CN103954392B - What micro-momentum device was rocked in the measurement of linear frequency modulation multi-beam laser heterodyne rocks micro-impulse measurement method - Google Patents

What micro-momentum device was rocked in the measurement of linear frequency modulation multi-beam laser heterodyne rocks micro-impulse measurement method Download PDF

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CN103954392B
CN103954392B CN201410206079.3A CN201410206079A CN103954392B CN 103954392 B CN103954392 B CN 103954392B CN 201410206079 A CN201410206079 A CN 201410206079A CN 103954392 B CN103954392 B CN 103954392B
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李彦超
刘明亮
高扬
杨九如
冉玲苓
杨瑞海
杜军
丁群
王春晖
马立峰
于伟波
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Heilongjiang University
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Abstract

线性调频多光束激光外差测量扭摆微冲量的装置及基于该装置的扭摆微冲量测量方法,涉及扭摆微冲量测量技术领域。解决另外现有测量扭摆微冲量的装置和方法的测量精度低的问题。脉冲激光发射出的激光作用于工质靶产生等离子喷射,反喷作用使标准梁发生转动,在标准梁发生转动的同时,线性调频激光器持续发射出线性调频激光,线性调频激光经第一平面反射镜和第二平面反射镜反射后入射至平面标准镜,平面标准镜的前表面和后表面均对线性调频激光进行反射并通过会聚透镜会聚到光电探测器的光敏面上,光电探测器将电信号发送至信号处理系统获得标准梁的摆角θ′,再根据公式获得脉冲激光器发出的激光与工质靶作用产生的微冲量I′。本发明适用于扭摆微冲量测量。

A device for measuring torsion micro-impulse by linear frequency modulation multi-beam laser heterodyne and a method for measuring torsion micro-impulse based on the device relate to the technical field of torsion micro-impulse measurement. In addition, the problem of low measurement accuracy of the existing device and method for measuring torsion micro-impulse is solved. The laser emitted by the pulsed laser acts on the working fluid target to generate plasma jet, and the backspray effect causes the standard beam to rotate. While the standard beam rotates, the chirp laser continuously emits the chirp laser, and the chirp laser is reflected by the first plane Mirror and the second plane reflector are incident to the plane standard mirror after being reflected, the front surface and the rear surface of the plane standard mirror all reflect the chirp laser and converge it to the photosensitive surface of the photodetector through the converging lens, and the photodetector converts the electric The signal is sent to the signal processing system to obtain the swing angle θ' of the standard beam, and then according to the formula, the micro-pulse I' generated by the interaction between the laser emitted by the pulse laser and the working medium target is obtained. The invention is suitable for torsion micro-impulse measurement.

Description

线性调频多光束激光外差测量扭摆微冲量装置的扭摆微冲量测量方法Method for Measuring Torsional Micro-Impulse of Linear Frequency Modulated Multi-beam Laser Heterodyne Measuring Device of Torsional Micro-impulse

技术领域technical field

本发明涉及扭摆微冲量测量技术领域。The invention relates to the technical field of torsion micro-impulse measurement.

背景技术Background technique

激光微推力器在微小卫星姿态和轨道控制领域有着广泛而深入的应用前景,其具有比冲高、冲量动态范围大、最小冲量小、功耗低、能量耦合效率高以及易于实现、轻量化和数字化控制等显著优势,受到了国内外学者们广泛的关注。而冲量是反映激光微推力器性能的一个重要参数,特点是量级小,约为10-7~10-5N·s。PhotonicAssociates小组Phipps等人于1999年提出了用扭摆系统测量激光微推力器产生的微小冲量,并用其进行微推力器性能参数的测试;2002年,Phipps等人又对扭摆系统进行了改进,随后国内的中国科技大学和装备指挥技术学院也进行了相关研究。从目前国内外报告的研究结果来看,一方面,测量系统的噪声会影响系统的精度,在小冲量量级,系统误差甚至达到了50%;同时,在力作用时间内,靶平面偏离焦平面,能量耦合效率降低,这也会影响微冲量的测量,因此常规的小冲量测量系统很难满足测量要求。Laser micro-thrusters have broad and in-depth application prospects in the field of attitude and orbit control of micro-satellites. Significant advantages such as digital control have attracted extensive attention from scholars at home and abroad. The impulse is an important parameter reflecting the performance of the laser microthruster, which is characterized by a small magnitude, about 10 -7 ~ 10 -5 N·s. In 1999, Phipps et al. of Photonic Associates group proposed to use the torsion pendulum system to measure the micro-impulse generated by the laser micro-thruster, and used it to test the performance parameters of the micro-thruster; in 2002, Phipps et al. improved the torsion system, and then domestic The China University of Science and Technology and the Institute of Equipment Command Technology have also conducted related research. Judging from the research results reported at home and abroad, on the one hand, the noise of the measurement system will affect the accuracy of the system. At the small impulse level, the system error even reaches 50%. Plane, the energy coupling efficiency is reduced, which will also affect the measurement of micro-impulse, so the conventional small-impulse measurement system is difficult to meet the measurement requirements.

激光干涉法可有效解决常规测试系统存在的以上两个问题,提高系统的测量精度。采用两个角隅棱镜形成差动测量的方法代替原来的光指针方法测量扭摆转动的角度,大大提高了系统的精度;扭摆推进技术2010年的质量由原来的0.2g增加到58g,克服了离焦问题。研究结果表明,激光干涉法的引入极大地改善了扭摆测试系统的性能,能够满足激光微推力器微小冲量的测试要求。但是由于间接测量量较多,偶然误差较大,因此测量精度也不会很高。Laser interferometry can effectively solve the above two problems existing in conventional test systems and improve the measurement accuracy of the system. Using two corner cubes to form a differential measurement method to replace the original optical pointer method to measure the angle of torsion rotation, greatly improving the accuracy of the system; the mass of the torsion propulsion technology increased from 0.2g to 58g in 2010, which overcomes the problem of separation focus problem. The research results show that the introduction of laser interferometry has greatly improved the performance of the torsion test system, which can meet the test requirements of the small impulse of the laser micro thruster. However, due to the large amount of indirect measurement and the large accidental error, the measurement accuracy will not be very high.

发明内容Contents of the invention

本发明为了解决现有测量扭摆微冲量的装置和方法的测量精度低的问题,提出了线性调频多光束激光外差测量扭摆微冲量的装置及基于该装置的扭摆微冲量测量方法。In order to solve the problem of low measurement accuracy of existing devices and methods for measuring torsion micro-impulse, the present invention proposes a device for measuring torsion micro-impulse by linear frequency modulation multi-beam laser heterodyne and a method for measuring torsion micro-impulse based on the device.

性调频多光束激光外差测量扭摆微冲量的装置包括线性调频激光器、第一平面反射镜、第二平面反射镜、平面标准镜、标准梁、真空室、脉冲激光器、工质靶、会聚透镜、光电探测器和信号处理系统,The device for measuring the torsion micro-impulse by heterodyne frequency-modulated multi-beam laser includes a linear frequency-modulated laser, a first plane mirror, a second plane mirror, a plane standard mirror, a standard beam, a vacuum chamber, a pulse laser, a working medium target, a converging lens, photodetector and signal processing system,

所述线性调频激光器、第一平面反射镜、第二平面反射镜、平面标准镜、标准梁、脉冲激光器、工质靶和会聚透镜均放置在真空室内,The chirp laser, the first plane reflector, the second plane reflector, the plane standard mirror, the standard beam, the pulse laser, the working medium target and the converging lens are all placed in the vacuum chamber,

所述标准梁的中心固定有旋转轴,The center of the standard beam is fixed with an axis of rotation,

所述工质靶黏贴在标准梁的上表面,第二平面反射镜黏贴在标准梁的下表面,且工质靶与第二平面反射镜均位于标准梁的同一端,The working fluid target is pasted on the upper surface of the standard beam, the second plane mirror is pasted on the lower surface of the standard beam, and the working fluid target and the second plane mirror are located at the same end of the standard beam,

脉冲激光发射出的激光作用于工质靶产生等离子喷射,反喷作用使标准梁发生转动,在标准梁发生转动的同时,线性调频激光器持续发射出线性调频激光,线性调频激光经第一平面反射镜和第二平面反射镜反射后入射至平面标准镜,平面标准镜的前表面和后表面均对线性调频激光进行反射并通过会聚透镜会聚到光电探测器的光敏面上,光电探测器的电信号输出端与信号处理系统的电信号输入端连接。The laser emitted by the pulsed laser acts on the working fluid target to generate plasma jet, and the backspray effect causes the standard beam to rotate. While the standard beam rotates, the chirp laser continuously emits the chirp laser, and the chirp laser is reflected by the first plane The mirror and the second plane reflector are incident to the plane standard mirror after being reflected, the front surface and the back surface of the plane standard mirror all reflect the chirp laser and converge it to the photosensitive surface of the photodetector through the converging lens, and the electric detector of the photodetector The signal output terminal is connected with the electrical signal input terminal of the signal processing system.

所述信号处理系统包括滤波器、前置放大器、A/D转换器和DSP,滤波器的电信号输入端作为信号处理系统的电信号输入端与光电探测器的电信号输出端连接,滤波器的滤波信号输出端与前置放大器的滤波信号输入端连接,前置放大器的放大信号输出端与A/D转换器的模拟信号输入端连接,A/D转换器的数字信号输出端与DSP的数字信号输入端连接。Described signal processing system comprises filter, preamplifier, A/D converter and DSP, and the electrical signal input end of filter is connected with the electrical signal output end of photodetector as the electrical signal input end of signal processing system, and filter The filter signal output end of the preamplifier is connected to the filter signal input end of the preamplifier, the amplified signal output end of the preamplifier is connected to the analog signal input end of the A/D converter, and the digital signal output end of the A/D converter is connected to the DSP Digital signal input connection.

所述真空室上开有真空窗,所述真空窗用于使真空室内的光会聚至真空室外部的光电探测器光敏面上。A vacuum window is opened on the vacuum chamber, and the vacuum window is used to converge the light in the vacuum chamber to the photosensitive surface of the photodetector outside the vacuum chamber.

基于所述线性调频多光束激光外差测量扭摆微冲量的装置的扭摆微冲量测量方法是由以下过程实现的:The method of measuring the torsion micro-impulse based on the device for measuring the torsion micro-impulse by linear frequency modulation multi-beam laser heterodyne is realized by the following process:

将脉冲激光器、线性调频激光器、光电探测器和信号处理系统切换至工作状态,光电探测器将接收到的光信号转换为电信号发送至信号处理系统,信号处理系统根据接收到的连续的电信号获得标准梁的摆角θ′,Switch the pulse laser, chirp laser, photodetector and signal processing system to the working state, the photodetector converts the received optical signal into an electrical signal and sends it to the signal processing system, and the signal processing system receives the continuous electrical signal Obtain the swing angle θ′ of the standard beam,

根据:according to:

I ′ = 2 J ω D · θ ′ = 4 π J DT ′ · θ ′ (公式一), I ′ = 2 J ω D. · θ ′ = 4 π J DT ′ · θ ′ (Formula 1),

获得脉冲激光器发出的激光与工质靶作用产生的微冲量I′,其中,J为扭摆系统的转动惯量,ω为阻尼频率,T′为阻尼周期,D为标准梁长度,令k=4πJ/DT′,则:Obtain the micro-impulse I' generated by the interaction between the laser emitted by the pulsed laser and the working medium target, where J is the moment of inertia of the torsion pendulum system, ω is the damping frequency, T' is the damping period, D is the standard beam length, and k=4πJ/ DT′, then:

I′=k·θ′(公式二)。I'=k·θ' (Formula 2).

信号处理系统根据接收到的连续的电信号获得标准梁的摆角θ′是由以下过程实现的:The signal processing system obtains the swing angle θ' of the standard beam according to the received continuous electrical signal through the following process:

当线性调频激光器持续发射的线性调频激光以入射角θ0斜入射至平面标准镜时,平面标准镜的入射光场E(t)为:When the chirp laser continuously emitted by the chirp laser is obliquely incident on the planar standard mirror at an incident angle θ 0 , the incident light field E(t) of the planar standard mirror is:

E(t)=E0exp{i(ω0t+k′t2)}(公式三),E(t)=E 0 exp{i(ω 0 t+k′t 2 )} (Formula 3),

其中,为调频带宽的变化率,T为调频周期,ΔF为调频带宽,E0为入射光场振幅,t为时间,ω0为入射光场角频率,i表示虚数,in, is the rate of change of the frequency modulation bandwidth, T is the frequency modulation period, ΔF is the frequency modulation bandwidth, E 0 is the amplitude of the incident light field, t is time, ω 0 is the angular frequency of the incident light field, i represents an imaginary number,

设线性调频激光到达平面标准镜前表面的光程为l,则t-l/c时刻线性调频激光到达平面标准镜前表面的反射光场E1(t)为:Assuming that the optical path of the chirp laser reaching the front surface of the plane standard mirror is l, then the reflected light field E 1 (t) of the chirp laser reaching the front surface of the plane standard mirror at time tl/c is:

E 1 ( t ) = α 1 E 0 exp { i [ ω 0 ( t - l c ) + k ′ ( t - l c ) 2 ] } (公式四), E. 1 ( t ) = α 1 E. 0 exp { i [ ω 0 ( t - l c ) + k ′ ( t - l c ) 2 ] } (Formula 4),

平面标准镜前表面透射的光在不同时刻均被平面标准镜的前表面和后表面进行多次反射和折射,每一次反射获得的反射光的光场为:The light transmitted by the front surface of the plane standard mirror is reflected and refracted multiple times by the front surface and the back surface of the plane standard mirror at different times, and the light field of the reflected light obtained by each reflection is:

EE. 22 (( tt )) == αα 22 EE. 00 expexp {{ ii [[ ωω 00 (( tt -- ll ++ 22 nno dd cc oo sthe s θθ cc )) ++ kk ′′ (( tt -- ll ++ 22 nno dd cc oo sthe s θθ cc )) 22 ++ 22 ωω 00 nno dd cc oo sthe s θθ cc ]] }} EE. 33 (( tt )) == αα 33 EE. 00 expexp {{ ii [[ ωω 00 (( tt -- ll ++ 44 nno dd cc oo sthe s θθ cc )) ++ kk ′′ (( tt -- ll ++ 44 nno dd cc oo sthe s θθ cc )) 22 ++ 44 ωω 00 nno dd cc oo sthe s θθ cc ]] }} ·&Center Dot; ·&Center Dot; ·&Center Dot; EE. mm (( tt )) == αα mm EE. 00 expexp {{ ii [[ ωω 00 (( tt -- ll ++ 22 (( mm -- 11 )) nno dd coscos θθ cc )) ++ kk ′′ (( tt -- ll ++ 22 (( mm -- 11 )) nno dd coscos θθ cc )) 22 ++ 22 (( mm -- 11 )) ωω 00 nno dd cc oo sthe s θθ cc ]] }} ·&Center Dot; ·&Center Dot; ··

(公式五),(Formula 5),

其中,m为非负整数,α1=r,αm=ββ′r′(2m-3)(m≥2),r为光从周围介质射入平面标准镜时的反射率,β为光从周围介质射入平面标准镜时的透射率,r′为平面标准镜后表面的反射率,β′为光从平面标准镜内部射入到周围介质时的透射率,d为平面标准镜厚度,θ为折射角,n为平面标准镜折射率,c为光速,Among them, m is a non-negative integer, α 1 = r, α m = ββ'r' (2m-3) (m≥2), r is the reflectivity when light enters the plane standard mirror from the surrounding medium, and β is the light The transmittance when entering the plane standard mirror from the surrounding medium, r' is the reflectivity of the back surface of the plane standard mirror, β' is the transmittance when the light enters the surrounding medium from the inside of the plane standard mirror, and d is the thickness of the plane standard mirror , θ is the angle of refraction, n is the refractive index of the plane standard mirror, c is the speed of light,

光电探测器接收到的总光场E′(t)为:The total light field E′(t) received by the photodetector is:

E′(t)=E1(t)+E2(t)+...+Em(t)+...(公式六),E'(t)=E 1 (t)+E 2 (t)+...+E m (t)+... (Formula 6),

则光电探测器输出的光电流I为:Then the photocurrent I output by the photodetector is:

I = η e h v 1 Z ∫ ∫ D 1 2 [ E 1 ( t ) + E 2 ( t ) + ... + E m ( t ) + ... ] [ E 1 ( t ) + E 2 ( t ) + ... + E m ( t ) + ... ] * d s (公式七), I = η e h v 1 Z ∫ ∫ D. 1 2 [ E. 1 ( t ) + E. 2 ( t ) + ... + E. m ( t ) + ... ] [ E. 1 ( t ) + E. 2 ( t ) + ... + E. m ( t ) + ... ] * d the s (Formula 7),

其中,e为电子电量,Z为光电探测器表面介质的本征阻抗,η为量子效率,D为光电探测器光敏面的面积,h为普朗克常数,v为激光频率,*号表示复数共轭,Among them, e is the electron charge, Z is the intrinsic impedance of the surface medium of the photodetector, η is the quantum efficiency, D is the area of the photosensitive surface of the photodetector, h is Planck's constant, v is the laser frequency, and the * sign represents a complex number conjugated,

根据公式七获得中频电流IIF为:According to formula 7, the intermediate frequency current I IF is obtained as:

I I F = η e 2 h v 1 Z ∫ ∫ D Σ p = 0 m - 1 Σ j = 0 m - p ( E j ( t ) E j + p * ( t ) + E j * ( t ) E j + p ( t ) ) d s (公式八), I I f = η e 2 h v 1 Z ∫ ∫ D. Σ p = 0 m - 1 Σ j = 0 m - p ( E. j ( t ) E. j + p * ( t ) + E. j * ( t ) E. j + p ( t ) ) d the s (Equation 8),

将公式四和公式五代入公式八中,整理得:Substituting Formula 4 and Formula 5 into Formula 8, we can get:

I I F = η e h v π Z E 0 2 Σ p = 0 m - 1 Σ j = 0 m - p α j + p α j c o s ( 4 pk ′ n d c o s θ c t - 4 pk ′ n d c o s θ ( l + n d c o s θ ) c 2 ) (公式九), I I f = η e h v π Z E. 0 2 Σ p = 0 m - 1 Σ j = 0 m - p α j + p α j c o the s ( 4 pk ′ no d c o the s θ c t - 4 pk ′ no d c o the s θ ( l + no d c o the s θ ) c 2 ) (Formula 9),

对公式九中的中频项频率差进行傅里叶变换,获得干涉信号的频率fp为:Perform Fourier transform on the frequency difference of the intermediate frequency term in formula 9, and obtain the frequency f p of the interference signal as:

f p = 2 pk ′ n d c o s θ π c = K p c o s θ (公式十), f p = 2 pk ′ no d c o the s θ π c = K p c o the s θ (formula ten),

从而获得折射角θ的值,其中Kp为比例系数,且 Thus the value of the refraction angle θ is obtained, where K p is the proportionality factor, and

根据折射定律可知折射角θ与入射角θ0的关系为:According to the law of refraction, the relationship between the refraction angle θ and the incident angle θ 0 is:

θ0=arcsin(nsinθ)(公式十一),θ 0 = arcsin(nsinθ) (Formula 11),

根据入射光路几何关系可知入射角θ0与标准梁(3)的摆角θ′的关系为:According to the geometric relationship of the incident light path, the relationship between the incident angle θ 0 and the swing angle θ′ of the standard beam (3) is:

θ ′ = θ 0 2 = a r c s i n ( n s i n θ ) 2 (公式十二), θ ′ = θ 0 2 = a r c the s i no ( no the s i no θ ) 2 (Formula 12),

将公式十二中获得的标准梁的摆角θ′的值代入公式二中,获得脉冲激光器发出的激光与工质靶作用产生的微冲量I'。Substituting the value of the swing angle θ' of the standard beam obtained in Formula 12 into Formula 2, the micro-impulse I' generated by the interaction between the laser light emitted by the pulse laser and the working medium target is obtained.

有益效果:本发明提出的扭摆微冲量测量方法线性范围大、分辨率高,此测角方法的优点是对转动敏感,对平动不敏感,因此本发明所述装置对振动也有较强抗干扰能力,特别是低频振动,可以在几秒钟之内恢复到系统工作状态,不仅减小了测量误差,还降低了对测量设备和实验坏境的要求。同时,在转动角度较小(小于5°)时,所测的冲量与入射角成线性关系,测量误差小于0.48%,能够满足激光微推力器冲量测量的要求,为评估激光微推力器的性能提供了很好的测量手段。Beneficial effects: the torsional micro-impulse measurement method proposed by the present invention has a large linear range and high resolution. The advantage of this angle measurement method is that it is sensitive to rotation and insensitive to translation, so the device of the present invention also has strong anti-interference to vibration Capability, especially low-frequency vibration, can be restored to the working state of the system within a few seconds, which not only reduces the measurement error, but also reduces the requirements for the measurement equipment and the experimental environment. At the same time, when the rotation angle is small (less than 5°), the measured impulse has a linear relationship with the incident angle, and the measurement error is less than 0.48%, which can meet the requirements of laser microthruster impulse measurement. Provides a good means of measurement.

附图说明Description of drawings

图1为具体实施方式一和具体实施方式二所述的线性调频多光束激光外差测量扭摆微冲量的装置的结构示意图;Fig. 1 is a structural schematic diagram of the device for measuring torsional micro-impulse by chirped multi-beam laser heterodyne described in Embodiment 1 and Embodiment 2;

图2为平面标准镜的线性调频多光束激光干涉原理示意图;Fig. 2 is a schematic diagram of the chirp multi-beam laser interference principle of the planar standard mirror;

图3为不同入射角情况下微冲量测量对应的频谱图。Fig. 3 is the spectrum diagram corresponding to the micro-impulse measurement under different incident angles.

具体实施方式detailed description

具体实施方式一、结合图1说明本具体实施方式,本具体实施方式所述的线性调频多光束激光外差测量扭摆微冲量的装置包括线性调频激光器5、第一平面反射镜6、第二平面反射镜4、平面标准镜7、标准梁3、真空室11、脉冲激光器1、工质靶2、会聚透镜8、光电探测器9和信号处理系统10,DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS 1. This specific embodiment is described in conjunction with FIG. 1. The device for measuring the torsion micro-impulse by chirping multi-beam laser heterodyne described in this specific embodiment includes a chirp laser 5, a first plane mirror 6, a second plane Mirror 4, plane standard mirror 7, standard beam 3, vacuum chamber 11, pulse laser 1, working medium target 2, converging lens 8, photodetector 9 and signal processing system 10,

所述线性调频激光器5、第一平面反射镜6、第二平面反射镜4、平面标准镜7、标准梁3、脉冲激光器1、工质靶2和会聚透镜8均放置在真空室11内,The chirp laser 5, the first plane reflector 6, the second plane reflector 4, the plane standard mirror 7, the standard beam 3, the pulsed laser 1, the working medium target 2 and the converging lens 8 are all placed in the vacuum chamber 11,

所述标准梁3的中心固定有旋转轴,The center of the standard beam 3 is fixed with a rotating shaft,

所述工质靶2黏贴在标准梁3的上表面,第二平面反射镜4黏贴在标准梁3的下表面,且工质靶2与第二平面反射镜4均位于标准梁3的同一端,The working fluid target 2 is pasted on the upper surface of the standard beam 3, the second plane mirror 4 is pasted on the lower surface of the standard beam 3, and the working fluid target 2 and the second plane mirror 4 are both located on the standard beam 3 same end,

脉冲激光发射出的激光作用于工质靶2产生等离子喷射,反喷作用使标准梁3发生转动,在标准梁3发生转动的同时,线性调频激光器5持续发射出线性调频激光,线性调频激光经第一平面反射镜6和第二平面反射镜4反射后入射至平面标准镜7,平面标准镜7的前表面和后表面均对线性调频激光进行反射并通过会聚透镜8会聚到光电探测器9的光敏面上,光电探测器9的电信号输出端与信号处理系统10的电信号输入端连接。The laser emitted by the pulsed laser acts on the working medium target 2 to generate plasma spray, and the backspray effect causes the standard beam 3 to rotate. While the standard beam 3 rotates, the chirp laser 5 continuously emits the chirp laser, and the chirp laser passes through The first plane reflector 6 and the second plane reflector 4 are incident to the plane standard mirror 7 after reflection, the front surface and the rear surface of the plane standard mirror 7 all reflect the chirp laser and converge to the photodetector 9 through the converging lens 8 On the photosensitive surface, the electrical signal output end of the photodetector 9 is connected to the electrical signal input end of the signal processing system 10 .

具体实施方式二、结合图1说明本具体实施方式,本具体实施方式与具体实施方式一所述的线性调频多光束激光外差测量扭摆微冲量的装置的区别在于,所述信号处理系统10包括滤波器10-1、前置放大器10-2、A/D转换器10-3和DSP10-4,滤波器10-1的电信号输入端作为信号处理系统10的电信号输入端与光电探测器9的电信号输出端连接,滤波器10-1的滤波信号输出端与前置放大器10-2的滤波信号输入端连接,前置放大器10-2的放大信号输出端与A/D转换器10-3的模拟信号输入端连接,A/D转换器10-3的数字信号输出端与DSP10-4的数字信号输入端连接。Specific Embodiment 2. This specific embodiment is described in conjunction with FIG. 1. The difference between this specific embodiment and the device for measuring torsion micro-impulse by chirp multi-beam laser heterodyne described in specific embodiment 1 is that the signal processing system 10 includes Filter 10-1, preamplifier 10-2, A/D converter 10-3 and DSP10-4, the electrical signal input terminal of filter 10-1 is used as the electrical signal input terminal of signal processing system 10 and photodetector The electrical signal output end of 9 is connected, the filter signal output end of filter 10-1 is connected with the filter signal input end of preamplifier 10-2, the amplified signal output end of preamplifier 10-2 is connected with A/D converter 10 The analog signal input end of -3 is connected, and the digital signal output end of A/D converter 10-3 is connected with the digital signal input end of DSP10-4.

具体实施方式三、结合图1说明本具体实施方式,本具体实施方式与具体实施方式一所述的线性调频多光束激光外差测量扭摆微冲量的装置的区别在于,所述真空窗用于使真空室11内的光会聚至真空室11外部的光电探测器9光敏面上。Specific Embodiment 3. This specific embodiment is described in conjunction with FIG. 1. The difference between this specific embodiment and the device for measuring torsion micro-impulse by chirp multi-beam laser heterodyne described in specific embodiment 1 is that the vacuum window is used to use The light in the vacuum chamber 11 converges to the photosensitive surface of the photodetector 9 outside the vacuum chamber 11 .

具体实施方式四、基于具体实施方式一伙具体实施方式二所述的线性调频多光束激光外差测量扭摆微冲量的装置的扭摆微冲量测量方法是由以下过程实现的:Embodiment 4. The method for measuring the micro-impulse torsion of the device for measuring the micro-impulse torsion by heterodyning the linear frequency-modulated multi-beam laser described in the second embodiment is realized by the following process:

将脉冲激光器1、线性调频激光器5、光电探测器9和信号处理系统10切换至工作状态,光电探测器9将接收到的光信号转换为电信号发送至信号处理系统10,信号处理系统10根据接收到的连续的电信号获得标准梁3的摆角θ′,Switch the pulse laser 1, the chirp laser 5, the photodetector 9 and the signal processing system 10 to the working state, the photodetector 9 converts the received optical signal into an electrical signal and sends it to the signal processing system 10, and the signal processing system 10 according to The received continuous electrical signal obtains the swing angle θ' of the standard beam 3,

根据:according to:

I ′ = 2 J ω D · θ ′ = 4 π J DT ′ · θ ′ (公式一), I ′ = 2 J ω D. &Center Dot; θ ′ = 4 π J DT ′ &Center Dot; θ ′ (Formula 1),

获得脉冲激光器1发出的激光与工质靶作用产生的微冲量I′,其中,J为扭摆系统的转动惯量,ω为阻尼频率,T′为阻尼周期,D为标准梁3长度,令k=4πJ/DT′,则:Obtain the micro-impulse I' generated by the action of the laser light emitted by the pulsed laser 1 and the working medium target, wherein J is the moment of inertia of the torsional pendulum system, ω is the damping frequency, T' is the damping period, D is the length of the standard beam 3, and k= 4πJ/DT′, then:

I′=k·θ′(公式二)。I'=k·θ' (Formula 2).

具体实施方式五、结合图2说明本具体实施方式,本具体实施方式与具体实施方式四所述的基于线性调频多光束激光外差测量扭摆微冲量的装置的扭摆微冲量测量方法的区别在于,信号处理系统10根据接收到的连续的电信号获得标准梁3的摆角θ′是由以下过程实现的:Embodiment 5. This embodiment is described in conjunction with FIG. 2. The difference between this embodiment and the method for measuring the torsion micro-impulse based on the device for measuring the torsion micro-impulse based on chirp multi-beam laser heterodyne described in Embodiment 4 is that, The acquisition of the swing angle θ' of the standard beam 3 by the signal processing system 10 according to the received continuous electrical signal is realized by the following process:

当线性调频激光器5持续发射的线性调频激光以入射角θ0斜入射至平面标准镜7时,平面标准镜7的入射光场E(t)为:When the chirp laser continuously emitted by the chirp laser 5 is obliquely incident on the plane standard mirror 7 at an incident angle θ 0 , the incident light field E(t) of the plane standard mirror 7 is:

E(t)=E0exp{i(ω0t+k′t2)}(公式三),E(t)=E 0 exp{i(ω 0 t+k′t 2 )} (Formula 3),

其中,为调频带宽的变化率,T为调频周期,ΔF为调频带宽,E0为入射光场振幅,t为时间,ω0为入射光场角频率,i表示虚数,in, is the rate of change of the frequency modulation bandwidth, T is the frequency modulation period, ΔF is the frequency modulation bandwidth, E 0 is the amplitude of the incident light field, t is time, ω 0 is the angular frequency of the incident light field, i represents an imaginary number,

设线性调频激光到达平面标准镜7前表面的光程为l,则t-l/c时刻线性调频激光到达平面标准镜7前表面的反射光场E1(t)为:Let the optical path of the chirp laser reach the front surface of the plane standard mirror 7 be l, then the reflected light field E 1 (t) of the chirp laser reaching the front surface of the plane standard mirror 7 at time t1/c is:

E 1 ( t ) = α 1 E 0 exp { i [ ω 0 ( t - l c ) + k ′ ( t - l c ) 2 ] } (公式四), E. 1 ( t ) = α 1 E. 0 exp { i [ ω 0 ( t - l c ) + k ′ ( t - l c ) 2 ] } (Formula 4),

平面标准镜7前表面透射的光在不同时刻均被平面标准镜7的前表面和后表面进行多次反射和折射,每一次反射获得的反射光的光场为:The light transmitted by the front surface of the plane standard mirror 7 is reflected and refracted multiple times by the front surface and the rear surface of the plane standard mirror 7 at different times, and the light field of the reflected light obtained by each reflection is:

EE. 22 (( tt )) == αα 22 EE. 00 expexp {{ ii [[ ωω 00 (( tt -- ll ++ 22 nno dd cc oo sthe s θθ cc )) ++ kk ′′ (( tt -- ll ++ 22 nno dd cc oo sthe s θθ cc )) 22 ++ 22 ωω 00 nno dd cc oo sthe s θθ cc ]] }} EE. 33 (( tt )) == αα 33 EE. 00 expexp {{ ii [[ ωω 00 (( tt -- ll ++ 44 nno dd cc oo sthe s θθ cc )) ++ kk ′′ (( tt -- ll ++ 44 nno dd cc oo sthe s θθ cc )) 22 ++ 44 ωω 00 nno dd cc oo sthe s θθ cc ]] }} ·&Center Dot; ·&Center Dot; ·&Center Dot; EE. mm (( tt )) == αα mm EE. 00 expexp {{ ii [[ ωω 00 (( tt -- ll ++ 22 (( mm -- 11 )) nno dd coscos θθ cc )) ++ kk ′′ (( tt -- ll ++ 22 (( mm -- 11 )) nno dd coscos θθ cc )) 22 ++ 22 (( mm -- 11 )) ωω 00 nno dd cc oo sthe s θθ cc ]] }} ·&Center Dot; ·· ·&Center Dot;

(公式五),(Formula 5),

其中,m为非负整数,α1=r,αm=ββ′r′(2m-3)(m≥2),r为光从周围介质射入平面标准镜7时的反射率,β为光从周围介质射入平面标准镜7时的透射率,r′为平面标准镜7后表面的反射率,β′为光从平面标准镜7内部射入到周围介质时的透射率,d为平面标准镜7厚度,θ为折射角,n为平面标准镜7折射率,c为光速,Among them, m is a non-negative integer, α 1 =r, α m =ββ'r' (2m-3) (m≥2), r is the reflectivity when light enters the plane standard mirror 7 from the surrounding medium, and β is The transmittance when light enters the plane standard mirror 7 from the surrounding medium, r' is the reflectivity of the rear surface of the plane standard mirror 7, and β' is the transmittance when the light enters the surrounding medium from the inside of the plane standard mirror 7, and d is The thickness of the plane standard mirror 7, θ is the refraction angle, n is the refractive index of the plane standard mirror 7, c is the speed of light,

光电探测器9接收到的总光场E′(t)为:The total light field E'(t) received by the photodetector 9 is:

E′(t)=E1(t)+E2(t)+...+Em(t)+...(公式六),E'(t)=E 1 (t)+E 2 (t)+...+E m (t)+... (Formula 6),

则光电探测器9输出的光电流I为:Then the photoelectric current I of photodetector 9 output is:

I = η e h v 1 Z ∫ ∫ D 1 2 [ E 1 ( t ) + E 2 ( t ) + ... + E m ( t ) + ... ] [ E 1 ( t ) + E 2 ( t ) + ... + E m ( t ) + ... ] * d s (公式七), I = η e h v 1 Z ∫ ∫ D. 1 2 [ E. 1 ( t ) + E. 2 ( t ) + ... + E. m ( t ) + ... ] [ E. 1 ( t ) + E. 2 ( t ) + ... + E. m ( t ) + ... ] * d the s (Formula 7),

其中,e为电子电量,Z为光电探测器9表面介质的本征阻抗,η为量子效率,D为光电探测器9光敏面的面积,h为普朗克常数,v为激光频率,*号表示复数共轭,Wherein, e is electron charge, Z is the intrinsic impedance of photodetector 9 surface medium, η is quantum efficiency, D is the area of 9 photosensitive surfaces of photodetector, h is Planck's constant, v is laser frequency, * sign represents the complex conjugate,

根据公式七获得中频电流IIF为:According to formula 7, the intermediate frequency current I IF is obtained as:

I I F = η e 2 h v 1 Z ∫ ∫ D Σ p = 0 m - 1 Σ j = 0 m - p ( E j ( t ) E j + p * ( t ) + E j * ( t ) E j + p ( t ) ) d s (公式八), I I f = η e 2 h v 1 Z ∫ ∫ D. Σ p = 0 m - 1 Σ j = 0 m - p ( E. j ( t ) E. j + p * ( t ) + E. j * ( t ) E. j + p ( t ) ) d the s (Equation 8),

将公式四和公式五代入公式八中,整理得:Substituting Formula 4 and Formula 5 into Formula 8, we can get:

I I F = η e h v π Z E 0 2 Σ p = 0 m - 1 Σ j = 0 m - p α j + p α j c o s ( 4 pk ′ n d c o s θ c t - 4 pk ′ n d c o s θ ( l + n d c o s θ ) c 2 ) (公式九), I I f = η e h v π Z E. 0 2 Σ p = 0 m - 1 Σ j = 0 m - p α j + p α j c o the s ( 4 pk ′ no d c o the s θ c t - 4 pk ′ no d c o the s θ ( l + no d c o the s θ ) c 2 ) (Formula 9),

对公式九中的中频项频率差进行傅里叶变换,获得干涉信号的频率fp为:Perform Fourier transform on the frequency difference of the intermediate frequency term in formula 9, and obtain the frequency f p of the interference signal as:

f p = 2 pk ′ n d c o s θ π c = K p c o s θ (公式十), f p = 2 pk ′ no d c o the s θ π c = K p c o the s θ (formula ten),

从而获得折射角θ的值,其中Kp为比例系数,且 K p = 2 p k n d π c , Thus the value of the refraction angle θ is obtained, where K p is the proportionality factor, and K p = 2 p k no d π c ,

根据折射定律可知折射角θ与入射角θ0的关系为:According to the law of refraction, the relationship between the refraction angle θ and the incident angle θ 0 is:

θ0=arcsin(nsinθ)(公式十一),θ 0 = arcsin(nsinθ) (Formula 11),

根据入射光路几何关系可知入射角θ0与标准梁3的摆角θ′的关系为:According to the geometric relationship of the incident light path, the relationship between the incident angle θ 0 and the swing angle θ′ of the standard beam 3 is:

θ ′ = θ 0 2 = a r c s i n ( n s i n θ ) 2 (公式十二), θ ′ = θ 0 2 = a r c the s i no ( no the s i no θ ) 2 (Formula 12),

将公式十二中获得的标准梁3的摆角θ′的值代入公式二中,获得脉冲激光器1发出的激光与工质靶2作用产生的微冲量I′。Substituting the value of the swing angle θ' of the standard beam 3 obtained in Formula 12 into Formula 2, the micro-impulse I' generated by the interaction between the laser light emitted by the pulse laser 1 and the working medium target 2 is obtained.

本实施方式中,通过测量加入标准梁3前后系统周期的变化,标定出系统的转动惯量,根据标定结果即可求出比例系数Kp的值。In this embodiment, the moment of inertia of the system is calibrated by measuring the change of the system period before and after adding the standard beam 3, and the value of the proportional coefficient Kp can be obtained according to the calibration result.

图1所示的线性调频多光束激光外差测量扭摆微冲量的装置,在10Pa的工作条件下,利用MATLAB模拟测量工质为PVC(聚氯乙烯)+2%C,厚度为180μm,激光初始电流为5A,脉宽为50ms,激光和工质相互作用产生的微冲量,并验证线性调频多光束激光外差测量方法的可能性,取标准梁3长度D=15cm,平面标准镜的折射率n=1.493983,厚度为3cm;线性调频激光器波长为1.55μm,扫描周期T=1ms,调制带宽ΔF=5GHz。The device for measuring torsion micro-impulse by linear frequency modulation multi-beam laser heterodyne shown in Figure 1, under the working condition of 10Pa, using MATLAB to simulate and measure the working medium is PVC (polyvinyl chloride) + 2% C, the thickness is 180μm, the laser initial The current is 5A, the pulse width is 50ms, the micro-pulse generated by the interaction between the laser and the working medium, and the possibility of the linear frequency modulation multi-beam laser heterodyne measurement method is verified. The length of the standard beam 3 is D = 15cm, and the refractive index of the plane standard mirror n=1.493983, the thickness is 3cm; the wavelength of the chirp laser is 1.55μm, the scan period T=1ms, and the modulation bandwidth ΔF=5GHz.

仿真得到了不同入射角θ0情况下,线性调频多光束激光外差测量微小角度对应的傅里叶变换频谱如图3所示,从图3可以看出,随着入射角θ0的增大,频谱的相对位置向低频方向移动,即随着入射角θ0的增加,频率减小。这是因为,在比例系数Kp不变的情况下,由于干涉信号的频率fp与入射角θ0的关系为fp=Kpcosθ=Kpcos[arcsin(sinθ0/n)],入射角θ0和干涉信号的频率fp是成反比关系的,当入射角θ0增加时,cosθ随之减小,因此,随着入射角θ0的增加,频谱的相对位置向低频方向移动。In the case of different incident angles θ 0 , the Fourier transform spectrum corresponding to the small angle measured by chirped multi-beam laser heterodyne is shown in Fig. 3. It can be seen from Fig. 3 that with the increase of incident angle θ 0 , the relative position of the spectrum moves to the low frequency direction, that is, as the incident angle θ 0 increases, the frequency decreases. This is because, when the proportionality coefficient K p is constant, the relationship between the frequency f p of the interference signal and the incident angle θ 0 is f p =K p cosθ=K p cos[arcsin(sinθ 0 /n)], The incident angle θ 0 and the frequency f p of the interference signal are inversely proportional to each other. When the incident angle θ 0 increases, cosθ decreases accordingly. Therefore, as the incident angle θ 0 increases, the relative position of the spectrum moves to the low frequency direction .

利用本发明所述的测量方法,连续测量八组数据,得到了不同入射角θ0情况下待测样品微冲量的仿真测量结果,如下表所示:Utilize measuring method described in the present invention, measure eight groups of data continuously, obtain the simulated measurement result of micro-impulse of sample to be measured under the situation of different incident angles θ 0 , as shown in the following table:

利用上表的仿真实验数据,计算出微冲量的平均测量值,最终得到的测量值的最大相对误差小于0.48%,同时,在小角度近似的情况下,环境带来的系统误差和读数误差在仿真中是可以忽略的,仿真实验中的误差主要来自快速傅里叶变化后的精度误差和计算过程中的舍入误差。Using the simulation experiment data in the table above, the average measurement value of the micro-impulse is calculated, and the maximum relative error of the final measurement value is less than 0.48%. At the same time, in the case of small angle approximation, the system error and reading error caused by the environment are in It can be ignored in the simulation, and the error in the simulation experiment mainly comes from the precision error after the fast Fourier transformation and the rounding error in the calculation process.

Claims (1)

1. A torsional pendulum micro impulse measuring method of a linear frequency modulation multi-beam laser heterodyne torsional pendulum micro impulse measuring device relates to a device comprising a linear frequency modulation laser (5), a first plane reflector (6), a second plane reflector (4), a plane standard mirror (7), a standard beam (3), a vacuum chamber (11), a pulse laser (1), a working medium target (2), a converging lens (8), a photoelectric detector (9) and a signal processing system (10),
the linear frequency modulation laser (5), the first plane reflector (6), the second plane reflector (4), the plane standard mirror (7), the standard beam (3), the pulse laser (1), the working medium target (2) and the convergent lens (8) are all arranged in a vacuum chamber (11),
a rotating shaft is fixed at the center of the standard beam (3),
the working medium target (2) is pasted on the upper surface of the standard beam (3), the second plane reflector (4) is pasted on the lower surface of the standard beam (3), the working medium target (2) and the second plane reflector (4) are both positioned at the same end of the standard beam (3),
the laser emitted by the pulse laser acts on the working medium target (2) to generate plasma jet, the standard beam (3) rotates under the action of back spray, the linear frequency modulation laser (5) continuously emits linear frequency modulation laser while the standard beam (3) rotates, the linear frequency modulation laser is reflected by the first plane reflecting mirror (6) and the second plane reflecting mirror (4) and then enters the plane standard mirror (7), the front surface and the rear surface of the plane standard mirror (7) reflect the linear frequency modulation laser and converge the linear frequency modulation laser on the photosensitive surface of the photoelectric detector (9) through the converging lens (8), and the electric signal output end of the photoelectric detector (9) is connected with the electric signal input end of the signal processing system (10);
the signal processing system (10) comprises a filter (10-1), a preamplifier (10-2), an A/D converter (10-3) and a DSP (10-4), wherein an electric signal input end of the filter (10-1) is connected with an electric signal output end of a photoelectric detector (9) as an electric signal input end of the signal processing system (10), a filtering signal output end of the filter (10-1) is connected with a filtering signal input end of the preamplifier (10-2), an amplifying signal output end of the preamplifier (10-2) is connected with an analog signal input end of the A/D converter (10-3), and a digital signal output end of the A/D converter (10-3) is connected with a digital signal input end of the DSP (10-4);
the vacuum chamber (11) is provided with a vacuum window for converging the light in the vacuum chamber (11) to the vacuum chamber
(11) The external photoelectric detector (9) is arranged on the photosensitive surface;
the torsional pendulum micro-impulse measuring method of the linear frequency modulation multi-beam laser heterodyne torsional pendulum micro-impulse measuring device is realized by the following processes:
the pulse laser (1), the linear frequency modulation laser (5), the photoelectric detector (9) and the signal processing system (10) are switched to a working state, the photoelectric detector (9) converts received optical signals into electric signals and sends the electric signals to the signal processing system (10), the signal processing system (10) obtains the swing angle theta' of the standard beam (3) according to the received continuous electric signals,
according to the following steps:
I ′ = 2 J ω D · θ ′ = 4 π J DT ′ · θ ′ (formula one),
obtaining micro impulse I ' generated by the action of laser emitted by a pulse laser (1) and a working medium target (2), wherein J is the rotational inertia of a torsional pendulum system, omega is damping frequency, T ' is damping period, D is the length of a standard beam (3), and k is 4 pi J/DT ':
i '═ k · θ' (equation two);
the method is characterized in that the signal processing system (10) obtains the swing angle theta' of the standard beam (3) according to the received continuous electric signals by the following steps:
when the linear frequency modulation laser (5) continuously emits linear frequency modulation laser at an incidence angle theta0When the light is obliquely incident to the plane standard mirror (7), the incident light field E (t) of the plane standard mirror (7) is as follows:
E(t)=E0exp{i(ω0t+k′t2) A (formula three) is calculated,
wherein,for the rate of change of the bandwidth of the modulation, T is the period of the modulation, △ F isBandwidth of modulation, E0For the amplitude of the incident light field, t is time, omega0For the incident field angle frequency, i represents an imaginary number,
setting the optical path of the linear frequency modulation laser reaching the front surface of the plane standard mirror (7) as l, and then the linear frequency modulation laser reaches the reflected light field E of the front surface of the plane standard mirror (7) at the time of t-l/c1(t) is:
E 1 ( t ) = α 1 E 0 exp { i [ ω 0 ( t - l c ) + k ′ ( t - l c ) 2 ] } (formula four) of the reaction solution,
the light transmitted by the front surface of the plane standard mirror (7) is reflected and refracted for multiple times by the front surface and the back surface of the plane standard mirror (7) at different times, and the light field of the reflected light obtained by each reflection is as follows:
E 2 ( t ) = α 2 E 0 exp { i [ ω 0 ( t - l + 2 n d c o s θ c ) + k ′ ( t - l + 2 n d c o s θ c ) 2 + 2 ω 0 n d c o s θ c ] } E 3 ( t ) = α 3 E 0 exp { i [ ω 0 ( t - l + 4 n d c o s θ c ) + k ′ ( t - l + 2 n d c o s θ c ) 2 + 4 ω 0 n d c o s θ c ] } · · · E m ( t ) = α m E 0 exp { i [ ω 0 ( t - l + 2 ( m - 1 ) n d cos θ c ) + k ′ ( t - l + 2 ( m - 1 ) n d cos θ c ) 2 + 2 ( m - 1 ) ω 0 n d c o s θ c ] } · · ·
(formula five) of the reaction solution,
wherein m is a non-negative integer α1=r,αm=ββ′r′(2m-3)(m is not less than 2), r is the reflectance when light enters the planar standard mirror (7) from the surrounding medium, β is the transmittance when light enters the planar standard mirror (7) from the surrounding medium, r 'is the reflectance of the rear surface of the planar standard mirror (7), β' is the transmittance when light enters the surrounding medium from the inside of the planar standard mirror (7), d is the thickness of the planar standard mirror (7), theta is the refraction angle, n is the refraction index of the planar standard mirror (7), c is the speed of light,
the total light field E' (t) received by the photodetector (9) is:
E′(t)=E1(t)+E2(t)+...+Em(t) +. - (equation six),
the photocurrent I output by the photodetector (9) is then:
I = η e h v 1 Z ∫ ∫ D 1 2 [ E 1 ( t ) + E 2 ( t ) + ... + E m ( t ) + ... ] [ E 1 ( t ) + E 2 ( t ) + ... + E m ( t ) + ... ] * d s (formula seven) of the reaction mixture,
wherein e is the electron electric quantity, Z is the intrinsic impedance of the surface medium of the photoelectric detector (9), eta is the quantum efficiency, D is the area of the photosensitive surface of the photoelectric detector (9), h is the Planck constant, v is the laser frequency, and the sign indicates complex conjugate,
obtaining the intermediate frequency current I according to the formulaIFComprises the following steps:
I I F = η e 2 h v 1 Z ∫ ∫ D Σ p = 0 m - 1 Σ j = 0 m - p ( E j ( t ) E j + p * ( t ) + E j * ( t ) E j + p ( t ) ) d s (the eighth formula),
substituting the formula four and the formula five into the formula eight, and arranging to obtain:
I I F = η e h v π Z E 0 2 Σ p = 0 m - 1 Σ j = 0 m - p α j + p α j cos ( 4 pk ′ n d cos θ c t - 4 pk ′ n d cos θ ( l + n d cos θ ) c 2 ) (the ninth formula),
fourier transform is carried out on the frequency difference of the intermediate frequency term in the formula nine to obtain the frequency f of the interference signalpComprises the following steps:
f p = 2 pk ′ n d c o s θ π c = K p c o s θ (formula ten) of the above-mentioned formula,
thereby obtaining a value of angle of refraction θ, where KpIs a proportionality coefficient, and
the refraction angle theta and the incidence angle theta can be known according to the law of refraction0The relationship of (1) is:
θ0arcsin (nsin θ) (formula eleven),
the incident angle theta can be known according to the geometrical relation of the incident light path0The relationship of the swing angle theta' with the standard beam (3) is as follows:
θ ′ = θ 0 2 = a r c s i n ( n s i n θ ) 2 (formula twelve),
and substituting the value of the swing angle theta 'of the standard beam (3) obtained in the formula twelve into the formula two to obtain the micro impulse I' generated by the action of the laser emitted by the pulse laser (1) and the working medium target (2).
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