CN103837470B - Between a kind of thin film and basic unit, the flat cylinder of adhesion adds load measuring method - Google Patents

Abstract

The invention discloses the flat cylinder of adhesion between a kind of thin film and basic unit and add load measuring method: in the basic unit of thin film/basic unit's system, open an aperture that radius is d running through basic unit, using a radius is that the nothing flat cylinder of friction of b is as loading axle, by the aperture in basic unit to coating film imposed load F, making thickness is h, elastic modelling quantity is E, Poisson's ratio is that the coating film of ν departs from basic unit, and form the stable bubbling that radius is a, wherein b < d, standing balance analysis based on this stable bubbling, utilize bubbling deflection metrology value wb at radius r=b, then can accurately calculate the adhesion FG between thin film and basic unit.

Description

Between a kind of thin film and basic unit, the flat cylinder of adhesion adds load measuring method

Technical field

The present invention relates to the measuring technology of adhesion between thin film and basic unit.

Background technology

Thin film/basic unit's system has a wide range of applications in fields such as machinery, electronics, biological engineering, surface film Young springform The accurate test of amount, Poisson's ratio, residual stress and film/base interfacial-adhesion strength, to the stability of structure, reliability and durable Property analysis has important mechanical meaning, thus various method is used to test these mechanical properties.

Conventional method of testing mainly has: 1. use unidirectional micro-stretching, beam deflection, static pressure bubbling (expansion), axle to carry bubbling, surpass The method of testings such as sound wave speed, resonant frequency, impression, X-ray diffraction, optical fluorescence, Raman spectrum, obtain surface film bullet Property modulus, Poisson's ratio and the information of residual stress.2. use vertical strain, horizontal moment, ultracentrifugation, ultra sonic oscillation, Adhesive tape, peeling, shear, swipe, static pressure bubbling (expansion), axle carry bubbling, chemical solution is antipyretic, X-ray, cantilever beam Etc. method of testing, obtain the information of film/base interfacial-adhesion strength.

Since it is noted that tested to as if some mechanical parameters, therefore use the method for some machineries (i.e. by one Macromechanics process) test result that obtained, than methods such as employing sound, light, come intuitively.The present invention is based on macroscopic view Elasticity behavior has a consideration of intuitive, and the method using axle to load bubbling realizes film/base layering, so research thin film with The measuring technology of adhesion between basic unit.

Axle loads bubbling and compares to static pressure and load bubbling, has certain advantage in terms of film/base hierarchical control, but existing axle Load bubbling measuring technology, owing to not providing the accurate answer of bubbling thin film standing balance problem, because being unable to realize thin film And the accurate test of adhesion between basic unit.

Summary of the invention

In order to obtain the accurate answer of bubbling thin film standing balance problem, to overcome the weak point of existing measuring technology, this Invention uses a band with or without the cylinder of the flat any radius that rubs as loading axle, it is achieved film/base layering.Such as Fig. 1 institute Show, the basic unit of thin film/basic unit's system open an aperture that radius is d running through basic unit, use radius be b without rubbing Wipe flat cylinder as load axle, by the aperture in basic unit to coating film imposed load F, making thickness is h, springform Amount departs from basic unit for the coating film that E, Poisson's ratio are ν, and forms the stable bubbling that radius is a, wherein b < d.? In loading procedure, owing to the thin film of axle/film contact portion is in planar stretch state all the time, therefore, axle/film contact portion is actual On be the planar stretch problem on deformation of thin film, and remain the problem on deformation of thin film, the actually problem on deformation of an annular membrane, So, the problem on deformation of whole bubbling thin film is easy for resolved process.

Utilize this stable bubbling bubbling deflection metrology value w at radius r=b_b, and remember α=b/a, accurately this drum of answer The standing balance problem of bubble thin film, is readily obtained:

If 1.

4=(1+ν)(3-α²),

Then the adhesion between thin film and basic unit is

$F_G=\frac{\mathrm{Eh}}{2a^3{\&lsqb;{(3-{\mathrm{\&alpha;}}^2)}^{1/3}-{\left(2{\mathrm{\&alpha;}}^2\right)}^{1/3}\&rsqb;}^3}{w}_b^3$

Wherein π is pi;

If 2.

(1+ν)(3-α²)<4

Then the adhesion between thin film and basic unit is

Wherein, π is pi,WithValue by formula

With

Determine；

If 3.

(1+ν)(3-α²)>4

Then the adhesion between thin film and basic unit is

Wherein, π is pi,WithValue by formula

With

Determine.

Accompanying drawing explanation

Fig. 1 is that flat cylinder loads bubble test organigram, in FIG, the coating film in 1-film/matrix system, 2-bubbling thin film (coating film after deformation), the basic unit in 3-film/matrix system, 4-loads axle, and (band is flat with or without friction Cylinder), symbol therein is, a represents the radius of bubbling, and b represents the radius loading axle, and d represents half of aperture in basic unit Footpath, r represents that radial coordinate, w represent that (wherein w (r) represents the lateral coordinates at r, w to lateral coordinates_bRepresent the horizontal stroke at r=b To coordinate), F represents the external force being applied on loading axle.

Detailed description of the invention

Below in conjunction with the accompanying drawings technical scheme is described in further detail:

As it is shown in figure 1, prepare the test sample (being made up of " 1 " and " 3 " in Fig. 1) of one piece of thin film/basic unit's system, adopt With boring or the way of chemical etching, opening a radius in the basic unit of film/matrix system is the aperture of d, and it is straight that aperture runs through basic unit To the contact interface of coating film (" 1 " in Fig. 1) Yu basic unit (" 3 " in Fig. 1), thus it is fabricated to one piece of test required " detected sample " wanted.Use a band with or without the flat cylinder that radius is b that rubs as loading axle (" 4 " in Fig. 1), Wherein b < d.By the aperture in basic unit, utilizing loading axle to coating film imposed load F, making thickness is h, elastic modelling quantity Depart from basic unit for the coating film that E, Poisson's ratio are ν, and form the stable bubbling (dimensionally stable of bubbling) that radius is a, Load before load axle flat on smear Pulvis Talci, to reduce the friction between film/base.Accurately measure this stable bubbling Deflection value w at radius r=b_b, then shed load F, observe whether the thin film after unloading can be completely recovered to load Front shape, if the thin film after Xie Zai can not recover deformation completely, then payload values F that explanation is applied is excessive, and thin film enters Plastic deformation, this is tested data invalid, needs additionally to make test sample and test.Suitably reduce the payload values applied F, until the thin film after unloading can recover deformation, then measured bubbling deflection value w completely_bFor virtual value, i.e. may be used for Adhesion F between thin film and basic unit_GCalculating.Note α=b/a, then the adhesion F between thin film and basic unit_GCalculating press Carry out according to following steps:

If 1.

4=(1+ν)(3-α²),

Then the adhesion between thin film and basic unit is

$F_G=\frac{\mathrm{Eh}}{2a^3{\&lsqb;{(3-{\mathrm{\&alpha;}}^2)}^{1/3}-{\left(2{\mathrm{\&alpha;}}^2\right)}^{1/3}\&rsqb;}^3}{w}_b^3$

Wherein π is pi;

If 2.

(1+ν)(3-α²)<4

Then the adhesion between thin film and basic unit is

Wherein, π is pi,WithThe value of (unit is radian) is by formula

With

Determine；

If 3.

(1+ν)(3-α²)>4

Then the adhesion between thin film and basic unit is

Wherein, π is pi,WithValue by formula

With

Determine.

All parameters all use the International System of Units.

Claims (1)

1. between thin film and basic unit, the flat cylinder of adhesion adds a load measuring method, it is characterized in that: thin Open an aperture that radius is d running through basic unit in the basic unit of film/base layer structure, be the nothing of b with a radius Rub flat cylinder as load axle, by the aperture in basic unit to coating film imposed load F, make thickness For h, elastic modelling quantity be E, Poisson's ratio be that the coating film of ν departs from basic unit, and to form a radius be a's Stablize bubbling, wherein b ＜ d, accurately measure this stable bubbling deflection value w at radius r=b_b, and Note α=b/a, when unloading load F rear film can recover deformation, then measured bubbling deflection value w completely_b For virtual value；So based on this stable bubbling standing balance analysis, the adhesion between thin film and basic unit F_G, calculating can be carried out according to following three kinds of situations and determine:

If situation is 1.

4=(1+ ν) (3-α²),

Then the adhesion between thin film and basic unit is

$F_G=\frac{Eh}{2a^3{\&lsqb;{(3-{\mathrm{\&alpha;}}^2)}^{1/3}-{\left(2{\mathrm{\&alpha;}}^2\right)}^{1/3}\&rsqb;}^3}{w}_b^3$

Wherein π is pi；

If situation is 2.

(1+ν)(3-α²) ＜ 4

Then the adhesion between thin film and basic unit is

Wherein, π is pi,WithValue by formula

With

Determine；

If situation is 3.

(1+ν)(3-α²) ＞ 4

Then the adhesion between thin film and basic unit is

Wherein, π is pi,WithValue by formula

With

Determine；

All parameters all use the International System of Units.