CN103884278B - A kind of laser tracker geometric angle error synthesis modification method - Google Patents

A kind of laser tracker geometric angle error synthesis modification method Download PDF

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Publication number
CN103884278B
CN103884278B CN201410086782.5A CN201410086782A CN103884278B CN 103884278 B CN103884278 B CN 103884278B CN 201410086782 A CN201410086782 A CN 201410086782A CN 103884278 B CN103884278 B CN 103884278B
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angle
tracker
error
horizontal axis
vertical
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CN103884278A (en
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周维虎
张滋黎
劳达宝
袁江
纪荣祎
董登峰
刘鑫
朱涵
李万红
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Institute of Microelectronics of CAS
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Academy of Opto Electronics of CAS
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Abstract

The invention discloses a kind of laser tracker geometric angle error synthesis modification method, this method is mainly used for error compensation and precision raising during laser tracker measuring system manufacture and use.Containing horizontal axis, vertical pivot, optical axis and tracking reflecting rotating mirror etc. in the structure of laser tracker, these all must assure that stringent geometry site.However in manufacture, install, copy mechanically in use process, the stringent geometry site between above-mentioned component is difficult to ensure, to influence the final co-ordinate measurement accuracy of tracker.Therefore the geometry error to above-mentioned component is needed to be modified.Lack the comprehensive correction method to tracker geometry angular error in existing tracker error correcting method.For above situation, the present invention establishes a kind of perfect angle modification method, carries out comprehensive compensation to tracker geometric angle error.

Description

A kind of laser tracker geometric angle error synthesis modification method
Technical field
The present invention relates to a kind of laser tracker geometric angle error synthesis modification method, this method be mainly used for laser with Error compensation and raising precision during track instrument measuring system manufacture and use.
Background technique
Containing horizontal axis, vertical pivot, optical axis and tracking reflecting rotating mirror etc. in the structure of laser tracker, these all be must assure that sternly The geometry site of lattice.However in manufacture, install, copy mechanically and the stringent geometric position in use process, between above-mentioned component Relationship is difficult to ensure, to influence the final co-ordinate measurement accuracy of tracker.Therefore it needs to miss the geometry of above-mentioned component Difference is modified.Lack the comprehensive modification side to tracker geometry angular error in existing tracker error correcting method Method.For above situation, the present invention establishes a kind of perfect angle modification method, integrates to tracker geometric angle error Compensation.
For the above, the technical problem to be solved in the invention is to establish composition error model, provides a set of synthesis Angular error modification method.
Summary of the invention
The present invention provides a kind of geometric angle error synthesis modification method, especially laser trackers to miss geometric angle The method of poor comprehensive modification.
Specifically, calculating the vertical and horizontal axis error of perpendicularity of tracker and tracking reflection turn using the method for space coordinates conversion The geometric error of mirror and horizontal axis angle.And the method for combining vector calculus calculates the spatial position of emergent light, normal and incident light Relationship, to establish optical axis and vertical pivot geometric error model.The present invention carries out comprehensive analysis to each geometric error, several by establishing What error compensation model obtains the final geometric position of practical optical axis.
With previous patent compared to the prior art compared with the present invention cannot be completely eliminated in tracker geometry error In the case of, comprehensive compensation is carried out to geometry angular error, improves the space coordinate measurement accuracy of tracker, there is real-time It is good, precision is high, the characteristics of being easily achieved.
Detailed description of the invention
It, below will be to embodiment or existing for the technical solution in the embodiment of the present invention that becomes apparent from, explains in precise term Attached drawing needed in technical description, which is done, simply to be introduced, it is therefore apparent that the accompanying drawings in the following description is only the present invention Embodiment for those of ordinary skill in the art without creative efforts, can also be according to offer Attached drawing obtain other attached drawings.
Fig. 1 is tracker geometry schematic diagram
Wherein, 1: laser tracker;2: tracking reflecting rotating mirror;3: horizontal axis;4: horizontal axis center line (as x-axis);5: vertical pivot; 6: vertical pivot center line (as z-axis);7: optical axis (radiation direction).
Fig. 2 is tracker optical axis and vertical pivot angular error model schematic
Wherein, 1: incident ray;2, ideal emergent ray direction;3: practical emergent ray direction.
Fig. 3 is tracker horizontal axis and vertical pivot angular error model schematic
Wherein, 1: incident ray;2, ideal emergent ray direction;3: practical emergent ray direction.
Fig. 4 is tracker horizontal axis and tracking reflecting rotating mirror angular error model schematic
Wherein, 1: incident ray;2, ideal emergent ray direction;3: practical emergent ray direction.
Fig. 5 is tracker angular error collective model schematic diagram
Wherein, 1: horizontal axis center line (as x-axis);2: vertical pivot center line (as z-axis);3:y axis is (vertical with x-axis and z-axis Intersection);4: optical axis (radiation direction);5: nominal emergent ray direction;6: practical emergent ray direction.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, that technical solution in the embodiment of the present invention part carries out is accurate, It is fully described by, it is clear that described embodiments are only a part of the embodiments of the present invention, is not whole embodiments.Base In this, every other embodiment obtained by those of ordinary skill in the art without making creative efforts all belongs to In protection scope of the present invention.
Tracker geometry angular error modification method of the present invention establishes tracker horizontal axis and vertical pivot, optical axis With the angular error collective model between vertical pivot, tracking reflecting rotating mirror and horizontal axis, the method simulation tracing instrument converted using coordinate Influence of the actual angle error to measurement result calculates tracker actual angle value according to tracker code-disc angle value, thus Actual measured results have been calculated, space coordinate measurement accuracy is improved.
Using laser tracker tracking reflecting rotating mirror and horizontal axis angle be c, vertical and horizontal axis non-perpendicularity error be θ, optical axis with Vertical pivot has drift angle α, and is H in level angle0Orientation on.
It, can be in the hope of amendment according to tracker items geometric error if tracker nominal level vertical angle angle value is (H, V) Horizontal vertical angle value (H ', V ') afterwards.Ideal coordinates system is O-xyz.Such as Fig. 1, shown in 2,3,4,5, z-axis represents vertical pivot, x Axis represents ideal horizontal axis position, and y-axis is vertical with x-axis and z-axis according to the right-hand rule.
Main models of the present invention are as follows:
(1) optical axis and vertical pivot angle error model
It as shown in Fig. 2, optical axis and vertical pivot have drift angle α, and is H in level angle0Orientation on, then the vector of incident ray It may be expressed as:
When nominal level pitch angle is H, when V, normal vector is indicated are as follows:
Then according to vector calculus rule, emergent ray be may be expressed as:
Wherein,
Then real standard angle H ' and pitch angle angle value V ' value are respectively as follows:
I.e. by the available revised coordinate system horizontal vertical angle (H ', V ') of nominal value (H, V)
(2) vertical and horizontal axis non-perpendicularity error model
Under O-xyz coordinate system, vertical and horizontal axial rake is θ, is equivalent to O-xyz coordinate system around y-axis and has rotated angle, θ, is rotated Coordinate system is O-x ' y ' z ' afterwards, as shown in Figure 3.
Incident ray vector is (0,1,0),
According to rotating model, practical normal vector is obtained are as follows:
Emergent ray vector then can be obtained by incident ray, normal vector, emergent ray position are as follows:
Then bringing formula (2) into and revised horizontal vertical angle can be obtained is (H ', V ')
(3) horizontal axis and tracking reflecting rotating mirror error model
Under O-xyz coordinate system, tracking reflecting rotating mirror and horizontal axis have angle c, are equivalent to O-xyz coordinate and have rotated around z-axis Angle c, then final coordinate system is O-x ' y ' z ', as shown in Figure 4.
Incident ray vector obtains practical normal vector according to rotating model for (0,1,0) are as follows:
Emergent ray vector then can be obtained by incident ray, normal vector, emergent ray position are as follows:
It is (H ', V ') that revised horizontal vertical angle then, which can be obtained, by formula (2)
(4) tracker angular error collective model
Then by (2), model in (3) tracks reflecting rotating mirror and horizontal axis there is also inclined it is found that vertical and horizontal axis has drift angle Angle is then equivalent to ideal coordinates system and is rotated twice, as shown in figure 5, vertical and horizontal axial rake is θ, quite under O-xyz coordinate system Angle, θ is had rotated around y-axis in O-xyz coordinate system, coordinate system is O-x ' y ' z ' after rotation;Under O-x ' y ' z ' coordinate system, tracking Reflecting rotating mirror and horizontal axis have inclination angle c, are equivalent to O-x ' y ' z ' coordinate around z ' axis and have rotated angle c, then final coordinate system is O-x " y"z"。
Finally obtain practical normal vector are as follows:
Optical axis and vertical pivot have drift angle α, and are H in level angle0Orientation when incident ray vector may be expressed as:
Then emergent ray may be expressed as:
Wherein,
Similarly, revised horizontal vertical angle can be obtained by formula (2) is (H ', V ')
I.e. in the case where vertical and horizontal axis, tracking reflecting rotating mirror and horizontal axis, optical axis and vertical pivot exist simultaneously drift angle, pass through tracking Instrument nominal level vertical angle angle value (H, V) can calculate real standard and pitch angle correction value (H ', V ').
The foregoing description of the disclosed embodiments makes professional and technical personnel in the field can be realized or use this hair Bright, various modifications to these embodiments will be apparent for the patented technology personnel of this field.Determine herein The General Principle of justice can be realized in other embodiments in the case where not departing from spirit or scope of the invention.Therefore, The present invention will not be limited to the embodiments shown herein, and is to fit to principles disclosed herein and novelty spy The consistent widest scope of point.

Claims (2)

1. a kind of laser tracker geometric angle error synthesis modification method, including
Measurement obtains tracking reflecting rotating mirror and horizontal axis angle is c, and vertical and horizontal axis non-perpendicularity error is θ, and optical axis and vertical pivot have drift angle α, and be H in level angle0Orientation on;
O-xyz coordinate system has rotated angle, θ around y-axis, and coordinate system is O-x ' y ' z ' after rotation, calculates vertical and horizontal axis non-perpendicularity error θ';
O-x ' y ' z ' coordinate has rotated angle c around z ' axis, then final coordinate system is O-x " y " z ", calculates horizontal axis and tracking reflection turns Mirror error c ';
By rotating to obtain practical normal vector twice
Ray Of Light is injected along special angle, so that optical axis and vertical pivot have drift angle α, and is H in level angle0Orientation on, it is incident The vector of light may be expressed as:Practical normal vectorIt may be expressed as:
Wherein nx,ny,nzIt respectively indicates are as follows:
Then emergent ray may be expressed as:
If emergent rayThree components be respectively px, py, pz, that is, have:
Px=cosH0sinα-2knx;Py=sinH0sinα-2kny;Pz=cos α -2knz
Wherein,
Then real standard angle H ' and pitch angle angle value V ' value are respectively as follows:
Using the correction value for calculating the horizontal tilt angle obtained, position adjustment is carried out to the component of tracker.
2. according to the method described in claim 1, being existed simultaneously in vertical and horizontal axis, tracking reflecting rotating mirror and horizontal axis, optical axis and vertical pivot In the case where drift angle, real standard and pitch angle correction value can be calculated by tracker nominal level vertical angle angle value (H, V) (H′,V′)。
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CN108007347B (en) * 2017-12-10 2019-07-26 北京工业大学 One kind being used for laser traces instrument geometric error compensation method
CN108089196B (en) * 2017-12-14 2021-11-19 中国科学院光电技术研究所 Optics is initiative and is fused non-cooperative target position appearance measuring device passively
CN110553582B (en) * 2018-06-01 2021-09-28 上海辉格科技发展有限公司 Error compensation method of laser scanner
CN109974587B (en) * 2019-04-20 2020-08-07 北京工业大学 Geometric error compensation method for laser tracker
CN110516350B (en) * 2019-08-25 2021-01-05 大连理工大学 ERS point error correction method based on anisotropic weighting

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