CN103966548A - Mask plate, manufacturing method of mask plate and mask assembly with mask plate - Google Patents
Mask plate, manufacturing method of mask plate and mask assembly with mask plate Download PDFInfo
- Publication number
- CN103966548A CN103966548A CN201410191585.XA CN201410191585A CN103966548A CN 103966548 A CN103966548 A CN 103966548A CN 201410191585 A CN201410191585 A CN 201410191585A CN 103966548 A CN103966548 A CN 103966548A
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- Prior art keywords
- mask plate
- sub
- mask
- plate body
- evaporation hole
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
Abstract
The embodiment of the invention provides a mask plate, a manufacturing method of the mask plate and a mask assembly with the mask plate, and relates to the technical field of displaying; the uniformity of vapor deposition can be improved, so that the displaying effect is improved. The mask plate comprises a first sub mask plate and a second sub mask plate, wherein each of the first and second sub mask plates comprises a mask plate body and a vapor deposition hole formed in the mask plate body; the vapor deposition holes in the first and second sub mask plates are small in size and completely overlapped; the mask plate bodies of the first and second sub mask plates are made from plastics with predetermined rigidity and are 5-150 microns in thickness. The mask plate is used for preparing an organic material layer in a display device.
Description
Technical field
The present invention relates to technique of display field, relate in particular to a kind of mask plate and preparation method thereof, mask assembly.
Background technology
Organic Light Emitting Diode (Organic Light Emitting Diode, be called for short OLED) is a kind of electroluminescent device of organic thin film, and it has the advantages such as easy formation flexible structure, visual angle be wide; Therefore, utilize the technique of display of Organic Light Emitting Diode to become a kind of important technique of display.
The full-color demonstration of OLED generally comprises the independent luminous or white light OLED of R (red) G (green) B (indigo plant) sub-pixel in conjunction with modes such as color filter films.Wherein, RGB sub-pixel is independently luminous is to adopt at present maximum color modes, and it is to utilize the luminous organic material in sub-pixel unit independent luminous.
At present, luminous organic material layer is all generally by organic materials is carried out to vacuum vapor plating formation.Wherein, for the independent luminous OLED of RGB sub-pixel, because each RGB sub-pixel unit adopts different luminous organic materials, thereby the organic luminous layer of RGB sub-pixel unit need to carry out respectively evaporation, in this process, the general mask plate that adopts metallic substance is controlled the plated film position of organic materials on substrate, then the corresponding organic materials of evaporation in each sub-pixel unit successively.
But; because the mask plate of metallic substance has the restriction of its thickness; when organic materials particle is during with the incident of less angle of inclination; this part organic materials particle can be covered by evaporation hole wall and cannot arrive substrate; thereby the edge evaporation thickness that makes each sub-pixel unit can be starkly lower than the evaporation thickness in the middle of sub-pixel unit, and this is called " shade influence ".
On this basis; due to the mask plate properties of materials of metallic substance; in the process in evaporation hole of making aforementioned mask plate, only to a certain extent time, could form evaporation hole at energy accumulating thereon; in this process; as shown in Figure 1, conventionally can be due to the gathering of energy, the surface that makes evaporation hole 1012 is not completely vertical; but can there is the problem of angle, this just further increases the weight of the generation of " shade influence ".
Summary of the invention
Embodiments of the invention provide a kind of mask plate and preparation method thereof, mask assembly, can improve the homogeneity of evaporation, thereby improve display effect.
For achieving the above object, embodiments of the invention adopt following technical scheme:
On the one hand, provide a kind of mask plate, comprising: the first sub-mask plate and the second sub-mask plate; Described the first sub-mask plate and described the second sub-mask plate include mask plate body and are arranged on the evaporation hole on described mask plate body; Described evaporation hole dimension on described the first sub-mask plate and described the second sub-mask plate equates and is completely overlapping;
Wherein, the material of the described mask plate body of described the first sub-mask plate and described the second sub-mask plate is the plastic material with redetermined rigidity, and thickness is 5～150 μ m.
Preferably, the material of described mask plate body comprises at least one in polyimide, polycarbonate, polyetherimide.
Preferably, the thickness of described the first sub-mask plate and described the second sub-mask plate equates.
Further preferred, the thickness of described the first sub-mask plate and described the second sub-mask plate is 5～20 μ m.
Based on above-mentioned, preferred, the spacing between described the first sub-mask plate and described the second sub-mask plate is 0～5 μ m.
On the other hand, provide a kind of mask assembly, comprise above-mentioned mask plate and for fixedly evening up the mask frame of described mask plate.
Preferably, described mask frame comprises the gripping portion that is positioned at relative both sides, and described gripping portion clamps the relative both sides of the edge of described mask plate.
Again on the one hand, provide a kind of making method of mask plate, comprising:
Using the plastic film with redetermined rigidity as the first mask plate body, even up and be fixed on mask frame;
Prospective region at described the first mask plate body forms evaporation hole;
Using the described plastic film with redetermined rigidity as the second mask plate body, even up and be fixed on described mask frame, and in the position corresponding with the evaporation hole that is positioned at described the first mask plate body, on described the second mask plate body, form described evaporation hole;
Wherein, be positioned at described evaporation hole on described the first mask plate body and to be positioned at described evaporation hole on described the second mask plate body completely overlapping, and the thickness of described the first mask plate body and described the second mask plate body is 5～150 μ m.
Preferably, the described prospective region at described the first mask plate body forms evaporation hole, comprising: by laser technology, form evaporation hole in the prospective region of described the first mask plate body;
Describedly on described the second mask plate body, form described evaporation hole, comprising: by laser technology, on described the second mask plate body, form described evaporation hole.
Further preferred, the material of described the first mask plate body and described the second mask plate body comprises at least one in polyimide, polycarbonate, polyetherimide.
The invention process provides a kind of mask plate and preparation method thereof, mask assembly, and this mask plate comprises the first sub-mask plate and the second sub-mask plate; Described the first sub-mask plate and described the second sub-mask plate include mask plate body and are arranged on the evaporation hole on described mask plate body; Described evaporation hole dimension on described the first sub-mask plate and described the second sub-mask plate equates and is completely overlapping; Wherein, the material of the described mask plate body of described the first sub-mask plate and described the second sub-mask plate is the plastic material with redetermined rigidity, and thickness is 5～150 μ m.
On the one hand, by the material of mask plate body being chosen to be to the plastic material with certain rigidity, and the thickness of mask plate body is rationally set, the mask plate of metallic substance in prior art relatively, can improve and form when described evaporation hole, " shade influence " that the angle producing due to the gathering of energy and the problem of mask plate thickness produce; On the other hand, by arranging that the size in evaporation hole of two sub-mask plates two sub-mask plates is set to equate and completely overlapping, can make to ensure only can make the deposition material of larger pitch angle (for example approaching vertical angle) incident to enter and pass through the evaporation hole of the second sub-mask plate away from for example first sub-mask plate of a sub-mask plate of evaporation substrate, in this process owing to having avoided the deposition material of all the other small angle inclination angle incidents on the inhomogeneity impact of evaporation, thereby can improve the homogeneity of evaporation, and then improve display effect.
Brief description of the drawings
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, to the accompanying drawing of required use in embodiment or description of the Prior Art be briefly described below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
The schematic diagram in the evaporation hole of the mask plate that Fig. 1 provides for prior art;
The structural representation one of a kind of mask plate that Fig. 2 provides for the embodiment of the present invention;
The structural representation two of a kind of mask plate that Fig. 3 provides for the embodiment of the present invention;
The structural representation of a kind of mask assembly that Fig. 4 provides for the embodiment of the present invention;
The schematic flow sheet of the making mask plate that Fig. 5 provides for the embodiment of the present invention.
Reference numeral:
10-mask plate; The sub-mask plate of 101-first; The sub-mask plate of 102-second; 1011-the first mask plate body; 1012-evaporation hole; 1021-the second mask plate body; The gripping portion of 201-mask frame.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is clearly and completely described, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiment.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtaining under creative work prerequisite, belong to the scope of protection of the invention.
The embodiment of the present invention provides a kind of mask plate 10, and as shown in Figures 2 and 3, this mask plate 10 comprises: the first sub-mask plate 101 and the second sub-mask plate 102; Described the first sub-mask plate 101 and described the second sub-mask plate 102 include mask plate body and are arranged on the evaporation hole 1012 on described mask plate body; Described evaporation hole 1012 sizes on described the first sub-mask plate 101 and described the second sub-mask plate 102 equate and are completely overlapping.
Wherein, the material of the described mask plate body of described the first sub-mask plate 101 and described the second sub-mask plate 102 is the plastic material with redetermined rigidity, and thickness is 5～150 μ m.
Here, the mask plate body of described the first sub-mask plate 101 can be called to the first mask plate body 1011, the mask plate body of described the second sub-mask plate 102 is called to the second mask plate body 1021.
It should be noted that, the first, the described evaporation hole 1012 that is positioned at described the first sub-mask plate 101 is corresponding one by one with the described evaporation hole 1012 that is positioned at described the second sub-mask plate 102.
Second, in the embodiment of the present invention, the material of described the first mask plate body 1011 and described the second mask plate body 1021 is, should not be in the time carrying out organic materials evaporation, make this mask plate 10 produce the plastic material of deformation, that is: there is low thermal coefficient of expansion and there is the material of certain rigidity.
The 3rd, (can directly not contact the spacing between described the first sub-mask plate 101 and described the second sub-mask plate 102, also can there is certain spacing) limit, be evenly as the criterion to the organic material layer on substrate by described evaporation hole 1012 evaporations can make.
The 4th, the accompanying drawing of all embodiment of the present invention all schematically shows the patterned layer relevant with inventive point, for not illustrating or only show part with the irrelevant patterned layer of inventive point.
The embodiment of the present invention provides a kind of mask plate 10, comprising: the first sub-mask plate 101 and the second sub-mask plate 102; Described the first sub-mask plate 101 and described the second sub-mask plate 102 include mask plate body and are arranged on the evaporation hole 1012 on described mask plate body; Described evaporation hole 1012 sizes on described the first sub-mask plate 101 and described the second sub-mask plate 102 equate and are completely overlapping.Wherein, the material of the described mask plate body of described the first sub-mask plate 101 and described the second sub-mask plate 102 is the plastic material with redetermined rigidity, and thickness is 5～150 μ m.
On the one hand, by the material of mask plate body being chosen to be to the plastic material with certain rigidity, and the thickness of mask plate body is rationally set, the mask plate of metallic substance in prior art relatively, can avoid forming described evaporation hole 1012 time, the problem of the angle producing due to the gathering of energy, thus improve above-mentioned " shade influence ", on the other hand, by arranging that the size in evaporation hole 1012 of two sub-mask plates two sub-mask plates is set to equate and completely overlapping, can make to ensure only can make the deposition material of larger pitch angle (for example approaching vertical angle) incident to enter and pass through the evaporation hole 1012 of the second sub-mask plate 102 away from for example first sub-mask plate 101 of a sub-mask plate of evaporation substrate, in this process owing to having avoided the deposition material of all the other small angle inclination angle incidents on the inhomogeneity impact of evaporation, thereby can improve the homogeneity of evaporation, and then improve display effect.
Preferably, the material of described the first mask plate body 1011 and described the second mask plate body 1021 comprises at least one in polyimide, polycarbonate, polyetherimide.
Wherein, polyimide have that thermal expansivity is low (can be 2 × 10
-5～3 × 10
-5/ DEG C between), high temperature resistant (can reach 400 DEG C), and it has the good characteristic such as mechanical property, high rigidity.
Polycarbonate to have thermal expansivity low by (3.8 × 10
-5/ DEG C), the heat-drawn wire of 135 DEG C, high strength, the characteristics such as high rigidity.
It is low by (5.6 × 10 that polyetherimide has thermal expansivity
-5/ DEG C), the heat-drawn wire of 200 DEG C, high strength, the characteristics such as high rigidity.
Because temperature in evaporate process generally can not exceed 60 DEG C of degree, therefore, above-mentioned materials all can meet in evaporate process, to the demand of described mask plate 10 difficult deformation.
Preferably, as shown in Figure 3, the thickness of described the first sub-mask plate 101 and described the second sub-mask plate 102 equates.
Like this, can be by identical processing condition, form described evaporation hole 1012 with identical method in the same position of described the first mask plate body 1011 and described the second mask plate body 1021, thereby form identical two the first sub-mask plates 101 and the second sub-mask plate 102, making processes is more simplified.
Further preferred, the thickness of described the first sub-mask plate 101 and described the second sub-mask plate 102 is 5～20 μ m.
The mask plate of metallic substance can be accomplished the thickness of 70 μ m at present, and the embodiment of the present invention is while adopting the plastic material with certain rigidity as mask plate, its thickness can be set as to 5～20 μ m, this can reduce " shade influence " that cause due to the thickness of mask plate greatly, thereby can further improve the homogeneity of evaporation.
Based on above-mentioned, due to the described first sub-mask plate 101 of plastic material and the surface ratio of the second sub-mask plate 102 more coarse, described the first sub-mask plate 101 and the second sub-mask plate 102 are not easy gaplessly to fit together completely, therefore, the embodiment of the present invention is preferably, between described the first sub-mask plate 101 and described the second sub-mask plate 102, there is spacing, and described spacing is preferably 0～5 μ m.
Like this, both can avoid surface ratio due to the first sub-mask plate 101 and the second sub-mask plate 102 compared with problem coarse and that can not fit completely, also can avoid because the deposition material that this spacing makes part enter the evaporation hole 1012 of the first sub-mask plate 101 too greatly cannot arrive the second sub-mask plate 101, thereby cause the waste of deposition material.
The embodiment of the present invention also provides a kind of mask assembly, and this mask assembly comprises above-mentioned mask plate 10 and for fixedly evening up the mask frame of described mask plate.
It should be noted that, first, the concrete shape of described mask frame is not limited herein, sub-first of described mask plate 10 mask plate 101 and the second sub-mask plate 102 can be fixed and evened up, and the described evaporation hole 1012 that does not in use make to be positioned on described the first sub-mask plate 101 relatively moves with the described evaporation hole 1012 being positioned on described the second sub-mask plate 102.
Second, between the first sub-mask plate 101 of described mask plate 10 and the second sub-mask plate 102, have in the situation of spacing, can make to there is spacing between the first sub-mask plate 101 and the second sub-mask plate 102 by the ad hoc structure of described mask frame, specifically set according to practical situation.
The embodiment of the present invention provides a kind of mask assembly, comprises above-mentioned mask plate 10 and for fixedly evening up the mask frame of described mask plate.On the one hand, by the material of mask plate body being chosen to be to the plastic material with certain rigidity, and the thickness of mask plate body is rationally set, the mask plate of metallic substance in prior art relatively, can avoid forming described evaporation hole 1012 time, the problem of the angle producing due to the gathering of energy, thus improve above-mentioned " shade influence ", on the other hand, by arranging that the size in evaporation hole 1012 of two sub-mask plates two sub-mask plates is set to equate and completely overlapping, can make to ensure only can make the deposition material of larger pitch angle (for example approaching vertical angle) incident to enter and pass through the evaporation hole 1012 of the second sub-mask plate 102 away from for example first sub-mask plate 101 of a sub-mask plate of evaporation substrate, in this process owing to having avoided the deposition material of all the other small angle inclination angle incidents on the inhomogeneity impact of evaporation, thereby can improve the homogeneity of evaporation, and then improve display effect.
Optionally, as shown in Figure 4, described mask frame comprises the gripping portion 201 that is positioned at relative both sides, and described gripping portion 201 clamps the relative both sides of the edge of described mask plate 10.
Because mask plate all can be made into rectangle under normal circumstances, therefore, in embodiments of the present invention, only need just can even up fixing whole the first sub-mask plate 101 and the second sub-mask plate 102 by the gripping portion that is positioned at relative both sides 201 of described mask frame, thus make the making of described mask frame and the assembling of mask assembly more easy.
The embodiment of the present invention also provides a kind of making method of mask plate 10, and as shown in Figure 5, the method comprises the steps:
S10, using the plastic film with redetermined rigidity as the first mask plate body 1011, even up and be fixed on mask frame.
The described plastic film with redetermined rigidity can be Kapton, or polycarbonate film, or polyetherimide film.
Described mask frame comprises the gripping portion 201 that is positioned at relative both sides, and described gripping portion 201 makes described the first mask plate body 1011 even up fixing by clamping the relative both sides of the edge of described the first mask plate body 1011.
S11, form evaporation hole 1012 in the prospective region of described the first mask plate body 1011.
S12, using the plastic film with redetermined rigidity as the second mask plate body 1021, even up and be fixed on described mask frame, and in the position corresponding with the evaporation hole 1012 that is positioned at described the first mask plate body 1011, on described the second mask plate body 1021, form described evaporation hole 1012.
Wherein, be positioned at described evaporation hole on described the first mask plate body 1,011 1012 and to be positioned at described evaporation hole 1012 on described the second mask plate body 1021 completely overlapping, and the thickness of described the first mask plate body 1011 and described the second mask plate body 1021 is 5～150 μ m.
Described the second mask plate body 1021 is also fixed and is evened up by the gripping portion 201 of above-mentioned mask frame.
It should be noted that, the first, the method that forms evaporation hole 1012 on the mask plate body at described plastic material is not limited, being as the criterion in the described evaporation of formation hole 1012 fast and accurately.
Second, (can directly not contact the spacing between described the first sub-mask plate 101 and described the second sub-mask plate 102 herein, also can there is certain spacing) limit, be evenly as the criterion to the organic material layer on substrate by described evaporation hole 1012 evaporations can make.
The embodiment of the present invention provides a kind of making method of mask plate 10, comprising: using the plastic film with redetermined rigidity as the first mask plate body 1011, even up and be fixed on mask frame; Prospective region at described the first mask plate body 1011 forms evaporation hole 1012; Using the described plastic film with redetermined rigidity as the second mask plate body 1021, even up and be fixed on described mask frame, and in the position corresponding with the evaporation hole 1012 that is positioned at described the first mask plate body 1011, on described the second mask plate body 1021, form described evaporation hole 1012; Wherein, be positioned at described evaporation hole on described the first mask plate body 1,011 1012 and to be positioned at described evaporation hole 1012 on described the second mask plate body 1021 completely overlapping, and the thickness of described the first mask plate body 1011 and described the second mask plate body 1021 is 5～150 μ m.
On the one hand, by the material of the first mask plate body 1011 and the second mask plate body 1021 is chosen to be to the plastic material with certain rigidity, and the thickness of the first mask plate body 1011 and the second mask plate body 1021 is rationally set, the mask plate of metallic substance in prior art relatively, can avoid forming described evaporation hole 1012 time, the problem of the angle producing due to the gathering of energy, thus improve above-mentioned " shade influence ", on the other hand, by forming two sub-mask plates and the size in the evaporation hole 1012 of two sub-mask plates being set as equal and completely overlapping, can make to ensure only can make the deposition material of larger pitch angle (for example approaching vertical angle) incident to enter and pass through the evaporation hole 1012 of the second sub-mask plate 102 away from for example first sub-mask plate 101 of a sub-mask plate of evaporation substrate, in this process owing to having avoided the deposition material of all the other small angle inclination angle incidents on the inhomogeneity impact of evaporation, thereby can improve the homogeneity of evaporation, and then improve display effect.
Based on above-mentioned, consider that laser boring has that speed is fast, efficiency is high, tolerance range is high etc. specific, thereby, in the embodiment of the present invention, be preferably, by laser technology, form evaporation hole 1012 in the prospective region of described the first mask plate body 1011; By laser technology, on described the second mask plate body 1021, form described evaporation hole 1012.
Based on above-mentioned description, the embodiment of the present invention is described the process of preparing the luminous organic material of OLED indicating meter by above-mentioned mask plate 10 by a specific embodiment, specifically comprise:
The for example red sub-pixel unit contraposition of wherein a kind of homochromy sub-pixel unit of S101, the evaporation hole 1012 that makes described mask plate 10 and OLED indicating meter is good, and carries out the evaporation of luminous organic material.
Wherein, the distribution of described evaporation hole 1012 on mask plate 10 need be identical with arranging of the homochromy sub-pixel unit of OLED indicating meter.
S102, complete after S101, make described mask plate 10 move the distance of a sub-pixel unit to adjacent lines relative to described OLED indicating meter, then carry out for example evaporation of the luminous organic material of green sub-pixels unit of the homochromy sub-pixel unit of the second.
S103, complete after S102, make described mask plate 10 move in the same direction the distance of a sub-pixel unit to adjacent lines relative to described OLED indicating meter, then carry out for example evaporation of the luminous organic material of blue subpixels unit of the third homochromy sub-pixel unit.
Certainly, above-mentioned steps S101-S103 has only embodied the process of the luminous organic material of preparing each sub-pixel unit, for active array type OLED indicating meter, before step S101, also need to form thin film transistor, anode also needs to form negative electrode etc. after S103, no longer repeats at this.
The above; be only the specific embodiment of the present invention, but protection scope of the present invention is not limited to this, any be familiar with those skilled in the art the present invention disclose technical scope in; can expect easily changing or replacing, within all should being encompassed in protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of described claim.
Claims (10)
1. a mask plate, is characterized in that, comprising: the first sub-mask plate and the second sub-mask plate;
Described the first sub-mask plate and described the second sub-mask plate include mask plate body and are arranged on the evaporation hole on described mask plate body; Described evaporation hole dimension on described the first sub-mask plate and described the second sub-mask plate equates and is completely overlapping;
Wherein, the material of the described mask plate body of described the first sub-mask plate and described the second sub-mask plate is the plastic material with redetermined rigidity, and thickness is 5～150 μ m.
2. mask plate according to claim 1, is characterized in that, the material of described mask plate body comprises at least one in polyimide, polycarbonate, polyetherimide.
3. mask plate according to claim 1, is characterized in that, the thickness of described the first sub-mask plate and described the second sub-mask plate equates.
4. mask plate according to claim 3, is characterized in that, the thickness of described the first sub-mask plate and described the second sub-mask plate is 5～20 μ m.
5. according to the mask plate described in claim 1-4 any one, it is characterized in that, the spacing between described the first sub-mask plate and described the second sub-mask plate is 0～5 μ m.
6. a mask assembly, is characterized in that, comprises mask plate described in claim 1 to 5 any one and for fixedly evening up the mask frame of described mask plate.
7. mask assembly according to claim 6, is characterized in that, described mask frame comprises the gripping portion that is positioned at relative both sides, and described gripping portion clamps the relative both sides of the edge of described mask plate.
8. a making method for mask plate, is characterized in that, comprising:
Using the plastic film with redetermined rigidity as the first mask plate body, even up and be fixed on mask frame;
Prospective region at described the first mask plate body forms evaporation hole;
Using the described plastic film with redetermined rigidity as the second mask plate body, even up and be fixed on described mask frame, and in the position corresponding with the evaporation hole that is positioned at described the first mask plate body, on described the second mask plate body, form described evaporation hole;
Wherein, be positioned at described evaporation hole on described the first mask plate body and to be positioned at described evaporation hole on described the second mask plate body completely overlapping, and the thickness of described the first mask plate body and described the second mask plate body is 5～150 μ m.
9. method according to claim 8, is characterized in that, the described prospective region at described the first mask plate body forms evaporation hole, comprising:
By laser technology, form evaporation hole in the prospective region of described the first mask plate body;
Describedly on described the second mask plate body, form described evaporation hole, comprising:
By laser technology, on described the second mask plate body, form described evaporation hole.
10. method according to claim 8 or claim 9, is characterized in that, the material of described the first mask plate body and described the second mask plate body comprises at least one in polyimide, polycarbonate, polyetherimide.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410191585.XA CN103966548B (en) | 2014-05-07 | 2014-05-07 | Mask plate, manufacturing method of mask plate and mask assembly with mask plate |
| PCT/CN2014/093819 WO2015169087A1 (en) | 2014-05-07 | 2014-12-15 | Mask plate, manufacturing method therefor and mask assembly |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410191585.XA CN103966548B (en) | 2014-05-07 | 2014-05-07 | Mask plate, manufacturing method of mask plate and mask assembly with mask plate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103966548A true CN103966548A (en) | 2014-08-06 |
| CN103966548B CN103966548B (en) | 2015-07-01 |
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|---|---|---|---|
| CN201410191585.XA Active CN103966548B (en) | 2014-05-07 | 2014-05-07 | Mask plate, manufacturing method of mask plate and mask assembly with mask plate |
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| WO (1) | WO2015169087A1 (en) |
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| WO2015169087A1 (en) * | 2014-05-07 | 2015-11-12 | 京东方科技集团股份有限公司 | Mask plate, manufacturing method therefor and mask assembly |
| CN108277455A (en) * | 2018-04-25 | 2018-07-13 | 京东方科技集团股份有限公司 | Mask plate component and preparation method thereof |
| CN116162893A (en) * | 2023-02-17 | 2023-05-26 | 京东方科技集团股份有限公司 | Mask plate and evaporation device |
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| CN103668048A (en) * | 2012-09-07 | 2014-03-26 | 昆山允升吉光电科技有限公司 | Manufacture method of composite mask plate assembly |
| CN103668054B (en) * | 2013-11-26 | 2015-10-21 | 北京遥测技术研究所 | A kind of mask frock of quartz micro mechanical sensor electrode evaporation |
| CN103966548B (en) * | 2014-05-07 | 2015-07-01 | 京东方科技集团股份有限公司 | Mask plate, manufacturing method of mask plate and mask assembly with mask plate |
| CN203834005U (en) * | 2014-05-07 | 2014-09-17 | 京东方科技集团股份有限公司 | Mask plate and mask assembly |
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2014
- 2014-05-07 CN CN201410191585.XA patent/CN103966548B/en active Active
- 2014-12-15 WO PCT/CN2014/093819 patent/WO2015169087A1/en active Application Filing
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| US20040086639A1 (en) * | 2002-09-24 | 2004-05-06 | Grantham Daniel Harrison | Patterned thin-film deposition using collimating heated mask asembly |
| CN101323172A (en) * | 2008-06-03 | 2008-12-17 | 江苏大学 | Laser plastic micro-welding method and device based on dynamic mask technique |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015169087A1 (en) * | 2014-05-07 | 2015-11-12 | 京东方科技集团股份有限公司 | Mask plate, manufacturing method therefor and mask assembly |
| CN108277455A (en) * | 2018-04-25 | 2018-07-13 | 京东方科技集团股份有限公司 | Mask plate component and preparation method thereof |
| CN116162893A (en) * | 2023-02-17 | 2023-05-26 | 京东方科技集团股份有限公司 | Mask plate and evaporation device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103966548B (en) | 2015-07-01 |
| WO2015169087A1 (en) | 2015-11-12 |
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