CN103895143A - Method for manufacturing PDMS thin film integrated with sub-millimeter deep channel - Google Patents
Method for manufacturing PDMS thin film integrated with sub-millimeter deep channel Download PDFInfo
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- CN103895143A CN103895143A CN201410113589.6A CN201410113589A CN103895143A CN 103895143 A CN103895143 A CN 103895143A CN 201410113589 A CN201410113589 A CN 201410113589A CN 103895143 A CN103895143 A CN 103895143A
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Abstract
The invention discloses a method for manufacturing a PDMS thin film integrated with a sub-millimeter deep channel. The method can be used for observing a micro living body under cultivation and growth states. A PMMA male mold is used as a PDMS channel duplication mold, flat PMMA adhered by transparent adhesive tapes is used as a thin film thickness control device, the obtained channel depth and the obtained thin film thickness are in a sub-millimeter scale, and the channel is embedded into the surface of the thin film. The PMMA male mold is manufactured by using an armok carving machine, and the bump height can reach the sub-millimeter scale, so that the PDMS channel with the sub-millimeter depth can be duplicated. PMMA of which two sides are adhered by a plurality of layers of transparent adhesive tapes is attached to a flat PMMA male mold, and the height of a cavity formed by the PMMA and the flat PMMA male mold is the height of cushion layers of the transparent adhesive tapes. When PDMS is poured into the cavity, the height is the thickness of the PDMS thin film. The height of the PMMA male mold can be controlled by finishing depth parameter setting in a tool path, and the thickness of the PDMS thin film can be controlled according to the layer number of the adhered transparent adhesive tapes.
Description
Technical field
The present invention relates to a kind of preparation method of film, specifically, is a kind of preparation method of integrated submillimeter deep channel PDMS film, while can be used for micro-live body cultivation and growth conditions, observes.
Background technology
PDMS is a kind of organosilicon macromolecule compound, is widely used in micro-fluidic field.It is easy to turn over system processing, and has good light transmission, gas permeability and bio-compatibility, is suitably for very much micro-live body cultivation desirable environment is provided.At present, have much about the research of carrying out cell, bacterium, virus in PDMS chip, the making of its passage adopts the reaction in-situ method of forming (In-situ Reaction Molding) conventionally.The so-called reaction in-situ method of forming, directly topples and on mould, reacts curing molding by liquid prepolymer.SU-8 formpiston is that PDMS passage is made the mould the most often adopting, and its making relates to the steps such as whirl coating, front baking, exposure, middle baking, development and rear baking, not easy to operate and very loaded down with trivial details.It should be noted that for SU-8 optical cement nature and limit, its controllable height of SU-8 formpiston of whirl coating gained mostly is 200 μ m left and right most, conventionally all below 100 μ m.Aforesaid several micro-live body size all below 100 μ m, therefore provides enough growing spaces with the PDMS passage capable of being that SU-8 formpiston turns over system for it.But, when the larger micro-live body of research size (as size is about drosophila embryos and the zebrafish embryo of 500 μ m), just cannot make the SU-8 formpiston of controllable height to turn over the PDMS passage of making enough degree of depth.And fruit bat and zebra fish are the model animal of Developmental Biology, there is important scientific research and be worth.Therefore, find one and can make the method that the degree of depth is submillimeter level (0.1mm-1mm) PDMS passage, contribute to promote the research of micro-fluidic this type of animal of bound pair.
In recent years, about micro-live body as (drosophila embryos) physiology and morphologic research in, conventionally can use laser scanning co-focusing microscope---a kind of microscopic observation system with special detection function, can realize high-resolution two-dimension optical fault imaging.Embryo is by certain fluorescence labeling, and the situation of change of its chromosome or configuration of surface just can clearly be observed by this Laser Scanning Confocal Microscope.In addition,, due to its remarkable imaging function, laser scanning co-focusing microscope is also extensively applied at other fields such as cell biology, pathology, anatomy, immunology and Neurobiologys.But this kind of microscope also has its weak point.In the time of its work, requiring the distance of the front camera lens of object lens and sample is that operating distance need be less than 800 μ m(take 30 × camera lens as example).Therefore,, while observing the micro-live body in PDMS passage with it, require the thickness of PDMS need be less than 800 μ m.The making of this type of thickness PDMS film can realize by the mode of high speed whirl coating, but than SU-8 optical cement, the mobility of liquid PDMS prepolymer is stronger, and therefore lacquering technique is unsatisfactory to the control of PDMS thickness.While observing sample, microscope parameter should make the appropriate adjustments to reach the most clear effect according to the thickness of thin slice.For guarantee to observe and carry out under same microscope parameter at every turn as far as possible, find a kind of PDMS film producing process reliably and be necessary.Chinese patent 201310203713.3 discloses a kind of preparation method of PDMS film, and they adopt fixture that two substrates and sidebar are fixedly clamped, and formed cavity is made for PDMS film.Simply, easily go, but substrate used thereof is flat board to the method, cannot make surface and be embedded with the PDMS film of passage.
In sum, set up a kind of preparation method of PDMS film of integrated submillimeter deep channel, be expected to micro-live body of micro-fluidic boundary's research submillimeter size to play progradation.
List of references:
[1]David?C.Duffy,J.Cooper?McDonald,at?al.Rapid?Prototyping?of?Microfluidic?Systems?in?Poly(dimethylsiloxane).Analytical?Chemistry,Vol.70,No.23,December1,1998,4974-4984.
[2]Byung-Ho?Jo,Linda?M.Van?Lerberghe,at?al.Three-Dimensional?Micro-Channel?Fabrication?in?Polydimethylsiloxane(PDMS)Elastomer.Journal?of?microelectromechanical?systems,Vol.9,No.1,March2000,76-81.
Summary of the invention
The object of the invention is to set up a kind of preparation method of integrated submillimeter deep channel PDMS film.The degree of depth of passage is by the PMMA formpiston control of engraving machine made, the cavity control that the thickness of film is formed by PMMA formpiston and another dull and stereotyped PMMA.The method is simple to operate, with low cost, is expected in common laboratory universal.
Experiment flow involved in the present invention is broadly divided into: the peeling off of PMMA formpiston making-liquid PDMS topple-PDMS film compacting-film.Wherein the making of PMMA formpiston and PDMS thin slice are compressed to committed step, are also innovations of the present invention simultaneously.
Concrete technical scheme of the present invention is as follows:
The present invention is a kind of preparation method of integrated submillimeter deep channel PDMS film, use PMMA formpiston to turn over molding jig as PDMS passage, use by the affixed dull and stereotyped PMMA of adhesive tape as film thickness control device, prepared channel depth and film thickness are all submillimeter level, and passage is embedded in film surface.
As improving further, PMMA formpiston of the present invention is formed by Ah not 's engraving machine engraving.
As improving further, the concrete preparation process of method of the present invention is as follows:
(1), draw needed channel pattern with ArtCAM Pro software, in cutter path, depth parameter is set to required numerical value, preserves cutter path;
(2), take dull and stereotyped PMMA as engraving base plate, above-mentioned path is imported to Ah not 's engraving machine, click and start, engraving machine can be according to the required 3D model of parameter carve importing;
(3), get a dull and stereotyped PMMA, the affixed adhesive tape with the identical number of plies respectively on its parallel both sides, the affixed number of plies is determined by the thickness of required PDMS thin slice;
(4), liquid PDMS performed polymer is toppled on PMMA formpiston, then the dull and stereotyped PMMA of affixed adhesive tape is pressed onto on formpiston, makes adhesive tape touch the non-protruding part of formpiston;
(5), above-mentioned substance is all placed in to baking oven, curing 1h at 100 ℃;
(6), take out, dull and stereotyped PMMA is removed, on PDMS film, mark required region with pocket knife, can separate required film.
As improving further, PDMS performed polymer of the present invention is to be mixed with the ratio of mass ratio 10:1 by PDMS monomer and crosslinking agent.
As improving further, the control of PMMA formpiston height of the present invention is to realize by finishing depth parameter setting in cutter path.
As improving further, the control of PDMS film thickness of the present invention is to realize by the affixed number of plies of adhesive tape.
As improving further, when being suitable for the cultivation of the micro-live body of submillimeter size and growth conditions, observes the integrated submillimeter deep channel PDMS film of made of the present invention.
As improving further, the present invention, after the dull and stereotyped PMMA of affixed adhesive tape is pressed onto on formpiston, for preventing dull and stereotyped PMMA floating, places a little iron block in the above.
Beneficial effect of the present invention is as follows:
Use Ah not 's engraving machine to make PMMA formpiston, its height of projection can reach submillimeter level, can turn over and make the dark PDMS passage of submillimeter with this.Use that both sides are affixed has the PMMA of some layers of adhesive tape and dull and stereotyped PMMA formpiston to be adjacent to, the two cavity height forming is adhesive tape bed course height, and in the time pouring into a mould PDMS inward, this is highly the thickness of PDMS film.The control of PMMA formpiston height can realize by finishing depth parameter setting in cutter path, and the control of PDMS film thickness can realize by the affixed number of plies of adhesive tape.
Use Ah not 's engraving machine to make PMMA formpiston, this technology is at least brought following three beneficial effects.The first, formpiston height can reach 400 μ m and more than, its system of turning over and PDMS enough for the existence of the micro-live body of submillimeter level provides enough spaces, be conducive to promote the research of micro-fluidic such live body of bound pair.The making of the second, PMMA formpiston can realize mechanization, and than home built SU-8 formpiston, it has the features such as collimation is good, difference is little, and it has the potential quality of batch production, is expected to be promoted in laboratory and industrial quarters.The 3rd, the making of PMMA formpiston is simple, lower cost for material, and compared with making with SU-8 formpiston, it is without loaded down with trivial details steps such as whirl coating, front baking, exposure, middle baking, development and rear bakings, and Production Time also shortens dramatically; And the price of PMMA will be far below SU-8 optical cement.
Suppress PDMS film with the affixed PMMA flat board that has some layers of adhesive tape in both sides, this technology is also at least brought following three beneficial effects.The first, the control of film thickness can realize by the affixed number of plies of adhesive tape, and flexibility and changeability can meet the demand of people to various film thicknesses.The second, than getting rid of painting method, the amount of PDMS that pressing uses still less, is more saved cost of manufacture.The 3rd, the prepared sheet thickness homogeneous of pressing, possesses the potentiality of batch production.
Accompanying drawing explanation
Fig. 1 is the pattern for carving PMMA formpiston;
Fig. 2 is the PMMA formpiston schematic diagram after engraving;
Wherein, 1 is carved region, 2 for carving area be not elevated regions;
Fig. 3 is the device schematic diagram for manufacturing integrated micro-channels PDMS film;
Wherein, 3 is PMMA formpiston, and 4 is dull and stereotyped PMMA, and 5 for being affixed on the adhesive tape on 4, and liquid PDMS is filled between 3 and 4;
Fig. 4 is prepared integrated submillimeter deep channel PDMS film schematic diagram.
The specific embodiment:
The invention provides a kind of preparation method of integrated submillimeter deep channel PDMS film, concrete technical scheme is:
PMMA formpiston is made:
Draw needed channel pattern with ArtCAM Pro software, in cutter path depth parameter be set to required numerical value (as 400 μ m), preserve cutter path;
1, take dull and stereotyped PMMA as engraving base plate, above-mentioned path is imported to Ah not 's engraving machine, click and start, engraving machine can be according to the required 3D model of parameter carve importing;
2, engraving finish after, by carved fall region scrub, carving area is not formpiston outburst area.
The compacting of PDMS thin slice:
1, get a dull and stereotyped PMMA, be wrapped in respectively the adhesive tape of the identical number of plies (m), the affixed number of plies is determined by the thickness of required PDMS thin slice thickness in monolayer 50 μ on its both sides.Row as, need 600 μ m thick PDMS, on dull and stereotyped PMMA, twine 12 layers of adhesive tape;
2, liquid PDMS is toppled on PMMA formpiston, then the dull and stereotyped PMMA of affixed adhesive tape is pressed onto on formpiston, make adhesive tape touch the non-protruding part of formpiston.For preventing dull and stereotyped PMMA floating, place in the above a little iron block;
3, above-mentioned substance is all placed in to baking oven, is heating and curing;
4, after solidifying, withdrawing device, carefully removes dull and stereotyped PMMA.
Finally, on PDMS film, mark required region with pocket knife, because PMMA and PDMS do not adhere to, be easy to separate required film.
PDMS used in the present invention be by monomer whose and curing agent take mass ratio as 10:1 mixes, while contributing to curing schedule, PDMS's solidifies.
PDMS channel depth involved in the present invention is in the cutter path by engraving PMMA formpiston, to finish depth parameter to determine, in the submillimeter level degree of depth, can artificially set.
PDMS thinness involved in the present invention determined by the affixed adhesive tape number of plies in dull and stereotyped PMMA both sides, according to required, and flexibly changing.
Testing result confirmation of the present invention, the PMMA formpiston size of made and designed error, within 5% scope, show that the PDMS channel depth error of turned over system is within 5% indirectly.
Testing result confirmation of the present invention, the PDMS thinness of made and designed error, within 10% scope, meet experiment required.
Below by specific embodiment, technical scheme of the present invention is further described:
Specific embodiment:
Example 1:
1. first draw channel pattern as shown in Figure 1 with ArtCAM Pro software, in cutter path hurdle, select 2 dimensional region to remove, finish the degree of depth and be set to 400 μ m;
2. cutter parameters is set: cutter numbering 1, diameter 1.000mm, line-spacing 0.100mm, incision step pitch 0.400mm, speed of mainshaft 4500r/min, feed rate 0.500mm/s, incision speed 0.200mm/s;
3. cutter path is saved as to cnc formatted file;
4. get a dull and stereotyped PMMA, be placed on milling cutter below, adjust milling cutter height and make its most advanced and sophisticated PMMA of contact just;
5. toolpath file is imported to Ah not 's engraving machine, click and start, formpiston engraving just starts;
6. after engraving finishes, take out the PMMA of carved mistake, wash away surperficial fines with running water, dry up;
7. the liquid PDMS prepolymer of preparation, by PDMS monomer and curing agent 10:1 ratio mixing in mass ratio;
8. get 1g said mixture and water on PMMA formpiston, standing 5min allows it flow to voluntarily evenly;
9. get another dull and stereotyped PMMA, at the affixed 12 layers of adhesive tape of its both sides difference, then pressed on the formpiston that has watered PDMS, and press in the above with an iron block to prevent its floating;
10. said apparatus is placed in to baking oven, at 100 ℃, solidifies 1h;
11. take out, and remove iron block and dull and stereotyped PMMA, mark required region with pocket knife on PDMS film, can separate integrated submillimeter deep channel PDMS film.
Through measuring, its tape channel degree of depth of the PDMS film making is about 400～420 μ m, and film thickness is about 600～650 μ m.Compare with designed size, error is within tolerance interval.
Example 2:
1. with example 1 step 1, finish the degree of depth and be set to 500 μ m;
2. with example 1 step 2, incision step pitch is set to 0.500mm;
3. with example 1 step 3;
4. with example 1 step 4;
5. with example 1 step 5;
6. with example 1 step 6;
7. with example 1 step 7;
8. with example 1 step 8;
9. with example 1 step 9, the number of plies of the attached adhesive tape that twines is 16 layers;
10. with example 1 step 10;
11. with example 1 step 11.
Through measuring, its tape channel degree of depth of the PDMS film making is about 500～530 μ m, and film thickness is about 800～880 μ m.Compare with designed size, error is within tolerance interval.
What more than enumerate is only part specific embodiment of the present invention; obviously, the invention is not restricted to above embodiment, can also have many distortion; all distortion that those of ordinary skill in the art can directly derive or associate from content disclosed by the invention, all should think protection scope of the present invention.
Claims (9)
1. the preparation method of an integrated submillimeter deep channel PDMS film, it is characterized in that, use PMMA formpiston to turn over molding jig as PDMS passage, use by the affixed dull and stereotyped PMMA of adhesive tape as film thickness control device, prepared channel depth and film thickness are all submillimeter level, and passage is embedded in film surface.
2. the preparation method of PDMS film according to claim 1, is characterized in that, described PMMA formpiston is formed by Ah not 's engraving machine engraving.
3. the preparation method of PDMS film according to claim 1 and 2, is characterized in that, concrete preparation process is as follows:
(1), draw needed channel pattern with ArtCAM Pro software, in cutter path, depth parameter is set to required numerical value, preserves cutter path;
(2), take dull and stereotyped PMMA as engraving base plate, above-mentioned path is imported to Ah not 's engraving machine, click and start, engraving machine can be according to the required 3D model of parameter carve importing;
(3), get a dull and stereotyped PMMA, affixed respectively on its parallel both sides the adhesive tape of the identical number of plies, the affixed number of plies is determined by the thickness of required PDMS thin slice;
(4), liquid PDMS performed polymer is toppled on PMMA formpiston, then the dull and stereotyped PMMA of affixed adhesive tape is pressed onto on formpiston, makes adhesive tape touch the non-protruding part of formpiston;
(5), above-mentioned substance is all placed in to baking oven, curing 1h at 100 ℃;
(6), take out, dull and stereotyped PMMA is removed, on PDMS film, mark required region with pocket knife, can separate required film.
4. the preparation method of PDMS film according to claim 3, is characterized in that, described PDMS performed polymer is to be mixed with the ratio of mass ratio 10:1 by PDMS monomer and crosslinking agent.
5. the preparation method of PDMS film according to claim 4, is characterized in that, the control of described PMMA formpiston height is to realize by finishing depth parameter setting in cutter path.
6. according to the preparation method of the PDMS film described in claim 4 or 5, it is characterized in that, the control of described PDMS film thickness is to realize by the affixed number of plies of adhesive tape.
7. the preparation method of PDMS film according to claim 6, is characterized in that, when the integrated submillimeter deep channel PDMS film of made is suitable for the cultivation of the micro-live body of submillimeter size and growth conditions, observes.
8. the preparation method of PDMS film according to claim 3, is characterized in that, after the dull and stereotyped PMMA of affixed adhesive tape is pressed onto on formpiston, for preventing dull and stereotyped PMMA floating, places in the above a little iron block.
9. the preparation method of PDMS film according to claim 3, is characterized in that, its tape channel degree of depth of prepared PDMS film is about 400～530 μ m, and film thickness is about 600～880 μ m.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105536897A (en) * | 2015-12-13 | 2016-05-04 | 北京工业大学 | Manufacturing method of microfluidic chip with movable upper wall face and movable lower wall face |
| WO2020118487A1 (en) * | 2018-12-10 | 2020-06-18 | 深圳大学 | Micro-structure mold core of microfluidic chip and manufacturing method therefor |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1621945A (en) * | 2004-12-20 | 2005-06-01 | 西安交通大学 | Method for making dimethyl silicone polymer micro flow control chip composite type optical cured resin die arrangement |
| CN102721820A (en) * | 2012-05-21 | 2012-10-10 | 浙江大学 | Method for preparing assembly type polymer micro fluidic chip equipped with integrated pneumatic micro valve |
| CN102785316A (en) * | 2012-07-16 | 2012-11-21 | 浙江大学 | Method for preparing high temperature resin male mold having circular section with controllable curvature |
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2014
- 2014-03-25 CN CN201410113589.6A patent/CN103895143B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1621945A (en) * | 2004-12-20 | 2005-06-01 | 西安交通大学 | Method for making dimethyl silicone polymer micro flow control chip composite type optical cured resin die arrangement |
| CN102721820A (en) * | 2012-05-21 | 2012-10-10 | 浙江大学 | Method for preparing assembly type polymer micro fluidic chip equipped with integrated pneumatic micro valve |
| CN102785316A (en) * | 2012-07-16 | 2012-11-21 | 浙江大学 | Method for preparing high temperature resin male mold having circular section with controllable curvature |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105536897A (en) * | 2015-12-13 | 2016-05-04 | 北京工业大学 | Manufacturing method of microfluidic chip with movable upper wall face and movable lower wall face |
| WO2020118487A1 (en) * | 2018-12-10 | 2020-06-18 | 深圳大学 | Micro-structure mold core of microfluidic chip and manufacturing method therefor |
| US11305277B2 (en) | 2018-12-10 | 2022-04-19 | Shenzhen University | Micro-structured mold-core of microfluidic chip and its manufacturing method |
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