CN103957494A - Vibrating membrane and preparing method and application thereof - Google Patents

Vibrating membrane and preparing method and application thereof Download PDF

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Publication number
CN103957494A
CN103957494A CN201410216590.1A CN201410216590A CN103957494A CN 103957494 A CN103957494 A CN 103957494A CN 201410216590 A CN201410216590 A CN 201410216590A CN 103957494 A CN103957494 A CN 103957494A
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vibrating membrane
metal base
oxide layer
metal oxide
nano
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CN103957494B (en
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李金龙
王永欣
王立平
薛群基
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Ningbo Institute of Material Technology and Engineering of CAS
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Ningbo Institute of Material Technology and Engineering of CAS
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Abstract

The invention provides a vibrating membrane for a loudspeaker and a preparing method and application of the vibrating membrane. The vibrating membrane comprises a metal base material and a metal oxide layer located on at least one main surface of the base material. The metal oxide layer has one or more characteristics for improving audio and/or the tone quality, and is characterized in that firstly, the metal oxide layer is provided with a nanometer tube array structure, and secondly, the hardness and/or elasticity modulus of the metal oxide layer are/is larger than the hardness and/or elasticity modulus of the metal base material. The oxide layer is directly generated on the surface of the metal base material through the anode oxidizing processing technology, the hardness and the elasticity modulus of the vibrating membrane can be effectively improved, and the audio and the tone quality of the vibrating membrane can be improved.

Description

Vibrating membrane and method for making thereof and application
Technical field
The present invention relates to loud speaker field, be specifically related to a kind of vibrating membrane and method for making thereof and application.
Background technology
Along with the development of modern stereo set technology, there is more and more higher requirement for the high frequency diaphragm of playback system.Traditional loudspeaker vibrating diaphragm mostly is organic plastic material or its composite material, and still, the voice effect of these materials is not fully up to expectations, and particularly, under high pitch and high frequency sounding, tonequality is difficult to meet application demand.
At present, high pitch high frequency pronunciation field multiselect is prepared vibrating membrane with titanium and alloy material thereof, and titanium and alloy thereof have good corrosion resistance and mechanical property, are desirable metal materials high-end used for oscillation.But the Hz-KHz of traditional titanium vibrating membrane is narrower, sensitivity is low, easily produces diaphagras in the time of high frequency, has a strong impact on its voice effect.
In sum, in the prior art, still lack gratifying, there is wide Hz-KHz and highly sensitive high frequency diaphragm, therefore, this area can meet the high frequency diaphragm of high pitch and high frequency requirement in the urgent need to exploitation.
Summary of the invention
The object of the present invention is to provide a kind of vibrating membrane and method for making and application that can meet high pitch and high frequency requirement.
In a first aspect of the present invention, a kind of vibrating membrane is provided, described vibrating membrane comprises metal base and is positioned at the metal oxide layer at least one first type surface of described base material, and wherein, described metal oxide layer has one or more following characteristics that improve audio frequency and/or tonequality:
(i) described metal oxide layer has nano-tube array structure;
(ii) hardness of described metal oxide layer and/or modulus of elasticity are greater than hardness and/or the modulus of elasticity of described metal base.
In another preference, the hardness of described metal oxide layer is 4~6GPa.
In another preference, the hardness of described base material is 2~5Gpa.
In another preference, the modulus of elasticity of described metal oxide layer is 140~200GPa.
In another preference, the modulus of elasticity of described base material is 70~140Gpa.
In another preference, described metal oxide layer makes described vibrating membrane present different colors.
In another preference, described substrate metal comprises the metal that is selected from lower group: pure titanium, titanium alloy, fine aluminium, aluminium alloy, or its combination.
In another preference, described in there is nano-tube array structure metal oxide layer comprise titanium oxide and/or aluminium oxide.
In another preference, the average length of described nanotube is 1 μ m~50 μ m; And/or the average diameter of described nanotube is 20~150nm.
In a second aspect of the present invention, a kind of loud speaker is provided, described loud speaker comprises the vibrating membrane described in first aspect present invention.
In a third aspect of the present invention, the preparation method of the vibrating membrane described in a kind of first aspect present invention is provided, the method comprises the following steps:
(a) provide metal base;
(b) at least one first type surface of described metal base, generate first metal oxide layer with nano-tube array structure;
(c) nanotube of described the first metal oxide layer is peeled off, obtained first type surface and have the metal base of nano-tube array structure template;
(d) have on the first type surface of described nano-tube array template and generate second metal oxide layer with nano-tube array structure at metal base, obtain described vibrating membrane.
In another preference, described step (b) comprising:
The electrolyte aqueous solution that configuration contains fluorine ion;
In the described electrolyte aqueous solution that contains fluorine ion, taking described metal base as anode, described metal base is carried out to anodized, thereby generate first metal oxide layer with nano-tube array structure at least one first type surface of described metal base;
And/or described step (c) comprising:
By mechanical oscillation, the nanotube in described the first metal oxide layer is peeled off, producing nanotubes array mould plate on the described first type surface of described metal base, obtains first type surface and has the metal base of nano-tube array structure template;
And/or described step (d) comprising:
In described fluorine ion electrolyte aqueous solution, the metal base taking first type surface with described nano-tube array template is anode, this metal base is carried out to anodized, generate second metal oxide layer with nano-tube array structure at described first type surface, obtain described vibrating membrane.
In another preference, generating after described vibrating membrane, be 5~10min by described vibrating membrane Ultrasonic Cleaning processing time in acetone soln.
In another preference, before the step of the electrolyte aqueous solution that contains fluorine ion in described configuration, further comprising the steps of:
Described metal base is carried out to surface preparation.
In another preference, describedly described metal base carried out to surface preparation comprise:
In alkali wash water, described metal base is carried out to oil removing and rust cleaning activation processing; And/or
In pickle, described metal base is carried out to oil removing and rust cleaning activation processing; And/or
In acetone soln, described metal base is carried out to Ultrasonic Cleaning, then by air-dry described metal base.
In another preference, described alkali wash water is sodium hydrate aqueous solution.
In another preference, the concentration of described NaOH alkali wash water is 5~20wt.%.
In another preference, described pickle comprises the acid that is selected from lower group: hydrofluoric acid, nitric acid or its combination.
In another preference, the volume ratio of described pickle is: hydrofluoric acid: nitric acid: deionized water=0.1~10:0.4~40:3~300.
In another preference, described in contain fluorine ion electrolyte aqueous solution comprise the fluoride that is selected from lower group: ammonium fluoride, potassium fluoride, sodium fluoride or its combination; And/or
The described electrolyte aqueous solution that contains fluorine ion comprises the additive that is selected from lower group: deionized water, glycerol, ethylene glycol, methyl alcohol or its combination.
In another preference, described fluoride is ammonium fluoride, described in contain fluorine ion electrolyte aqueous solution in the content of ammonium fluoride be 0.01~2.5wt.%.
In another preference, described in contain fluorine ion electrolyte aqueous solution in comprise 0.2~20wt.% deionized water.
In another preference, described in contain fluorine ion electrolyte aqueous solution in comprise 0.01~99.9wt.% ethylene glycol.
In another preference, described anodized comprises the one or more features that are selected from lower group:
The anodic oxidation voltage of described anodized is 5V~100V;
The oxidization time of described anodized is 20min~150min;
The electrolyte temperature of described anodized is 10 DEG C~80 DEG C;
Described anodized be graphite or metal to electrode.
In a fourth aspect of the present invention, the preparation method of the vibrating membrane described in a kind of first aspect present invention is provided, the method comprises the following steps:
(a1) provide metal base;
(b1) in the phosphoric acid electrolyte aqueous solution, taking described metal base as anode, described metal base is carried out to anodized, at least one first type surface of described metal base, generate metal oxide layer, obtain described vibrating membrane.
In another preference, the described metal oxide layer of generation is titanium oxide layer, and the thickness of described titanium oxide layer is 10nm~200nm.
In another preference, described anodized has the one or more features that are selected from lower group:
The voltage of described anodized is 5V~100V;
The oxidization time of described anodized is 5min~60min;
The electrolyte temperature of described anodized is 10 DEG C~80 DEG C;
Described anodized be graphite or metal to electrode.
In another preference, the proportioning of described phosphoric acid electrolyte solution is 0.1~20wt.%H 3pO 4the aqueous solution, solvent is deionized water.
In another preference, before the step of the described configuration phosphoric acid electrolyte aqueous solution, further comprising the steps of:
Described metal base is carried out to surface preparation.
In another preference, describedly described metal base carried out to surface preparation comprise:
In alkali wash water, described metal base is carried out to oil removing and rust cleaning activation processing; And/or
In pickle, described metal base is carried out to oil removing and rust cleaning activation processing; And/or
In acetone soln, described metal base is carried out to Ultrasonic Cleaning, then by air-dry described metal base.
In another preference, described alkali wash water is sodium hydrate aqueous solution.
In another preference, the concentration of described NaOH alkali wash water is 5~20wt.%.
In another preference, described pickle comprises the acid that is selected from lower group: hydrofluoric acid, nitric acid or its combination.
In another preference, the volume ratio of described pickle is: hydrofluoric acid: nitric acid: deionized water=0.1~10:0.4~40:3~300.
In should be understood that within the scope of the present invention, above-mentioned each technical characterictic of the present invention and can combining mutually between specifically described each technical characterictic in below (eg embodiment), thus form new or preferred technical scheme.As space is limited, tire out and state no longer one by one at this.
Brief description of the drawings
Fig. 1 shows the vibrating membrane with pure titanium layer-fine and close titanium oxide layer structure generating under different anodic oxidation voltages in the present invention, and anodic oxidation voltage is respectively:
(a)10V、(b)30V、(c)50V;
Fig. 2 shows the bowl-shape nano-tube array template of the class that generates on (a) pure titanium layer in the present invention and (b) nano-tube array that generates on pure titanium layer;
Fig. 3 shows the consistency and elasticity modulus of a vibrating membrane in the embodiment of the present invention with the change curve of compression distance.
Embodiment
The inventor, through extensive and deep research, by repetition test, finds to generate in the metallic substrate surface as high frequency diaphragm the oxide of this metal base of one deck, can effectively improve the consistency and elasticity modulus of high frequency diaphragm.Under the help of this thinking, the inventor finds by advanced multistep anodic oxidation treatment technology, can be at the metal oxide nanotubes array of the surface construction high-sequential of metal base, by the regulation and control of the diameter to nanotube in nano-tube array and length, can effectively improve audio frequency and the tonequality of vibrating membrane.Meanwhile, by anodized technology, can also be in the multicoloured compact metal oxide layer of the Surface Creation of metal base, this oxide layer has the consistency and elasticity modulus that is better than virgin metal base material, and the vibrating membrane that can be used as high-quality uses.Complete on this basis the present invention.
Vibrating membrane
The metal oxide layer that vibrating membrane of the present invention comprises metal base and generates by anodized in this metallic substrate surface, the metal oxide layer generating can improve the consistency and elasticity modulus of base metal base material, significantly improves audio frequency and the tonequality of the loud speaker that uses this vibrating membrane.
Metal oxide layer
Metal oxide layer of the present invention is directly to make by anodized on the surface of metal base, and wherein, described metal oxide layer has one or more following characteristics that improve audio frequency and/or tonequality:
(i) described metal oxide layer has nano-tube array structure;
(ii) hardness of described metal oxide layer and/or modulus of elasticity are greater than hardness and/or the modulus of elasticity of described metal base.
Nano-tube array structure
Nano-tube array structure of the present invention refers to the surface at metal base, high-sequential be arranged with layer of metal oxide nano, the surperficial angle of the radial direction of these nanotubes and metal base is 70~90 °.
Anodized
The oxide layer that metal surface autoxidation generates is not only soft but also thin and perishable, therefore often adopts the method for anodized to generate the high anode oxide film of the corrosion-resistant hardness of one deck in metal surface.Anodized of the present invention refers to and is placed in corresponding electrolyte using metal base as anode, under specified conditions and impressed current effect, carries out electrolysis, generates the thin oxide layer of this metal of one deck in the metallic substrate surface as anode.
The preparation method of vibrating membrane
The present invention also provides the preparation method of vibrating membrane of the present invention.Conventionally, the method comprises:
Metal base is provided;
On at least one first type surface of this metal base, generate metal oxide layer, obtain described vibrating membrane, particularly, a kind of preparation method of preferred vibrating membrane, comprises the following steps:
Carry out surface preparation at metal base, successively in alkali wash water and pickle, carry out oil removing and rust cleaning activation processing, in acetone soln, adopt subsequently Ultrasonic Cleaning, air-dry after taking out;
Be configured for the electrolyte aqueous solution that contains fluorine ion of anodized;
In the described electrolyte aqueous solution that contains fluorine ion, taking described metal base as anode, described metal base is carried out to anodized, thereby generate first metal oxide layer with nano-tube array structure at least one first type surface of metal base, what anodized was used is metal or graphite cake to electrode;
Sur-face peeling by the nanotube in described the first metal oxide layer from described metal base, obtains first type surface and has the metal base of nano-tube array template;
In described electrolyte aqueous solution, the metal base taking described first type surface with nano-tube array template is anode, this metal base is carried out to anodized, generate second metal oxide layer with nano-tube array structure at described first type surface, obtain described vibrating membrane, what anodized was used is metal or graphite cake to electrode;
The vibrating membrane with metal base-have the second metal oxide layer structure of nano-tube array structure generating is carried out to follow-up Ultrasonic Cleaning processing in acetone soln.
Preferably, the anodic oxidation voltage of above-mentioned anodized is 5V~100V, and oxidization time is 20min~150min, and electrolyte temperature is 10 DEG C~100 DEG C.
In addition, in the present invention, the preparation method of another kind of preferred vibrating membrane, comprises the following steps:
Metal base is carried out to surface preparation, successively in alkali wash water and pickle, carry out oil removing and rust cleaning activation processing, in acetone soln, adopt subsequently Ultrasonic Cleaning, air-dry after taking out;
The configuration phosphoric acid electrolyte aqueous solution;
In described electrolyte aqueous solution, taking described metal base as anode, metal base is carried out to anodized, thereby at the Surface Creation metal oxide layer of this metal base, obtain described vibrating membrane, wherein, the metal oxide layer of generation presents different colors.
The above-mentioned vibrating membrane generating is carried out to follow-up Ultrasonic Cleaning processing in acetone soln.
Application
Vibrating membrane of the present invention can be for conventional various electro-acoustic transducer devices, as loud speaker etc., in the electronic and electrical equipment of various sounding, can use.Better, in high pitch and high frequency microphone device, sounding effect is better.
Major advantage of the present invention comprises:
(a) directly generate layer of oxide layer in metallic substrate surface by anodized technology, can effectively improve the consistency and elasticity modulus of vibrating membrane, improve audio frequency and the tonequality of vibrating membrane.
(b) metal oxide layer with nano-tube array structure of the present invention is prepared by multistep anodic oxidation treatment technology, using for the first time generate nanotube from metallic substrate surface is peeled off as template, carry out secondary or repeatedly generate, the metal oxide nanotubes generating is difficult for dropping under mechanical oscillation, there is higher intensity and corrosion resistance, can make it have more excellent acoustical behavior as the surface of vibrating membrane.
(c) titanium or aluminium and alloy material thereof have the corrosion-resistant and mechanical property of high strength, excellence, by advanced multistep anodic oxidation treatment technology, can construct in titanium or aluminium alloy diaphragm face the nano-tube array of high-sequential, audio frequency and the tonequality of this nano-tube array on loud speaker also can make a significant impact, also audio frequency and the tonequality that can improve vibrating membrane by the diameter of nanotube and length in regulation and control nano-tube array are the vibrating membranes that can meet high pitch and frequency applications demand.
(d) titanium alloy surface is by electrochemical anodic oxidation processing, not only can form the oxide skin(coating) with rich colors on its surface, and this oxide skin(coating) has the consistency and elasticity modulus higher than bulk material, can significantly improve audio frequency and the tonequality of loud speaker.
Embodiment 1
Vibrating membrane No.1
Prepare vibrating membrane taking pure titanium as metal base below, comprise the following steps:
(1) pure titanium metal base material is carried out to surface preparation, successively in 5~20wt.% sodium hydrate aqueous solution, clean 2~10min, caustic washing liquid temp is 40~150 DEG C.After metal base is cleaned with clear water, put into pickle and clean 2~10min, pickle proportioning is hydrofluoric acid (10ml)+nitric acid (40ml)+deionized water (300ml).Vibrating membrane after pickling is Ultrasonic Cleaning in acetone soln subsequently, air-dry after taking out.
(2) be configured for the 3wt.% phosphoric acid electrolyte aqueous solution of electrochemical anodic oxidation.
(3) in electrolyte aqueous solution, pure titanium metal base material is carried out to anodized, anodized is used is graphite electrode to electrode.Anodic oxidation voltage is respectively 20V, 30V and 50V, and oxidization time is 10min, and in oxidizing process, electrolyte temperature is 20 DEG C.
(4) after diaphragm face anodic oxidation, in acetone soln, it is carried out to follow-up Ultrasonic Cleaning processing.As vibrating membrane No.1.
The prepared vibrating membrane of the present embodiment 1 as shown in Figure 1, logical superpotential change, can form in diaphragm face the oxide skin(coating) of different colours, the thickness of oxide skin(coating) is about 10~200nm, this oxide skin(coating) has the consistency and elasticity modulus apparently higher than matrix, can improve the Frequency Response of loud speaker, effectively improve its tonequality.
Embodiment 2
Vibrating membrane No.2
Prepare vibrating membrane taking pure titanium as metal base below, comprise the following steps:
(1) pure titanium metal base material is carried out to surface preparation, first in 5~20wt.% sodium hydrate aqueous solution, clean 2~10min, alkali wash water temperature is 40~150 DEG C.After cleaning with clear water, put into pickle and clean 2~10min, pickle proportioning is hydrofluoric acid (10ml)+nitric acid (40ml)+deionized water (300ml).Pure titanium metal base material after pickling Ultrasonic Cleaning in acetone soln subsequently, air-dry after taking out.
(2) be configured for the electrolysis of fluorides liquid of electrochemical anodic oxidation, NH in electrolyte 4f content is 0.25wt.%, and deionized water content is 2wt.%, and all the other compositions are ethylene glycol.
(3) in electrolyte aqueous solution, pure titanium vibrating diaphragm is carried out to anodized, anodized is used is graphite electrode to electrode, and in oxidizing process, electrolyte temperature is 20 DEG C.Anodic oxidation is carried out in two steps, and first step anodic oxidation voltage is 60V, and oxidization time 60min can peel off the nanotube oxide forming by mechanical oscillation subsequently, forms the bowl-shape nano-tube array template of class, on matrix as shown in accompanying drawing 2a.Second step anodic oxidation, is to proceed anodic oxidation in the bowl-shape nano-tube array template of class, and oxidization time is 60min, and can prepare length is 20 μ m, and the titanium oxide nano-tube array of high-sequential, as shown in accompanying drawing 2b.
(4) after diaphragm face anodic oxidation, in acetone soln, it is carried out to follow-up Ultrasonic Cleaning processing.As vibrating membrane No.2.
The prepared diaphragm face oxide of this embodiment 2 has the unique texture of high-sequential oxide nanotube array, audio frequency and acoustical quality that this structure obviously can appreciable impact loud speaker.
Test implementation example
1. the test data of the consistency and elasticity modulus of vibrating membrane No.1.
The titanium oxide layer thickness of vibrating membrane No.1 is 100nm, as shown in Figure 3, compression distance is between 0~100nm time, vibrating membrane keeps higher hardness, compression distance higher than 100nm after, particularly, after 150nm, the hardness of vibrating membrane starts fast-descending, illustrates that the hardness of vibrating membrane titanium oxide layer is apparently higher than base material.Meanwhile, the modulus of elasticity of vibrating membrane also sharply declines (as shown in Figure 3 b) after compression distance is higher than 100nm.Illustrate that the oxide layer that adopts the phosphoric acid electrolyte aqueous solution to produce has the consistency and elasticity modulus apparently higher than matrix.
2. pure titanium layer, vibrating membrane No.1 and vibrating membrane No.2 are the tonequality test and appraisal that vibrating membrane is made loud speaker No.1, loud speaker No.2 and loud speaker No.3.
Make respectively loud speaker No.1, loud speaker No.2 and loud speaker No.3 taking above-mentioned pure titanium layer, vibrating membrane No.1 and vibrating membrane No.2 as vibrating membrane.Below by the tonequality of test loudspeaker No.1, loud speaker No.2 and loud speaker No.3.
Assessment of acoustics project and scale setting: 5 projects are set, are respectively third dimension, location sense, spatial impression, stereovision and thickness sense.Wherein, the sense of hearing that third dimension is mainly made up of spatial impression (Ambience), location sense (sense of direction), the stereovision (thickness sense) etc. of sound, the sound with these senses of hearing is called stereo; Locate sense and refer to that sound source is with left and right, upper and lower, the rear transmission of front and back different azimuth recording, and recipient receives the sound of playback, the sensation that the orientation of sound source in original sound field is reappeared out; Spatial impression refers to that the primary event sound of hysteresis direct sound wave and multiple reflections reverberation sound arrive two ears from all quarter, and the sense of hearing is judged to surrounding space size produces material impact, and people's ear is produced by the sensation around surrounding; Stereovision refers to that sound is high, medium and low and again and again rings balancedly, and high pitch is homophonic abundant, limpid very thin and not ear-piercing, and middle pitch is bright outstanding, plentiful enriching and not stiff, and bass is abundant and without nasal sound; Thickness sense refers to that bass is sedate strong, and heavy thick and not muddy, high pitch does not lack, and volume is moderate, has certain brightness, and reverberation is suitable, and distortion is little.
The maximum scale of above-mentioned each project is 9, and projects are all with 1 point of score unit, corresponding to the meaning of the each scale value of projects in table 1.
Check problem; To commenting sound expert sampling and check table, require to comment sound expert according to form requirement, indices to be evaluated.The evaluation result of a carrying out lateral comparison for above-mentioned three kinds of vibrating membranes.
Result statistics: all evaluation results of sound person of commenting are all effective, and the individual event evaluation result of respectively commenting sound person is asked to arithmetic mean, and result remains to a decimal, and the arithmetic mean of each individual event is added and, obtain total score, result remains to a decimal.
Table 1 is corresponding to the meaning of the each scale value of projects
Score value Third dimension Location sense Spatial impression Stereovision Thickness sense
9 Fine Fine Very strong Very clear Fine
8 Good Good By force Clear Good
7 Better Better Stronger More clear Better
6 Slightly good Slightly good Slightly strong Slightly clear Slightly good
5 In In In In In
4 Slightly poor Slightly poor Slightly Slightly fuzzy Slightly poor
3 Poor Poor ? Fuzzyyer Poor
2 Poor Poor A little less than Fuzzy Poor
1 Very poor Very poor Very weak Very fuzzy Very poor
Table 2 Analyses Methods for Sensory Evaluation Results
Sample Third dimension Location sense Spatial impression Stereovision Thickness sense Add up to
Loud speaker No.1 5 5 5 5 5 5
Loud speaker No.2 6 5 5 6 7 5
Loud speaker No.3 6 7 6 6 5 5
The third dimension of the vibrating membrane after phosphoric acid oxidation as shown in Table 2, thickness sense and stereovision are better than untreated vibrating membrane, and prepare the third dimension of the vibrating membrane of high-sequential nano-tube array, location sense, spatial impression and stereovision will obviously be better than untreated vibrating membrane.
All documents of mentioning in the present invention are all quoted as a reference in this application, are just quoted separately as a reference as each section of document.In addition should be understood that those skilled in the art can make various changes or modifications the present invention after having read above-mentioned instruction content of the present invention, these equivalent form of values fall within the application's appended claims limited range equally.

Claims (10)

1. a vibrating membrane, is characterized in that, described vibrating membrane comprises metal base and be positioned at the metal oxide layer at least one first type surface of described base material, and wherein, described metal oxide layer has one or more following characteristics that improve audio frequency and/or tonequality:
(i) described metal oxide layer has nano-tube array structure;
(ii) hardness of described metal oxide layer and/or modulus of elasticity are greater than hardness and/or the modulus of elasticity of described metal base.
2. vibrating membrane according to claim 1, is characterized in that, described substrate metal comprises the metal that is selected from lower group: pure titanium, titanium alloy, fine aluminium, aluminium alloy, or its combination.
3. vibrating membrane according to claim 1, is characterized in that, described in there is nano-tube array structure metal oxide layer comprise titanium oxide and/or aluminium oxide.
4. vibrating membrane according to claim 3, is characterized in that, the average length of described nanotube is 1 μ m~50 μ m; And/or the average diameter of described nanotube is 20~150nm.
5. a loud speaker, is characterized in that, described loud speaker comprises the vibrating membrane described in claim 1 to 5 any one.
6. a preparation method for vibrating membrane as claimed in claim 1, is characterized in that, comprises the following steps:
(a) provide metal base;
(b) at least one first type surface of described metal base, generate first metal oxide layer with nano-tube array structure;
(c) nanotube of described the first metal oxide layer is peeled off, obtained first type surface and have the metal base of nano-tube array structure template;
(d) have on the first type surface of described nano-tube array template and generate second metal oxide layer with nano-tube array structure at metal base, obtain described vibrating membrane.
7. the preparation method of vibrating membrane according to claim 6, is characterized in that, described step (b) comprising:
The electrolyte aqueous solution that configuration contains fluorine ion;
In the described electrolyte aqueous solution that contains fluorine ion, taking described metal base as anode, described metal base is carried out to anodized, thereby generate first metal oxide layer with nano-tube array structure at least one first type surface of described metal base;
And/or described step (c) comprising:
By mechanical oscillation, the nanotube in described the first metal oxide layer is peeled off, producing nanotubes array mould plate on the described first type surface of described metal base, obtains first type surface and has the metal base of nano-tube array structure template;
And/or described step (d) comprising:
In described fluorine ion electrolyte aqueous solution, the metal base taking first type surface with described nano-tube array template is anode, this metal base is carried out to anodized, generate second metal oxide layer with nano-tube array structure at described first type surface, obtain described vibrating membrane.
8. preparation method according to claim 7, is characterized in that, described in contain fluorine ion electrolyte aqueous solution comprise the fluoride that is selected from lower group: ammonium fluoride, potassium fluoride, sodium fluoride or its combination; And/or
The described electrolyte aqueous solution that contains fluorine ion comprises the additive that is selected from lower group: deionized water, glycerol, ethylene glycol, methyl alcohol or its combination.
9. preparation method according to claim 8, is characterized in that, described fluoride is ammonium fluoride, described in contain fluorine ion electrolyte aqueous solution in the content of ammonium fluoride be 0.01~2.5wt.%.
10. a preparation method for vibrating membrane as claimed in claim 1, is characterized in that, comprises the following steps:
(a1) provide metal base;
(b1) in the phosphoric acid electrolyte aqueous solution, taking described metal base as anode, described metal base is carried out to anodized, at least one first type surface of described metal base, generate metal oxide layer, obtain described vibrating membrane.
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CN107904556A (en) * 2017-10-23 2018-04-13 宁波大红鹰学院 One kind prepares patterning function film method based on templated deposition
WO2019047082A1 (en) * 2017-09-06 2019-03-14 深圳市同富达电子科技有限公司 Method for forming aluminum surface selenium treated nano coating for improving low frequency extension of earphone
CN113132887A (en) * 2021-04-20 2021-07-16 东莞舒铂迈特精工实业有限公司 Metal ring processing technology of vibrating diaphragm assembly

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