CN103900646B - Flow operation device and flow control device - Google Patents
Flow operation device and flow control device Download PDFInfo
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- CN103900646B CN103900646B CN201310728786.4A CN201310728786A CN103900646B CN 103900646 B CN103900646 B CN 103900646B CN 201310728786 A CN201310728786 A CN 201310728786A CN 103900646 B CN103900646 B CN 103900646B
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- G—PHYSICS
- G16—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR SPECIFIC APPLICATION FIELDS
- G16Z—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR SPECIFIC APPLICATION FIELDS, NOT OTHERWISE PROVIDED FOR
- G16Z99/00—Subject matter not provided for in other main groups of this subclass
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- G—PHYSICS
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Abstract
The invention provides a flow operation device and flow control device, which can still manage to realize accurate flow control under a dominant condition through the air flow inside a regulate valve. If the judging unit (20) determines that by a regulating valve (2) the fluid flow is dominant, the flow calculation section (23) based on the dominant cavitation flow under the condition of XF, pressure ratio and valve opening angle and flow coefficient Cv, stores the corresponding second export flow coefficient Cv. Then, the flow coefficient Cv using such derived calculation flow regulating valve (2) is capable of achieving flow Q accurately even under a dominant condition through the air flow inside a regulate valve. As a result, a more accurate flow control can be achieved.
Description
Technical field
The present invention relates to the flow arithmetic unit of computing be carried out to the flow by the fluid of regulating valve and possesses the stream
The volume control device of amount arithmetic unit.
Background technology
In the past, the flow for flowing through the fluid of the pipeline of plant equipment etc. is controlled by the regulating valve for being arranged at pipeline.Tool
For body, according to following formula（1）The flow Q by regulating valve is calculated, by controlling to adjust the aperture of valve so that flow Q and setting
Flow Qsp is consistent so that the fluid of regulation flow passes through regulating valve（For example, referring to patent document 1）.Here, Δ P is regulating valve
Primary side（Upstream side）The pressure P1 of stream and secondary side（Downstream）The differential pressure of the pressure P2 of stream（P1-P2）, Cv is stream
Coefficient of discharge, for each valve opening θ of regulating valve sets.
Q=A·Cv·ΔP1/2···（1）
Among these, due to the flow coefficient Cv of regulating valve it is different according to the bore or classification of regulating valve, it is therefore desirable to accord with
Cooperate to obtain appropriate value in advance for the regulating valve ground of object.Thus, for example the ground such as every several Pa presets multiple differential pressures, it is right
When each in these differential pressures obtains the aperture with the regulating valve of the setting for changing for example several percentages etc. every time
The value of the corresponding flow coefficient Cv of each aperture, and value table corresponding with differential pressure and each aperture will be made in shipment to be stored in regulation
In the memory of the executing agency of valve or the measurement apparatus of flow etc..Then, when actual flow is measured, based on the table and measurement
The differential pressure for arriving and the actual aperture of regulating valve derive corresponding Cv values, by substituting into above formula（1）Obtain flow Q, control and regulation
The aperture of valve is so that flow Q is consistent with setting flow Qsp.
Prior art literature
Patent document
The Japanese Unexamined Patent Publication 6-094160 publication of patent document 1
The content of the invention
The invention problem to be solved
But, due to the table of above-mentioned discharge coefficient be not produce the state of air pocket in regulating valve premised on, therefore
If producing air pocket in regulating valve, cavitation flow becomes if mastery, then each Cv values of flow coefficient Cv value table just become
It is not corresponding with actual value.Then, due to above formula（1）The flow Q for trying to achieve is not actual flow, therefore as a result,
Accurate flow control cannot be carried out.
Therefore, it is an object of the present invention to provide a kind of flow arithmetic unit and volume control device, even if in air pocket
Flowing become it is overriding in the case of can also carry out accurate flow control.
Means for solving the problems
In order to solve above-mentioned problem, flow arithmetic unit involved in the present invention is characterised by, including:Obtaining section, institute
State obtaining section obtain as the restriction for flowing through the regulating valve being connected with stream upstream side fluid pressure first pressure,
As the second pressure and first pressure and second pressure of the pressure of the fluid in the downstream of the restriction for flowing through regulating valve
In differential pressure at least two；Obtain the valve opening obtaining section of the valve opening of regulating valve；Coefficient operational part, the coefficient operational part base
In the first pressure, second pressure and differential pressure obtained by obtaining section at least two, calculate based on first pressure, first
First coefficient of the saturated vapour pressure of the differential pressure and fluid of pressure and second pressure；First table, first table will pass through
In the flowing of the fluid of regulating valve cavitation flow be not in the state of mastery, first pressure and second pressure differential pressure and
Valve opening is accordingly stored with discharge coefficient；Second table, second table is by the gas in by the flowing of the fluid of regulating valve
Cave flowing is that in the state of mastery, the first coefficient and valve opening are accordingly stored with discharge coefficient；Judging part, it is described
Whether cavitation flow is overriding in the flowing that judging part judgement passes through the fluid of regulating valve；And flow rate calculation unit, it is described
Flow rate calculation unit in the case of being judged that cavitation flow is not overriding in by the flowing of the fluid of regulating valve by judging part,
Discharge coefficient is derived with the first table based on differential pressure and valve opening, is calculated based on the discharge coefficient and differential pressure and is flow through regulating valve
The flow of fluid, in the case of being judged that air pocket is overriding in the flowing by the fluid of regulating valve by judging part, is based on
First coefficient and valve opening and the second table derive discharge coefficient, are calculated based on the discharge coefficient and differential pressure and flow through regulating valve
The flow of fluid.
In above-mentioned flow arithmetic unit, coefficient operational part can also be making the first coefficient for XF, and differential pressure is Δ P, and first
Pressure is P1, when saturated vapour pressure is PV, according to XF=Δ P/（P1-PV）Calculate the first coefficient.
Also, in above-mentioned flow arithmetic unit, further with storage part, the storage part according to valve opening to setting
Threshold value is stored, and judging part can also enter to the first coefficient calculated by coefficient operational part and the threshold value for being stored in storage part
Row compares, and judges that cavitation flow is domination in the flowing by the fluid of regulating valve in the case where the first coefficient is more than threshold value
Property.
Also, in above-mentioned flow arithmetic unit, further having：Temperature acquisition unit, the temperature acquisition unit is obtained and flow through
The temperature of the fluid of stream；With the 3rd table, the 3rd table be stored with fluid each temperature saturated vapour pressure, coefficient computing
Portion can also calculate the first coefficient using saturated vapour pressure, and the saturated vapour pressure is based on the fluid obtained by temperature acquisition unit
Temperature and the 3rd table derived from.
Also, volume control device involved in the present invention is characterised by, including：Flow arithmetic unit, the flow computing
Device calculates the flow for flowing through the regulating valve for being connected to stream；And control valve device, the control valve device control and regulation valve
Aperture, so that the flow calculated by the flow arithmetic unit is consistent with setting value, flow arithmetic unit is above-mentioned flow fortune
Calculate device.
Invention effect
According to the present invention, if it is determined that in by the flowing of the fluid of regulating valve cavitation flow be not it is overriding, then
Based in the state of not being mastery in by the flowing of the fluid of regulating valve by cavitation flow, first pressure and the second pressure
The first table that differential pressure and valve opening and the discharge coefficient of power is accordingly stored derives discharge coefficient, if it is determined that cavitation flow
Be it is overriding, then based on it is in the state of being mastery in by the flowing of the fluid of regulating valve by cavitation flow, first
The second table that coefficient and valve opening are accordingly stored with discharge coefficient derives discharge coefficient, due to using so derived stream
Coefficient of discharge calculates the flow of the fluid for flowing through regulating valve, even if therefore also can carry out in the case of being overriding in cavitation flow
Accurately flow control.
Description of the drawings
Fig. 1 is the figure of the structure for schematically showing the flow control system that embodiment of the invention is related to.
Fig. 2 is the block diagram of the structure for illustrating flow arithmetic unit.
Fig. 3 is the figure for illustrating the structure of the first table.
Fig. 4 is the figure for illustrating the structure of the second table.
Fig. 5 is the block diagram of the structure for illustrating control valve device.
Specific embodiment
Hereinafter, it is described in detail referring to the drawings the embodiment to the present invention.
［ structure of flow control system ］
As shown in figure 1, flow control system of the present embodiment includes：Stream 1, is arranged at the regulation of the stream 1
Valve 2, is arranged at the temperature sensor 3 of stream 1, the upstream side of the restriction being arranged in regulating valve 2（Primary side）Primary side
Pressure sensor 4, the downstream of the restriction being arranged in regulating valve 2（Secondary side）Secondary pressure sensor 5, be arranged at
The valve opening sensor 6 of regulating valve 2, and convection current crosses the flow controlling unit 7 that the flow of the fluid of stream 1 is controlled.
Stream 1 is made up of a pipe arrangement being arranged in plant equipment etc., and fluid is in its internal circulation.
Regulating valve 2 by internally have stream and in the way of the stream with restriction valve body, be disposed in the valve
Body interior simultaneously limits the valve element of flow by the fluid of restriction and is held by driving the valve element to control the electronic of aperture
The flow controlling unit such as row mechanism or positioner 7 is constituted, by being changed based on the control signal from flow controlling unit 7
Valve opening, the flow of the fluid that control passes through regulating valve 2, that is, flow through the flow of the fluid inside stream 1.
Temperature sensor 3 is well-known temperature sensor, temperature T of the fluid that measurement stream is crossed inside stream 1.The survey
Amount result is sent to flow controlling unit 7.
Side pressure sensor 4 is well-known pressure sensor, the upstream side to the restriction in regulating valve 2
（Primary side）Stream in the pressure P1 of fluid that flows measure.The measurement result is sent to flow controlling unit 7.
Secondary pressure sensor 5 is well-known pressure sensor, the downstream to the restriction in regulating valve 2
（Secondary side）Stream in the pressure P2 of fluid that flows measure.The measurement result is sent to flow controlling unit 7.
Valve opening sensor 6 is the sensor of valve opening θ for measuring regulating valve 2.The measurement result is sent to flow control
Unit processed 7.
<The structure of flow controlling unit>
Flow controlling unit 7 includes：Flow arithmetic unit 8, the flow arithmetic unit 8 is based on from temperature sensor 3, once
The measurement result that side pressure sensor 4, secondary pressure sensor 5 and valve opening sensor 6 are received is calculated and flows through stream 1
The flow of fluid；With control valve device 9, the control valve device 9 is by the operation result generation control based on the flow arithmetic unit 8
Signal processed simultaneously sends to regulating valve 2 to control to adjust the valve opening of valve 2.
<<The structure of flow arithmetic unit>>
Here, flow arithmetic unit 8 as shown in Fig. 2 including：Temperature acquisition unit 11, a pressure obtaining section 12, secondary pressure
Power obtaining section 13, the 3rd table 14, saturated vapour pressure leading-out portion 15, differential pressure operational part 16, coefficient operational part 17, valve opening obtaining section
18, threshold value storage part 19, judging part 20, the first table 21, the second table 22 and flow rate calculation unit 23.
Temperature acquisition unit 11 is that the fluid for flowing through stream 1 measured by the temperature sensor 3 is obtained from temperature sensor 3
Temperature T function part.Temperature T of acquirement is exported to saturated vapour pressure leading-out portion 15.
3rd table 14 is the tables of data for accordingly storing temperature T of fluid with saturated vapour pressure PV.As one example,
Temperature T1 of the interval setting of setting, and saturated vapour pressure PV phases corresponding with each temperature T1 for example will be waited with 0.1 DEG C every time
In being accordingly stored in the 3rd table 14.
Temperature T1 of the saturated vapour pressure leading-out portion 15 based on the fluid for flowing through stream 1 from the input of temperature acquisition unit 11, and
The saturated vapour pressure PV of the fluid of stream 1 is flow through in 3rd table 14, derivation.Specifically, with reference to the 3rd table 14, derive and from temperature
The corresponding saturated vapour pressure PV of temperature T of the input of obtaining section 11.The saturated vapour pressure PV that this is derived is exported to coefficient computing
Portion 17.So, because corresponding with fluid temperature (F.T.) T saturated vapour pressure PV is exported, therefore improve by system described later
The operational precision of pressure ratio XF that number operational part 17 is carried out.
Pressure obtaining section 12 is to obtain to be measured by a side pressure sensor 4 from a side pressure sensor 4
The fluid for flowing through primary side stream pressure P1 function part.The pressure P1 of acquirement is output to differential pressure operational part 16 and is
Number operational part 17.
Secondary pressure obtaining section 13 is to obtain to be measured by the secondary pressure sensor 5 from secondary pressure sensor 5
The fluid for flowing through secondary side stream pressure P2 function part.The pressure P2 of acquirement is output to differential pressure operational part 16 and is
Number operational part 17.
Differential pressure operational part 16 is calculated from the pressure P1 of an input of pressure obtaining section 12 and from secondary pressure obtaining section 13
The differential pressure Δ P of the pressure P2 of input（=P1-P2）Function part.The differential pressure Δ P that what this was obtained calculate is output to coefficient computing
Portion 17 and flow rate calculation unit 23.
Coefficient operational part 17 is taken based on the saturated vapour pressure PV from the input of saturated vapour pressure leading-out portion 15, from a pressure
The pressure P1 and the differential pressure Δ P from the input of differential pressure operational part 16 of the input of portion 12 are obtained, the function part of the first coefficient is calculated.In this reality
In applying form, pressure ratio XF is calculated as first coefficient.Pressure ratio XF is represented while being differential pressure Δ P, another side is pressure
The ratio that P1 or pressure P2 is constituted with the difference of saturated vapour pressure.Specifically, coefficient operational part 17 is based on following formula（2）Calculate pressure
Power compares XF.Pressure ratio XF for calculating is output to judging part 20 and flow rate calculation unit 23.
XF=Δ P/（P1-PV）···（2）
According to above formula（2）, can calculate whether cavitation flow in the flowing that fluid is judged using judging part 20 is domination
Required pressure ratio XF of property.
Valve opening obtaining section 18 is that the regulating valve 2 measured by the valve opening sensor 6 is obtained from valve opening sensor 6
The function part of valve opening θ.Aperture θ of acquirement is output to judging part 20 and flow rate calculation unit 23.
Threshold value storage part 19 is to the threshold value A used in the judgement action of judging part 20（θ）The function part for being stored.
The threshold value A（θ）It is the intrinsic value of each the aperture θ setting for regulating valve 2.Even identical regulating valve 2,
If aperture θ difference if, then cavitation flow be changed into overriding pressure ratio size it is also different.Therefore, in threshold
In value storage part 19, aperture θ of the regulating valve 2 of the interval setting for for example waiting setting with 1 ° every time that is accordingly stored with, and
Threshold value A corresponding with each aperture θ（θ）.Thus, it is possible to more accurately judge whether cavitation flow is mastery in the flowing of fluid
's.
Judging part 20 is that whether air pocket is overriding function part in the flowing for judge fluid.In the present embodiment, sentence
Disconnected portion 20 based on from coefficient operational part 17 input pressure ratio XF, from valve opening obtaining section 18 input aperture θ and be stored in
The threshold value of threshold value storage part 19（θ）Judged.Specifically, judging part 20 is obtained and opened from valve with reference to threshold value storage part 19
The corresponding threshold value A of aperture θ of the degree input of obtaining section 18（θ）, to the threshold value A（θ）It is compared with pressure ratio XF.Then, in XF
Value compare threshold value A（θ）Value it is little in the case of（XF ＜ A（θ））, judge that cavitation flow is not mastery in the flowing of fluid
's.On the other hand, XF value in threshold value A（θ）Value more than in the case of（XF≧A（θ））, judge the gas in the flowing of fluid
Cave flowing is overriding.The judged result is output to flow rate calculation unit 23.
First table 21 be illustrate in the flowing of fluid cavitation flow be not it is overriding in the case of, aperture θ and difference
The tables of data of the relation of pressure Δ P and flow coefficient Cv.Specifically, as shown in figure 3, the longitudinal axis is taken for example every time with the setting such as 1 °
Interval setting regulating valve 2 aperture θ（θ 1～θ i）, transverse axis take for example every time with the settings such as 1 [Pa] interval setting
Differential pressure Δ P（=X～XXX）, to be stored with and record corresponding flow coefficient Cv with each（Cvv1i～Cvv3i）.
Second table 22 be illustrate in the flowing of fluid cavitation flow be it is overriding in the case of, aperture θ and pressure
Than XF and the tables of data of the relation of flow coefficient Cv.Specifically, as shown in figure 4, the longitudinal axis is taken for example every time with the setting such as 1 °
Interval setting regulating valve 2 aperture θ（θ 1～θ j）, transverse axis take with setting interval setting pressure ratio XF（XFv=Y～
YYY）, to be stored with and record corresponding flow coefficient Cv with each（Cvv1j～Cvv3j）.
Flow rate calculation unit 23 is the function part of the flow Q for calculating the fluid by regulating valve 2.Specifically, by will be from
The differential pressure Δ P and flow coefficient Cv of the input of differential pressure operational part 16 substitutes into above formula（1）, calculate the stream for currently passing through regulating valve 2
The flow Q of body.The flow Q that this is calculated is output to control valve device 9.
Here, being updated to above formula（1）Flow coefficient Cv be derived as follows.
In the case of cavitation flow is not overriding in the flowing that fluid is judged according to judging part 20, flow rate calculation unit 23
With reference to the first table 21, derive and aperture θ and the differential pressure Δ P from the input of differential pressure operational part 16 from the input of valve opening obtaining section 18
Corresponding flow coefficient Cv, by the flow coefficient Cv being derived above formula is substituted into（1）.
On the other hand, in the case of judging that cavitation flow is overriding in the flowing of fluid in judging part 20, flow computing
Derive and aperture θ and the pressure from the input of coefficient operational part 17 from the input of valve opening obtaining section with reference to the second table 22 in portion 23
Flow coefficient Cv more corresponding than XF, by the flow coefficient Cv being derived above formula is substituted into（1）.Now, because pressure ratio XF is used
Be pressure ratio XF used in the judgement of judging part 20, therefore computing again is avoided the need for, it is possible to mitigate computing bearing
Carry.
So, in flow arithmetic unit 8, judge in the flowing of fluid cavitation flow be whether it is overriding,
Cavitation flow be not it is overriding in the case of using based on discharge coefficient calculated flow rate derived from the first table 21, be in cavitation flow
Using discharge coefficient calculated flow rate derived from the second table 22 is based in the case of overriding, therefore, it is possible to more accurately be flowed
Amount.
This flow arithmetic unit 8 is built-in by the electric operator or positioner as flow controlling unit 7
The storage circuits such as the computing circuits such as CPU, memory and the program being mounted with are constituted.That is, by hardware resource and soft
Part cooperates, and above-mentioned hardware resource is controlled by the program, above-mentioned 11, pressure obtaining section 12, secondary pressure of temperature acquisition unit
Obtaining section 13, the 3rd table 14, saturated vapour pressure leading-out portion 15, differential pressure operational part 16, coefficient operational part 17, valve opening obtaining section
18th, threshold value storage part 19, judging part 20, the first table 21, the second table 22 and flow rate calculation unit 23 are achieved.
<<The structure of control valve device>>
Control valve device 9 as shown in figure 5, including flow obtaining section 31, setting value obtaining section 32, valve opening operational part 33 with
And signal generation portion 34.
Flow obtaining section 31 is obtained by the computing of flow arithmetic unit 8 by regulating valve 2 from flow arithmetic unit 8
The function part of the flow Q of fluid.The flow Q for achieving is output to valve opening operational part 33.
Setting value obtaining section 32 is obtained by regulating valve from the epigyny device being communicatively coupled with flow controlling unit 7
The function part of setting value Qsp of the flow of 2 fluid.Setting value Qsp for achieving is output to valve opening operational part 33.
Valve opening operational part 33 is based on the flow Q from the input of flow obtaining section 31 and from the input of setting value obtaining section 32
Setting value Qsp, calculating makes flow Q become the function part of the aperture of the regulating valve 2 consistent with setting value Qsp.The operation result quilt
Export to signal generation portion 34.
Signal generation portion 34 is generated for making the aperture of regulating valve 2 be the regulating valve 2 from the input of valve opening operational part 33
Aperture control signal function part.The control signal for generating is output to regulating valve 2.Thus, the aperture of regulating valve 2
The aperture determined by control signal control is just controlled as, the fluid of flow corresponding with setting value Qsp passes through regulating valve 2.
This control valve device 9 as flow arithmetic unit 8, by the electric operator as flow controlling unit 7
Or the storage circuit such as computing circuit, the memory such as the built-in CPU of positioner and the program that is mounted with are constituted.Namely
Say, by the cooperation of hardware resource and software, above-mentioned hardware resource is controlled by the program, above-mentioned flow obtaining section 31, setting value
Obtaining section 32, valve opening operational part 33 and signal generation portion 34 are achieved.
As described above, according to this embodiment, cavitation flow in the flowing of fluid is judged using judging part 20
Whether it is overriding, if it is determined that cavitation flow is not overriding, then based on not being overriding state by cavitation flow
Under pressure P1 and first table 21 that accordingly stores with flow coefficient Cv of differential pressure Δ P and valve opening θ of pressure P2 derive
Flow coefficient Cv, if it is determined that cavitation flow is overriding, then based on being pressure in the state of mastery by cavitation flow
Flow coefficient Cv is derived than the second table 22 that XF and valve opening θ are accordingly stored with flow coefficient Cv, due to using so
Derived flow coefficient Cv calculates the flow Q of the fluid for flowing through regulating valve 2, even if therefore being overriding situation in cavitation flow
Under can also carry out accurate flow control.
In addition, in this embodiment, with by differential pressure operational part 16 according to the pressure obtained by pressure obtaining section 12
Power P1 and the pressure P2 obtained by secondary pressure obtaining section 13 are illustrated in case of calculating differential pressure Δ P, but also may be used
To arrange difference gauge in stream 1, the measurement result of the difference gauge is used as differential pressure Δ P like this.In this case, only
At least one of pressure P1 and pressure P2 can be obtained, it becomes possible to which another is calculated according to differential pressure Δ P.
[industrial applicability]
Present invention may apply to using the various systems of regulating valve.
Symbol description
1：Stream, 2：Regulating valve, 3：Temperature sensor, 4：Side pressure sensor, 5：Secondary pressure sensor, 6：
Valve opening sensor, 7：Flow controlling unit, 8：Flow arithmetic unit, 9：Control valve device, 11：Temperature acquisition unit, 12：Once
Pressure obtaining section, 13：Secondary pressure obtaining section, 14：3rd table, 15：Saturated vapour pressure leading-out portion, 16：Differential pressure operational part, 17：
Coefficient operational part, 18：Valve opening obtaining section, 19：Threshold value storage part, 20：Judging part, 21：First table, 22：Second table, 23：Stream
Amount operational part, 31：Flow obtaining section, 32：Setting value obtaining section, 33：Valve opening operational part, 34：Signal generation portion.
Claims (5)
1. a kind of flow arithmetic unit, it is characterised in that include：
Obtaining section, the obtaining section obtains the pressure of the fluid of the upstream side as the restriction for flowing through the regulating valve being connected with stream
The first pressure of power, the second pressure of pressure of fluid in downstream as the restriction for flowing through the regulating valve and described
In first pressure and the differential pressure of the second pressure at least two；
Obtain the valve opening obtaining section of the valve opening of the regulating valve；
Coefficient operational part, the coefficient operational part is based on the first pressure, the second pressure obtained by the obtaining section
And at least two in the differential pressure, calculate based on the first pressure, the first pressure and the second pressure
First coefficient of the saturated vapour pressure of differential pressure and fluid；
The cavitation flow in the flowing of the fluid by the regulating valve is not overriding state by the first table, first table
Under, the differential pressure and the valve opening of the first pressure and the second pressure accordingly store with discharge coefficient；
Second table, second table is by the state of cavitation flow is mastery in the flowing of the fluid by the regulating valve
, first coefficient and the valve opening accordingly store with discharge coefficient；
Judging part, first coefficient and threshold value are compared, first coefficient be it is more than threshold value in the case of, it is described
It is overriding that judging part is judged by cavitation flow in the flowing of the fluid of the regulating valve；And
Flow rate calculation unit, the flow rate calculation unit is being judged in the flowing of the fluid by the regulating valve by the judging part
In the case of cavitation flow is not overriding, flow system is derived with first table based on the differential pressure and the valve opening
Number, based on the discharge coefficient and the differential pressure flow of the fluid for flowing through the regulating valve is calculated, and is being sentenced by the judging part
Break in the case of air pocket is overriding in the flowing of the fluid by the regulating valve, based on first coefficient and described
Valve opening and second table derive discharge coefficient, are calculated based on the discharge coefficient and the differential pressure and flow through the regulating valve
The flow of fluid.
2. flow arithmetic unit as claimed in claim 1, wherein, it is characterised in that
The coefficient operational part is making first coefficient be XF, and the differential pressure is Δ P, and the first pressure is P1, described full
With vapour pressure be PV when, first coefficient is calculated according to XF=Δ P/ (P1-PV).
3. the flow arithmetic unit as described in claim 2, it is characterised in that
Further there is storage part, the storage part is stored to the threshold value set according to the valve opening.
4. the flow arithmetic unit as described in claim 2, it is characterised in that further have：
Temperature acquisition unit, the temperature acquisition unit obtains the temperature of the fluid for flowing through the stream；With
3rd table, the 3rd table be stored with the fluid each temperature saturated vapour pressure,
The coefficient operational part calculates first coefficient using saturated vapour pressure, and the saturated vapour pressure is based on by described
Derived from the temperature and the 3rd table of the fluid that temperature acquisition unit is obtained.
5. a kind of volume control device, it is characterised in that include：
Flow arithmetic unit, the flow arithmetic unit calculates the flow for flowing through the regulating valve for being connected to stream；Fill with valve control
Put, the control valve device controls the aperture of the regulating valve so that the flow calculated by the flow arithmetic unit with
Setting value is consistent,
The flow arithmetic unit is the flow arithmetic unit in Claims 1-4 described in any one.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012-282331 | 2012-12-26 | ||
| JP2012282331A JP6002029B2 (en) | 2012-12-26 | 2012-12-26 | Flow rate calculation device and flow rate control device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103900646A CN103900646A (en) | 2014-07-02 |
| CN103900646B true CN103900646B (en) | 2017-04-12 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310728786.4A Active CN103900646B (en) | 2012-12-26 | 2013-12-25 | Flow operation device and flow control device |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP6002029B2 (en) |
| KR (1) | KR101544648B1 (en) |
| CN (1) | CN103900646B (en) |
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| CN110531794A (en) * | 2019-08-30 | 2019-12-03 | 北京北方华创微电子装备有限公司 | Fluid pressure control device and method, cleaning solution supplying mechanism |
| CN113432661B (en) * | 2021-06-25 | 2022-05-20 | 河北凯森石化工程有限责任公司 | Method, device and medium for monitoring flow data |
| KR102632541B1 (en) * | 2022-03-21 | 2024-02-02 | 주식회사 플로워크연구소 | diagnosis method and system for diagnose water valve |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5251148A (en) * | 1990-06-01 | 1993-10-05 | Valtek, Inc. | Integrated process control valve |
| CN201066289Y (en) * | 2006-09-27 | 2008-05-28 | 松下电器产业株式会社 | Flux measuring device and flux measuring system |
| CN102734549A (en) * | 2011-03-29 | 2012-10-17 | 阿自倍尔株式会社 | Cavitation diagnosis device and diagnosis method thereof |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05264306A (en) * | 1991-03-08 | 1993-10-12 | Ishikawajima Harima Heavy Ind Co Ltd | Method for monitoring accuracy of vortex flowmeter in flow control system |
| JPH10228322A (en) * | 1997-02-14 | 1998-08-25 | Hitachi Ltd | Method and device for controlling flow rate |
| JP5113722B2 (en) * | 2008-10-31 | 2013-01-09 | アズビル株式会社 | Flow measuring device |
-
2012
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-
2013
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5251148A (en) * | 1990-06-01 | 1993-10-05 | Valtek, Inc. | Integrated process control valve |
| CN201066289Y (en) * | 2006-09-27 | 2008-05-28 | 松下电器产业株式会社 | Flux measuring device and flux measuring system |
| CN102734549A (en) * | 2011-03-29 | 2012-10-17 | 阿自倍尔株式会社 | Cavitation diagnosis device and diagnosis method thereof |
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| JP2014126425A (en) | 2014-07-07 |
| KR20140083905A (en) | 2014-07-04 |
| JP6002029B2 (en) | 2016-10-05 |
| KR101544648B1 (en) | 2015-08-17 |
| CN103900646A (en) | 2014-07-02 |
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