the present invention prepares low cost, portable and NO that can working and room temperature in conjunction with grapheme material and intaglio printing technology
2gas sensor.
Summary of the invention
The graphene-based NO of printing formula that the object of this invention is to provide a kind of energy working and room temperature
2gas sensor provides the preparation method of above-mentioned gas sensor simultaneously.
Technical scheme of the present invention is as follows:
The graphene-based NO of printing formula
2gas sensor, is provided with dielectric substrate, pectination interdigital electrode and graphene-based sensitive thin film; The graphene-based sensitive thin film of gas-sensitive sensing element adopts the mode of intaglio printing to be printed on substrate and pectination interdigital electrode surface, by detecting thin-film electro resistance, changes realization to NO
2the detection of gas concentration.
Described dielectric substrate comprises polyimide, polyester, paper, glass and silicon chip.
Described pectination interdigital electrode, graphene-based sensitive thin film are positioned at the dielectric substrate homonymy of gas sensor.
Described pectination interdigital electrode comprises argent, gold and platinum.
Described graphene-based sensitive thin film is the water color ink of Graphene or redox Graphene.
Described graphene-based sensitive thin film thickness can the regulation and control of intaglio printing number of times.
The graphene-based NO of above-mentioned printing formula
2the preparation method of gas sensor, comprises step:
A. substrate (1) is carried out to Ultrasonic Cleaning with acetone, absolute ethyl alcohol, deionized water respectively, rear it is done to surface treatment;
B. adopt intaglio printing technology, in the upper preparation of substrate (1) pectination interdigital electrode (2), and place it in baking oven inner drying;
C. adopt intaglio printing technology by the responsive ink printing of graphene-based water-based on the substrate with pectination interdigital electrode (2) (1), substrate location is carried out to mark location, graphene-based sensitive thin film layer (3) is covered on pectination interdigital electrode (2) surface completely, place it in baking oven inner drying, obtain the graphene-based NO of printing formula
2gas sensor.
In described steps A, substrate being done to surface treatment can adopt substrate is immersed in to chemical method in Mercaptamine reagent or the Physical of reactive ion etching.
In described step B, oven drying temperature is 80 ℃, dry 20-30 minute.
In described step C, the responsive ink of graphene-based water-based is prepared according to following step:
Graphene uniform is scattered in deionized water, and concentration is controlled as 15-80mg/mL, low speed magnetic agitation 5-10 minute, more ultrasonic concussion 5-10 minute; Repeat this step 3-5 time completely dispersed, obtain the responsive ink of graphene-based water-based.
Below Graphene sensitive layer, print one deck conduction interdigital electrode and play two effects: reduce on the one hand the resistance of grapheme material own, thereby reduce, detect power consumption; On the other hand, interdigital electrode particularly metal interdigital electrode plays catalytic action in gas absorption desorption process, thereby shortens the response recovery time of gas.Said method fully, in conjunction with the two advantage of intaglio printing technology and Graphene, is printed on pectination interdigital electrode and graphene-based sensitive layer on substrate successively, finally obtains the graphene-based NO of printing formula
2gas sensor.In preparation process, first substrate is done to surface treatment, make substrate and ink there is good matching, finally obtain best printing effect.The graphene-based NO of laminar film type preparing
2gas sensor can working and room temperature.
Tool of the present invention has the following advantages: the 1. NO based on conduction interdigital electrode and Graphene sensitive layer
2gas sensor is at ambient temperature to NO
2the gas-sensitive property having had and sensitivity; 2. print the graphene-based NO of formula
2gas sensor miniaturization, lightening, low energy consumption, meets people to the NO in living environment
2concentration is carried out in real time, demand accurate, that monitor continuously; 3. adopt mode of printing to prepare graphene-based NO
2gas sensor technique is simple, and cost is lower, reproducible, can suitability for industrialized production.
Accompanying drawing explanation
Fig. 1 is the graphene-based NO of printing formula of the present invention
2the structural representation of gas sensor, mark mark explanation: 1: substrate; 2: pectination interdigital electrode; 3: graphene-based sensitive membrane (layer).
Fig. 2 is the graphene-based NO of printing formula of the present invention
2gas sensor is at room temperature to 10,20,30,40,50ppm NO
2gas-sensitive property.
Fig. 3 is the graphene-based NO of printing formula of the present invention
2the selectivity figure of gas sensor to gas with various.
Specific embodiments
For a more clear understanding of the present invention, with example, further illustrate below, but scope is not limited in this.
A kind of graphene-based NO of printing formula that can working and room temperature
2gas sensor, its feature, by a flexible substrate 1, the responsive rete 3 of pectination interdigital electrode 2 and Graphene forms (as shown in Figure 1).
Embodiment 1
The first step, PET substrate is cleaned in deionized water for ultrasonic, dry up, with oxygen plasma, substrate is done to etching processing, airshed 100sccm, power 100W, etching time 20 seconds;
Second step, adopt intaglio printing technology, on PI substrate, print out silver-colored interdigital electrode, and place it in baking oven 120 ℃ dry 30 minutes;
The 3rd step, employing intaglio printing technology, by graphene-based responsive ink printing on the PI substrate with silver-colored interdigital electrode, substrate location is carried out to mark location, make Graphene sensitive membrane cover silver-colored interdigital electrode surface completely, place it in baking oven 80 ℃ dry 10 minutes, obtain the graphene-based NO of printing formula
2gas sensor.
Fig. 2 is the graphene-based NO of printing formula prepared by the present embodiment
2gas sensor is to 10,20,30,40,50ppm NO
2gas-sensitive property, condition of work is room temperature, humidity range 15-80%: measurement range 10-50ppm, sensitivity (current ratio Δ I/I
0) 0.60-3.08, response time 12s (response time be defined as reach maximum resistance 90%), 20s release time (be defined as release time return to initial resistivity value 10%), circuit voltage≤5VDC.
Fig. 3 is the graphene-based NO of printing formula of the present invention
2the selectivity figure of gas sensor to gas with various.
Embodiment 2
The first step, PI substrate is cleaned in deionized water for ultrasonic, dry up, with oxygen plasma, substrate is done to etching processing, airshed 100sccm, power 100W, etching time 20 seconds;
Second step, adopt intaglio printing technology, on PI substrate, print out silver-colored interdigital electrode, and place it in baking oven 120 ℃ dry 30 minutes;
The 3rd step, employing intaglio printing technology, by graphene-based responsive ink printing on the PI substrate with silver-colored interdigital electrode, substrate location is carried out to mark location, make Graphene sensitive membrane cover silver-colored interdigital electrode surface completely, place it in baking oven 80 ℃ dry 10 minutes, according to the position of substrate mark, repeat above operation, obtain the graphene-based NO of multi-layer graphene sensitive layer
2gas sensor.
Embodiment 3
The first step, PI substrate is cleaned in deionized water for ultrasonic, dry up;
Second step, adopt intaglio printing technology, directly by graphene-based responsive ink printing on PI substrate, place it in baking oven 80 ℃ dry 10 minutes, obtain the graphene-based NO of printing formula
2gas sensor.
Wherein, graphene-based responsive ink is prepared according to following step: graphene uniform is scattered in deionized water, and concentration is controlled as 15-80mg/mL, low speed magnetic agitation 5-10 minute, more ultrasonic concussion 5-10 minute; Repeat this step 3-5 time completely dispersed, obtain graphene-based responsive ink.
Claims (9)
1. the graphene-based NO of printing formula
2gas sensor, is characterized in that, is provided with dielectric substrate, pectination interdigital electrode and graphene-based sensitive thin film; The graphene-based sensitive thin film of gas-sensitive sensing element adopts the mode of intaglio printing to be printed on substrate and pectination interdigital electrode surface.
2. the graphene-based NO of printing formula according to claim 1
2gas sensor, is characterized in that, described dielectric substrate comprises polyimide, polyester, paper, glass and silicon chip.
3. the graphene-based NO of printing formula according to claim 1
2gas sensor, is characterized in that, described pectination interdigital electrode, graphene-based sensitive thin film are positioned at the dielectric substrate homonymy of gas sensor.
4. the graphene-based NO of printing formula according to claim 1
2gas sensor, is characterized in that, described pectination interdigital electrode comprises argent, gold and platinum.
5. the graphene-based NO of printing formula according to claim 1
2gas sensor, is characterized in that, described graphene-based sensitive thin film is the water color ink of Graphene or redox Graphene.
6. the graphene-based NO of printing formula according to claim 1
2the preparation method of gas sensor, is characterized in that, comprises step:
A. substrate (1) is carried out to Ultrasonic Cleaning with acetone, absolute ethyl alcohol, deionized water respectively, rear it is done to surface treatment;
B. adopt intaglio printing technology, in the upper preparation of substrate (1) pectination interdigital electrode (2), and place it in baking oven inner drying;
C. adopt intaglio printing technology by the responsive ink printing of graphene-based water-based on the substrate with pectination interdigital electrode (2) (1), substrate location is carried out to mark location, graphene-based sensitive thin film layer (3) is covered on pectination interdigital electrode (2) surface completely, place it in baking oven inner drying, obtain the graphene-based NO of printing formula
2gas sensor.
7. the graphene-based NO of printing formula according to claim 6
2the preparation method of gas sensor, is characterized in that, in described steps A, substrate is done to surface treatment and can adopt substrate is immersed in to chemical method in Mercaptamine reagent or the Physical of reactive ion etching.
8. the graphene-based NO of printing formula according to claim 7
2the preparation method of gas sensor, is characterized in that, in described step B, oven drying temperature is 80 ℃, dry 20-30 minute.
9. the graphene-based NO of printing formula according to claim 7
2the preparation method of gas sensor, is characterized in that, in described step C, the responsive ink of graphene-based water-based is prepared according to following step:
Graphene uniform is scattered in deionized water, and concentration is controlled as 15-80mg/mL, low speed magnetic agitation 5-10 minute, more ultrasonic concussion 5-10 minute; Repeat this step 3-5 time completely dispersed, obtain the responsive ink of graphene-based water-based.
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Cited By (11)
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|---|---|---|---|---|
| CN104569076A (en) * | 2015-01-08 | 2015-04-29 | 上海师范大学 | Pencil drawing type NO2 sensing element and production method thereof |
| CN104897739A (en) * | 2015-06-18 | 2015-09-09 | 济南大学 | Organic semiconductor nanomaterial, preparation method and application of organic semiconductor nanomaterial as well as nitrogen dioxide gas sensor |
| CN105319241A (en) * | 2014-07-04 | 2016-02-10 | 中国科学院苏州纳米技术与纳米仿生研究所 | Flexible gas-sensitive sensor and making method thereof |
| CN105588856A (en) * | 2014-10-19 | 2016-05-18 | 吴振武 | Flexible printed manure-urine sensor |
| CN106814110A (en) * | 2017-01-05 | 2017-06-09 | 华中科技大学 | A kind of stretchable semiconductor resistance-type flexible gas sensor and preparation method thereof |
| CN107064218A (en) * | 2016-10-31 | 2017-08-18 | 扬州大学 | Based on reduced graphene semiconductor room temperature nitrogen dioxide sensor preparation method |
| CN108802111A (en) * | 2018-03-21 | 2018-11-13 | 北京旭碳新材料科技有限公司 | Miniature gas-sensitive sensor and preparation method thereof |
| CN109142467A (en) * | 2018-07-23 | 2019-01-04 | 杭州电子科技大学 | A kind of high sensitive NO2Gas sensor and preparation method thereof |
| CN109559851A (en) * | 2018-11-15 | 2019-04-02 | 中南大学 | A kind of graphene electrocardioelectrode and preparation method thereof |
| CN110044972A (en) * | 2019-04-18 | 2019-07-23 | 厦门理工学院 | A kind of graphene-based gas sensor and preparation method thereof |
| CN112268935A (en) * | 2020-10-15 | 2021-01-26 | 有研工程技术研究院有限公司 | Flexible room-temperature gas sensor based on porous graphene and preparation method thereof |
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| CN103236295A (en) * | 2013-04-23 | 2013-08-07 | 上海师范大学 | Preparation method of patterned graphene conductive thin film |
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105319241A (en) * | 2014-07-04 | 2016-02-10 | 中国科学院苏州纳米技术与纳米仿生研究所 | Flexible gas-sensitive sensor and making method thereof |
| CN105588856A (en) * | 2014-10-19 | 2016-05-18 | 吴振武 | Flexible printed manure-urine sensor |
| CN104569076A (en) * | 2015-01-08 | 2015-04-29 | 上海师范大学 | Pencil drawing type NO2 sensing element and production method thereof |
| CN104897739B (en) * | 2015-06-18 | 2017-07-28 | 济南大学 | A kind of organic semiconductor nano material and preparation method thereof and purposes and a kind of nitrogen dioxide gas sensor |
| CN104897739A (en) * | 2015-06-18 | 2015-09-09 | 济南大学 | Organic semiconductor nanomaterial, preparation method and application of organic semiconductor nanomaterial as well as nitrogen dioxide gas sensor |
| CN107064218A (en) * | 2016-10-31 | 2017-08-18 | 扬州大学 | Based on reduced graphene semiconductor room temperature nitrogen dioxide sensor preparation method |
| CN106814110A (en) * | 2017-01-05 | 2017-06-09 | 华中科技大学 | A kind of stretchable semiconductor resistance-type flexible gas sensor and preparation method thereof |
| CN106814110B (en) * | 2017-01-05 | 2020-11-06 | 华中科技大学 | Stretchable semiconductor resistance type flexible gas sensor and preparation method thereof |
| CN108802111A (en) * | 2018-03-21 | 2018-11-13 | 北京旭碳新材料科技有限公司 | Miniature gas-sensitive sensor and preparation method thereof |
| CN109142467A (en) * | 2018-07-23 | 2019-01-04 | 杭州电子科技大学 | A kind of high sensitive NO2Gas sensor and preparation method thereof |
| CN109559851A (en) * | 2018-11-15 | 2019-04-02 | 中南大学 | A kind of graphene electrocardioelectrode and preparation method thereof |
| CN110044972A (en) * | 2019-04-18 | 2019-07-23 | 厦门理工学院 | A kind of graphene-based gas sensor and preparation method thereof |
| CN112268935A (en) * | 2020-10-15 | 2021-01-26 | 有研工程技术研究院有限公司 | Flexible room-temperature gas sensor based on porous graphene and preparation method thereof |
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Application publication date: 20140820 |