CN103901362B - The three axle magnetic detection modules based on multichannel SQUID Magnetic Sensors - Google Patents
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Abstract
The present invention relates to a kind of three axle magnetic detection modules based on multichannel SQUID Magnetic Sensors, it is characterized in that described three-axle magnetic field detecting module, three directions are mutually orthogonal, the XYZ directions in space are corresponded to respectively, and the magnetic-field measurement to each direction is completed by multiple passage superconduction SQUID Magnetic Sensors devices；Multiple passage superconduction SQUID sensors constitute serial array or constitute parallel connected array by changing connection order.Serial array can improve the sensitivity of measurement, and parallel connected array can improve the signal to noise ratio and operating efficiency of measurement.Change the connection method of each component in module, the detecting module of different structure can be constructed, the difference of detecting module is required with meeting practical application, flexibility and the efficiency of detection system is improved.
Description
Technical field
Measurement the present invention relates to superconduction SQUID Magnetic Sensors to magnetic field of the earth, more specifically the present invention relates to one kind
The three axle magnetic detection modules based on multichannel SQUID Magnetic Sensors.Belong to magnetic field measurement technology field.
Background technology
Superconducting quantum interference device（SQUID）It is a kind of Superconducting Quantum device being made up of Josephson junction and superconducting ring
Part, its operation principle is based primarily upon Josephson effect and magnetic field quantization, and the faint change in magnetic field can be converted into by it
Measurable voltage, magnetic field sensitivity can reach fT magnitudes, be current most sensitive magnetic field sensor, therefore it is in Weak magentic-field
There is greatly development and application potential in terms of field of detecting such as biological magnetic field detection, Non-Destructive Testing, magnetic field of the earth detection.Example
Telluric electromagnetic sounding such as in geophysical exploration（Magnetotelluric, MT）And controlled-source audiomagnetotellurics sounding
（CSAMT）High performance magnetic field sensor is required in measure magnetic field of the goal signal.
MT is that naturally occurring regional electromagnetic field is detected, and this kind of Natural electromagnetic field has very wide frequency band, is led to
Cross the measurement and data analysis to these Natural electromagnetic fields, it may be appreciated that the electrical structure of earth's lithosphere, be research geology of deep part
One of the basic exploitation method in construction and look for oil and gas field, MT has obtained very big development in recent years.Due to the natural field sources of MT
Weak output signal, therefore highly sensitive Magnetic Sensor is needed to use in the application.
CSAMT and MT belongs to frequency electromagnetic sounding category together, and both difference is that CSAMT excitation field source can be with people's industry control
System, for the randomness and weak output signal of MT field sources, so that observing very difficult situation, CSAMT is used and can manually controlled
Emission current and its electric dipole or magnetic dipole of frequency are as field source, by measuring the difference away from field source place position farther out
Electromagnetic field signal under tranmitting frequency, to calculate the apparent resistivity under different frequency, to reflect the distribution of subsurface resistivity
Feature.
When carrying out crustal magnetotelluric measurement, MT measurements are generally both carried out, CSAMT measurements are also carried out, they are required for sensitive
Magnetic Sensor.In addition, CSAMT echo signal is the magnetic field that different tranmitting frequencies are triggered, earth environment magnetic field, which is regarded as, makes an uproar
Sound, therefore, the signal-to-noise performance of its system are an emphasis indexs of its concern, are generally reduced using the method for multiple stacking
The influence of earth environment magnetic noise, it is therefore desirable to which long-time measurement is carried out to the field of single-frequency.
However, when superconduction SQUID Magnetic Sensors are applied into MT and CSAMT, single channel SQUID sensors are all used at present
Magnetic-field measurement is carried out, the magnetic signal that SQUID is sensed is read using Flux modulation lock-in circuit（DANTSKER,E
etc.HIGH-T-C3-AXIS DC SQUID MAGNETOMETER FOR GEOPHYSICAL APPLICATIONS）, according to report
Road, so far Shanghai Inst. of Microsystem and Information Technology, Chinese Academy of Sci also only utilize superconduction SQUID Magnetic Sensors device carry out
Application study in terms of MT and CSAMT.During magnetic survey, MT measurement have frequency band it is relatively wide the characteristics of, and CSAMT in order to
The signal to noise ratio of improvement system, using the processing method of signal averaging, it is therefore desirable to carry out long-time measurement in a measurement point, is surveyed
The amount time is more than half an hour, is unfavorable for engineering application.
The present invention intends the measuring characteristic for above-mentioned superconduction SQUID Magnetic Sensors, it is intended to provides one kind and is based on multichannel
Three axle detecting modules of SQUID sensors, it is not only able to measure the magnetic field of three orthogonal directions, and can for MT and
CSAMT different requirements, flexibly change modular structure to adapt to its requirement, and then can improve operating efficiency.In addition, this visit
Module is surveyed equally to be expected to can apply among other Weak magentic-field field of detecting.
The content of the invention
It is an object of the invention to provide a kind of three axle magnetic detection modules based on multichannel SQUID Magnetic Sensors.This hair
A kind of bright three-axle magnetic field detecting module of design, three directions are mutually orthogonal, and XYZ directions in space are corresponded to respectively.To each side
To magnetic-field measurement completed by multiple passage superconduction SQUID sensors, multiple passage SQUID can either constitute serial array,
Parallel connected array can be constituted by changing connection order, serial array can improve the sensitivity of measurement, and parallel connected array can be carried
The signal to noise ratio and operating efficiency of high measurement.Further feature is described as follows：
（1）Three-axle magnetic field detecting module
Superconduction SQUID Magnetic Sensors are a kind of vector sensors, can only measure the magnetic field change perpendicular to device plane direction
Change amount.When carrying out Weak magentic-field signal measurement, because Weak magentic-field signal is not with superconduction SQUID Magnetic Sensors device plane
It is completely vertical, therefore it is component of the magnetic field signal to be measured perpendicular to SQUID planes that SQUID Magnetic Sensors, which are sensed, even
In some cases, single shaft SQUID is not measured magnetic field signal, Distribution of Magnetic Field such as Fig. 1 that the electric current loop of such as magnetic dipole is produced,
As can be seen from the figure come, on the point that these are listed in A, B, C, D and E, tested according to single shaft, the direction magnetic field of arrow mark
Just do not detect, cause the magnetic field value measured in fact inaccurate, in addition, being not only these particular points, deviateing these
The not far vicinity of particular point, sometimes magnetic field signal is very faint, and the effect measured is dissatisfied.Using three axle magnetic
Detecting module can be solved the above problems, and three axle modules are made up of the Magnetic Sensor in 3 directions, as shown in Fig. 2 this 3 directions
It is mutually orthogonal, in this way, magnetic field signal to be measured can be decomposed according to these three directions, the Magnetic Sensor measurement pair in each direction
Answer the magnetic field in its direction, it is possible to which thus three signal of change go out magnetic vector.
（2）Series connection SQUID arrays
In three axle detecting modules, the magnetic detection component for detecting each direction is made up of multiple SQUID Magnetic Sensors,
These superconductions SQUID Magnetic Sensors device be may be constructed into series connection SQUID components in series, as shown in figure 3, before i.e.
The negative pole end of one superconduction SQUID Magnetic Sensor device is connected to the positive terminal of adjacent superconduction SQUID Magnetic Sensor devices.It is this
Series connection SQUID components have larger magnetic field-voltage conversion coefficient, if what each superconduction SQUID Magnetic Sensor devices were sensed
Changes of magnetic field Δ B, its output voltage is Δ V, then its magnetic field-voltage conversion coefficient is Δ V/ Δ B, when n superconduction SQUID magnetic
When sensor component constitutes series connection SQUID components, when changes of magnetic field is Δ B, the output voltage of its array is n* Δ V, its magnetic
Field-voltage conversion coefficient is n* Δ V/ Δ B, and n times is improved than single superconduction SQUID Magnetic Sensor devices.Magnetic field-voltage conversion
The raising of coefficient allows SQUID reading circuits to use direct-reading circuit mode, and this circuit mode is not only simple in structure, convenient
Use, and with very high Slew Rate and very big bandwidth, MHz magnitudes can be reached, these advantages make it require high Slew Rate
With very strong application potential during magnetic-field measurement with big bandwidth.
（3）SQUID arrays in parallel
In three axle detecting modules, the magnetic detection component for detecting each direction can also be by multiple SQUID Magnetic Sensors
The parallel connected array of composition, as shown in figure 4, being mutually not attached between i.e. multiple SQUID sensors, each SQUID Magnetic Sensors difference
Sense external magnetic field signal, array sensitivity sensitivity of individual devices in array is determined, but be due to each SQUID sensings
The ambient noise of device sensing has randomness and irrelevance, and incoherent magnetic noise is superimposed, can be in theory
Magnetic noise is reduced into n1/2, therefore the signal to noise ratio of system can be improved n by parallel connection SQUID arrays1/2。
Further, since parallel connection SQUID is installed in a plane, the spacing of device, therefore can be by phase at several centimetres
Two adjacent superconduction SQUID Magnetic Sensors devices constitute a magnetic field gradient meter, as shown in figure 4, SQUID-1 measurements is position
Magnetic field at 1, what SQUID-2 was measured is the magnetic field at position 2, then can calculate magnetic field according to the magnetic field of the two positions
GradientAccording to the measured magnetic field at position 1 and position 3, magnetic field gradient can be calculatedEqually, pass through
The SQUID arrays of other both directions, can calculate magnetic field gradient
These magnetic gradient datas more enrich Magnetic Field, help to carry out more accurate magnetic field inverting, in geophysical exploration
In play a significant role.
In 3 axle magnetic detection modules, the magnetic detection component for measuring each direction both may be constructed cascade, can also
Parallel form is constituted, switching can be completed by switching between multi-form.Needing the measurement of high Slew Rate and big bandwidth
Occasion, can apply cascade；The occasion of high s/n ratio is needed in detection, parallel form can be applied, three axles are so further increased
The use flexibility of magnetic-field measurement module.
, can also be by battle array of connecting in the application of SQUID magnetic measurements in addition to serial array or parallel connected array is used alone
Row and parallel connected array are used in mixed way, and constitute the measuring system with high Slew Rate, big bandwidth and high s/n ratio, such as each magnetic field
The parallel connected array arranged in measurement direction using 2 rows 2, and each unit is made up of 4 superconduction SQUID sensor series.If but
It is so designed that, number of sensors increases by 4 times, adds system cost, needs to be weighed in the application.
In a word, the present invention relates to a kind of three axle magnetic detection modules based on multichannel SQUID Magnetic Sensors, it is characterised in that
Described three-axle magnetic field detecting module, three directions are mutually orthogonal, the XYZ directions in space corresponded to respectively, to each direction
Magnetic-field measurement is completed by multiple passage superconduction SQUID Magnetic Sensors devices；Multiple passage superconduction SQUID sensors constitute series connection battle array
Row constitute parallel connected array by changing connection order.Serial array can improve the sensitivity of measurement, and parallel connected array can be carried
The signal to noise ratio and operating efficiency of high measurement.Change the connection method of each component in module, the spy of different structure can be constructed
Module is surveyed, the difference of detecting module is required with meeting practical application, flexibility and the efficiency of detection system is improved.
Brief description of the drawings
The Distribution of Magnetic Field schematic diagram that Fig. 1 magnetic dipoles are produced；
Fig. 2 three-axle magnetic field detecting module schematic diagrames；
Fig. 3 series connection SQUID connection diagrams；
Fig. 4 parallel connection SQUID connection diagrams, wherein (a) is the parallel connected array schematic diagram on a direction in three axle modules,
(b) it is whole three axle modules schematic diagram, (a) and the superconduction SQUID Magnetic Sensors device in (b) are mutually corresponded to；
The axle detecting module preparation methods of Fig. 5 tri-.
Embodiment
According to foregoing design, 3 axle detecting module of the present invention makes by the way of from top to down, such as
Shown in Fig. 5.
Three axle modules are broadly divided into carrier and device two large divisions, and carrier and element manufacturing can separate parallel complete
Into therefore, during module is made, being first respectively completed carrier and SQUID and make, this two parts then is integrated in into one
Rise, constitute 3 axle modules.The specific make step of 2 × 2 passages is：
First, the dimensional parameters of three axle modules are determined, according to the Dewar size determining module that low temperature environment is provided to module
Size, the size of this module is identical generally with the size of carrier.The carrier of usual module is designed as cube structure, and the length of side is small
In 10 centimetres, the carrier material selection stable epoxy material of performance, and being produced using mechanical manufacturing technology at low ambient temperatures
Cube carrier, produces the mechanical structure of some auxiliary, such as screw on carrier.After completing, cube is measured
Surface smoothness and each plane between angle, compare design parameter, adjust and reduce the structural failure of carrier.
Second, while carrier makes, superconduction SQUID Magnetic Sensor devices are prepared using micro fabrication, in device
After the completion of prepared by part, according to the size in three each direction of axle module, device is packaged, because arranging 2 × 2 on per one side
Channel array, and to prevent the cross-interference issue between device, it is necessary to leave several centimetres of spacing between device.In device
After encapsulation, superconduction SQUID sensors are installed on before module, performance test and demarcation are carried out to each device, including
The test of the performances such as device noise, field voltage conversion parameter, and select the close device of performance to manufacture magnetic detection module, protect
Demonstrate,prove the homogeneity of device performance.
3rd, according to the design of module, superconduction SQUID Magnetic Sensor devices are installed on three axle modules, and to each
The array in individual direction carries out performance test, according to the measurement feedback result of performance parameter, updates and improve three axle modules.
4th, by the detection to each step in device, component, module preparation process, to ensure magnetic detection module
Quality, makes 3 axle detecting modules be played an important role in Weak magentic-field detection application.
Claims (2)
1. a kind of preparation method of the three axle magnetic detection modules based on multichannel SQUID Magnetic Sensors, it is characterised in that using from
Mode under above makes, and three described axle magnetic detection modules are divided into carrier and device two large divisions, and carrier and device system
Make to separate and complete parallel；During module is made, carrier and superconduction SQUID Magnetic Sensor device systems are first respectively completed
Make, then integrate this two parts, constitute 3 axle modules；The specific make step of 2 × 2 passages is：
First, the dimensional parameters of three axle modules are determined, according to the Dewar size determining module size that low temperature environment is provided by module,
The size of module is identical with the size of carrier, and the carrier of usual module is designed as cube structure, the selection of carrier material be
The stable epoxy material of performance under low temperature environment, and cube carrier is produced using mechanical manufacturing technology, made on carrier
Go out the mechanical structure of screw auxiliary；After completing, the angle between cubical surface smoothness and each plane is measured, than
To design parameter, the structural failure of carrier is adjusted and reduced；
Second, while carrier makes, superconduction SQUID Magnetic Sensor devices are prepared using micro fabrication, in device system
After the completion of standby, according to the size in three each direction of axle module, device is packaged；2 × 2 passages battle array is arranged on each face
Row, to prevent the cross-interference issue between device, it is necessary to leave several centimetres of spacing between device；After device encapsulation,
Superconduction SQUID Magnetic Sensors are installed on before module, each device is carried out to include device noise, field voltage conversion ginseng
The test performance test and demarcation of number performance, and select the close device of performance to manufacture magnetic detection module, it is ensured that device performance
Homogeneity；
3rd, according to the design of module, superconduction SQUID Magnetic Sensor devices are installed on three axle modules, and to each side
To array carry out performance test, according to the measurement feedback result of performance parameter, update and improve three axle modules；
4th, by the detection to each step in device, module making step, to ensure the quality of magnetic detection module.
2. the method as described in claim 1, it is characterised in that the length of side of the carrier of the module of cube structure is less than 10 centimetres.
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| CN104330754B (en) * | 2014-09-29 | 2017-09-19 | 北京美尔斯通科技发展股份有限公司 | Superconduction weak magnetic signal detects magnetometer |
| CN105866710B (en) * | 2016-03-30 | 2018-09-07 | 中国科学院上海微系统与信息技术研究所 | A kind of ambient noise suppressing method and equipment |
| CN106403959A (en) * | 2016-11-22 | 2017-02-15 | 天津海运职业学院 | Electromagnetic positioning system adopting multi-sensor array |
| CN107229021B (en) * | 2017-05-22 | 2019-07-19 | 中国科学院上海微系统与信息技术研究所 | Three-dimension reconstruction component and preparation method |
| CN109799467B (en) * | 2019-01-31 | 2021-04-27 | 北京大学 | Space magnetic field measuring device, measuring system and measuring method without extending rod |
| CN113267741B (en) * | 2021-05-18 | 2022-06-21 | 中国科学院上海微系统与信息技术研究所 | SQUID test component crosstalk calibration and elimination method and system |
| CN113705050B (en) * | 2021-08-26 | 2023-10-27 | 哈尔滨工程大学 | Teaching virtual experiment platform for superconducting quantum interferometer |
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