CN103953574A - Shaft seal structure of low temperature pump and sealing gas control system of shaft seal - Google Patents
Shaft seal structure of low temperature pump and sealing gas control system of shaft seal Download PDFInfo
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- CN103953574A CN103953574A CN201410062603.4A CN201410062603A CN103953574A CN 103953574 A CN103953574 A CN 103953574A CN 201410062603 A CN201410062603 A CN 201410062603A CN 103953574 A CN103953574 A CN 103953574A
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Abstract
The invention discloses a shaft seal structure of a low temperature pump and a sealing gas control system of a shaft seal. The shaft seal structure of the low temperature pump comprises a sealing seat, wherein a labyrinth sleeve and a first sealing liner are arranged between the sealing seat and a pump shaft, the first sealing liner is positioned outside the labyrinth sleeve and is embedded in a shaft hole of the sealing seat, and a labyrinth type sealing pair is formed in a way that a comb-tooth structure arranged on the labyrinth sleeve is matched with a sealing groove, which runs out of the first sealing liner, on the first sealing liner due to mutual rotational running of the comb-tooth structure and the first sealing liner; the outer end of the sealing seat is provided with a shaft sleeve type check ring with a second sealing liner; the sealing seat is respectively provided with three air source connectors which are communicated with the labyrinth type sealing pair. According to the shaft seal structure disclosed by the invention, the low temperature pump can be used in a process technology which is capable of meeting continuous running and does not affect the medium purity, and the reliable running of the low temperature pump cannot be affected by the pressure fluctuation at an inlet of the low temperature pump.
Description
Technical field
What the present invention relates to is a kind of shaft seal structure and shaft seal blanket gas control system of cryopump, belongs to low temperature machinery.
Background technique
In existing cryogenic media circulation technology flow process, require cryopump to run without interruption continuously, require fed sheet of a media purity not to be affected simultaneously; Conventionally the type of shaft sealing of cryopump is: mechanical seal and packing seal can only discontinuity be used at low temperature (196 ° of C), cannot meet long-term requirement continuously, and mechanical seal and gland sealed non-metallic material experience wear can enter into the medium that cryopump is carried, thereby affect the purity of fed sheet of a media, because cryogenic media easily gasifies, molecular weight is little, easily leak outside, therefore common also cannot reliable sealing without gas type labyrinth seal, especially the inlet pressure for cryopump exists in the situation of fluctuation, more cannot realize reliable sealing.
Summary of the invention
The object of the invention is to overcome the deficiency that prior art exists, and provide a kind of for all kinds of cryogenic media circulation technology flow processs, can run without interruption continuously, and can guarantee shaft seal structure and the shaft seal blanket gas control system of the impregnable cryopump of fed sheet of a media purity simultaneously.
The object of the invention is to complete by following technical solution, the shaft seal structure of described cryopump, it comprises that one is nested with at pump shaft and is close to the sealing seat on the pump housing by axis hole, between described sealing seat and pump shaft, be provided with a labyrinth bush and be positioned at labyrinth bush outer and by interlocking the first sealing lining at sealing seat axis hole, the comb structure arranging on described labyrinth bush and the first sealing are lining with the seal groove of being run out of because of mutual rotation running-in by comb structure and coordinate and be formed with maze type sealing pair; The outer end of described sealing seat is provided with an axle sleeve type back-up ring with the second sealing lining; On described sealing seat, be respectively arranged with the gas source interface of maze type sealing pair described in San Ge UNICOM, and on described three gas source interfaces, connect respectively mixture pipe joint, labyrinth upstream pressure gas-tpe fitting and enter blanket gas pipe joint.
Described the first sealing lining and the second sealing lining are made by Babbitt material, and described the second sealing lining is embedded in axle sleeve type shield ring sleeve and is connected in the axle sleeve on sealing seat and sealing seat joins; On the axle sleeve contacting with the second sealing lining on described sealing seat, be also provided with comb structure, this comb structure and the second sealing lining 7 have been run out of seal groove because mutually rotating running-in, and cooperation is formed with the second maze type sealing pair that can stop shaft seal back-end sealing gas to leak outside; Described labyrinth upstream pressure gas-tpe fitting and two gas source interfaces that are connected mixture pipe joint of being connected with are opened near on the sealing seat of the pump housing, and another connects into the gas source interface of blanket gas pipe joint and is positioned on the sealing seat in outside of above-mentioned two gas source interfaces.
Described axle sleeve type back-up ring is pressed in by top on the shaft shoulder of pump shaft, and described sealing seat is bolted on pump housing shell, and makes pump shaft, axle sleeve type back-up ring labyrinth bush can do relative rotating relative to sealing seat under the drive of motor.
A kind of shaft seal blanket gas control system of the shaft seal structure for above-mentioned cryopump, this system mainly comprises: a precise pressure-reducing valve, needle type valve, three respectively with corresponding three interfaces of system and the sealing sources of the gas respectively of three gas source interfaces in shaft seal structure, described sealing source of the gas is connected with described precise pressure-reducing valve with filter by a reduction valve, and the setting by described precise pressure-reducing valve is connected in and enters blanket gas pipe joint shaft seal structure from the output of system first interface; Described precise pressure-reducing valve is connected with labyrinth upstream pressure gas-tpe fitting in shaft seal structure by system the second interface and obtains labyrinth upstream pressure; Described needle type valve is connected with the mixture pipe joint in shaft seal structure by system the 3rd interface, and by described needle type valve, controls pressure that mixed gas goes out and discharge after lower than setting value of labyrinth upstream pressure.
The described blanket gas pressure from the output of system first interface is greater than labyrinth upstream pressure 0.1 ~ 0.4bar; The pressure that described mixed gas goes out is less than labyrinth upstream pressure 0.1 ~ 0.2bar.
The present invention has rational in infrastructure, easy to use, reliable, can be used for all kinds of cryogenic media circulation technology flow processs, can run without interruption continuously, and can guarantee the features such as fed sheet of a media purity is unaffected simultaneously.
Accompanying drawing explanation
Fig. 1 is shaft seal structure schematic diagram of the present invention.
Fig. 2 is the control system long splice composition of shaft seal blanket gas of the present invention.
Embodiment
Below in conjunction with accompanying drawing, the present invention will be described in detail: shown in Fig. 1, the shaft seal structure of cryopump of the present invention, it comprises that one is nested with at pump shaft 1 and is close to the sealing seat 3 on the pump housing 2 by axis hole, between described sealing seat 3 and pump shaft 1, be provided with a labyrinth bush 4 and be positioned at labyrinth bush 4 outer and by interlocking the first sealing lining 5 at sealing seat axis hole, the comb structure arranging on described labyrinth bush 4 coordinates and is formed with maze type sealing pair 6 with the seal groove of being run out of because of mutual rotation running-in by comb structure on the first sealing lining 5; The outer end of described sealing seat 3 is provided with an axle sleeve type back-up ring 8 with the second sealing lining 7; On described sealing seat 3, be respectively arranged with the gas source interface of maze type sealing pair 6 described in San Ge UNICOM, and on described three gas source interfaces, connect respectively mixture pipe joint 9, labyrinth upstream pressure gas-tpe fitting 10 and enter blanket gas pipe joint 11.
Described first sealing lining the 5 and second sealing lining 7 is made by Babbitt material, and described the second sealing lining 7 is embedded in axle sleeve type back-up ring 8 and is socketed in the axle sleeve on sealing seat 3 and joins with sealing seat 3; On described sealing seat 3 with on the second sealing lining 7 axle sleeves that contact, be also provided with comb structure, this comb structure and the second sealing lining 7 have been run out of seal groove because mutually rotating running-in, and cooperation is formed with the second maze type sealing pair 21 that can stop shaft seal back-end sealing gas to leak outside; Described labyrinth upstream pressure gas-tpe fitting 10 and two gas source interfaces that are connected mixture pipe joint 9 of being connected with are opened near on the sealing seat 3 of the pump housing, and another connects into the gas source interface of blanket gas pipe joint 11 and is positioned on the sealing seat 3 in outside of above-mentioned two gas source interfaces.
Axle sleeve type back-up ring 8 of the present invention is pressed on the shaft shoulder of pump shaft 1 by top by a gasket seal 20, described sealing seat 3 is bolted on pump housing shell 2, and makes pump shaft 1, axle sleeve type back-up ring 8, labyrinth bush 4 can do relative rotating relative to sealing seat 3 under the drive of motor.
Pump shaft 1 is under the rotation of motor, drive labyrinth bush 4, axle sleeve type back-up ring 8 and gasket seal 20 to rotate in the sealing seat 3 that is embedded with the first sealing lining 5, on labyrinth bush 4, there is broach, after rotating running-in, on the first sealing lining 5 of sealing seat 3, run out of seal groove, form maze type sealing pair with the broach of labyrinth bush 4, stop impeller side high-pressure medium to leak outside.
Shown in Fig. 2, the shaft seal blanket gas control system of the shaft seal structure for above-mentioned cryopump of the present invention, this system mainly comprises: a precise pressure-reducing valve 12, needle type valve 13, three respectively with corresponding three interfaces of system 14,15,16 and the sealing sources of the gas 17 respectively of three gas source interfaces in shaft seal structure, described sealing source of the gas 17 is connected with described precise pressure-reducing valve 12 with filter 19 by a reduction valve 18, and the setting by described precise pressure-reducing valve 12 is exported to be connected in from system first interface 14 and entered blanket gas pipe joint 11 shaft seal structure; Described precise pressure-reducing valve 12 is connected with labyrinth upstream pressure gas-tpe fitting 10 in shaft seal structure by system the second interface 15 and obtains labyrinth upstream pressure; Described needle type valve 13 is connected with the mixture pipe joint 9 in shaft seal structure by system the 3rd interface 16, and the pressure being gone out by described needle type valve 13 control mixed gass discharges after lower than setting value of labyrinth upstream pressure; In Fig. 2, also have labyrinth upstream pressure table 22, blanket gas to enter pressure gauge 23, mixture pressure table 24.
The described blanket gas pressure from 14 outputs of system first interface is greater than labyrinth upstream pressure 0.1 ~ 0.4bar; The pressure that described mixed gas goes out is less than labyrinth upstream pressure 0.1 ~ 0.2bar.
Labyrinth of the present invention upstream pressure is the pressure of being drawn by the impeller back side, representative be impeller side pressure medium, it is as signal source; First sealing source of the gas passes through reduction valve 18 and filter 19, and the pressure that the setting output blanket gas of process precise pressure-reducing valve 12 enters is greater than labyrinth upstream pressure.And precise pressure-reducing valve 12 is under the effect in upstream pressure signal source, labyrinth, the blanket gas entrance pressure power of output keeps a steady state value with labyrinth upstream pressure all the time, is also that the pressure that blanket gas enters fluctuates along with the fluctuation of labyrinth upstream pressure.Blanket gas is done sealing use enter entering in shaft seal seat 3, the high-pressure medium that impeller side is leaked enters at mixed gas, to go out the shaft seal position that this pipe joint draws and reach balance with blanket gas after the decompression of labyrinth, and the mixed gas of generation goes out discharge by mixed gas.Meanwhile, in shaft seal blanket gas control system, by needle type valve 13, control mixed gas and go out pressure lower than setting value of labyrinth upstream pressure.By realizing reliable shaft seal above, and pressure reduction can guarantee that in range of set value blanket gas does not enter impeller active side, can not affect purity.Higher for purity requirement, sealing source of the gas can draw the own medium of carrying from cryopump, reaches high-purity requirement.
Claims (5)
1. the shaft seal structure of a cryopump, it comprises that one is nested with at pump shaft and is close to the sealing seat on the pump housing by axis hole, it is characterized in that being provided with between described sealing seat and pump shaft a labyrinth bush and be positioned at labyrinth bush outer and by interlocking the first sealing lining at sealing seat axis hole, the comb structure arranging on described labyrinth bush and the first sealing are lining with the seal groove of being run out of because of mutual rotation running-in by comb structure and coordinate and be formed with maze type sealing pair; The outer end of described sealing seat is provided with an axle sleeve type back-up ring with the second sealing lining; On described sealing seat, be respectively arranged with the gas source interface of maze type sealing pair described in San Ge UNICOM, and on described three gas source interfaces, connect respectively mixture pipe joint, labyrinth upstream pressure gas-tpe fitting and enter blanket gas pipe joint.
2. the shaft seal structure of cryopump according to claim 1, it is characterized in that described the first sealing lining and the second sealing lining 7 make by Babbitt material, described the second sealing lining is embedded in axle sleeve type shield ring sleeve and is connected in the axle sleeve on sealing seat and sealing seat 3 joins; On the axle sleeve contacting with the second sealing lining on described sealing seat, be also provided with comb structure, this comb structure and the second sealing lining have been run out of seal groove because mutually rotating running-in, and cooperation is formed with the second maze type sealing pair that can stop shaft seal back-end sealing gas to leak outside; Described labyrinth upstream pressure gas-tpe fitting and two gas source interfaces that are connected mixture pipe joint of being connected with are opened near on the sealing seat of the pump housing, and another connects into the gas source interface of blanket gas pipe joint and is positioned on the sealing seat in outside of above-mentioned two gas source interfaces.
3. the shaft seal structure of cryopump according to claim 1 and 2, it is characterized in that axle sleeve type back-up ring is pressed on the shaft shoulder of pump shaft by top, described sealing seat is bolted on pump housing shell, and makes pump shaft, axle sleeve type back-up ring labyrinth bush can do relative rotating relative to sealing seat under the drive of motor.
4. the shaft seal blanket gas control system for the shaft seal structure of cryopump described in described claim 1 or 2, it is characterized in that this system mainly comprises: a precise pressure-reducing valve, needle type valve, three respectively with corresponding three interfaces of system and the sealing sources of the gas respectively of three gas source interfaces in shaft seal structure, described sealing source of the gas is connected with described precise pressure-reducing valve with filter by a reduction valve, and the setting by described precise pressure-reducing valve is connected in and enters blanket gas pipe joint shaft seal structure from the output of system first interface; Described precise pressure-reducing valve is connected with labyrinth upstream pressure gas-tpe fitting in shaft seal structure by system the second interface and obtains labyrinth upstream pressure; Described needle type valve is connected with the mixture pipe joint in shaft seal structure by system the 3rd interface, and by described needle type valve, controls pressure that mixed gas goes out and discharge after lower than setting value of labyrinth upstream pressure.
5. shaft seal blanket gas control system according to claim 4, is characterized in that the described blanket gas pressure from the output of system first interface is greater than labyrinth upstream pressure 0.1 ~ 0.4bar; The pressure that described mixed gas goes out is less than labyrinth upstream pressure 0.1 ~ 0.2bar.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410062603.4A CN103953574B (en) | 2014-02-25 | 2014-02-25 | The shaft seal structure of a kind of cryopump and axle are sealed gas control system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410062603.4A CN103953574B (en) | 2014-02-25 | 2014-02-25 | The shaft seal structure of a kind of cryopump and axle are sealed gas control system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103953574A true CN103953574A (en) | 2014-07-30 |
| CN103953574B CN103953574B (en) | 2016-11-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410062603.4A Active CN103953574B (en) | 2014-02-25 | 2014-02-25 | The shaft seal structure of a kind of cryopump and axle are sealed gas control system |
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| CN (1) | CN103953574B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108626403A (en) * | 2018-06-25 | 2018-10-09 | 杭州新亚低温科技有限公司 | A kind of twin-stage phase transformation labyrinth seal structure |
| CN108644120A (en) * | 2018-06-25 | 2018-10-12 | 杭州新亚低温科技有限公司 | A kind of self-balanced multiple-stage cryogenic pump |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11280687A (en) * | 1998-03-25 | 1999-10-15 | Mitsubishi Heavy Ind Ltd | High temperature pump |
| CN201152278Y (en) * | 2007-08-31 | 2008-11-19 | 孙剑琨 | Micropressure labyrinth seal energy saving pump |
| CN202012501U (en) * | 2010-12-15 | 2011-10-19 | 南通大通宝富风机有限公司 | Combined type shaft end seal |
| CN202612193U (en) * | 2012-06-15 | 2012-12-19 | 阳谷祥光铜业有限公司 | Liquid argon pump and hydrogen-free argon generating system |
| CN202811475U (en) * | 2012-10-18 | 2013-03-20 | 武汉钢铁(集团)公司 | Sealing device applied to low temperature centrifugal liquid pump |
-
2014
- 2014-02-25 CN CN201410062603.4A patent/CN103953574B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11280687A (en) * | 1998-03-25 | 1999-10-15 | Mitsubishi Heavy Ind Ltd | High temperature pump |
| CN201152278Y (en) * | 2007-08-31 | 2008-11-19 | 孙剑琨 | Micropressure labyrinth seal energy saving pump |
| CN202012501U (en) * | 2010-12-15 | 2011-10-19 | 南通大通宝富风机有限公司 | Combined type shaft end seal |
| CN202612193U (en) * | 2012-06-15 | 2012-12-19 | 阳谷祥光铜业有限公司 | Liquid argon pump and hydrogen-free argon generating system |
| CN202811475U (en) * | 2012-10-18 | 2013-03-20 | 武汉钢铁(集团)公司 | Sealing device applied to low temperature centrifugal liquid pump |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108626403A (en) * | 2018-06-25 | 2018-10-09 | 杭州新亚低温科技有限公司 | A kind of twin-stage phase transformation labyrinth seal structure |
| CN108644120A (en) * | 2018-06-25 | 2018-10-12 | 杭州新亚低温科技有限公司 | A kind of self-balanced multiple-stage cryogenic pump |
| CN108644120B (en) * | 2018-06-25 | 2024-01-05 | 杭州新亚低温科技有限公司 | Self-balancing multistage cryogenic pump |
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| Publication number | Publication date |
|---|---|
| CN103953574B (en) | 2016-11-23 |
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