CN103904545A - Pulse shaping device and pulse shaping method - Google Patents

Pulse shaping device and pulse shaping method Download PDF

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CN103904545A
CN103904545A CN201310700813.7A CN201310700813A CN103904545A CN 103904545 A CN103904545 A CN 103904545A CN 201310700813 A CN201310700813 A CN 201310700813A CN 103904545 A CN103904545 A CN 103904545A
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pulsed light
light
pulse
shaping device
pulse shaping
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CN103904545B (en
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田中健二
冈美智雄
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Sony Corp
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Sony Corp
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/005Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
    • H01S5/0057Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping for temporal shaping, e.g. pulse compression, frequency chirping
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/10Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/14External cavity lasers
    • H01S5/141External cavity lasers using a wavelength selective device, e.g. a grating or etalon
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/005Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
    • H01S5/0064Anti-reflection components, e.g. optical isolators
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/06Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
    • H01S5/065Mode locking; Mode suppression; Mode selection ; Self pulsating
    • H01S5/0657Mode locking, i.e. generation of pulses at a frequency corresponding to a roundtrip in the cavity
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/40Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4006Injection locking
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/50Amplifier structures not provided for in groups H01S5/02 - H01S5/30

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Lasers (AREA)
  • Semiconductor Lasers (AREA)
  • Laser Surgery Devices (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)

Abstract

The invention provides a pulse shaping device and a pulse shaping method. The pulse shaping device includes a pulse generator configured to generate pulsed light by using a semiconductor laser for emitting light of a predetermined wavelength, and an optical member provided in a subsequent stage of the pulse generator and configured to compress a pulse time width of the pulsed light. The pulsed light has a first frequency dispersion state. The optical member imparts a second frequency dispersion state to the pulsed light, the second frequency dispersion state being a frequency dispersion state opposite to the first frequency dispersion state.

Description

Pulse shaping device and shaping pulse method
The cross reference of related application
The application requires in the rights and interests of the Japanese priority patent application JP2012-280736 of submission on December 25th, 2012, and its full content is hereby expressly incorporated by reference.
Technical field
The present invention relates to a kind of pulse shaping device and a kind of shaping pulse method.
Background technology
In the processing of precision component and the field of optical communication, the pulse laser (flashlight) that wherein has the light of certain burst length width with the transmitting of even interval is widely used.Such as the solid-state laser of Ti:Sa laser through being often used as the main laser of this flashlight.
Can increase peak power (peak strength) by carrying out the burst length width of pulse compression and chopped pulse light.As the method for pulse compression, for example, using prism is known to the method for (a pair of prism) or grating pair (a pair of diffraction grating).
In addition, for example, the uncensored Patent Application Publication of Japan (translation of PCT application) discloses a kind of technology No. 2002-502061, and it is for carrying out pulse compression by propagate pulsed light in the module component by making such as the material of tellurium oxide (TeO2), zinc sulphide (ZnS) or zinc selenide (ZnSe).In addition, Japanese uncensored Patent Application Publication discloses a kind of technology No. 2009-271528, and it is for carrying out pulse compression by combination graded index (GRIN) optical fiber lens and pulse compression fiber.
Summary of the invention
But, in No. 2009-271528th, No. 2002-502061st, the uncensored Patent Application Publication of Japan (PCT application translation) and Japanese uncensored Patent Application Publication, disclosed pulse compression technique adopts the optical component beyond compressor, such as pulse stretcher or GRIN optical fiber lens, therefore, its device has complexity and large-scale structure.
In addition, in recent years, semiconductor laser had been widely used as laser diode, and had attempted using the main laser of semiconductor laser as pulsed light.In No. 2009-271528th, No. 2002-502061st, the uncensored Patent Application Publication of Japan (PCT application translation) and Japanese uncensored Patent Application Publication, disclosed pulse compression technique is to use the technology of solid-state laser as the pulsed light of main laser, and therefore have a kind of possibility, the pulsed light that uses semiconductor laser is not carried out to enough pulse compressions.
Therefore, pulse shaping device and shaping pulse method that an embodiment of the invention provide a kind of novelty and improved, it can carry out pulse compression to the pulsed light that uses semiconductor laser by simple structure.
According to an embodiment of the invention, a kind of pulse shaping device is provided, it comprises impulse generator, its semiconductor laser being configured to by using the light for launching predetermined wavelength produces pulsed light; And optical component, the burst length width that it is arranged on the rear class of impulse generator and is configured to compression pulse light.Pulsed light has first frequency dispersity, and wherein second frequency dispersity is assigned to pulsed light by optical component, and second frequency dispersity is the frequency dispersion state contrary with first frequency dispersity.
According to an embodiment of the invention, a kind of pulse shaping device is provided, it comprises impulse generator, it is configured to produce pulsed light by using for emission wavelength ranges from the semiconductor laser of the light of 350nm to 500nm; Quartz glass block, it is arranged on the rear class of impulse generator; And speculum, it is arranged at least one in prime and the rear class of quartz glass block and is set to the pulsed light of reflection from impulse generator transmitting.Pulsed light only propagates through the inside of quartz glass block along the predetermined light paths length being reflected by speculum.
According to an embodiment of the invention, a kind of pulse shaping device is provided, it comprises impulse generator, it is configured to produce pulsed light by using for emission wavelength ranges from the semiconductor laser of the light of 350nm to 500nm; Monomode fiber, is arranged on the rear class of impulse generator; First lens, is configured to pulsed light to guide to monomode fiber; With the second lens, be configured to from monomode fiber transmitted pulse light.
According to an embodiment of the invention, a kind of shaping pulse method is provided, comprising: the semiconductor laser that is used for the light of launching predetermined wavelength by use produces pulsed light; With the burst length width through the internal compression pulsed light of optical component by permission pulsed light.Pulsed light has first frequency dispersity, and wherein second frequency dispersity is assigned to pulsed light by optical component, and second frequency dispersity is the frequency dispersion state contrary with first frequency dispersity.
According to one or more execution modes of the present invention, by using pulsed light that semiconductor laser produces through for being assigned to and the optical component of the second frequency dispersity of the frequency dispersion opposite states of the first frequency dispersity of pulsed light, thereby allow the burst length width of pulsed light compressed.
According to one or more execution modes of the invention described above, can use the semiconductor laser of simple structure to carry out pulse compression pulsed light.
Accompanying drawing explanation
Fig. 1 is the schematic diagram with the exemplary configuration of the impulse generator of MOPA system;
Fig. 2 uses the right impulse compression method of prism for explaining;
Fig. 3 is the impulse compression method that uses grating pair for explaining;
Fig. 4 illustrates for using semiconductor laser to utilize the result of the right pulse compression of the prism of pulse blue light;
Fig. 5 is the wavelength dependency that the dispersion value of quartz glass and NBH52 is shown;
Fig. 6 is the schematic diagram of the exemplary configuration of the pulse shaping device of first embodiment of the invention;
Fig. 7 A is the effect that the pulse compression of being undertaken by the pulse shaping device of first embodiment of the invention is shown;
Fig. 7 B is the effect that the pulse compression of being undertaken by the pulse shaping device of first embodiment of the invention is shown;
Fig. 8 is the schematic diagram that the exemplary configuration of the modification of the pulse shaping device of first embodiment of the invention is shown;
Fig. 9 is the schematic diagram that the exemplary configuration of pulse shaping device is second embodiment of the invention shown; With
Figure 10 is the effect that the pulse compression of being undertaken by pulse shaping device is second embodiment of the invention shown.
Embodiment
Hereinafter, describe the preferred embodiment of the present invention in detail with reference to accompanying drawing.Should be noted, in this specification and accompanying drawing, the structural detail with roughly the same function and structure is denoted by like references, and omits the repetition of explanation to these structural details.
To be described by order below.
1. use the Consideration of the pulse compression of the pulsed light of semiconductor laser
1.1. the configuration of impulse generator (MOPA)
1.2. impulse compression method
2. the first execution mode
3. the second execution mode
4. sum up
<1. use the Consideration > of the pulse compression of the pulsed light of semiconductor laser
For the present invention is more easily understood, will the reason of the present invention of making of having been conceived by the inventor be described.
As disclosed in No. 2009-271528th, No. 2002-502061st, the uncensored Patent Application Publication of Japan (PCT application translation) and Japanese uncensored Patent Application Publication, about for the technology of carrying out pulse compression by the pulsed light that uses solid-state laser to produce has been carried out to much research.But not necessarily whether the technology of the clear situation that is similar to solid-state laser is suitable for the technology for the pulsed light producing by use semiconductor laser is carried out to pulse compression.
Therefore, the inventor has considered to use the pulse compression of the pulsed light of semiconductor laser.Particularly, the inventor has considered pulse shaping device and the shaping pulse method of carrying out pulse compression by assembled pulse maker and optical component.Impulse generator is configured to launch by use the semiconductor laser generation pulsed light of the light of predetermined wavelength, and optical component is arranged on the rear class of impulse generator the burst length width of compression pulse light.Hereinafter, impulse generator and optical component will be described in order.
[configuration of 1.1. impulse generator (MOPA)]
Comprise so-called MOPA(master oscillator power amplifier according to the impulse generator of an embodiment of the invention) system.MOPA system is a kind of system, wherein, allows semiconductor laser be used as main laser with the operated mode-locked laser diode of exocoel form (MLLD) and amplified by semiconductor optical amplifier (SOA) from the output of mode-locked laser diode.
With reference to figure 1, now description is there is to the exemplary configuration of the impulse generator of MOPA system.Fig. 1 is the schematic diagram that the exemplary configuration of the impulse generator with MOPA system is shown.Note also, be applied to according to the MOPA system of the impulse generator 10 of present embodiment and be not limited to the configuration shown in Fig. 1.Any known MOPA system all can be applied to impulse generator 10.
With reference to figure 1, according to the impulse generator 10 of an embodiment of the invention comprise mode locking oscillator 110, lens 120a, 120b and 120c, isolator 130, prism to 140, λ/2 plate 150 and SOA160.Fig. 1 illustrates as according to the configuration of the impulse generator 10 of the transmitted pulse blue light of the example of the impulse generator 10 of present embodiment (its wave-length coverage is from about 350nm to the pulsed light of about 500nm).But, be not limited to the configuration of transmitted pulse blue light according to the impulse generator 10 of present embodiment, therefore it can have the configuration of the pulsed light of other wavelength band of transmitting.In addition,, in the time that impulse generator 10 is launched the pulsed light of other wavelength bands, can suitably adjust according to the wavelength band of launched pulsed light the optical characteristics of the each assembly that forms impulse generator 10.In the following description, the light of blue lamp indication wave-length coverage from about 350nm to about 500nm, unless otherwise prescribed outside.
Mode locking oscillator 110 by the output of semiconductor laser that makes transmitting and there is the light of predetermined wavelength by the cavity configuration emission pulse laser that resonates.Mode locking oscillator 110 comprises laser diode 111, collimating lens 112, band pass filter (BPF) 113 and outgoing mirror 114.
In the present embodiment, laser diode 111 is bisection laser diodes (BS-LD) of being made up as main material of GaInN.In addition, laser diode 111 can serve as mode-locked laser diode (MLLD) and emission wavelength band scope and be about the pulsed light of 350nm to about 500nm.
The pulsed light of launching from laser diode 111 passes collimating lens 112, band pass filter 113 and outgoing mirror 114, and then launches from mode locking oscillator 110.The pulsed light of launching from mode locking oscillator 110 is adjusted into the wavelength of for example about 405nm by band pass filter 113.
The pulsed light of launching from laser diode 111 successively through be arranged on lens 120a rear class, isolator 130, prism to 140, λ/2 plate 150 and lens 120b be then incident on SOA160.Adjusted the polarization direction of pulsed light by λ/2 plate 150.In addition, on SOA, the coupling efficiency of the pulsed light of incident improves 140 by making pulsed light pass prism.The pulsed light being amplified by SOA160 is launched into outside via lens 120c.
Hereinbefore, described according to the exemplary configuration of the impulse generator 10 of an embodiment of the invention with reference to figure 1.In the impulse generator 10 with MOPA system as above, can produce the pulsed light with the power of about 100W and the burst length width of about 3ps.
In this respect, even for the impulse generator 10 shown in Fig. 1, also have very large demand, i.e. the burst length width of chopped pulse light and acquisition high power pulse light.Therefore, the inventor has further considered the method for compressing the pulsed light of launching from impulse generator 10.
[1.2. impulse compression method]
As a kind of method that uses solid-state laser paired pulses light to carry out pulse compression, use prism to being known with using the method for grating pair.These impulse compression methods will be described now briefly.
With reference to figure 2, use the right impulse compression method of prism by describing now.Fig. 2 uses the right impulse compression method of prism for explaining.For example, as shown in Figure 2, pulsed light incides a pair of prism 910a and the 910b to arrange apart from d each other.The pulsed light of incident is divided into each other along the relatively long wavelength light (having the light of long wavelength's component) of different light path propagation and relatively short wavelength light (having the light of short wavelength components) in prism.For example, in the example shown in Fig. 2, propagate the optical distance (optical path length) of the light with short wavelength components and between prism 910a and 910b, be longer than the optical distance of propagating the light with long wavelength's component.The optical distance (optical path length) that propagation has the light of short wavelength components is shorter than the optical distance of propagating the light with long wavelength's component in prism 910b.By this way, having optical distance that the light of the long wavelength's component that incides the pulsed light on a pair of prism 910a and 910b advances is different from and has the optical distance that the light of the short wavelength components that incides the pulsed light on a pair of prism 910a and 910b is advanced.Therefore, can control the poor of optical path length by the distance d between control prism 910a and 910b, refractive index or the similar value of each prism.
On the other hand, for example, having in the pulsed light of linear positive frequency modulation (positive chirp), known short wavelength components is positioned near the rear end of pulse and long wavelength's component and is positioned at the front end place near pulse.Therefore, can be by arrange that prism 910a and 910b make the optical path length of the light with short wavelength components and the optical path length of the light with long wavelength's component be compressed into the pulsed light of penetrating in required relation temporarily.Therefore, use the right impulse compression method of prism to give the negative dispersion as frequency dispersion state.
Next,, with reference to figure 3, now will describe and use grating pair impulse compression method.Fig. 3 is the figure for explaining the impulse compression method that uses grating pair.In the method, as shown in Figure 3, a pair of grating 920a and 920b are arranged with preset distance in following state, and wherein, its of each grating on, the surface (reflecting surface) of formation groove (grating) faces with each other and each grating tilts at a predetermined angle with respect to optical axis.In addition, a pair of spherical lens 940a and 940b are arranged between grating 920a and 920b.Particularly, spherical lens 940a is disposed in the position of the reflecting surface of Facing Grating 920a with the preset distance L with respect to grating 920a.Equally, spherical lens 940b is disposed in the position of the reflecting surface of Facing Grating 920b with the preset distance L with respect to grating 920b.In addition, the distance between spherical lens 940a and 940b is adjusted to the distance (2f) of the twice of the focal distance f of spherical lens 940a and 940b.
Pulsed light (being incident on grating 920a with predetermined incidence angle) is by the reflecting surface reflection of grating 920a and diffraction, successively through spherical lens 940a and 940b, and then incides on the reflecting surface of grating 920b.The pulsed light inciding on grating 920b is further reflected and diffraction by the reflecting surface of grating 920b, and then to external emission.Pulsed light (its from grating 920b transmitting) is reflected by speculum 950, and the light path of then advancing along light before being reflected by speculum 950 is advanced on oppositely.In other words, pulsed light by the reflecting surface 920b reflection of grating and diffraction, successively through spherical lens 940b and 940a, further by reflecting surface 920a reflection and the diffraction of grating, reflected by speculum 930, and be then fetched to outside.
In a series of programs of propagation pulsed light as above, when pulsed light is during by grating 920a and 920b diffraction, according to each diffraction light wavelength and in different directions diffraction of pulsed light, and the pulsed light of diffraction is advanced along the light path differing from one another for each wavelength thus.For example, Fig. 3 illustrates that (as the example of the light path differing from one another) has the light path that the light path that the light of short wavelength components passes and the light with long wavelength's component are passed.In this example, according to the impulse compression method that uses the grating pair shown in Fig. 3, can adjust the optical path length of the light with long wavelength's component and there is the optical path length of the light of short wavelength components.This adjustment of optical path length can realize by the distance L between adjustment grating 920a and spherical lens 940a and the distance L between grating 920b and spherical lens 940b.Particularly, can make distance L be less than focal distance f (L<f) by adjustment distance L and will just disperse to be assigned to pulsed light.In addition, can make distance L be greater than focal distance f (L>f) by adjustment distance L negative dispersion is assigned to pulsed light.By this way, can be by arrange that grating 920a and 920b and spherical lens 940a and 940b make the optical path length of the light with short wavelength components and the optical path length of the light with long wavelength's component be compressed into the pulsed light of penetrating in required relation temporarily.
The pulse blue light that the inventor has attempted being used the right impulse compression method of prism and being used the impulse compression method of grating pair to launch the impulse generator 10 from shown in Fig. 1 by employing carries out pulse compression.Consequently, using in the impulse compression method of grating pair, found that the transmissivity of pulse blue light in grating is low, and therefore to use the impulse compression method of grating pair be poor efficiency as impulse compression method.
On the other hand, by using as shown in Figure 4 the right impulse compression method of prism can not obtain the effect of pulse compression.Fig. 4 illustrates the result that uses the right pulse compression of the prism of pulse blue light of semiconductor laser for utilizing.
In Fig. 4, draw the result of the pulse compression of the pulse blue light for using semiconductor laser, wherein, transverse axis represents that distance between the prism of prism centering and the longitudinal axis represent the burst length width by carrying out the result that pulse compression obtains.As shown in Figure 4, even in the time of change of distance between prism, burst length width can great changes will take place yet.From this point, can find out, with respect to the pulse blue light that uses semiconductor laser, can not be by using the right impulse compression method of prism to be enough to obtain the effect of pulse compression.
According to the result of this consideration, can say that the impulse compression method that uses the right impulse compression method of prism and use grating pair is not a kind of effectively impulse compression method with respect to the pulse blue light that uses semiconductor laser.
In this respect, as mentioned above, the right impulse compression method of known use prism is assigned to the negative dispersion as frequency dispersion state.Therefore, as shown in Figure 4, by using the right impulse compression method of prism can not be enough to the fact of the effect that obtains pulse compression, can think and use the pulse blue light of semiconductor laser to there is the negative dispersity as frequency dispersion state.
According to above-mentioned consideration, the inventor has conceived following idea: using the optical component that is configured to be assigned to as the positive dispersity of frequency dispersion state is effective so that compression is used the pulse blue light of semiconductor laser.In addition,, in superincumbent consideration, used by way of example pulse blue light to consider as the situation of the pulsed light that uses semiconductor laser.But, more generally, think that the pulsed light that the optical component that can be configured to the frequency dispersion state of giving relative pulse light frequency dispersity by use carries out using semiconductor laser carries out pulse compression.
The inventor has considered that quartz glass and NBH52(are the optical glass of one type for the example of the material of such optical component).For quartz glass and NBH52, by considering to give in pulse compression, the dispersion amount of pulsed light obtains the results are shown in Fig. 5.Fig. 5 is the diagram that the wavelength dependency of the dispersion amount of quartz glass and NBH52 is shown.
With reference to figure 5, draw the characteristic of quartz glass and NBH52, wherein, the dispersion amount (GVD: group velocity disperse) that transverse axis indicating impulse light wavelength (nanometer) and vertical pivot represent the pulsed light that gives corresponding wavelength is (fs2/mm).In Fig. 5, while being illustrated in the value large (being that dispersion amount is large) of vertical pivot, the compression degree of pulsed light is large.
Meanwhile, even if quartz glass and NBH52 also have wavelength dependency for the absorptivity of light.Particularly, the absorptivity that blue light (light that for example, wavelength is 405nm) is compared to quartz glass for the absorptivity of NBH52 is high.On the other hand, ruddiness (for example, the light that wavelength is 780nm) is substantially the same for the absorptivity of NBH52 and quartz glass, and therefore, the situation of the light that absorptivity is 405nm than wavelength is low.
In this respect, meet a large amount of dispersion and these two characteristics of low absorptivity for the material require of the optical component of pulse compression simultaneously.This is because can more effectively carry out pulse compression in the time that the dispersion amount shown in Fig. 5 is larger, and likely loss when the incident of suppressor pulse light in the time that absorptivity is lower.But, in dispersion amount and absorptivity, there is wavelength dependency, therefore can select any suitable material according to incident light wavelength.
For example, suppose that pulse blue light (light that for example, wavelength is 405nm) is wherein used as the situation of pulsed light.In this case, if NBH52 is used as optical material, dispersion amount is larger, and absorptivity is higher, and therefore loss is larger.Therefore, preferably use the quartz glass having compared with low absorptivity.
In addition, for example, suppose that pulsed red (light that for example, wavelength is 780nm) is used as the situation of pulsed light.In this case, as mentioned above, the absorptivity of NBH52 is similar to the absorptivity of quartz glass substantially.Therefore, can preferably use the NBH52 with large dispersion amount.
As mentioned above, as the material of the optical component for pulse compression, can be according to the pulse light wavelength that stands pulse compression is selected to suitable material by considering its dispersion amount and absorptivity.In addition, as the example of the material of optical component, the dispersion amount of quartz glass and NBH52 is shown in Fig. 5, even if but also can obtain the wavelength dependency of its dispersion amount and absorptivity for other material based on experiment value, calculated value (analogue value), literature value or similar value.Therefore,, with respect to the pulsed light of any wavelength, also can select the suitable material as the optical component using in pulse compression.
As mentioned above, the inventor has conceived following methods, as considering that the pulsed light to using semiconductor laser carries out the result of impulse compression method.In other words, can be configured to the frequency dispersion state of relative pulse light frequency dispersity to be assigned to and to carry out pulse compression with the optical component of the pulsed light of semiconductor laser by use.In addition can suitably select by the absorptivity of consideration light or dispersion amount, the material of optical component according to pulse light wavelength.
For example, be the pulse blue light being produced by the impulse generator 10 with the MOPA system shown in Fig. 1 at the pulsed light that uses semiconductor laser, pulsed light has the negative dispersity as frequency dispersion state.Therefore, can be by carrying out compression pulse light with giving the material just disperseing as the material of optical component.In addition, preferably in such material, use quartz glass to be used for pulse blue light.
Hereinafter, the preferred implementation of the impulse compression method of being conceived by the inventor will be described according to above consideration in detail.In the first and second execution modes of mentioning hereinafter, will provide as an example description by the situation that the pulsed light of semiconductor laser is the pulse blue light that produced by the impulse generator 10 with the MOPA system shown in Fig. 1 by adopting wherein.
<2. the first execution mode >
With reference to Fig. 6, the first execution mode of the present invention is described.Fig. 6 is the schematic diagram that the exemplary configuration of the pulse shaping device of first embodiment of the invention is shown.Should be noted, in the first and second execution modes of mentioning hereinafter, will the prerequisite from impulse generator towards the direction of optical component of rear class that is arranged on impulse generator being x axle, provide description.
With reference to figure 6, optical element 20 and speculum 210a, 210b and 210c that the pulse shaping device 1 of first embodiment of the invention comprises impulse generator 10, is made up of quartz glass.
The semiconductor laser that impulse generator 10 is launched the light with predetermined wavelength by use produces pulsed light.In the first embodiment, impulse generator 10 has example MOPA system Decentralized Impulse blue light as shown in Figure 1.
The optical element 20 of being made up of quartz glass is examples of the optical component of being made up of quartz glass for carrying out pulse compression, and this optical element 20 is the block member being formed by quartz glass (quartz glass block) in the example shown in Fig. 6.In addition, each prime and the rear class being arranged on the optical axis that lays respectively at the optical element 20 of being made up of quartz glass in speculum 210a and 210b, is inserted between these speculums the optical element 20 of being made up of quartz glass.
In this respect, if <1. is above negative dispersity to the frequency dispersion state that uses described in the Consideration > of pulse compression of pulsed light of semiconductor laser, think the pulsed light of launching in impulse generator 10.Therefore, can will just disperse to be assigned to pulsed light, and can be by using the optical component being formed by the quartz glass that has more relatively low absorptivity effectively to carry out pulse compression.
Particularly, as shown in Figure 6, the pulsed light of launching from impulse generator 10 incides the optical element 20 of being made up of quartz glass, propagates in the positive direction of x axle simultaneously.The burst length width of pulsed light is compressed by the inside through the optical element 20 of being made up of quartz glass.
In addition, in the first embodiment, as shown in Figure 6, the pulsed light that passes the inside of the optical element 20 of being made up of quartz glass is reflected by the speculum 210a of the rear class that is arranged on the optical element 20 of being made up of quartz glass.The pulsed light of being launched by speculum 210a is incident on the optical element 20 of being made up of quartz glass again, propagates on the rightabout of x axle simultaneously.Then, on the rightabout of x axle, the pulsed light through the inside of the optical element 20 be made up of quartz glass is reflected by the speculum 210b of the prime that is arranged on the optical element 20 of being made up of quartz glass again.In other words, the pulsed light of launching from impulse generator 10 is through the inside of the optical element 20 of being made up of quartz glass, with the reciprocating motion on x direction of principal axis by allowing speculum 210a and 210b reflected impulse light.
The size of optical element 20 that can be made up of quartz glass by adjustment and the position of speculum 210a and 210b and angle are adjusted the distance (optical path length) of the inside of the optical element 20 of being made up of quartz glass through pulsed light on it.As described in the back with reference to figure 7A, depend on the optical path length of light through the inside of optical component by the degree of pulse compression compression pulse time width.Therefore the size of optical element 20 that, can be made up of quartz glass by adjustment and the position of speculum 210a and 210b and angle are carried out the degree of control impuls compression.
In example as shown in Figure 6, the pulsed light of being propagated along required optical path length by speculum 210a and 210b finally propagates through the inside of the optical element 20 of being made up of quartz glass in the opposite direction of x axle, then takes out in optional direction by the speculum 210c between the optical element 20 that is arranged on impulse generator 10 and be made up of quartz glass.The configuration of by this way, finally taking out the light of propagating in the opposite direction of x axle is called as in the following description reflection and takes out configuration.The pulsed light being taken out by speculum 210c is directed into other Optical devices (not shown) of the further rear class that is arranged on pulse shaping device 1, and may be used as the light source of other Optical devices.
With reference to Fig. 7 A and Fig. 7 B, the effect by the pulse compression of carrying out according to the pulse shaping device 1 of the first execution mode is described.Fig. 7 A and Fig. 7 B are the effects of the pulse compression that illustrates that the pulse shaping device 1 of first embodiment of the invention carries out.
Fig. 7 A illustrates the curve chart of drawing pulsed light and propagate through the relation between the optical path length of inside and the burst length width of pulsed light of the optical element 20 of being made up of quartz glass (quartz glass block).In this curve chart, transverse axis represents optical path length and longitudinal axis indicating impulse time width.With reference to figure 7A, can find out, meet burst length width and reduce along with optical path length is longer and dull until optical path length reaches the relation of about 2500mm.Meanwhile, if optical path length exceedes about 2500mm, burst length width can great changes will take place.In example as shown in Figure 7 A, in the situation that optical path length is 0mm,, in the time that pulsed light does not pass the optical element 20 of being made up of quartz glass, burst length width is about 2.8ps.Then, burst length width is to be compressed to about 0.72ps in maximal pressure point reduction more than about 2500mm at optical path length.
Relation shown in Fig. 7 A is that pulsed light is that wavelength is that the blue light of 405nm and optical component are optical path length in the situation of quartz glass block and the relation between burst length width therein.If the changes in material of pulse light wavelength or optical component, the relation between them also correspondingly changes.But, can be by experiment, simulation or the similar operations relation that obtains the relation that is similar to Fig. 7 A determines optical component that the required pulse of the best pulsed light of carrying out each wavelength compresses and the material of optical path length.
Fig. 7 B illustrates in the time that the optical path length of pulsed light in the optical element 20 of being made up of quartz glass (quartz glass block) is 3200mm through the optical element 20 of being made up of quartz glass pulse correlation waveform before and afterwards.In this respect, pulse correlation waveform is plotted as with respect to the pulse, the transverse axis that are included in the wavelength (pulse) in pulsed light and represents that time (ps) and vertical pivot represent luminous intensity (a.u.).But as shown in Figure 7 B, the luminous intensity (a.u.) that vertical pivot represents is normalized the output for pulsed light, make its minimum value be 0 and its maximum be 1, to be more prone to when with burst length width comparison.With reference to figure 7B, can find out, burst length width is compressed to approximately 1/4 by the pulse shaping device 1 according to the first execution mode.
In addition, for the transmissivity of the pulsed light in the optical element of being made by quartz glass 20 of pulse shaping device 1, checked and the difference of situation that uses other optical component.Consequently, use general glass component as the transmissivity of the situation of optical component for approximately 20% and to use general grating pair be approximately 50% as the transmissivity of the situation of optical component.The use of the optical element 20 of being made up of quartz glass in contrast, makes likely to obtain approximately 90% high-transmission rate.Therefore, pulse shaping device 1 can suppress the loss of the pulsed light causing due to pulse compression, therefore can more effectively carry out pulse compression.
Describe according to the modification of the pulse shaping device 1 of the first execution mode referring now to Fig. 8.Fig. 8 is the schematic diagram that the exemplary configuration of the modification of the pulse shaping device 1 of first embodiment of the invention is shown.Should be noted, in the description of this modification, explain the difference mainly concentrating between the pulse shaping device 1 shown in modification and Fig. 6, and omitted the repetition of explanation of identical configuration.
With reference to figure 8, the optical element 20 that comprises impulse generator 10, made by quartz glass according to the pulse shaping device 1a of this modification, and speculum 220a and 220c.By this way, be substantially similar at the pulse shaping device shown in Fig. 6 according to the pulse shaping device 1a of this modification, difference is the configuration of speculum.
With reference to figure 8, in pulse shaping device 1a, the pulsed light of being propagated along required optical path length by speculum 220a and 220c finally propagates through the inside of the optical element 20 of being made up of quartz glass in the positive direction of x axle, is then fetched to outside.In other words, be different from the pulse shaping device 1 shown in Fig. 6 according to the pulse shaping device 1a of this modification, difference is: pulse shaping device 1 has reflection and takes out configuration, but pulse shaping device 1a has the configuration that the final light of propagating in the positive direction of x axle is removed.Therefore, in the following description, the configuration that the light of finally propagating in the positive direction of x axle is removed is called as transmission and takes out configuration.Even be, while thering is the pulse shaping device of transmission taking-up configuration, to be only also the direction difference that pulsed light is finally taken out as pulse shaping device 1a, therefore can obtain the effect of the pulse compression as shown in Fig. 7 A and Fig. 7 B.
In addition, as pulse shaping device, can be according to suitably selecting whether to use reflection to take out configuration or use transmission to take out determining of configuration being arranged on configuration, layout or the similar structures of other Optical devices of the rear class of pulse shaping device separately.
Hereinbefore, with reference to figure 6, Fig. 7 A, Fig. 7 B and Fig. 8, the pulse shaping device 1 of first embodiment of the invention and the configuration of 1a and its effect of pulse compression have been described.As mentioned above, in the pulse shaping device 1 or 1a of first embodiment of the invention, with respect to the pulse blue light (it has the negative dispersity as frequency dispersion state) that uses semiconductor laser, the optical element 20 of being made up of quartz glass (quartz glass block) carries out pulse compression.Therefore, can be by the more effectively burst length width of compression pulse light of better simply structure.
In addition, according in the pulse shaping device 1 of the first execution mode or 1a, the size by quartz glass block and be arranged on the position of the prime of quartz glass block and multiple speculums of rear class and angle adjustment pulsed light thereon through the optical path length of the inside of quartz glass block.Therefore, pulsed light can be compressed to required burst length width.
In superincumbent description, although speculum 210a, 210b and 210c or 220a and 220c are arranged on prime and the rear class of the optical element 20 of being made up of quartz glass, the first execution mode is not limited to this.If can only once guarantee required optical path length through the optical element 20 of being made by quartz glass by the size of adjusting the optical element 20 of being made by quartz glass, these speculums can be provided.
<3. the second execution mode >
Next, with reference to Fig. 9, the second execution mode of the present invention is described.Fig. 9 is the schematic diagram that the exemplary configuration of pulse shaping device is second embodiment of the invention shown.
With reference to figure 9, pulse shaping device 2 second embodiment of the invention comprises impulse generator 10, monomode fiber (SMF) 30 and lens 310a and 310b.
The function of impulse generator 10 and configuration are similar to the first execution mode substantially.In other words the semiconductor laser that, impulse generator 10 is used for by use the light of launching predetermined wavelength produces pulsed light.In the second execution mode, impulse generator 10 have example as shown in Figure 1 MOPA system concurrency penetrate pulse blue light.
Monomode fiber 30 is examples for the optical component be made up of quartz glass, and the core of monomode fiber is formed by quartz glass.In addition, lens 310a is to provide for making light incide the lens of monomode fiber 30, and lens 310b is to provide the lens for making to be transmitted into from the light of monomode fiber 30 member of rear class.Should be noted, the configuration of monomode fiber 30 and lens 310a and 310b is not limited at the example shown in Fig. 9, and can apply the configuration of any optical fiber as known in the art.
Be similar to the first execution mode, the frequency dispersion state of impulse generator 10 is considered to negative dispersity.Therefore, can will just disperse to be assigned to pulsed light, and can be by using the optical component being formed by the quartz glass with relatively low absorptivity more effectively to carry out pulse compression.
Particularly, as shown in Figure 9, the pulsed light of launching from impulse generator 10 incides monomode fiber 30 via lens 310a when the positive direction of x axle is propagated.The burst length width of pulsed light by the core that formed by quartz glass in the interior propagation of monomode fiber 30 and compressed.The pulsed light of pulse compression and then other Optical devices towards being arranged on rear class or similar device transmitting from lens 310b.
Referring now to Figure 10, the effect by the pulse compression of carrying out according to the pulse shaping device 2 of the second execution mode is described.Figure 10 is the effect that the pulse compression of being undertaken by pulse shaping device 2 is second embodiment of the invention shown.Figure 10 is illustrated in through monomode fiber 30 pulse correlation waveform before and afterwards.In this respect, the pulse correlation waveform of Figure 10 is plotted as with respect to the pulse, the transverse axis that are included in the wavelength (pulse) in pulsed light and represents that time (ps) and vertical pivot represent luminous intensity (a.u.), and this is similar to the pulse correlation waveform shown in Fig. 7 B.
With reference to Figure 10, can find out, burst length width is compressed by the pulse shaping device 2 according to the second execution mode.In the example shown in Figure 10, burst length width is about 2.5ps after passing monomode fiber 30, and burst length width is being compressed into about 1.2ps through before monomode fiber 30.In addition, even in the second execution mode, be similar to the first execution mode, the degree that burst length width is compressed by pulse compression also depends on light thereon through the optical path length of optical component (monomode fiber 30).Therefore, can carry out by adjusting the length of monomode fiber 30 degree of control impuls compression.
Configuration and its effect of pulse compression thereof of pulse shaping device 2 second embodiment of the invention have been described with reference to figure 9 and Figure 10 hereinbefore.In pulse shaping device 2 second embodiment of the invention, except by according to the effect of the pulse shaping device 1 of the first execution mode described in <2. the first execution mode > above-mentioned or 1a acquisition, also can obtain following effect.
As mentioned above, in pulse shaping device 2 second embodiment of the invention, monomode fiber 30 is used as optical component.Therefore,, in the time that pulse shaping device 2 is used as the light source of other Optical devices, monomode fiber 30 can be made it possible to configure neatly the layout of the light path from pulse shaping device 2 to other Optical devices as optical component.In other words, can carry out pulse compression simultaneously and light is directed to other Optical devices from pulse shaping device 2 by monomode fiber 30, total (comprising the configured in one piece of pulse shaping device 2, other Optical devices and other optical element) that therefore can simplification device.
<4. sum up >
As mentioned above, according to the first and second execution modes of the present invention, can obtain following effect.
In the pulse shaping device 1 or 1a of first embodiment of the invention, with respect to the pulse blue light (it has the negative dispersity as frequency dispersion state) that uses semiconductor laser, can carry out pulse compression by the optical element 20 of being made by quartz glass (quartz glass block).Therefore, can be by the more effectively burst length width of compression pulse light of better simply structure.
In addition, according in the pulse shaping device 1 of the first execution mode or 1a, the size by quartz glass block and be arranged on the position of the prime of quartz glass block and multiple speculums of rear class and angle adjustment pulsed light thereon through the optical path length of the inside of quartz glass block.Therefore, pulsed light can be compressed to required burst length width.
In addition,, in pulse shaping device 2 second embodiment of the invention, monomode fiber 30 is used as optical component.Therefore,, in the time that pulse shaping device 2 is used as the light source of other Optical devices, monomode fiber can be made it possible to configure neatly the layout of the light path from pulse shaping device 2 to other Optical devices as optical component.
In addition,, in the first execution mode of the present invention and the second execution mode, carry out pulse compression by the pulsed light that makes to launch from impulse generator 10 through the optical element 20 of being made by quartz glass (quartz glass block) or the inside of monomode fiber 30.Therefore, can carry out pulse compression and can reduce the cost of relative assembly configuration compared with impulse compression method in correlation technique by better simply structure.
Although described impulse generator 10 in superincumbent the first and second execution modes and used the situation of semiconductor laser transmitted pulse blue light, the invention is not restricted to this.Impulse generator 10 can be launched the pulsed light of other wavelength band.Even in the time that impulse generator 10 is launched the pulsed light of the wavelength band beyond blue wavelength, also can be configured to the frequency dispersion state of relative pulse light frequency dispersity to be assigned to and to carry out pulse compression with the optical component of the pulsed light of semiconductor laser by use.In addition, can be according to pulse light wavelength and by considering that its absorptivity and dispersion amount suitably select the material of optical component.For example, for example, in the situation of impulse generator 10 transmitted pulse red light (, the light that wavelength is 780nm), NBH52 can be used as the example of the optical component for carrying out pulse compression therein.
Although be described in detail with reference to the attached drawings the preferred embodiment of the present invention, technical scope of the present invention is not limited to this.It will be understood by those skilled in the art that in the art and may occur various modifications, combination, sub-portfolio and change according to designing requirement and other factors, as long as they are in the scope of claims or its equivalent.
For example, in above-mentioned the first and second execution modes of the present invention, as shown in Fig. 6, Fig. 8 and Fig. 9, speculum 210a, 210b and 210c or 220a and 220c, or optical element beyond lens 310a and the 310b optical element 20 and the monomode fiber 30 that are used as being made by quartz glass.But the present invention is not limited to such configuration.For example, carry out prime and/or the rear class of pulse compression, can further provide conventional dissimilar optical element (such as lens, speculum and dissimilar filter) so that the behavior of control impuls light.
In addition, this technology also can be configured as follows.
(1) pulse shaping device, it comprises:
Impulse generator, the semiconductor laser being configured to by using the light for launching predetermined wavelength produces pulsed light; With
Optical component, is arranged on the rear class of impulse generator and is configured to the burst length width of compression pulse light,
Wherein, pulsed light has first frequency dispersity, and
Wherein, second frequency dispersity is assigned to pulsed light by optical component, and second frequency dispersity is the frequency dispersion state contrary with described first frequency dispersity.
(2) according to the pulse shaping device (1) described,
Wherein pulsed light has the wavelength of scope from 350nm to 500nm,
Wherein, first frequency dispersity is disperseed for negative, and
Wherein, optical component carrys out compression pulse light by giving as the just dispersion of second frequency dispersity.
(3) according to the pulse shaping device (2) described, wherein, optical component is the optical component of being made up of quartz glass.
(4) according to the pulse shaping device (3) described, wherein, optical component is the optical element of being made up of quartz glass.
(5) according to the pulse shaping device (3) described, wherein, optical component is monomode fiber.
(6), according to the pulse shaping device described in any one in (1) to (5), wherein, the compressed degree of burst length width of pulsed light changes through the optical path length of optical component according to pulsed light.
(7) according to the pulse shaping device described in any one in (1) to (6), wherein, impulse generator comprises master oscillator power amplifier (MOPA) system, and described main master oscillator power amplifier system is for allowing semiconductor laser to make to be amplified by semiconductor optical amplifier (SOA) from the output of mode-locked laser diode (MLLD) with the operated mode-locked laser diode of exocoel form by use.
(8) pulse shaping device, comprising:
Impulse generator, is configured to produce pulsed light by using for emission wavelength ranges from the semiconductor laser of the light of 350nm to 500nm;
Quartz glass block, is arranged on the rear class of impulse generator; With
Speculum, it is arranged at least one in prime and the rear class of quartz glass block and is set to the pulsed light of reflection from impulse generator transmitting,
Wherein, pulsed light, by the reflection of described speculum, only propagates through the inside of quartz glass block along predetermined light paths length.
(9) pulse shaping device, comprising:
Impulse generator, is configured to produce pulsed light by using for emission wavelength ranges from the semiconductor laser of the light of 350nm to 500nm;
Monomode fiber, is arranged on the rear class of impulse generator;
First lens, is configured to pulsed light to guide to described monomode fiber; With
The second lens, are configured to from monomode fiber transmitted pulse light.
(10) a shaping pulse method, comprising:
The semiconductor laser that is used for the light of launching predetermined wavelength by use produces pulsed light; With
By making pulsed light pass the burst length width of pulsed light described in the internal compression of optical component,
Wherein, pulsed light has first frequency dispersity, and
Wherein, second frequency dispersity is given described pulsed light by optical component, and second frequency dispersity is the frequency dispersion state contrary with first frequency dispersity.

Claims (11)

1. a pulse shaping device, comprising:
Impulse generator, the semiconductor laser being configured to by using the light for launching predetermined wavelength produces pulsed light; With
Optical component, is arranged in the rear class of described impulse generator and is configured to compress the burst length width of described pulsed light,
Wherein, described pulsed light has first frequency dispersity, and
Wherein, second frequency dispersity is assigned to described pulsed light by described optical component, and described second frequency dispersity is the frequency dispersion state contrary with described first frequency dispersity.
2. pulse shaping device according to claim 1,
Wherein, described pulsed light has from the wavelength of the scope of 350nm to 500nm,
Wherein, described first frequency dispersity is disperseed for negative, and
Wherein, described optical component compresses described pulsed light by giving as the just dispersion of described second frequency dispersity.
3. pulse shaping device according to claim 2, wherein, described optical component is the optical component of being made up of quartz glass.
4. pulse shaping device according to claim 3, wherein, described optical component is the optical element of being made up of quartz glass.
5. pulse shaping device according to claim 3, wherein, described optical component is monomode fiber.
6. pulse shaping device according to claim 1, wherein, the compressed degree of described burst length width of described pulsed light changes through the optical path length of described optical component according to described pulsed light.
7. pulse shaping device according to claim 1, wherein, described impulse generator comprises master oscillator power amplifier (MOPA) system, and described master oscillator power amplifier system is for allowing described semiconductor laser to make to be amplified by semiconductor optical amplifier (SOA) from the output of described mode-locked laser diode with the operated mode-locked laser diode of exocoel form (MLLD) by use.
8. pulse shaping device according to claim 1, described impulse generator comprises that mode locking oscillator, lens, isolator, prism are to, λ/2 plate and semiconductor optical amplifier.
9. a pulse shaping device, comprising:
Impulse generator, is configured to produce pulsed light by using for emission wavelength ranges from the semiconductor laser of the light of 350nm to 500nm;
Quartz glass block, is arranged in the rear class of described impulse generator; And
Speculum, is arranged at least one in prime and the rear class of described quartz glass block and is configured to the pulsed light of reflection from described impulse generator transmitting,
Wherein, described pulsed light, by the reflection of described speculum, only propagates through the inside of described quartz glass block along predetermined light paths length.
10. a pulse shaping device, comprising:
Impulse generator, is configured to produce pulsed light by using for emission wavelength ranges from the semiconductor laser of the light of 350nm to 500nm;
Monomode fiber, is arranged on the rear class of described impulse generator;
First lens, is configured to described pulsed light to guide to described monomode fiber; With
The second lens, are configured to launch described pulsed light from described monomode fiber.
11. 1 kinds of shaping pulse methods, comprising:
The semiconductor laser that is used for the light of launching predetermined wavelength by use produces pulsed light; With
Compress the burst length width of described pulsed light by the inside that makes described pulsed light pass optical component,
Wherein, described pulsed light has first frequency dispersity, and
Wherein, second frequency dispersity is assigned to described pulsed light by described optical component, and described second frequency dispersity is the frequency dispersion state contrary with described first frequency dispersity.
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