CN103822893B - A kind of NDIR gas sensor - Google Patents

A kind of NDIR gas sensor Download PDF

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CN103822893B
CN103822893B CN201410074027.5A CN201410074027A CN103822893B CN 103822893 B CN103822893 B CN 103822893B CN 201410074027 A CN201410074027 A CN 201410074027A CN 103822893 B CN103822893 B CN 103822893B
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infrared light
cylindrical optic
infrared detectors
infrared
detectors
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CN103822893A (en
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张文博
欧文
明安杰
张海苗
张宇
张乐
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China core Microelectronics Technology Chengdu Co.,Ltd.
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Jiangsu IoT Research and Development Center
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Abstract

The present invention provides a kind of NDIR gas sensor, including: infrared light supply, cylindrical optic chamber, Infrared Detectors and circuit block, wherein, described cylindrical optic chamber is used for holding gas to be detected, upper surface and/or the lower surface in described cylindrical optic chamber are provided with blow vent, described blow vent passes in and out described cylindrical optic chamber for gas to be detected, described cylindrical optic intracavity is provided with described infrared light supply, reflecting mirror and described Infrared Detectors, wherein, described reflecting mirror is for receiving and reflect the infrared light that described infrared light supply sends, described Infrared Detectors is for detecting the infrared light reflected at described cylindrical optic intracavity by described reflecting mirror;Described circuit block is connected with described Infrared Detectors, and the infrared light for detecting according to described Infrared Detectors obtains the concentration of described gas to be detected, and to realize volume reduction, cost reduces, and realizes light path increase, thus improving sensor performance.

Description

A kind of NDIR gas sensor
Technical field
The present embodiments relate to gas detection technology, particularly relate to a kind of NDIR gas sensor.
Background technology
Progress and scientific and technical development, the carbon dioxide (CO in human habitat along with human society2) etc. gas content there occurs great changes, and the health of people is had certain threat;Meanwhile, in commercial production, to methane (CH4), the concentration of the gas such as carbon monoxide (CO) carry out detection and control there has been higher requirement, therefore, the gas sensor for detected gas concentration arises at the historic moment.
The gas sensor being currently used for gas concentration detection mainly has several big classes such as electric chemical formula, semiconductor-type, solid electrolyte formula, optical profile type, high score minor.Wherein, NDIR (Non-dispersiveinfra-red in optical profile type, NDIR) gas sensor combination property is better, and along with the development of infrared light supply and electronic technology, NDIR gas sensor is very general in actual applications as one gas detecting instrument fast and accurately.Its Cleaning Principle is: have the gas of asymmetric double atom or polyatomic molecule structure (such as CH4、CO、CO2、SO2Deng) all there is characteristic absorption spectrum in middle-infrared band, the characteristic absorption spectrum intensity of this gas is relevant with the concentration of gas, utilizes this principle and detectable gas concentration, it is possible to describe with following Lambert-Beer's law:
I=I0·exp(-α·c·L)
Wherein, I0Light intensity for infrared light supply radiation, namely with reference to light intensity, I be the infrared light of infrared light supply radiation by the light intensity after GAS ABSORPTION to be detected, c is the concentration of gas to be detected, L is the light path that infrared light passes through gas to be detected, and α is the gas to be detected absorbance to infrared light.
Existing NDIR gas sensor generally comprises an air chamber being made up of infrared light supply, optics cavity and Infrared Detectors, also include circuit block, infrared light supply gives off infrared light, the absorption of gas to be detected in air chamber, the light intensity of the infrared light arriving Infrared Detectors can reduce, detect its light intensity by Infrared Detectors and reduce degree, Lambert-Beer's law can obtain the concentration of gas to be detected.
By above-mentioned Cleaning Principle it can be seen that in order to obtain high performance NDIR gas sensor, it is necessary to increase the light path in air chamber, thus increasing the absorbtivity of infrared light infrared light in air chamber.But, the optics cavity of existing NDIR gas sensor is generally adopted straight chamber, and the increase realizing light path by increasing the overall dimensions in straight chamber causes volume to increase, manufacturing cost increases.
Summary of the invention
The present invention provides a kind of NDIR gas sensor, and to realize volume reduction, cost reduces, and realizes light path increase, thus improving sensor performance.
The present invention provides a kind of NDIR gas sensor, including: infrared light supply, cylindrical optic chamber, Infrared Detectors and circuit block, wherein, described cylindrical optic chamber is used for holding gas to be detected, upper surface and/or the lower surface in described cylindrical optic chamber are provided with blow vent, described blow vent passes in and out described cylindrical optic chamber for gas to be detected, described cylindrical optic intracavity is provided with described infrared light supply, reflecting mirror and described Infrared Detectors, wherein, described reflecting mirror is for receiving and reflect the infrared light that described infrared light supply sends, described Infrared Detectors is for detecting the infrared light reflected at described cylindrical optic intracavity by described reflecting mirror;Described circuit block is connected with described Infrared Detectors, and the infrared light for detecting according to described Infrared Detectors obtains the concentration of described gas to be detected.
Wherein, described Infrared Detectors is for detecting the infrared light being directly reflected into described Infrared Detectors at described cylindrical optic intracavity by described reflecting mirror;Or
Described Infrared Detectors is reflected by described reflecting mirror at described cylindrical optic intracavity for detection, and is then at least reflected the infrared light once entering described Infrared Detectors by described cylinder side wall.
Wherein, described reflecting mirror is the parabolic mirror with the first focus, wherein, when described Infrared Detectors is directly reflected into the infrared light of described Infrared Detectors for detecting at described cylindrical optic intracavity by described parabolic mirror, described first focus is positioned at the midpoint at described parabolic mirror center and the described Infrared Detectors line of centres;Or
When described Infrared Detectors is reflected by described parabolic mirror at described cylindrical optic intracavity for detection, and when then at least being reflected, by described cylinder side wall, the infrared light once entering described Infrared Detectors, described first focus is positioned at described parabolic mirror center and the midpoint of primary importance line on described cylinder side wall, and wherein said primary importance is the position infrared light first time reflected by described parabolic mirror inciding described cylinder side wall.
Wherein, the cylinder side wall in described cylindrical optic chamber is coated with the reflectance coating to the infrared light reflection that described infrared light supply sends.
Wherein, the diameter range of the infrared light that described infrared light supply sends is 1-3mm, and spread angle range is 28-32 °.
Wherein, described Infrared Detectors is dual pathways Infrared Detectors.
Wherein, described blow vent is pore.
Wherein, described pore quantity is multiple.
Wherein, described pore is that circumference is uniformly distributed.
Wherein, also include parabola focus lamp, for focusing on the infrared light that described cylindrical optic intracavity is reflected by described reflecting mirror, make described infrared light enter described Infrared Detectors after focusing on.
The present invention provides a kind of NDIR gas sensor, by adopting cylindrical optic chamber, and by arranging reflecting mirror at this cylindrical optic intracavity, infrared light is reflected, avoid the increase realizing light path in prior art by increasing the size of optics cavity, and the problem that the volume thus brought increases, manufacturing cost increases, the invention enables gas sensor volume to reduce, cost reduces, and realizes light path increase, thus improving sensor performance.
Accompanying drawing explanation
In order to be illustrated more clearly that the present invention, introduce the accompanying drawing used required in the present invention is done one simply below, apparently, accompanying drawing in the following describes is some embodiments of the present invention, for those of ordinary skill in the art, under the premise not paying creative work, it is also possible to obtain other accompanying drawing according to these accompanying drawings.
The structural representation of a kind of NDIR gas sensor that Fig. 1 provides for the embodiment of the present invention;
The schematic diagram of the pore in a kind of NDIR gas sensor that Fig. 2 provides for the embodiment of the present invention;
The schematic diagram of the parabolic mirror that Fig. 3 provides for the embodiment of the present invention;
The light path analogous diagram of a kind of cylindrical optic intracavity that Fig. 4 provides for the embodiment of the present invention.
Detailed description of the invention
For making the object, technical solutions and advantages of the present invention clearly, below in conjunction with accompanying drawing, the technical scheme in the embodiment of the present invention is described in further detail, it is clear that described embodiment is a part of embodiment of the present invention, rather than whole embodiments.It is understandable that; specific embodiment described herein is only used for explaining the present invention; but not limitation of the invention; based on the embodiment in the present invention; the every other embodiment that those of ordinary skill in the art obtain under not making creative work premise, broadly falls into the scope of protection of the invention.It also should be noted that, for the ease of describing, accompanying drawing illustrate only part related to the present invention but not full content.
Refer to Fig. 1, Fig. 2, the structural representation of a kind of NDIR gas sensor that Fig. 1 provides for the embodiment of the present invention, the schematic diagram of the pore in a kind of NDIR gas sensor that Fig. 2 provides for the embodiment of the present invention.As depicted in figs. 1 and 2, described gas sensor includes: infrared light supply 11, cylindrical optic chamber 14, Infrared Detectors 13 and circuit block (not shown).
Wherein, described cylindrical optic chamber 14 is used for holding gas to be detected, for instance CO2, CO or CH4Upper surface and/or the lower surface in described cylindrical optic chamber 14 are provided with blow vent, described blow vent passes in and out described cylindrical optic chamber 14 for gas to be detected, described infrared light supply 11, reflecting mirror 12 and described Infrared Detectors 13 it is provided with in described cylindrical optic chamber 14, wherein, described reflecting mirror 12 is for receiving and reflect the infrared light that described infrared light supply 11 sends, and described Infrared Detectors 13 is for detecting the infrared light reflected in described cylindrical optic chamber 14 by described reflecting mirror 12;Described circuit block is connected with described Infrared Detectors 13, infrared light for detecting according to described Infrared Detectors 13 obtains the concentration of described gas to be detected, specifically, the i.e. infrared light according to the detection of described Infrared Detectors 13, and according to Lambert-Beer's law, it is thus achieved that the concentration of described gas to be detected.
Wherein, described Infrared Detectors 13 can be dual pathways Infrared Detectors.
Described dual pathways Infrared Detectors includes first passage and second channel, the first filter plate it is provided with in wherein said first passage, the second filter plate it is provided with in second channel, described first filter plate is the infrared light of gas characteristic of correspondence absorbing wavelength to be detected described in transmission, it is additionally operable to the infrared light near characteristic absorption wavelength described in transmission, thus the light intensity of the infrared light of first passage detection is with reference to light intensity;Described second filter plate is for absorbing the infrared light of described gas characteristic of correspondence absorbing wavelength to be detected, it is additionally operable to the infrared light near characteristic absorption wavelength described in transmission, thus the infrared light that the light intensity of the infrared light of second channel detection is infrared light supply radiation is by the light intensity after GAS ABSORPTION to be detected, according to Lambert-Beer's law, it is thus achieved that the concentration of described gas to be detected.
Such as, the wave-length coverage of the infrared light that infrared light supply sends is 3.9-4.26um, and gas to be detected is CO2, this gas characteristic of correspondence absorbing wavelength is 4.26um, then described first filter plate transmission peak wavelength is the infrared light of 3.9-4.26um;Described second filter plate absorbing wavelength is the infrared light of 4.26um, the infrared light near characteristic absorption wavelength described in transmission, for instance wavelength is the infrared light of 3.9um.
Further specifically, described Infrared Detectors 13 is for detecting the infrared light being directly reflected into described Infrared Detectors 13 in described cylindrical optic chamber 14 by described reflecting mirror 12;Or
Described Infrared Detectors 13 is reflected by described reflecting mirror 12 in described cylindrical optic chamber 14 for detection, and is then at least reflected the infrared light once entering described Infrared Detectors 13 by described cylinder side wall.
That is, when described Infrared Detectors 13 is for detecting the infrared light being directly reflected into described Infrared Detectors 13 in described cylindrical optic chamber 14 by described reflecting mirror 12, reflection by described reflecting mirror 12, it is achieved the increase of the infrared light that described infrared light supply 11 sends light path in described cylindrical optic chamber 14.
When described Infrared Detectors 13 is reflected by described reflecting mirror 12 in described cylindrical optic chamber 14 for detection, and when then at least being reflected, by described cylinder side wall, the infrared light once entering described Infrared Detectors 13, by the reflection of described reflecting mirror 12 and by the reflection at least one times of described cylinder side wall, it is achieved the increase of the infrared light that described infrared light supply 11 sends light path in described cylindrical optic chamber 14.
Preferably, the cylinder side wall in described cylindrical optic chamber 14 being coated with the reflectance coating to the infrared light reflection that described infrared light supply 11 sends, described reflectance coating can be blooming or metal film.
The present embodiment provides a kind of NDIR gas sensor, by adopting cylindrical optic chamber, and by arranging reflecting mirror at this cylindrical optic intracavity, infrared light is reflected, avoid the increase realizing light path in prior art by increasing the size of optics cavity, and the problem that the volume thus brought increases, manufacturing cost increases, the present embodiment makes gas sensor volume reduce, cost reduces, and realizes light path increase, thus improving sensor performance.
Referring to Fig. 2, still optionally further, described blow vent is pore 15.Specifically, described pore 15 can be as shown in Figure 2.
Preferably, described pore 15 quantity can be multiple.
Still optionally further, described pore 15 can be that circumference is uniformly distributed.
For given cylindrical optic chamber, by increasing the quantity of described pore, to increase the space of the blow vent passing in and out described cylindrical optic chamber for gas to be detected, to accelerate the described cylindrical optic chamber of gas to be detected turnover, thus improving detection speed.
Preferably, described gas sensor also includes: parabola focus lamp 16, for focusing on the infrared light reflected in described cylindrical optic chamber 14 by described reflecting mirror 12, makes described infrared light enter described Infrared Detectors 13 after focusing on.
Refer to Fig. 3, Fig. 4, as above-described embodiment one preferred embodiment, it is further preferred that described reflecting mirror 12 is the parabolic mirror 121 with the first focus.
Wherein, when described Infrared Detectors 13 is for detecting the infrared light being directly reflected into described Infrared Detectors 13 in described cylindrical optic chamber 14 by described parabolic mirror 121, described first focus is positioned at the midpoint at described parabolic mirror 121 center and described Infrared Detectors 13 line of centres;Or
When described Infrared Detectors 13 is reflected by described parabolic mirror 121 in described cylindrical optic chamber 14 for detection, and when then at least being reflected, by described cylinder side wall, the infrared light once entering described Infrared Detectors 13, described first focus is positioned at described parabolic mirror 121 center and the midpoint of primary importance line on described cylinder side wall, and wherein said primary importance is the position infrared light first time reflected by described parabolic mirror 121 inciding described cylinder side wall.
Preferably, the cylinder side wall in described cylindrical optic chamber 14 being coated with the reflectance coating to the infrared light reflection that described infrared light supply 11 sends, described reflectance coating can be blooming or metal film.
Wherein, the diameter range of the infrared light that described infrared light supply 11 sends is 1-3mm, and spread angle range is 28-32 °.
Present embodiment is by adopting cylindrical optic chamber, and by arranging parabolic mirror at this cylindrical optic intracavity, infrared light is reflected, and to realize volume reduction, cost reduces, and realizes light path increase;And by choosing the parabolic mirror of suitable focus, no longer increase realizing infrared light that infrared light supply the sends angle of divergence in cylindrical optic intracavity reflecting process, so that Infrared Detectors detects more infrared light, optical loss minimizing, optical efficiency is made to improve.
Exemplarily, illustrate with an instantiation.Referring to Fig. 4, wherein, described Infrared Detectors 13 is reflected by described parabolic mirror 121 in described cylindrical optic chamber 14 specifically for detection, and is entered the infrared light of described Infrared Detectors 13 for three times by the reflection of described cylinder side wall.Wherein, it is primary importance (illustrating with A in figure) that the infrared light first time reflected by described parabolic mirror 121 incides the position of described cylinder side wall, it is the second position (illustrating with B in figure) that the infrared light second time reflected by described parabolic mirror 121 incides the position of described cylinder side wall, described parabolic mirror 121 it is the 3rd position (illustrating with C in figure) that the infrared light reflected third time incides the position of described cylinder side wall.It is to say, the infrared light that described infrared light supply 11 sends reflects through described parabolic mirror 121 and sequentially passes through the reflection of described first, second and third position, subsequently into described Infrared Detectors 13, in physical simulation light path such as Fig. 4 shown in 17.
Wherein, the radius in described cylindrical optic chamber 14 is 10mm, using the center of circle in described cylindrical optic chamber 14 as zero, using zero vertically downward as coordinate x-axis, using zero level to the right as coordinate y-axis, using the vertical paper of zero outwards as coordinate z-axis.Under this coordinate system, illustrating with the plane of z=0, described infrared light supply 11 center is (8,2,0), the diameter range of the infrared light that described infrared light supply 11 sends is 1mm, x directional divergence angle range is 30 °, described Infrared Detectors 13 center is (6 ,-5,0).
Wherein, through emulation it can be seen that the center of described parabolic mirror 121 should be (-6.5,6,0).Described first focus is positioned at described parabolic mirror 121 center and the midpoint of primary importance line on described cylinder side wall, and wherein said primary importance is (0 ,-10,0), in Fig. 4 shown in A point;The described second position is (6,8,0), in Fig. 4 shown in B point;Described 3rd position is (-10 ,-3,0), in Fig. 4 shown in C point.
This example is by choosing the parabolic mirror of suitable focus, no longer increase realizing infrared light that infrared light supply the sends angle of divergence in cylindrical optic intracavity four secondary reflection process, so that Infrared Detectors detects more infrared light, optical loss minimizing, optical efficiency is made to improve.
Last it is noted that various embodiments above is merely to illustrate technical scheme, but not be limited;In embodiment preferred embodiment, being not limited, to those skilled in the art, the present invention can have various change and change.Any amendment of making within all spirit in the present invention and principle, equivalent replacement, improvement etc., should be included within protection scope of the present invention.

Claims (6)

1. a NDIR gas sensor, it is characterized in that, including: infrared light supply, cylindrical optic chamber, Infrared Detectors and circuit block, wherein, described cylindrical optic chamber is used for holding gas to be detected, upper surface and/or the lower surface in described cylindrical optic chamber are provided with blow vent, described blow vent passes in and out described cylindrical optic chamber for gas to be detected, described cylindrical optic intracavity is provided with described infrared light supply, reflecting mirror and described Infrared Detectors, wherein, described reflecting mirror is for receiving and reflect the infrared light that described infrared light supply sends, described Infrared Detectors is for detecting the infrared light reflected at described cylindrical optic intracavity by described reflecting mirror;Described circuit block is connected with described Infrared Detectors, and the infrared light for detecting according to described Infrared Detectors obtains the concentration of described gas to be detected;
Described Infrared Detectors is for detecting the infrared light being directly reflected into described Infrared Detectors at described cylindrical optic intracavity by described reflecting mirror;Or
Described Infrared Detectors is reflected by described reflecting mirror at described cylindrical optic intracavity for detection, and is then at least reflected the infrared light once entering described Infrared Detectors by described cylinder side wall;
Described reflecting mirror is the parabolic mirror with the first focus, wherein, when described Infrared Detectors is directly reflected into the infrared light of described Infrared Detectors for detecting at described cylindrical optic intracavity by described parabolic mirror, described first focus is positioned at the midpoint at described parabolic mirror center and the described Infrared Detectors line of centres;Or
When described Infrared Detectors is reflected by described parabolic mirror at described cylindrical optic intracavity for detection, and when then at least being reflected, by described cylinder side wall, the infrared light once entering described Infrared Detectors, described first focus is positioned at described parabolic mirror center and the midpoint of primary importance line on described cylinder side wall, and wherein said primary importance is the position infrared light first time reflected by described parabolic mirror inciding described cylinder side wall;
The cylinder side wall in described cylindrical optic chamber is coated with the reflectance coating to the infrared light reflection that described infrared light supply sends;
The diameter range of the infrared light that described infrared light supply sends is 1-3mm, and spread angle range is 28-32 °.
2. gas sensor according to claim 1, it is characterised in that described Infrared Detectors is dual pathways Infrared Detectors.
3. gas sensor according to claim 1, it is characterised in that described blow vent is pore.
4. gas sensor according to claim 3, it is characterised in that described pore quantity is multiple.
5. gas sensor according to claim 4, it is characterised in that described pore is that circumference is uniformly distributed.
6. gas sensor according to claim 1, it is characterised in that also include parabola focus lamp, for focusing on the infrared light that described cylindrical optic intracavity is reflected by described reflecting mirror, makes described infrared light enter described Infrared Detectors after focusing on.
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