CN1039065C - Read amplifier - Google Patents

Abstract

An integrated circuit pattern of a sense amplifier is disclosed. The sense amplifier includes a sense circuit connected to a memory array and a column gate. The sense circuit includes N-MOSFETs cross-coupled between paired bit lines. The column gate includes an N-MOSFET for connecting the bit line to a data line and an N-MOSFET for connecting the other bit line to another data line. The N-MOSFET contained in the sense circuit and the N-MOSFET contained in the column gate are integrated in one element region. Further, the N-MOSFET contained in the sense circuit and the N-MOSFET contained in the column gate are integrated in another element region.

Description

Sensor amplifier

The present invention relates to sensor amplifier, relate in particular to and be used to semiconductor memory device, have the column selection of carrying out, amplify to flow into and be located at the signal of this bit line that lists that is selected, and this amplifying signal is sent to the sensor amplifier of the function of data line.

In the now typical dynamic semiconductor storing apparatus, bit line is to being connected on the memory cell, with sensor amplifier amplify this bit line to potential difference (PD), thereby amplify the signal that flows into bit line.

The loop of reading that comprises potential difference (PD) between readout bit line in the above-mentioned sensor amplifier.This loop of reading generally is coupled to form crossing one another by bit line by two transistors.

And bit line is to being divided into predetermined listing.When memory cell takes out data, or when data are write memory cell, utilize from the array selecting signal of column decoder output and select any bit line right from some bit line pairs.Based on such array selecting signal, for bit line pair and data line to being electrically connected or cutting off, bit line pair and data line between be provided with the row gate circuit.

Like this, the sensor amplifier that is used for semiconductor memory is by reading the loop and the row gate circuit constitutes.

Figure 15 is the general loop diagram of this sensor amplifier, is being one row (1 bit) shown in this Figure 15.

As shown in figure 15, be provided with bit line BL and the anti-phase bit line BBL (in patent specification, first letter b represent inversion signal) paired with it in semiconductor memory device, it is right to constitute bit line.

Read loop 4 and be connected to bit line, by N channel-style MOSFET (calling NMOS in the following text) Q1 and Q2 and P channel-style MOSFET (calling PMOS in the following text) Q5 and Q6 formation between BL, the BBL.

The source electrode of NMOS Q1 is connected in anti-phase read output signal line BSAN, and its drain electrode is connected in bit line BL, and its grid then is connected in anti-phase bit line BBL.The source electrode of NMOS Q2 is connected in anti-phase read output signal line BSAN, and its drain electrode is connected in anti-phase bit line BBL, and its grid is connected in bit line BL.The source electrode of PMOS Q5 is connected in read output signal line SAN, and its drain electrode is connected in bit line BL, and its grid is connected in anti-phase bit line BBL.The source electrode of DMOS Q6 is connected in read output signal line SAN, and its drain electrode is connected in anti-phase bit line BBL, and its grid is connected to bit line BL.

Again at bit line to BL, BBL with read the place of interconnecting in loop and data line is provided with column selection loop 5 between to DQ, BDQ.Column selection loop 5 is made of NMOS Q3 and NMOS Q4.

The source electrode of NMOS Q3 is connected to bit line BL, and its drain electrode is connected to data line DQ, and its grid is connected to array selecting signal line CSL, and the source electrode of NMOS Q4 is connected to anti-phase bit line BBL, and its drain electrode is connected to inversion signal line BDQ, and its grid is connected on the array selecting signal line CSL.

Each row of sensor amplifier as above-mentioned structure (1 bit) are made up of 4 NMOS and 2 PMOS.In order on semiconductor substrate, to form these transistors, must form transistor is separated from each other the required zone of coming, promptly the element separated region of field oxide film etc. obtains element area on substrate.Above-mentioned sensor amplifier needs 6 element areas basically for 6 elements will be arranged.When particularly only being conceived to NMOS loop part, need 4 element areas.

But above-mentioned sensor amplifier, particularly NMOS partly need 4 element areas, thereby cause the element separated region problem that shared area increases on substrate.Thereby make chip size be difficult to dwindle.

The present invention be directed to the problems referred to above point and make, thereby purpose provides and can reduce the sensor amplifier that can seek to dwindle chip size to the transistorized separated region that constitutes sensor amplifier.

In order to achieve the above object, the present invention has and comprises that one of current path is terminated on the bit line, the other end of current path is connected on the data line, the end that grid is connected to the 1st transistorized column selection device on the array selecting signal line and comprises current path is connected on the interlinkage of end of aforementioned the 1st transistorized current path and aforementioned bit line, and the other end of current path is connected on the read output signal line, grid is connected in and is the 2nd transistorized readout device on the distribution of the required reference potential signal flow warp of the signal of reading the aforementioned bit line of amplification inflow, and aforementioned the 2nd transistor of aforementioned the 1st transistor AND gate is arranged at an element area of setting on the semiconductor substrate respectively;

Sensor amplifier with said structure, the 1st transistor and the 2nd transistor are arranged at an element area that is set on the semiconductor substrate respectively, cut down the necessary element separated region in setting member zone with this, thus the purpose that can realize dwindling chip size.

Moreover, have said structure, even increase columns,, in this element area, repeat said structure as long as set an element area, just can access the necessary sensor amplifier of the columns of increase.

That is to say, use the sensor amplifier with said structure, along with the increase of the memory capacity of semiconductor memory device, the minification of its chip size also little by little improves automatically.

Be the simple declaration of each figure below:

Fig. 1 is the sensor amplifier figure of the present invention the 1st embodiment, and (a) figure is its general arrangement planimetric map of expression, and (b) figure is its equivalent circuit figure.

Fig. 2 is the sensor amplifier sectional view of the present invention the 1st embodiment, and (a) figure is the sectional view along the 2a-2a line among Fig. 1 (a), and (b) figure is the sectional view along the 2b-2b line among Fig. 1 (a).

Fig. 3 is to use the block scheme of dynamic type RAM of the sensor amplifier of the present invention the 1st embodiment.

Fig. 4 is the loop diagram that is shown in the sensor amplifier of Fig. 3.

Fig. 5 is the example planimetric map that expression expands the master plan shown in Fig. 1 (a) to 2 row.

Fig. 6 is the example planimetric map that expression expands the master plan shown in Fig. 1 (a) to 4 row

Fig. 7 is to use the block scheme of dynamic type RAM of the sensor amplifier of the 2nd embodiment of the present invention.

Fig. 8 is the loop diagram of sensor amplifier shown in Figure 7.

Fig. 9 is the master plan of the sensor amplifier of the present invention the 2nd embodiment.

Figure 10 is the equivalent circuit figure of the sensor amplifier of the present invention the 2nd embodiment.

Figure 11 is the example planimetric map that expression expands master plan shown in Figure 9 to 4 row.

Figure 12 is the planimetric map of gate pattern of the sensor amplifier of expression the present invention the 3rd embodiment.

Figure 13 is the planimetric map that forms the state of inner wiring layer on the expression figure shown in Figure 12.

Figure 14 is the equivalent circuit figure of Figure 12 and sensor amplifier shown in Figure 13.

Figure 15 is the loop diagram of general sensor amplifier.

Symbol description

1 ... memory cell array, 2 ... line decoder, 3 ... sensor amplifier, 4-1～4-4 ... read loop, 5-1～5-4 row gate circuit, 6 ... column decoder, 21 ... P type silicon substrate, 22 ... element separated region, 23 ... element area, 24 ... element area, 25-1～25-8 ... many silicon layers (grid), 27-1～27-9 ... n type diffused layer, 28-1～28-9 ... n type diffused layer, 30-1～30-2 ... many silicon layers (grid).

Embodiment

Below with reference to each figure, the present invention is illustrated with embodiment.This explanation relates to all figure, common part is used common symbol, avoided repeat specification.

Fig. 3 is to use the block diagram of formation summary of dynamic type RAM of the sensor amplifier of the present invention the 1st embodiment.

As shown in Figure 3, the memory cell matrix 1 that forms is arranged in setting by a plurality of dynamic type memory cell M11～M44 matrix form on semi-conductor chip.Here, memory cell M11～M44 is connected on the bit line by drain electrode, and 1 transistor, the 1 capacitor type unit that source electrode is connected on the capacitor constitutes.

Be configured in all being connected with common word line WL1～WL4 on the grid of the memory cell in the delegation, on the end separately of these word lines WL1～WL4, connecting line decoder 2 according to the selected row of being scheduled to of row address signal (not shown).

The same drain electrode that lists the memory cell of configuration is connected on the bit lines basically, but, in the present embodiment, the same drain electrode that lists the memory cell of configuration be connected in alternately bit line BL (BL1～BL4) and the anti-phase bit line BBL paired with this bit line BL (and BBL1～BBL4), by bit line to forming the shape that constitutes row.The right configuration shape of this bit line is a flexion bit line type.

On the end of bit line, connecting the row sensor amplifier 3 that amplifies potential difference (PD) between bit line to BL, BBL.This sensor amplifier 3 by each bit line to (row) go up to be provided with read loop 4-1～4-4 and row gate circuit 5-1～5-4 constitutes.

Read output signal SAN and inversion signal BSAN thereof supply with and respectively read loop 4-1～4-4.Each row gate circuit 5-1～5-4 then is provided with array selecting signal CSL1-CSL4.Be used for the distribution of these array selecting signals CSL1～CSL4 supply row gate circuit 5-1～5-4 is connected in column decoder 6.Column decoder 6 produces above-mentioned array selecting signal CSL1～CSL4 according to column address signal (not shown).

Only be conceived to one of them, be illustrated as follows: read loop 4-1 and be inserted between bit line BL1 and the BBL1, obtain read output signal SAN and inversion signal BSAN thereof and supply with thereby conducting reading the loop.

Equally, only be conceived to one of them the row gate circuit be illustrated, row gate circuit 5-1 be inserted in each bit line BL1 and BBL1 and each data line DQ and and the paired data line BDQ of this data line DQ between, obtain array selecting signal CSL-1 and supply with thereby conducting.

Data line is terminated at input circuit 7 to one of DQ, BDQ.This input circuit write fashionable, according to allowing write signal that input data Din is imported data line to DQ, BDQ.The importing data line is selected with column decoder the input data Din of DQ, BDQ, imports bit line to (row) by means of the row gate circuit that is in conducting state.Again the input data Din that imports these row is selected, then imports the memory cell collection storage that is in conducting state with line decoder.

Again, data line is connected in output enlarging section 8 to the other end of DQ, BDQ.Output enlarging section 8 is by being that the sensor amplifier 9 of differential input constitutes with data line to DQ, BDQ.When there is potential difference (PD) in sensor amplifier 9 between data line is to DQ, BDQ, export for example data Dout of level"1", when between data line is to DQ, BDQ, not having potential difference (PD), export for example data Dout of level "0".

Details to sensor amplifier 3 are illustrated below.And this explanation only is conceived to row and carries out.

Fig. 4 is the loop diagram of sensor amplifier 3 shown in Figure 3.

As shown in Figure 4, reading loop 4-1 has source electrode and is connected in anti-phase read output signal line BSAN, drain electrode is connected on the bit line BL1, and NMOS Q1-1 and source electrode that grid is connected on the anti-phase bit line BBL1 are connected in the NMOS Q2-1 that anti-phase read output signal line BSAN is last, drain electrode is connected on the bit line BBL1, grid is connected in bit line BL1.And, being provided with source electrode among the amplifying return circuit 4-1 reading of this embodiment is connected to read output signal line SAN, drain electrode and is connected in PMOS Q5-1 and the source electrode that bit line BL1, grid be connected to anti-phase bit line BBL1 and is connected to read output signal line SAN, drain electrode is connected to the PMOS Q6-1 that bit line BBL1, grid are connected to bit line BL1, becomes the cmos type amplifying return circuit of reading.

Again, row gate circuit 5-1 is connected to bit line BL1 by source electrode, drain electrode is connected to NMOS Q3-1 and the source electrode that data line DQ, grid be connected to array selecting signal line CSL1 and is connected in anti-phase bit line BBL1, and drain electrode is connected in oppisite phase data line BDQ1, and the NMOS Q4-1 that grid is connected to array selecting signal line CSL1 constitutes.

In possessing the dynamic type RAM that the sensor amplifier 3 of as above constructing is arranged, the present invention improves the chip size minification for the inactive area of the cancellation element of trying one's best, and for this reason, the element General Arrangement of sensor amplifier is pressed formation shown in Figure 1.

Fig. 1 is the sensor amplifier figure of the present invention the 1st embodiment, (a) is its general arrangement planimetric map, and (b) figure is its equivalent circuit figure.And Fig. 2 is the sensor amplifier sectional view of the present invention the 1st embodiment, and (a) figure is the sectional view along the 2a-2a line among Fig. 1 (a), and (b) figure is the sectional view along the 2b-2b line among Fig. 1 (a).

At Fig. 1 (a), in the sensor amplifier 3 particularly shown in Figure 3, the NMOS part of loop 4-1 and the General Arrangement of row gate circuit 5-1 are read in demonstration.That is the part of the loop shown in the solid line among Fig. 1 (b).

As Fig. 1 (a), Fig. 2 (a) and (b) respectively shown in, at the surf zone of P type silicon substrate 21, form the element separated region 22 that constitutes with field oxide film etc.On the surface of substrate 21, with these element separated region 22 difference demarcation element zones 23 and 24.On element area 23, isolate the electric conductivity polysilicon layer 25-1 and the 25-2 of the grid (gate) that forms MOSFET mutually, same, also mutual electric conductivity polysilicon layer 26-1 and the 26-2 that becomes the grid of MOS-FET isolator on element area 24.Zone beyond the part of covering in element area 23, by polysilicon layer 25-1 and 25-2 forms n type diffused layer 27-1～27-3, and these diffusion layers 27-1～27-3 works as source electrode or the drain electrode of MOSFET respectively.Equally, the element area 24 beyond the part of being covered by polysilicon layer 26-1 and 26-2 also forms n type diffused layer 28-1～28-3, works as source electrode or the drain electrode of MOSFET respectively.

General Arrangement shown in Fig. 1 (a) is described as follows, and the NMOSQ1-1 and the Q3-1 that are connected to bit line BL1 are located at element area 24 respectively.It is the MOSFET portion of grid that NMOS Q1-1 is formed at polysilicon layer 26-2, and it is the MOSFET portion of grid that NMOS Q3-1 is formed at polysilicon layer 26-1.

Moreover it is last, general mutually that the source electrode of the drain electrode of NMOS Q1-1 and NMOS Q3-1 is located at a n type diffused layer 28-2.This diffusion layer 28-2 is connected in bit line BL1.And n type diffused layer 28-1 is connected on the data line DQ, and n type diffused layer 28-2 is connected on the anti-phase read output signal line BSAN.

On the one hand, NMOS Q2-1 and the Q4-1 that is connected in anti-phase bit line BBL1 is located at element area 23 respectively.It is the MOSFET portion of grid that NMOS Q2-1 is formed at polysilicon layer 25-2.On the other hand, to be formed at polysilicon layer 25-1 be the MOSFET portion of grid to NMOS Q4-1.

The source electrode of the drain electrode of NMOS Q2-1 and NMOS Q4-1, with above-mentioned the same, it is last, general mutually to be located at a n type diffused layer 27-2.So diffusion layer 27-2 is connected on the anti-phase bit line BBL1.And n type diffused layer 27-1 is connected on the oppisite phase data line BDQ, and n type diffused layer 27-2 is connected on the anti-phase read output signal line BSAN.

And to the loop feature shown in the with dashed lines among Fig. 1 (b), promptly read the PMOS part of loop 4-1, specially diagram is not come out.For example, in P type silicon substrate 21, form the recessed district of N type, on this recessed zone, form the element separated region with the demarcation element zone.Then, in the element area of this delimitation, form PMOS Q5-1 and Q6-1 respectively.

General Arrangement with said structure expands the Fig. 5 that is illustrated in of 2 row (2 bit) to.

As shown in Figure 5, the situation that expands 2 row to is exactly the General Arrangement shown in Fig. 1 (a) basically, and along the part of diffusion layer 27-3 and 28-3, i.e. the upset of A-A line shown in the figure repeats to get final product.

As shown in Figure 5, the pattern that has illustrated with reference to Fig. 1 in element area 24, is provided with NMOS Q1-2 and Q3-2 along the upset of A-A line.Here, it is the MOSFET portion of grid that NMOS Q1-2 is formed at polysilicon layer 26-3, and it is the MOSFET portion of grid that NMOS Q3-2 is formed at polysilicon layer 26-4.So the source electrode of the drain electrode of NMOS Q1-2 and NMOS Q3-2 is located at same n type diffused layer 28-4, and is general mutually.This diffusion layer 28-4 is connected to bit line BL2.And the source electrode of the source electrode of NMOS Q1-1 and NMOS Q1-2 is located at same n type diffused layer 28-3, and is general mutually.This diffusion layer 28-3 is connected to anti-phase read output signal line BSAN.

Equally, at element area 23 NMOS Q2-2 and Q4-2 are set.It is the MOSFET portion of grid that NMOS Q2-2 is formed at polysilicon layer 25-3, and it is the MOSFET portion of grid that NMOS Q4-2 is formed at polysilicon layer 25-4.Moreover the source electrode of the drain electrode of NMOSQ2-2 and NMOS Q4-2 is located at same n type diffused layer 27-4, general mutually.Moreover the source electrode of NMOS Q2-1 and the source electrode of NMOSQ2-2 are located at same n type diffused layer 27-3, general mutually.

Like this, the device that the needs 2 that constitute with the pattern shown in Fig. 1 (a) are listed as need not increase the element area number, only need repeat this pattern to get final product.In other words, correspondence is read the increase of amplification, and element area 23 and 24 prolongs respectively and gets final product, thereby can dwindle chip size.Moreover, compare with the structure shown in Fig. 1 (a), all form the required separated region of element area separation owing to there is no need each row, its minification is just higher.

Fig. 6 is the example that general arrangement pattern shown in Fig. 1 (a) is expanded again to the situation of 4 row.

As shown in Figure 6, when expanding 4 row to, 2 row patterns shown in Figure 5 are repeated and can realize according to former state.At this moment, it is shared that the drain electrode of the drain electrode of NMOS Q4-2 and NMOS Q4-3 is located at that same n type diffused layer 27-5 is shared, same n type diffused layer 28-5 is located in the drain electrode of the drain electrode of NMOS Q3-2 and NMOSQ3-3.

Like this, identical when expanding 4 situations about being listed as with 2 row to, the element area number does not increase yet.

Like this, with the pattern shown in Fig. 1 (a), in upset of identity element zone or repetition, columns be increased to 8 row (bit), 16 row (bit), 32 row (bit) ... even columns (bit) increases always, required sensor amplifier also can obtain in the identity element zone respectively in the row that increase.

And, much less, use the present invention, not only can corresponding 8 or 16 byte unit, and can corresponding various numbers.

Sensor amplifier to the present invention the 2nd embodiment is illustrated below.

Fig. 7 is to use the block diagram that roughly constitutes of dynamic type RAM of the sensor amplifier of the present invention the 2nd embodiment.

Dynamic type RAM shown in Figure 7 is different with dynamic type RAM shown in Figure 3, and difference is data line to picture DQ1, and BDQ1 and DQ2, BDQ2 are provided with many groups like that, from many groups line to output data Dout1, Dout2 respectively.Be commonly referred to as bit architecture.

Fig. 8 illustrates the loop diagram of the sensor amplifier 3 among the sort of dynamic type RAM.

As shown in Figure 8, array selecting signal line CSL1 is connected to row gate circuit 5-1 and row gate circuit 5-2.With this array selecting signal is provided jointly by 2 row.Contained bit line pairs in these row by row gate circuit 5-1, is connected to data line to DQ1, BDQ1.Another is connected to data line to DQ2, BDQ2 to by row gate circuit 5-2.

In having the dynamic type RAM of multidigit structure that constitutes as above-mentioned sensor amplifier 3, in order to improve the minification of wafer size, the element general arrangement pattern of sensor amplifier 3 is by formation shown in Figure 9.

As shown in Figure 9, NMOS Q1-1, Q1-2, Q3-1 and the Q3-2 that is connecting current path on bit line BL1 and the BL2 is arranged at respectively in the element area 24.

It is that MOSFET portion, the NMOS Q3-1 of grid be formed at polysilicon layer 26-1 is the MOSFET portion of grid that NMOS Q1-1 is formed at polysilicon layer 26-2.Again, it is the MOSFET portion of grid that NMOS Q1-2 is formed at polysilicon layer 26-3, and it is the MOSFET portion of grid that NMOS Q3-2 is formed at polysilicon layer 26-4.On polysilicon layer 26-2, connect anti-phase bit line BBL1, connecting anti-phase bit line BBL2 on the polysilicon layer 26-3.Again, polysilicon layer 26-1 and polysilicon layer 26-4 are connected on respectively on the 1st column selection line CSL1, thereby both intercommunications.

The source electrode of the drain electrode of NMOS Q1-1 and NMOS Q3-1 is located on the n type diffused layer 28-2, and 1 n type diffused layer 28-3 is located in the drain electrode of the source electrode of NMOS Q1-1 and NMOS Q1-2.The drain electrode of the source electrode of NMOS Q1-2 and NMOS Q3-2 is located on the n type diffused layer 28-4.N type diffused layer 28-2 is connected in bit line BL1, and n type diffused layer 28-3 is connected in anti-phase read output signal line BSAN, and n type diffused layer 28-4 is connected to bit line BL2.

Again, the n type diffused layer 28-1 that becomes the drain electrode of NMOS Q3-1 is connected to data line DQ1 on one side, and the n type diffused layer 28-5 that becomes the drain electrode of NMOS Q3-2 is connected to the data line DQ2 of another side.

The NMOS Q2-1 that is connecting current circuit on anti-phase bit line BBL1 and the BBL2, Q2-2, Q4-1 and Q4-2 are located at respectively in the element area.

It is the MOSFET portion of grid that NMOS Q2-1 is formed at polysilicon layer 25-2, and it is the MOSFET portion of grid that NMOS Q4-1 is formed at polysilicon layer 25-1.And NMOS Q2-2 to be formed at polysilicon layer 25-3 be the MOSFET portion of grid, it is the MOSFET portion of grid that NMOS Q4-2 is formed at polysilicon layer 25-4.On polysilicon layer 25-2, connecting bit line BL1.Connect bit line BL2 on the polysilicon layer 25-3, again, connecting the 1st column selection line CSL1 on polysilicon layer 25-1 and the polysilicon layer 25-4 respectively, thus also intercommunication.

The source electrode of the drain electrode of NMOS Q2-1 and NMOS Q4-1 is located on the n type diffused layer 27-2, and the source electrode of the drain electrode of NMOS Q2-2 and NMOS Q4-2 is located at 1 n type diffused layer 27-4.N type diffused layer 27-2 is connected to anti-phase bit line BBL1, and n type diffused layer 27-3 is connected to anti-phase read output signal line BSAN, and n type diffused layer 27-4 is connected to anti-phase bit line BBL2.

Again, the n type diffused layer 27-1 that becomes the drain electrode of NMOS Q4-1 is connected to oppisite phase data line BDQ1, and the n type diffused layer 27-5 that becomes the drain electrode of NMOS Q4-2 is connected to oppisite phase data line BDQ2.

Figure 10 is the equivalent circuit figure of general arrangement pattern shown in Figure 9.

At Figure 10, the loop feature shown in the solid line represents that pattern shown in Figure 9 partly.And the loop portion shown in the dotted line is the part that is made of PMOS, does not express especially for this pattern.

The examples that general arrangement pattern with said structure is expanded as 4 row (4 bit) are shown in Figure 11.

As shown in figure 11, expanded as for 4 whens row, identical with above-mentioned the 1st embodiment, be along the part of diffusion layer 27-5 and 28-5, promptly repeat to get final product basically general arrangement pattern shown in Figure 9 along the line of B-B shown in the figure.

Moreover, expand as 8 situations about being listed as, though not shown.As long as pattern shown in Figure 11 is repeated.

It is following that more suitably pattern when integrated is illustrated as the 3rd embodiment sensor amplifier of the present invention.This 3rd embodiment is illustrated the situation of the device that is applied in the multidigit structure that the 2nd embodiment is illustrated as an example.

Figure 12 is the planimetric map of gate pattern of the sensor amplifier of expression the 3rd embodiment.Figure 13 is illustrated in the planimetric map that forms the state of inner wiring layer on the pattern shown in Figure 12, and Figure 14 is its equivalent circuit figure.

As shown in figure 12, element area 23 is separated by element separated region 22 with element area 24 and is formed in the silicon substrate.Element area 23 and element area 24 parallel configurations.

Polysilicon layer 25-1,25-4,26-1 and 26-4 that the 1st column selection line CSL1 is connecting form by a polysilicon layer 30-1 is whole respectively.Moreover polysilicon layer 25-5,25-8,26-5 and 26-8 that the 2nd column selection line CSL2 is connecting form by a polysilicon layer 30-2 is whole respectively.These polysilicon layers 30-1 and polysilicon layer 30-2 are machined on the straight line respectively in relative part, and mutually close.Other polysilicon layers on element area 23 or element area 24 midway, along the vertically bending in the plane of passage.

And for example shown in Figure 13, bit line BL1 and BL4, anti-phase line BBL1～BBL4 be laterally being formed by for example the 1st layer of aluminium lamination (1A1) along the passage of NMOS respectively.Data line DQ1, DQ2, oppisite phase data line BDQ1, BDQ2 are configured in respectively on element area 23 and 24, simultaneously along the passage of NMOS vertically, form by for example the 2nd layer of aluminium lamination (2A1).

Moreover the square frame C that marks at the dot-and-dash line shown in Figure 12～Figure 14 represents and the corresponding part of pattern shown in Figure 9.

The sensor amplifier of said structure at first is whole each polysilicon layer (grid) that forms the common connection of array selecting signal line on a multilayer crystal layer, so reduce the contact hole number with this.

Again,, can expand the grid width of NMOS, thereby the energising ability of NMOS is increased with this polysilicon layer (grid) vertical bending to passage on element area.

Again, be configured to this with element area 23 and element area 24 are parallel, as marking specially well on Figure 13 and Figure 14, between pair of bit lines BL, BBL, NMOS, for example NMOS Q1-1, the Q2-1 that are connected on above them can dispose respectively.Make the parallel pattern of element area 23 and element area 24 like this, bit line BL and BBL near each other be arranged on the repeats bits line style device of memory cell in capable effective especially.

Moreover, be machined on the straight line respectively at polysilicon layer 30-1 and polysilicon layer 30-2 part relative to each other, and near each other.This meaning track data line contact hole can be adjusted ground formation with respect to polysilicon layer 30-1 and polysilicon layer 30-2 oneself.Patterning case under the state that 3-tier architecture forms like this obtains polysilicon layer 30-1 that the insulation course of nitrogen silicon fiml forms and the pattern of 30-2 at an upper portion thereof.Then, the sidewall at them forms sidewall spacer.In this sidewall spacer, also contain silicon nitride film.

Like this with contain nitride film insulation course as the etch obstacle cover respectively polysilicon layer 30-1 and 30-2 around.In case become such structure, even the perforate of contact hole appears on polysilicon layer 30-1 and the 30-2, polysilicon layer 30-1 and 30-2 are not etched because of the protection of corroding obstacle yet.Thereby, might on polysilicon layer 30-1 and 30-2, form contact hole, be good for improving integrated degree.

The sensor amplifier that is illustrated with above-mentioned the 1st～the 3rd embodiment, the NMOS that reads the loop being contained in, is connected in the NMOS of bit line BL and is included in the row gate circuit, is connected to above-mentioned bit line BL is formed at the identity element zone, even the increase columns, also can its needed sensor amplifier, particularly the NMOS loop is partly for good and all integrated is formed at an element area.

Again, right even device has a bit line, essential 4 element area this point of each row before can be only with 2 element areas just.Moreover, on this device, along with the increase of columns, in order to form its needed sensor amplifier, also must increase the number of element area, if but with the illustrated sensor amplifier of the foregoing description, even then as long as the columns increase is usually also 2 element areas.

Owing to these reasons, use the sensor amplifier of the foregoing description explanation, can be reduced to and obtain the needed element of element area Disengagement zone, for example, can reduce the zone of field oxide film etc., can dwindle chip size.

And above-mentioned effect along with the increase of columns, be that the high capacity of semiconductor memory device will be remarkable further.

Moreover it is the inactive area that does not have function (dead band) of device to the element separated region in chip, and in the above-described embodiments, such inactive area is also cut down.Therefore, to improving the chip service efficiency contribution is arranged also.Again, the drawing reference symbol of charging to simultaneously on the main points that respectively constitutes of the application's patent claim scope adopts for easy to understand the application, is not intentionally the technical scope of the application's invention to be limited to illustrated embodiment and to charge to these symbols simultaneously.

As mentioned above, if use the present invention, can be reduced to and separate the required zone of transistor that constitutes sensor amplifier, thereby the sensor amplifier that can seek to dwindle chip size can be provided.

Claims (2)

1. sensor amplifier, have: an end that comprises current path is connected in bit line (BL1～4, BBL1～4), the other end of current path is connected to data line (DQ, DQ1, DQ2, BDQ, BDQ1, BDQ2), grid is connected to the first transistor (Q3-1～Q3-4, the column selection device of Q4-1～Q4-4) of array selecting signal line (CSL1～4), it is characterized in that

Further have: an end that comprises current path is connected on the interlinkage of the end of current path of aforementioned the 1st crystal and aforementioned bit line, the other end of current path is connected in read output signal line (SAN, BSAN), grid is connected in and is the 2nd transistor (Q1-1～Q1-4, Q2-1, Q2-4 on the distribution of the required reference potential signal flow warp of the signal of reading the aforementioned bit line of amplification inflow, Q5-1～Q5-4, Q6-1, readout device Q6-4)

And aforementioned the 2nd transistor of aforementioned the 1st transistor AND gate is arranged at respectively on the element area (23,24) of setting on the semiconductor substrate 21.

2. a sensor amplifier has: the 1st conductive-type semiconductor matrix (21); Be set in the 1st element area (23,24) on the aforesaid semiconductor matrix, it is characterized in that further having: isolate the 1st (27-1 that is arranged at the 2nd conductivity type in aforementioned the 1st element field mutually, 27-5,27-9,28-1,28-5,28-9), the 2nd (27-2,27-4,27-6,27-8,28-2,28-4,28-6,28-8), the 3rd (27-3,27-7,28-3,28-7) semiconductor regions; Be arranged at the 1st gate circuit grid on the aforementioned components zone between aforementioned the 1st semiconductor regions and the 2nd semiconductor regions (25-1,25-4,25-5,25-8,26-1,26-4,26-5,26-8); Be arranged at the 2nd grid gate on the aforementioned components zone between aforementioned the 2nd semiconductor regions and the 3rd semiconductor regions (25-2,25-3,25-6,25-7,26-2,26-3,26-6,26-7); Be electrically connected in aforementioned the 1st semiconductor regions data line (DQ, DQ1, DQ2, BDQ, BDQ1, BDQ2); Be electrically connected in the bit line (BL1～4, BBL1～4) of aforementioned the 2nd semiconductor regions; Be electrically connected in the read output signal line (BSAN) of aforementioned the 3rd semiconductor regions; Be connected on aforementioned the 1st grid array selecting signal line (CSL1～4) and for reading the distribution that amplify to flow into the required reference potential signal flow warp of the signal that is connected on the aforementioned bit line on aforementioned the 2nd grid.

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