CN103913184A - A Tunable Optical Fiber Sensor with Thin Film Multi-cavity Structure - Google Patents
A Tunable Optical Fiber Sensor with Thin Film Multi-cavity Structure Download PDFInfo
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- CN103913184A CN103913184A CN201310019643.6A CN201310019643A CN103913184A CN 103913184 A CN103913184 A CN 103913184A CN 201310019643 A CN201310019643 A CN 201310019643A CN 103913184 A CN103913184 A CN 103913184A
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- Prior art keywords
- pressure
- temperature
- cavity
- sensor
- suspension
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 12
- 239000010409 thin film Substances 0.000 title claims 2
- 239000011797 cavity material Substances 0.000 claims abstract description 50
- 238000012360 testing method Methods 0.000 claims abstract description 44
- 239000012528 membrane Substances 0.000 claims abstract description 10
- 239000000463 material Substances 0.000 claims abstract description 5
- 239000000725 suspension Substances 0.000 claims abstract 17
- 239000000835 fiber Substances 0.000 claims description 8
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 239000010408 film Substances 0.000 claims 7
- 150000002739 metals Chemical class 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
- 238000009662 stress testing Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 description 4
- 239000000523 sample Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000002360 explosive Substances 0.000 description 2
- 239000002210 silicon-based material Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 208000002925 dental caries Diseases 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 230000008450 motivation Effects 0.000 description 1
- 230000008447 perception Effects 0.000 description 1
- 238000011897 real-time detection Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
The invention provides a tunable optical fiber sensor with a film multi-cavity structure, which is characterized in that: the sensor is divided into a test cavity and a compensation cavity, wherein a suspension film positioned between the two cavities is used for reflecting light waves so as to sense pressure change and can be used for testing pressure and temperature; exerting pre-strain on the suspension membrane by adjusting the pressure of the compensation cavity, so as to adjust the test range of the sensor; when the pressures of the two cavities are equal or close, the air pressures of the two cavities can be changed simultaneously due to temperature change, so that the pressure change caused by the temperature acting on the two sides of the suspension membrane can be offset, and the influence of the temperature on the pressure test is reduced; when the pressure difference between the two cavities is large or the pressure of one cavity is kept constant, the pressure change caused by the temperature on the two sides of the suspension membrane cannot be completely offset, and the sensor can be used for testing the temperature change; in addition, when the thermal expansion coefficients of the cavity material and the suspension film material are different, the temperature change can also cause the suspension film to deform, thereby sensing the temperature change.
Description
Technical field
The present invention relates to a kind of tunable optical fiber sensor, can be used for detected pressures, vibration and temperature.
Background technology
Under environment inflammable and explosive or that electromagnetic interference (EMI) is serious, carry out the real-time detection of pressure and temperature, the sensor based on electric signal is not suitable for using under these environment.Therefore, Fibre Optical Sensor is applied to the detection [IEEE Sensors Journal, vol.8, pp.1184-1193,2008] under above-mentioned environment by people.
Fibre Optical Sensor be taking light as carrier, optical fiber is medium, perception outer signals, has the advantages such as volume is little, lightweight, electrical insulating property is strong, anti-electromagnetic interference (EMI).Meanwhile, this sensor can bear the extreme conditions such as high temperature, high pressure and strong shock and vibration, can be used for the detection in the environment such as inflammable and explosive, high temperature and high pressure.
Fibre optic compression sensor can be divided into micro-curved, disappearance ripple coupled mode, film-type and grating type optical fiber etc.Wherein, film type pressure sensor, is to make film produce elastic deformation by pressure, changes the transmission direction [J.Micromech.Microeng., vol.15, pp.521-527,2005] of light wave.This sensor has high sensitivity, but test specification is (test specification is determined by film thickness, cannot change once device has just been prepared) of fixing.Therefore researching and developing test specification can flexible and can, simultaneously for detection of the Fibre Optical Sensor of temperature and pressure, be that wound of the present invention is ground motivation.
Summary of the invention
The present invention proposes " a kind of tunable optical fiber sensor with film multi-cavity structure ", and this sensor is divided into test chamber and compensated cavity, thereby the outstanding film wherein between two cavitys is for the light wave induction pressure of mirror based fiber optica device and the distortion that temperature causes.
Inventor has further investigation [IEEE Photonics Technology Letters, vol.16, pp.245-247,2004] to semiconductor optical mirror and outstanding film preparation, thereby has inspired generation of the present invention.The present invention can realize in the following manner:
Sensor construction of the present invention as shown in Figure 1.The light wave of optical fibre device outgoing turns back in optical fiber after being hanged film reflection, and is detected; When the pressure that is subject to when outstanding film both sides is unequal, outstanding film deforms (Fig. 2, Fig. 3), changes thereby reflect into into the light intensity of optical fiber.Test chamber can be open also can sealing; Compensated cavity is connected (Fig. 2) by pipeline with extraneous, and by this pipeline, compensated cavity is bled or ventilated, thereby regulates pressure in chamber to apply a prestrain to outstanding film.
Test chamber in the present invention can be installed elastic cover (Fig. 2), and ambient pressure can be applied in elastic cover, is then delivered on outstanding film by the test chamber of sealing; Therefore,, while testing large pressure (such as the pressure in buildings), cause damage thereby can avoid pressure to act directly on accurate outstanding film.
In the present invention, the deformation of outstanding film is relevant with the pressure differential △ P of outstanding film both sides; When the pressure in compensated cavity is P
0time, the test starting point of sensor is P
0(now the pressure of test chamber and compensated cavity equates, deformation does not occur outstanding film, as Fig. 1); When the pressure in compensated cavity becomes P
1time, test accordingly starting point and also will become P
1.Therefore, can change the P in compensated cavity by pipeline
0value, thus the starting point of mobile test scope plays the effect of tuning test specification.
Test chamber in the present invention can be sealing (Fig. 2); Initial pressure difference in test chamber and compensated cavity is △ P
0, environment temperature changes △ T and will cause two pressure differences in chamber to become (1+ △ T/T
0) × △ P
0(T
0for initial temperature), the pressure differential variation that therefore outstanding film both sides are subject to is proportional to △ T × △ P
0.
In the present invention, if △ is P
0approach zero (be pressure approach) in test chamber and compensated cavity, the pressure differential that corresponding temperature causes changes and (is proportional to △ T × △ P
0) also approach zero, thus the impact that temperature variation causes pressure test reduced.
In the present invention, if △ is P
0larger, the pressure difference value that outstanding film both sides are subject to is very sensitive to temperature, can be for probe temperature.
In the present invention, by changing the original pressure of compensated cavity, can regulate △ P
0the size of value; Thereby prepare thermally sensitive temperature sensor or temperature-resistant pressure transducer.
Test chamber in the present invention, can be open (now the pressure of test chamber is consistent with atmospheric pressure, temperature independent) (Fig. 3); Because compensated cavity seals, the pressure following temperature in compensated cavity and changing, thus cause the pressure differential of outstanding film both sides also to vary with temperature; Now, sensor can be used to probe temperature variation.
In the present invention, the deformation of outstanding film is also with the extruding of outstanding membrane plane direction with stretch relevant, in the time that the thermal expansivity of cavity material and outstanding membrane material has difference, temperature variation can make film be squeezed or stretch along its in-plane, cause outstanding film distortion (Fig. 3), thereby temperature sensor changes.
Brief description of the drawings
Accompanying drawing, it is incorporated into and becomes the part of this instructions, the embodiments of the invention of having demonstrated, and explain principle of the present invention with aforesaid summary together with detailed description below.
Fig. 1 is a kind of structural representation of sensor;
Fig. 2 is a kind of structural representation of sensor;
Fig. 3 is a kind of structural representation of sensor;
Embodiment
For making the content of technical scheme of the present invention more clear, describe the specific embodiment of the present invention in detail below in conjunction with technical scheme and accompanying drawing.
Example 1
First, between the test chamber of glass and compensated cavity, paste the outstanding film (Fig. 1) of a silicon, two chambeies are separated;
Then, in the time acting on external force in elastic cover and reduce, lid rises, and test chamber internal pressure reduces, outstanding film generation deformation (Fig. 2); Thereby the luminous power by outstanding film reflection back light fiber device changes.
Example 2
First, between stainless steel test chamber and compensated cavity, the outstanding film (Fig. 1) of metal, separates two chambeies;
Then,, by the tracheae inflation (Fig. 2) of compensated cavity, the pressure in compensated cavity is by P
0rise to P
1; Test zero point of pressure transducer is by P
0move to P
1; Realize the tuning of test specification.
Example 3
First, between the test chamber of silicon materials and compensated cavity, paste the outstanding film (Fig. 1) of silicon, two chambeies are separated;
Then, regulate the pressure in compensated cavity by the tracheae of compensated cavity, the pressure that outstanding film both sides are subject to equates (Fig. 1); Now, the pressure change in two chambeies that temperature variation causes equates, the effect of outstanding film is cancelled out each other, and temperature variation reduces the impact of pressure transducer.
Example 4
First, between plastic testing chamber and compensated cavity, the outstanding film (Fig. 3) of laminating material, separates two chambeies;
Then, test chamber is in communication with the outside (Fig. 3), and the pressure in compensated cavity is by P
0rise to P
1, test zero point of corresponding pressure transducer is by P
0move to P
1, realize the tuning of test specification.
Example 5
First, between aluminum test chamber and compensated cavity, paste the outstanding film (Fig. 3) of GaAs, two chambeies are separated;
Then, test chamber is in communication with the outside (Fig. 3), the pressure constant (equaling atmospheric pressure) in test chamber; In the time of temperature variation, the pressure in compensated cavity changes, and the pressure differential that outstanding film both sides are subject to also changes; Now, sensor can be used for probe temperature.
Example 6
First, between test chamber made of copper and compensated cavity, paste the outstanding film (Fig. 3) of a silicon, two chambeies are separated;
Then, test chamber is all communicated with (Fig. 3) with compensated cavity with the external world, the pressure constant (equaling atmospheric pressure) in two chambeies; In the time of temperature variation, because the thermal expansivity of copper and silicon materials is different, film is squeezed or stretches along its in-plane, thereby outstanding film deforms; Now, sensor can be used for probe temperature.
The above is know-why and instantiation that the present invention applies, the equivalent transformation doing according to conception of the present invention, as long as when its scheme of using does not exceed spiritual that instructions and accompanying drawing contain yet, and all should be within the scope of the invention, explanation hereby.
Claims (9)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310019643.6A CN103913184A (en) | 2013-01-04 | 2013-01-04 | A Tunable Optical Fiber Sensor with Thin Film Multi-cavity Structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310019643.6A CN103913184A (en) | 2013-01-04 | 2013-01-04 | A Tunable Optical Fiber Sensor with Thin Film Multi-cavity Structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103913184A true CN103913184A (en) | 2014-07-09 |
Family
ID=51039047
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310019643.6A Pending CN103913184A (en) | 2013-01-04 | 2013-01-04 | A Tunable Optical Fiber Sensor with Thin Film Multi-cavity Structure |
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|---|---|
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106152961A (en) * | 2015-01-16 | 2016-11-23 | 黄辉 | A kind of optical fiber strain sensor and preparation method thereof |
| CN108132093A (en) * | 2017-10-11 | 2018-06-08 | 黄辉 | A kind of suspended film optical fiber acoustic wave sensor and its preparation method |
| CN113405703A (en) * | 2021-06-16 | 2021-09-17 | 哲弗智能系统（上海）有限公司 | Optical sensor and fire alarm device |
-
2013
- 2013-01-04 CN CN201310019643.6A patent/CN103913184A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106152961A (en) * | 2015-01-16 | 2016-11-23 | 黄辉 | A kind of optical fiber strain sensor and preparation method thereof |
| CN106152961B (en) * | 2015-01-16 | 2019-02-12 | 黄辉 | A kind of optical fiber strain sensor and preparation method thereof |
| CN108132093A (en) * | 2017-10-11 | 2018-06-08 | 黄辉 | A kind of suspended film optical fiber acoustic wave sensor and its preparation method |
| CN113405703A (en) * | 2021-06-16 | 2021-09-17 | 哲弗智能系统（上海）有限公司 | Optical sensor and fire alarm device |
| CN113405703B (en) * | 2021-06-16 | 2024-04-09 | 哲弗智能系统（上海）有限公司 | Optical sensor and fire alarm device |
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Application publication date: 20140709 |