CN103979993A - Preparation method of large-sized carbon/silicon carbide composite heat-insulting baseplates - Google Patents
Preparation method of large-sized carbon/silicon carbide composite heat-insulting baseplates Download PDFInfo
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- CN103979993A CN103979993A CN201410228695.9A CN201410228695A CN103979993A CN 103979993 A CN103979993 A CN 103979993A CN 201410228695 A CN201410228695 A CN 201410228695A CN 103979993 A CN103979993 A CN 103979993A
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Abstract
The invention discloses a preparation method of large-sized carbon/silicon carbide composite heat-insulting baseplates. The method comprises the following steps: I, densifying a carbon fibre preform so as to obtain a carbon/carbon composite; II, machining the carbon/carbon composite so as to obtain a carbon/carbon composite heat-insulting baseplate; III, uniformly laying first silicon slurry on a board, placing the carbon/carbon composite heat-insulting baseplate on the first silicon slurry, and uniformly laying second silicon slurry on the carbon/carbon composite heat-insulting baseplate so as to obtain an assembly; and IV, putting the assembly into a heating furnace to carry out reaction infiltration processing, so that a carbon/silicon carbide composite heat-insulting baseplate is obtained after the assembly is taken out of the furnace; or, after multiple assembles are stacked, putting the assembles into a heating furnace to carry out reaction infiltration processing, so that a carbon/silicon carbide composite heat-insulting baseplate is obtained after the assemblies are taken out of the furnace. Compared with carbon/carbon composite heat-insulting baseplates, the service life of a carbon/silicon carbide composite heat-insulting baseplate prepared by using the method disclosed by the invention is increased by over 50%, and can reach more than 18 months.
Description
Technical field
The invention belongs to polysilicon hydrogenation furnace thermal field component preparing technical field, be specifically related to a kind of preparation method of large size carbon/carbon/silicon carbide composite material heat insulation bottom board.
Background technology
At present, polysilicon hydrogenation furnace generally adopts carbon/carbon composite with heat insulation bottom board.In the hot hydrogenation process of polysilicon, can there is chemical reaction with Carbon Materials (carbon matrix and charcoal fiber) in silicon-containing gas (comprising silicon tetrachloride and trichlorosilane), cause Carbon Materials to be etched, heat insulation bottom board charcoal fiber and carbon matrix are come off, attenuate gradually, finally causes product failure.Therefore the erosion that, how effectively to suppress Carbon Materials is to improve the polysilicon hydrogenation furnace heat insulation bottom board key technical problem in work-ing life.
Summary of the invention
Technical problem to be solved by this invention is for above-mentioned the deficiencies in the prior art, and a kind of preparation method of large size carbon/carbon/silicon carbide composite material heat insulation bottom board is provided.The relative classical inverse of the method is answered infiltration process, adopt the silicon slip that silica flour and alcohols (ethylene glycol or glycerol) mix to replace solid silicon material, silicon slip can be placed on heat insulation bottom board by uniform spreading, lower surface, and the silicon slip form of lay is relatively stable, ensure the homogeneity in infiltration process, on heat insulation bottom board, lower surface forms the silicon carbide ceramics matrix of 2mm～5mm thickness, the carbon/carbon/silicon carbide composite material heat insulation bottom board obtaining does not need to carry out mechanical workout, significantly reduce the tooling cost of stupalith, the carbon/carbon/silicon carbide composite material heat insulation bottom board of preparation is with respect to carbon/carbon composite heat insulation bottom board, improve work-ing life more than 50%, can reach more than 18 months.
For solving the problems of the technologies described above, the technical solution used in the present invention is: a kind of preparation method of large size carbon/carbon/silicon carbide composite material heat insulation bottom board, it is characterized in that, and the method comprises the following steps:
Step 1, be 0.20g/cm by density
3～0.50g/cm
3the density of charcoal fiber preform, obtaining density is 0.80g/cm
3～1.0g/cm
3carbon/carbon composite;
Step 2, carbon/carbon composite described in step 1 is machined into diameter is 1500mm～2000mm, the carbon/carbon composite heat insulation bottom board that thickness is 60mm～200mm;
Step 3, the first silicon slip that evenly laying depth is 3mm～7mm on sheet material, then the heat insulation bottom board of carbon/carbon composite described in step 2 is positioned on the first silicon slip, the second silicon slip that evenly laying depth is 3mm～7mm on carbon/carbon composite heat insulation bottom board again, obtains subassembly; Described sheet material is carbon plate, carborundum plate or graphite cake; Described the first silicon slip and the second silicon slip by silica flour and alcohols according to (1～3): 1 mass ratio mixes to be made, and wherein alcohols is ethylene glycol or glycerol;
Step 4, subassembly described in step 3 is placed in to process furnace reacts infiltration processing, after coming out of the stove, obtaining density is 1.10g/cm
3～1.30g/cm
3carbon/carbon/silicon carbide composite material heat insulation bottom board; Or subassembly described in multiple step 3 is stacked to be placed in process furnace and react infiltration processing, after coming out of the stove, obtaining density is 1.10g/cm
3～1.30g/cm
3carbon/carbon/silicon carbide composite material heat insulation bottom board; The temperature of reaction of described reaction infiltration processing is 1450 DEG C～1540 DEG C, and soaking time is 7h～15h.
The preparation method of above-mentioned a kind of large size carbon/carbon/silicon carbide composite material heat insulation bottom board, the method for density described in step 1 is: charcoal fiber preform is placed in to chemical vapor deposition stove, adopts carbon-source gas to carry out chemical vapor infiltration; Then the charcoal fiber preform after chemical vapor infiltration is placed in to dipping stove and carries out acetone-furfural resin and/or resol pressure impregnation, then be placed in charring furnace charing.
The preparation method of above-mentioned a kind of large size carbon/carbon/silicon carbide composite material heat insulation bottom board, described carbon-source gas is propylene and/or Sweet natural gas, carbon-source gas flow is 50L/min～200L/min, and the temperature of chemical vapor infiltration is 900 DEG C～1100 DEG C, and soaking time is 30h～60h.
The preparation method of above-mentioned a kind of large size carbon/carbon/silicon carbide composite material heat insulation bottom board, the pressure of described pressure impregnation is 1.0MPa～2.5MPa, the dwell time is 0.5h～5h.
The preparation method of above-mentioned a kind of large size carbon/carbon/silicon carbide composite material heat insulation bottom board, the temperature of described charing is 900 DEG C～1000 DEG C, soaking time is 2h～5h.
The preparation method of above-mentioned a kind of large size carbon/carbon/silicon carbide composite material heat insulation bottom board, the quality purity of silica flour described in step 3 is not less than 99.9%, and silica flour particle diameter is not more than 3mm.
The preparation method of above-mentioned a kind of large size carbon/carbon/silicon carbide composite material heat insulation bottom board, the temperature of reaction of reacting infiltration processing described in step 4 is 1500 DEG C, soaking time is 10h.
The present invention compared with prior art has the following advantages:
1, the present invention adopts chemical vapor infiltration technique binding resin liquid phase densification technique to carry out density to carbon/carbon composite, has shortened the manufacturing cycle, effectively reduces production cost; The pyrolytic carbon matrix that simultaneously chemical vapor infiltration technique obtains can effectively protect the charcoal fiber in precast body, and the resin carbon that resin liquid phase densification technique obtains provides carbon source for subsequent reactions infiltration process.
2, the relative classical inverse of the present invention is answered infiltration process, adopt the silicon slip that silica flour and alcohols (ethylene glycol or glycerol) mix to replace solid silicon material, silicon slip can be placed on the upper and lower surface of heat insulation bottom board by uniform spreading, and the silicon slip form of lay is relatively stable, ensure the homogeneity in infiltration process, form the silicon carbide ceramics matrix of 2mm～5mm thickness on the upper and lower surface of heat insulation bottom board, the carbon/carbon/silicon carbide composite material heat insulation bottom board obtaining does not need to carry out mechanical workout, has significantly reduced the tooling cost of stupalith.
3, the present invention, by multiple subassemblies are stacked to the rear infiltration that reacts simultaneously, has increased substantially production efficiency, has reduced production cost.
4, the relative classical inverse of the present invention is answered infiltration process, adopts lower temperature of reaction, can effectively avoid the physical abuse of charcoal fiber in pyroprocessing in heat insulation bottom board on the one hand, ensures the intensity of existing charcoal/carbon/carbon heat insulation bottom board; On the other hand, by the longer reaction times, silicification reaction is fully carried out, ensured the homogeneity of siliconizing.
5, adopt carbon/carbon/silicon carbide composite material heat insulation bottom board prepared by method of the present invention with respect to carbon/carbon composite heat insulation bottom board, improved work-ing life more than 50%, can reach more than 18 months.
6, the present invention first carries out machinery according to the size of heat insulation bottom board to carbon/carbon composite, and then adopt the processing of reaction infiltration directly to obtain carbon/carbon/silicon carbide composite material heat insulation bottom board, do not need to carry out again mechanical workout, can be used for preparing the large size heat insulation bottom board of (diameter is not less than 1500mm).
Below in conjunction with drawings and Examples, technical scheme of the present invention is described in further detail.
Brief description of the drawings
Fig. 1 is the structural representation of subassembly of the present invention.
Description of reference numerals:
1-sheet material; The 2-the first silicon slip; 3-carbon/carbon composite heat insulation bottom board;
The 4-the second silicon slip.
Embodiment
Embodiment 1
Step 1, according to shape and the performance requriements that will prepare heat insulation bottom board, adopt ordinary method utilize charcoal fiber, charcoal cloth and net tire to make density for 0.20g/cm
3charcoal fiber preform, be then 0.80g/cm by described charcoal fiber preform density to density
3carbon/carbon composite; The method of described density is: charcoal fiber preform is placed in to chemical vapor deposition stove, adopt propylene (also can adopt the gas mixture of Sweet natural gas or propylene and Sweet natural gas) to carry out chemical vapor infiltration as carbon-source gas, the processing parameter of chemical vapor infiltration is: carbon-source gas flow is 50L/min, the temperature of chemical vapor infiltration is 900 DEG C, and soaking time is 30h; Then the charcoal fiber preform after chemical vapor infiltration is placed in to dipping stove, under the condition that is 1.0MPa at pressure, carry out acetone-furfural resin pressure impregnation (also can adopt resol pressure impregnation or resol and acetone-furfural resin pressure impregnation), dwell time is 0.5h, be placed in again charring furnace charing at 900 DEG C, insulation 2h;
Step 2, carbon/carbon composite described in step 1 is machined into diameter is 1500mm, the carbon/carbon composite heat insulation bottom board 3 that thickness is 60mm;
Step 3, as shown in Figure 1, the first silicon slip 2 that evenly laying depth is 5mm on sheet material 1, then the heat insulation bottom board of carbon/carbon composite described in step 23 is positioned on the first silicon slip 2, the second silicon slip 4 that evenly laying depth is 5mm on carbon/carbon composite heat insulation bottom board 3 again, obtains subassembly; Described sheet material 1 is carbon plate; Described the first silicon slip 2 and the second silicon slip 4 mix and make according to the mass ratio of 2:1 by silica flour (quality purity 99.9%, particle diameter is 3mm) and glycerol (also can adopt ethylene glycol);
Step 4, subassembly described in step 3 is placed in to process furnace reacts infiltration processing, after coming out of the stove, obtaining density is 1.10g/cm
3carbon/carbon/silicon carbide composite material heat insulation bottom board; The temperature of reaction of described reaction infiltration processing is 1450 DEG C, and soaking time is 7h.
The silicon slip that the present embodiment adopts silica flour and glycerol (also can adopt ethylene glycol) to mix replaces solid silicon material, silicon slip can be placed on the upper and lower surface of heat insulation bottom board by uniform spreading, and the silicon slip form of lay is relatively stable, ensure the homogeneity in infiltration process, form the silicon carbide ceramics matrix of 4mm thickness on the upper and lower surface of heat insulation bottom board, the carbon/carbon/silicon carbide composite material heat insulation bottom board obtaining does not need to carry out mechanical workout, has significantly reduced the tooling cost of stupalith.
Embodiment 2
Step 1, according to shape and the performance requriements that will prepare heat insulation bottom board, adopt ordinary method utilize charcoal fiber, charcoal cloth and net tire to make density for 0.50g/cm
3charcoal fiber preform, be then 1.0g/cm by described charcoal fiber preform density to density
3carbon/carbon composite; The method of described density is: charcoal fiber preform is placed in to chemical vapor deposition stove, the propylene that employing volume ratio is 1: 1 and the gas mixture (also can adopt propylene or Sweet natural gas) of Sweet natural gas carry out chemical vapor infiltration as carbon-source gas, the processing parameter of chemical vapor infiltration is: carbon-source gas flow is 200L/min, the temperature of chemical vapor infiltration is 1100 DEG C, and soaking time is 60h; Then the charcoal fiber preform after chemical vapor infiltration is placed in to dipping stove, under the condition that is 2.5MPa at pressure, carry out resol pressure impregnation (also can adopt acetone-furfural resin pressure impregnation or resol and acetone-furfural resin pressure impregnation), dwell time is 5h, be placed in again charring furnace charing at 1000 DEG C, insulation 5h;
Step 2, carbon/carbon composite described in step 1 is machined into diameter is 2000mm, the carbon/carbon composite heat insulation bottom board 3 that thickness is 200mm;
Step 3, as shown in Figure 1, the first silicon slip 2 that evenly laying depth is 3mm on sheet material 1, then the heat insulation bottom board of carbon/carbon composite described in step 23 is positioned on the first silicon slip 2, the second silicon slip 4 that evenly laying depth is 3mm on carbon/carbon composite heat insulation bottom board 3 again, obtains subassembly; Described sheet material 1 is carborundum plate; Described the first silicon slip 2 and the second silicon slip 4 mix and make according to the mass ratio of 1:1 by silica flour (quality purity 99.99%, particle diameter is 2mm) and ethylene glycol (also can adopt glycerol);
Step 4, subassembly described in two step 3 is stacked to be placed in process furnace and react infiltration processing, after coming out of the stove, obtaining density is 1.20g/cm
3carbon/carbon/silicon carbide composite material heat insulation bottom board; The temperature of reaction of described reaction infiltration processing is 1540 DEG C, and soaking time is 12h.
The silicon slip that the present embodiment adopts silica flour and ethylene glycol (also can adopt glycerol) to mix replaces solid silicon material, silicon slip can be placed on the upper and lower surface of heat insulation bottom board by uniform spreading, and the silicon slip form of lay is relatively stable, ensure the homogeneity in infiltration process, form the silicon carbide ceramics matrix of 2mm thickness on the upper and lower surface of heat insulation bottom board, the carbon/carbon/silicon carbide composite material heat insulation bottom board obtaining does not need to carry out mechanical workout, has significantly reduced the tooling cost of stupalith.
Embodiment 3
Step 1, according to shape and the performance requriements that will prepare heat insulation bottom board, adopt ordinary method utilize charcoal fiber, charcoal cloth and net tire to make density for 0.40g/cm
3charcoal fiber preform, be then 0.9g/cm by described charcoal fiber preform density to density
3carbon/carbon composite; The method of described density is: charcoal fiber preform is placed in to chemical vapor deposition stove, adopt Sweet natural gas (also can adopt the gas mixture of propylene or propylene and Sweet natural gas) to carry out chemical vapor infiltration as carbon-source gas, the processing parameter of chemical vapor infiltration is: carbon-source gas flow is 100L/min, the temperature of chemical vapor infiltration is 1000 DEG C, and soaking time is 45h; Then the charcoal fiber preform after chemical vapor infiltration is placed in to dipping stove, under the condition that is 1.5MPa at pressure, carry out resol and acetone-furfural resin (mass ratio 1: 1) pressure impregnation (also can adopt acetone-furfural resin pressure impregnation or resol pressure impregnation), dwell time is 2.5h, be placed in again charring furnace charing at 950 DEG C, insulation 3h;
Step 2, carbon/carbon composite described in step 1 is machined into diameter is 1800mm, the carbon/carbon composite heat insulation bottom board 3 that thickness is 100mm;
Step 3, as shown in Figure 1, the first silicon slip 2 that evenly laying depth is 7mm on sheet material 1, then the heat insulation bottom board of carbon/carbon composite described in step 23 is positioned on the first silicon slip 2, the second silicon slip 4 that evenly laying depth is 7mm on carbon/carbon composite heat insulation bottom board 3 again, obtains subassembly; Described sheet material 1 is graphite cake; Described the first silicon slip 2 and the second silicon slip 4 mix and make according to the mass ratio of 3:1 by silica flour (quality purity 99.95%, particle diameter is 1mm) and glycerol (also can adopt ethylene glycol);
Step 4, subassembly described in three step 3 is stacked to be placed in process furnace and react infiltration processing, after coming out of the stove, obtaining density is 1.30g/cm
3carbon/carbon/silicon carbide composite material heat insulation bottom board; The temperature of reaction of described reaction infiltration processing is 1500 DEG C, and soaking time is 10h.
The silicon slip that the present embodiment adopts silica flour and glycerol (also can adopt ethylene glycol) to mix replaces solid silicon material, silicon slip can be placed on the upper and lower surface of heat insulation bottom board by uniform spreading, and the silicon slip form of lay is relatively stable, ensure the homogeneity in infiltration process, form the silicon carbide ceramics matrix of 5mm thickness on the upper and lower surface of heat insulation bottom board, the carbon/carbon/silicon carbide composite material heat insulation bottom board obtaining does not need to carry out mechanical workout, has significantly reduced the tooling cost of stupalith.
Embodiment 4
Step 1, according to shape and the performance requriements that will prepare heat insulation bottom board, adopt ordinary method utilize charcoal fiber, charcoal cloth and net tire to make density for 0.40g/cm
3charcoal fiber preform, be then 1.0g/cm by described charcoal fiber preform density to density
3carbon/carbon composite; The method of described density is: charcoal fiber preform is placed in to chemical vapor deposition stove, adopt Sweet natural gas (also can adopt the gas mixture of propylene or propylene and Sweet natural gas) to carry out chemical vapor infiltration as carbon-source gas, the processing parameter of chemical vapor infiltration is: carbon-source gas flow is 150L/min, the temperature of chemical vapor infiltration is 950 DEG C, and soaking time is 40h; Then the charcoal fiber preform after chemical vapor infiltration is placed in to dipping stove, under the condition that is 2.0MPa at pressure, carry out resol and acetone-furfural resin (mass ratio 2: 1) pressure impregnation (also can adopt acetone-furfural resin pressure impregnation or resol pressure impregnation), dwell time is 3h, be placed in again charring furnace charing at 950 DEG C, insulation 4h;
Step 2, carbon/carbon composite described in step 1 is machined into diameter is 1600mm, the carbon/carbon composite heat insulation bottom board 3 that thickness is 150mm;
Step 3, as shown in Figure 1, the first silicon slip 2 that evenly laying depth is 4mm on sheet material 1, then the heat insulation bottom board of carbon/carbon composite described in step 23 is positioned on the first silicon slip 2, the second silicon slip 4 that evenly laying depth is 4mm on carbon/carbon composite heat insulation bottom board 3 again, obtains subassembly; Described sheet material 1 is graphite cake; Described the first silicon slip 2 and the second silicon slip 4 mix and make according to the mass ratio of 2:1 by silica flour (quality purity 99.99%, particle diameter is 0.5mm) and ethylene glycol (also can adopt glycerol);
Step 4, subassembly described in five steps three is stacked to be placed in process furnace and react infiltration processing, after coming out of the stove, obtaining density is 1.30g/cm
3carbon/carbon/silicon carbide composite material heat insulation bottom board; The temperature of reaction of described reaction infiltration processing is 1540 DEG C, and soaking time is 12h.
The silicon slip that the present embodiment adopts silica flour and ethylene glycol (also can adopt glycerol) to mix replaces solid silicon material, silicon slip can be placed on the upper and lower surface of heat insulation bottom board by uniform spreading, and the silicon slip form of lay is relatively stable, ensure the homogeneity in infiltration process, form the silicon carbide ceramics matrix of 3mm thickness on the upper and lower surface of heat insulation bottom board, the carbon/carbon/silicon carbide composite material heat insulation bottom board obtaining does not need to carry out mechanical workout, has significantly reduced the tooling cost of stupalith.
Work-ing life to carbon/carbon/silicon carbide composite material heat insulation bottom board of the present invention and the work-ing life of charcoal/carbon/carbon heat insulation bottom board compare, and the results are shown in following table:
The contrast in work-ing life of table 1 differing materials heat insulation bottom board
| Material | Work-ing life (moon) |
| Charcoal/carbon/carbon heat insulation bottom board | 12 |
| Heat insulation bottom board prepared by embodiment 1 | 18 |
| Heat insulation bottom board prepared by embodiment 2 | 18 |
| Heat insulation bottom board prepared by embodiment 3 | 20 |
| Heat insulation bottom board prepared by embodiment 4 | 19 |
As can be seen from Table 1, in use, carbon/carbon/silicon carbide composite material heat insulation bottom board of the present invention obviously extends its work-ing life than carbon/carbon composite heat insulation bottom board.
The above; it is only preferred embodiment of the present invention; not the present invention is done to any restriction, every any simple modification of above embodiment being done according to invention technical spirit, change and equivalent structure change, and all still belong in the protection domain of technical solution of the present invention.
Claims (7)
1. a preparation method for large size carbon/carbon/silicon carbide composite material heat insulation bottom board, is characterized in that, the method comprises the following steps:
Step 1, be 0.20g/cm by density
3～0.50g/cm
3the density of charcoal fiber preform, obtaining density is 0.80g/cm
3～1.0g/cm
3carbon/carbon composite;
Step 2, carbon/carbon composite described in step 1 is machined into diameter is 1500mm～2000mm, the carbon/carbon composite heat insulation bottom board (3) that thickness is 60mm～200mm;
Step 3, the first silicon slip (2) that is 3mm～7mm at the upper even laying depth of sheet material (1), then the heat insulation bottom board of carbon/carbon composite described in step 2 (3) is positioned on the first silicon slip (2), the the second silicon slip (4) that is 3mm～7mm at the upper even laying depth of carbon/carbon composite heat insulation bottom board (3) again, obtains subassembly; Described sheet material (1) is carbon plate, carborundum plate or graphite cake; Described the first silicon slip (2) and the second silicon slip (4) by silica flour and alcohols according to (1～3): 1 mass ratio mixes to be made, and wherein alcohols is ethylene glycol or glycerol;
Step 4, subassembly described in step 3 is placed in to process furnace reacts infiltration processing, after coming out of the stove, obtaining density is 1.10g/cm
3～1.30g/cm
3carbon/carbon/silicon carbide composite material heat insulation bottom board; Or subassembly described in multiple step 3 is stacked to be placed in process furnace and react infiltration processing, after coming out of the stove, obtaining density is 1.10g/cm
3～1.30g/cm
3carbon/carbon/silicon carbide composite material heat insulation bottom board; The temperature of reaction of described reaction infiltration processing is 1450 DEG C～1540 DEG C, and soaking time is 7h～15h.
2. the preparation method of a kind of large size carbon/carbon/silicon carbide composite material heat insulation bottom board according to claim 1, it is characterized in that, the method of density described in step 1 is: charcoal fiber preform is placed in to chemical vapor deposition stove, adopts carbon-source gas to carry out chemical vapor infiltration; Then the charcoal fiber preform after chemical vapor infiltration is placed in to dipping stove and carries out acetone-furfural resin and/or resol pressure impregnation, then be placed in charring furnace charing.
3. the preparation method of a kind of large size carbon/carbon/silicon carbide composite material heat insulation bottom board according to claim 2, it is characterized in that, described carbon-source gas is propylene and/or Sweet natural gas, carbon-source gas flow is 50L/min～200L/min, the temperature of chemical vapor infiltration is 900 DEG C～1100 DEG C, and soaking time is 30h～60h.
4. the preparation method of a kind of large size carbon/carbon/silicon carbide composite material heat insulation bottom board according to claim 2, is characterized in that, the pressure of described pressure impregnation is 1.0MPa～2.5MPa, and the dwell time is 0.5h～5h.
5. the preparation method of a kind of large size carbon/carbon/silicon carbide composite material heat insulation bottom board according to claim 2, is characterized in that, the temperature of described charing is 900 DEG C～1000 DEG C, and soaking time is 2h～5h.
6. the preparation method of a kind of large size carbon/carbon/silicon carbide composite material heat insulation bottom board according to claim 1, is characterized in that, the quality purity of silica flour described in step 3 is not less than 99.9%, and silica flour particle diameter is not more than 3mm.
7. the preparation method of a kind of large size carbon/carbon/silicon carbide composite material heat insulation bottom board according to claim 1, is characterized in that, the temperature of reaction of reacting infiltration processing described in step 4 is 1500 DEG C, and soaking time is 10h.
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Cited By (3)
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| CN105367102A (en) * | 2014-08-22 | 2016-03-02 | 三菱电机株式会社 | Manufacturing method of carbon fiber strengthened silicon carbide moulded body |
| CN108886310A (en) * | 2016-03-29 | 2018-11-23 | 三菱电机株式会社 | Carbon fiber-reinforced carborundum forming body, the manufacturing method of carbon fiber-reinforced carborundum forming body, armature spindle, the manufacturing method of armature spindle and silicon dipping device |
| CN110330353A (en) * | 2019-08-15 | 2019-10-15 | 中南大学 | A kind of SiCf/ SiC ceramic matrix composite material burner inner liner and its automation preparation method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105367102A (en) * | 2014-08-22 | 2016-03-02 | 三菱电机株式会社 | Manufacturing method of carbon fiber strengthened silicon carbide moulded body |
| CN105367102B (en) * | 2014-08-22 | 2018-01-12 | 三菱电机株式会社 | The manufacture method of carbon fibre reinforced silicon carbide formed body |
| CN108886310A (en) * | 2016-03-29 | 2018-11-23 | 三菱电机株式会社 | Carbon fiber-reinforced carborundum forming body, the manufacturing method of carbon fiber-reinforced carborundum forming body, armature spindle, the manufacturing method of armature spindle and silicon dipping device |
| CN108886310B (en) * | 2016-03-29 | 2019-09-27 | 三菱电机株式会社 | Manufacturing method, the manufacturing method of armature spindle and the silicon dipping device of carbon fiber-reinforced carborundum forming body |
| CN110330353A (en) * | 2019-08-15 | 2019-10-15 | 中南大学 | A kind of SiCf/ SiC ceramic matrix composite material burner inner liner and its automation preparation method |
| US11591267B2 (en) | 2019-08-15 | 2023-02-28 | Central South University | Automated preparation method of a SiCf/SiC composite flame tube |
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