CN103882379A - Magnetic plated film for processing magnetic conductive material surface and processing method - Google Patents
Magnetic plated film for processing magnetic conductive material surface and processing method Download PDFInfo
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- CN103882379A CN103882379A CN201210566659.4A CN201210566659A CN103882379A CN 103882379 A CN103882379 A CN 103882379A CN 201210566659 A CN201210566659 A CN 201210566659A CN 103882379 A CN103882379 A CN 103882379A
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Abstract
A magnetic plated film for processing magnetic conductive material surface comprises an amorphous alloy structure formed by nickel, a first element, a second element and a third element, wherein the first element, the second element and the third element are elements selected from group VB, group VA and group VIB, group IIIB and group IIIA. By utilizing the magnetism and the corrosion resistance of nickel, the amorphous alloy structure is formed by combining the first element, the second element and the third element selected from group VB, group VA and group VIB, group IIIB and group IIIA, and the problems that the magnetism of a magnetic conductive material is reduced or disappeared because of a damaged surface are improved under the premise that the magnetism of the magnetic conductive material is not influenced. The invention also discloses a method for processing the magnetic conductive material surface.
Description
Technical field
The present invention relates to a kind of plated film and be applied to the treatment process of material surface, particularly relate to a kind of magnetic plated film and surface treatment method thereof for magnetically permeable material.
Background technology
Magnetically permeable material (for example magnet) is the object that can produce magnetic field, conventionally can be divided into two kinds of permanent magnet and impermanent magnet, impermanent magnet as generally known electro-magnet (as lifting machine, electric bell, the application of magnetic-levitation train etc.), permanent magnet has loadstone or by manually manufacturing, as ndfeb magnet (Neodymium magnet), ndfeb magnet is the strongest permanent magnet of magnetic now, also be the rare-earth magnet (rare earth magnet) the most often using, therefore ndfeb magnet is widely used in electronic product, for example hard disk, mobile phone, earphone etc., and some mechanisms, for example magnetic drive pump, aerogenerator, permanent magnet type synchronous motor, magnetite transmission, magnetic stirring apparatus, battery lead plate etc.
But for fear of the physical property such as the chemical injury of corrosion or the friction of the external environment infringement existing in using; in product manufacture, still need to do conservation treatment on these magnetically permeable material surfaces; be all to electroplate and on magnetically permeable material surface, form metallic diaphragm with gold, nickel, zinc, tin etc. in the past, or reached erosion-resisting function at magnetically permeable material surface spraying macromolecular compound as epoxy resin rete etc.
By current known surface treatment mode and its film material, polymeric coating layer corrosion resistance is not as good as plated metal, and its insulation characterisitic is on also impact to some extent of magnetic field, but the crystallization rete that plated metal forms structure has lattice imperfection and causes material impact-resistant not high, or under some acid or alkali environment the not good problem of anticorrosion effect, so, in magnetically permeable material related industries, except magneto system technology for making, many magnetic poles of anisotropy alignment technique, outside the exploitation such as the technology that magnetizes, the improvement of magnetically permeable material surface treatment and its plated film character is also to produce to learn a upper research direction.
Summary of the invention
The object of the present invention is to provide a kind of magnetic plated film for magnetically permeable material surface treatment with magnetic, the good and non-traditional metallic crystal structure of erosion resistance.
In addition, another object of the present invention is to provide a kind of and utilizes built-up type target and physical vapor deposition and can form on magnetically permeable material surface the magnetically permeable material surface treatment method of excellent properties plated film.
Magnetic plated film of the present invention is for magnetically permeable material surface-treated magnetic plated film, include nickel, the first element, the second element, and element and form amorphous alloy structure, and described the first element, the second element, and element is to be respectively selected from VB family in chemical periodictable, VA family, group vib, IIIB family, and a kind of element in IIIA family.
Preferably, magnetic plated film of the present invention is taking this magnetic plated film whole content as 100mol%, and nickel accounts for that 30-77mol%, the first element account for 11-50mol%, the second element accounts for 4-15mol%, and element accounts for 4-10mol%.
Preferably, nickel, the first element, the second element in magnetic plated film of the present invention, and element to appoint both mixture heat be negative value.
Preferably, the element that in magnetic plated film of the present invention, the first element, the second element and one of them atomic radius of element are less and the atomic radius ratio of the element that wherein another atomic radius is larger are not more than 85%.
Preferably, the thickness of magnetic plated film of the present invention is 0.1-5 μ m.
Preferably, in magnetic plated film of the present invention, this first element is that chromium element, this second element are that aluminium element, this element are yttrium.
And a kind of magnetically permeable material surface treatment method of the present invention is characterized in that comprising following steps:
(A) there is nickel, the first element, the second element by one, and the built-up type target of element is installed in a physics vapour deposition system, and described the first element, the second element, and element is to be selected from respectively VB family in chemical periodictable, VA family, group vib, IIIB family, and a kind of element in IIIA family;
(B) magnetically permeable material is inserted in the system of this physical vapor deposition;
(C) utilize physical vapor deposition to carry out sputter and form one deck by nickel, the first element, the second element in this magnetically permeable material surface, and element forms the magnetic plated film of amorphous alloy structure.
Preferably, in magnetically permeable material surface treatment method of the present invention, in this step (C), also coordinate ion source first pre-treatment to be carried out in this magnetically permeable material surface, renew and the physical vaporous deposition of arranging in pairs or groups carries out sputter to form this magnetic plated film.
Preferably, in magnetically permeable material surface treatment method of the present invention, nickel, the first element, the second element in the ratio of the each element of built-up type target in this step (A) and this magnetic plated film, and a when proportional relation of other relative sputter production rate of the content of element.
Preferably, in magnetically permeable material surface treatment method of the present invention, the magnetic plated film whole content that in this step (C), sputter forms is 100mol% meter, and the nickeliferous 30-77mol% of accounting for, the first element account for 11-50mol%, the second element accounts for 4-15mol%, and element accounts for 4-10mol%.
Preferably, in magnetically permeable material surface treatment method of the present invention, the nickel in this step (A), the first element, the second element, and element to appoint both mixture heat be negative value.
Preferably, in magnetically permeable material surface treatment method of the present invention, the element that the first element, the second element and one of them atomic radius of element are less and the atomic radius ratio of the element that wherein another atomic radius is larger are not more than 85%.
Beneficial effect of the present invention is: utilize nickel, the first element, the second element, and amorphous alloy structure composition the present invention that element becomes has the magnetic plated film of magnetic and erosion resistance, and can under the prerequisite that does not affect the magnetic properties of magnetically permeable material own, improve the decline problem of even demagnetization of magnetic that magnetically permeable material causes because surface is impaired.
Brief description of the drawings
Fig. 1 is cross-sectional schematic, and a preferred embodiment of magnetic plated film of the present invention is described;
Fig. 2 is schema, and the treatment process of magnetic plated film of the present invention for magnetically permeable material surface is described.
Embodiment
Below in conjunction with drawings and Examples, the present invention is described in detail.
Consult Fig. 1, the present invention is for a preferred embodiment of magnetically permeable material 100 surface-treated magnetic plated films 2, comprise nickel (Nickel), the first element, the second element, and element, and described the first element, the second element, and element is to be respectively selected from VB family in chemical periodictable, VA family, group vib, IIIB family, and a kind of element in IIIA family and the structure that jointly forms amorphous alloy with nickel are to form this magnetic plated film 2.
Amorphous alloy claims again metallic glass (metallic glass), by the various element-specific mixed smeltings non-crystalline structure alloy that cooled and solidified forms fast again, amorphous alloy unlike crystalline material under obvious fusing point by the solid-state liquid state that transfers to suddenly, similarly be glass all the better, along with the rising of temperature, viscosity can reduce gradually, the speciality of this kind of glutinousness can prevent that atom from producing enough movements and forming Methodistic lattice, therefore hot briquetting and cooling after, still can keep amorphous state.Also due to this characteristic, make amorphous alloy in the time of higher temperatures, there is plasticity-, therefore, in the time using mould to carry out moulding, can be easy to control its mechanism characteristics, add that it has the mechanical speciality that high strength, abrasion performance etc. are excellent, so the attention of Guang Shou all circles.Metallic glass is developed so far, zirconium-based metallic glass (Zirconium based metallic glass) is the current industry main raw of widespread use the most, but for the surface coating processing of magnetically permeable material 100, contriver utilizes tool magnetic, good plastic nickel to develop the magnetic plated film 2 of nickel based metal glass of the present invention (Nickel based metallic glass) for research.
In this preferred embodiment, this magnetically permeable material 100 is taking ndfeb magnet as implementation, the first element in this magnetic plated film 2 is selected from the chromium (Cr) of group vib, the second element is the aluminium (Al) that is selected from IIIA family, element is the yttrium (Y) that is selected from IIIB family, wherein, nickel has magnetic, and taking these magnetic plated film 2 entirety as 100mol%, nickel accounts for overall ratio 30-77mol% and all good solution strengthening phases of a chemical property, physical properties is at high temperature provided, and makes other alloying elements have good compatibility; Chromium accounts for overall ratio 11-50mol% and can promote high-temperature oxidation resistant, the resistance to corrosion of these magnetic plated film 2 entirety, and can increase hardness; Aluminium accounts for overall ratio 4-15mol%, can strengthen further the resistance of oxidation of these magnetic plated film 2 entirety; Yttrium accounts for overall ratio 4-10mol%.
And by E.Clementi, D.L.Raimondi, in the atomic radius reference data of W.P.Reinhardt in chemical physics periodical (J.Chem.Phsy.1963,38,2686), the atomic radius of the first element-chromium in this preferred embodiment
the atomic radius of the second element-aluminium
and the atomic radius of the element-yttrium
the atomic radius ratio of the element that one of them atomic radius is less and the element that wherein another atomic radius is larger is neither greater than 85%, and makes the size of composed atom have significant difference, forms a kind of intimate mixture of low freeboard; More preferably, nickel, the first element-chromium, the second element-aluminium, and the element-yttrium to appoint both mixture heat be negative value, this is when producing negative mixture heat, xenogenesis atom magnetism can be greater than atom of the same race, has preferably effect for producing amorphous alloy.
In addition, the preferred embodiment of magnetic plated film 2 of the present invention explanation of magnetically permeable material 100 surface treatment methods below coordinating, when can be clearer.
Coordinate and consult Fig. 2, this preferred embodiment is to utilize physical vapor deposition (PhysicalVapor Deposition, PVD) this magnetically permeable material 100 is carried out to surface treatment, first will there is nickel, the first element-chromium, the second element-aluminium, and the built-up type target of the element-yttrium is installed in a physics vapour deposition system, and the first element, the second element, and element is used material except this preferred embodiment, can be selected from respectively VB family in chemical periodictable, VA family, group vib, IIIB family, and a kind of element in IIIA family; Specifically, can be easier to control the element ratio in institute's sputtering thin film by relative sputter production rate and relative volume between each alloying element by built-up type target.
Then this magnetically permeable material 100 is inserted in this physics vapour deposition system, by extremely predetermined pressure, temperature of this physics vapour deposition system setting, in the making of this preferred embodiment, system pressure is controlled in 1 × 10 simultaneously
-6torr, Temperature Setting is not more than 300 DEG C.
Then utilize physical vapor deposition to carry out sputter and form one deck by nickel, the first element-chromium, the second element-aluminium in these magnetically permeable material 100 surfaces, and the element-yttrium forms the magnetic plated film 2 of amorphous alloy structure; In more detail; first pass into the pressure of controlling this physics vapour deposition system for the blunt gas (as argon gas) of sputter; pass into again the reactant gases (as hydrogen, oxygen, hydrocarbon polymer) of predetermined amount of flow and control target voltage, electric current and sputter time and form the magnetic plated film 2 of pre-determined thickness on the surface of this magnetically permeable material 100; in addition; this magnetic plated film 2 is taking 0.1-5 μ m as good; thickness deficiency can reduce the protection of this magnetically permeable material 100, but the blocked up increase of being not only cost also can affect the tack between this magnetic plated film 2 and magnetically permeable material 100.
What remark additionally is, for making magnetic plated film effectively form amorphous alloy structure plated film, in carrying out the step of physical vapor deposition, also provide an ion source (Ion beam) further to promote ionic concn simultaneously, and before forming magnetic plated film in magnetically permeable material surface, can coordinate ion source to carry out pre-treatment to this magnetically permeable material surface, cleaning, upgrading or heating magnetically permeable material surface and make the magnetic coating quality of follow-up formation better.
The magnetically permeable material that is formed with this preferred embodiment-magnetic plated film 2 is tested taking salt mist experiment (corrosive fluid is as 5% sodium chloride solution), can exceed 100 hours by the anti-corrosion time, and existing high molecular film can be only in 3% sodium chloride solution anti-corrosion approximately 48 hours at corrosive fluid, electronickelling is in 3% sodium chloride solution anti-corrosion approximately 72 hours at corrosive fluid, in comparison, the corrosion resistance of magnetic plated film 2 of the present invention is far above film material in the past.
In addition, because amorphous alloy structure can not have lattice imperfection as conventional metals crystal structure, therefore except the improvement of erosion resistance, for temperature contrast, with the sticking power of this magnetically permeable material 100 on all have lifting to a certain degree, add and in magnetic plated film 2 of the present invention, contain nickel and there is magnetic, can be in order to improving macromolecular compound in the past, the materials such as the metal of magnetic of not having affect, cause consume, the error of magnetic in start to some extent on wanting to carry out the magnetic properties of surface-treated magnetically permeable material 100.
In sum, the present invention utilizes low-temperature physics vapour deposition to coordinate ionogenic pre-treatment, order can form smoothly the different element ratios of the present invention by indivedual independently metals and the built-up type target that forms to scale and become the magnetic plated film 2 of amorphous alloy structure, and not only having magnetic, the magnetic plated film 2 of the present invention taking nickel as principal element have good erosion resistance, oxidation-resistance concurrently, and and this magnetically permeable material 100 between have good sticking power, therefore really can reach object of the present invention.
Claims (12)
1. one kind for magnetically permeable material surface-treated magnetic plated film, it is characterized in that: this magnetic plated film includes nickel, the first element, the second element, and element and form amorphous alloy structure, described the first element, the second element, and element is to be respectively selected from VB family in chemical periodictable, VA family, group vib, IIIB family, and a kind of element in IIIA family.
2. magnetic plated film according to claim 1, is characterized in that: taking this magnetic plated film whole content as 100mol%, nickel accounts for that 30-77mol%, the first element account for 11-50mol%, the second element accounts for 4-15mol%, and element accounts for 4-10mol%.
3. magnetic plated film according to claim 2, is characterized in that: nickel, the first element, the second element, and element to appoint both mixture heat be negative value.
4. magnetic plated film according to claim 3, is characterized in that: the element that the first element, the second element and one of them atomic radius of element are less and the atomic radius ratio of the element that wherein another atomic radius is larger are not more than 85%.
5. magnetic plated film according to claim 4, is characterized in that: the thickness of this magnetic plated film is 0.1-5 μ m.
6. magnetic plated film according to claim 5, is characterized in that: this first element is that chromium element, this second element are that aluminium element, this element are yttrium.
7. a magnetically permeable material surface treatment method, is characterized in that comprising following steps:
(A) there is nickel, the first element, the second element by one, and the built-up type target of element is installed in a physics vapour deposition system, and described the first element, the second element, and element is to be selected from respectively VB family in chemical periodictable, VA family, group vib, IIIB family, and a kind of element in IIIA family;
(B) magnetically permeable material is inserted in the system of this physical vapor deposition;
(C) utilize physical vapor deposition to carry out sputter and form one deck by nickel, the first element, the second element in this magnetically permeable material surface, and element forms the magnetic plated film of amorphous alloy structure.
8. magnetically permeable material surface treatment method according to claim 7, it is characterized in that: in this step (C), also coordinate ion source first pre-treatment to be carried out in this magnetically permeable material surface, renew and the physical vaporous deposition of arranging in pairs or groups carries out sputter to form this magnetic plated film.
9. magnetically permeable material surface treatment method according to claim 8, it is characterized in that: nickel, the first element, the second element in the ratio of the each element of built-up type target in this step (A) and this magnetic plated film, and the when proportional relation of relative sputter production rate of each element of the content of element.
10. magnetically permeable material surface treatment method according to claim 9, it is characterized in that: the magnetic plated film whole content that in this step (C), sputter forms is 100mol% meter, the nickeliferous 30-77mol% of accounting for, the first element account for 11-50mol%, the second element accounts for 4-15mol%, and element accounts for 4-10mol%.
11. magnetically permeable material surface treatment methods according to claim 10, is characterized in that: the nickel in this step (A), the first element, the second element, and element to appoint both mixture heat be negative value.
12. magnetically permeable material surface treatment methods according to claim 11, is characterized in that: the element that the first element, the second element and one of them atomic radius of element are less and the atomic radius ratio of the element that wherein another atomic radius is larger are not more than 85%.
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| CN201210566659.4A CN103882379A (en) | 2012-12-24 | 2012-12-24 | Magnetic plated film for processing magnetic conductive material surface and processing method |
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| CN201210566659.4A CN103882379A (en) | 2012-12-24 | 2012-12-24 | Magnetic plated film for processing magnetic conductive material surface and processing method |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106175408A (en) * | 2016-07-22 | 2016-12-07 | 湖北荣太炊具有限公司 | One can electromagnetic heating container and manufacture method thereof |
| CN110129733A (en) * | 2019-06-19 | 2019-08-16 | 东北大学 | A kind of Sintered NdFeB magnet and preparation method thereof with composite film |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63113907A (en) * | 1986-10-31 | 1988-05-18 | Matsushita Electric Ind Co Ltd | Magnetic alloy film |
| CN1121252A (en) * | 1994-05-02 | 1996-04-24 | 松下电器产业株式会社 | Magnetoresistance effect device, and magnetoresistance effect type head, memory device, and amplifying device using the same |
| CN101054658A (en) * | 2006-04-14 | 2007-10-17 | 山阳特殊制钢株式会社 | Soft magnetic target material |
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2012
- 2012-12-24 CN CN201210566659.4A patent/CN103882379A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63113907A (en) * | 1986-10-31 | 1988-05-18 | Matsushita Electric Ind Co Ltd | Magnetic alloy film |
| CN1121252A (en) * | 1994-05-02 | 1996-04-24 | 松下电器产业株式会社 | Magnetoresistance effect device, and magnetoresistance effect type head, memory device, and amplifying device using the same |
| CN101054658A (en) * | 2006-04-14 | 2007-10-17 | 山阳特殊制钢株式会社 | Soft magnetic target material |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106175408A (en) * | 2016-07-22 | 2016-12-07 | 湖北荣太炊具有限公司 | One can electromagnetic heating container and manufacture method thereof |
| CN106175408B (en) * | 2016-07-22 | 2018-06-29 | 湖北荣太炊具有限公司 | One kind can electromagnetic heating container and its manufacturing method |
| CN110129733A (en) * | 2019-06-19 | 2019-08-16 | 东北大学 | A kind of Sintered NdFeB magnet and preparation method thereof with composite film |
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Application publication date: 20140625 |