CN103818930A - Device for separating and recycling waste ammonia discharged during LED (light emitting diode) production through membrane component and operating method of device - Google Patents
Device for separating and recycling waste ammonia discharged during LED (light emitting diode) production through membrane component and operating method of device Download PDFInfo
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- CN103818930A CN103818930A CN201310568451.0A CN201310568451A CN103818930A CN 103818930 A CN103818930 A CN 103818930A CN 201310568451 A CN201310568451 A CN 201310568451A CN 103818930 A CN103818930 A CN 103818930A
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Abstract
The invention discloses a device for separating and recycling waste ammonia discharged during LED (light emitting diode) production through membrane component and an operating method of the device. An air temperature type gas cooler is used for cooling discharged waste gas to room temperature; a pressurization fan is used for boosting the pressure to 0.01-0.05MPa, and then the waste gas enters a hollow fiber membrane component; only ammonia can penetrate through the other side of hollow fiber membranes; circulating absorption liquid consisting of water absorbs the ammonia to form ammonia water; heat released by the ammonia in the ammonia water is absorbed through a refrigerant, so that normal absorption of the ammonia is saturated; an ammonia water concentration detector is mounted in an ammonia water circulation system and is used for indicating that the saturated ammonia water is automatically pumped into stronger ammonia water tank; nitrogen and hydrogen which cannot be dissolved are discharged from the other side of the membrane component and enter a harmless gas discharging chimney; the membrane component can absorb the waste ammonia discharged during the LED production to form the ammonia water; the absorption rate is up to 99.9 percent; the concentration of ammonia water is up to about 25 percent; the problem of environment pollution caused by the waste ammonia discharged during the LED production is solved.
Description
Technical field
The invention belongs to the green technology of electron trade, be specifically related to a kind of useless mixed gas of discharge in LED produces, by booster fan supercharging, enter the membrane module of hollow-fibre membrane composition, make ammonia in the mixed gas of nitrogen, hydrogen, ammonia be absorbed as ammoniacal liquor with water at another of membrane module, in mixed gas, water-fast nitrogen, hydrogen are discharged at another of film, make LED process gas be reclaimed and purify, and the ammoniacal liquor of recovery can reach 25% saturation concentration.
Background technology
(LED) main raw material(s) of photodiode in gas-phase deposition is ultra-pure ammonia, nitrogen, hydrogen, MO source.The at high temperature vapour deposition of trimethyl-gallium and ammonia generates gan.
And in order to make full use of the MO source that price is more expensive, it is greatly excessive to need in ultra-pure ammonia vapour deposition, the utilization ratio in whole reaction process is less than 1%, and the ammonia of redundance is discharged together with carrier gas nitrogen, hydrogen.And ammonia is obnoxious flavour environmental protection treatment in addition, can legal discharge.The method of processing at present LED production discharging waste gas has: the one, discharge ammonia is neutralized with sulfuric acid, and the later waste liquid of neutralization enters sewage work and processes; The 2nd, adopt packing tower that discharge ammonia is absorbed as to ammoniacal liquor, ammoniacal liquor is undersold; The 3rd, adopt film-falling absorption tower will discharge ammonia and absorb into ammoniacal liquor, ammoniacal liquor is undersold;
Because the neutralisation in aforesaid method is to transfer the pollution, environmental issue is not solved at all.And the method for two absorption ammoniacal liquor, because the ammonia concentration in LED discharging waste gas is only less than 20%, all the other nitrogen, density of hydrogen have reached 80% left and right, cause the solubleness of ammonia in water greatly to reduce, be less than 10%, there is no commodity value, the very difficult processing of ammoniacal liquor.For qualified discharge in the end must use sulfuric acid to neutralize.Still had a strong impact on environment.
Summary of the invention
Goal of the invention of the present invention is the shortcoming in order to overcome above-mentioned background technology, provide a kind of, by air temperature type gas cooler, discharging waste gas in LED production is cooled to normal temperature, by booster fan, boost in pressure is entered to tubular fibre tunica fibrosa group to 0.01MPa～0.05MPa, due to only have ammonia can see through hollow-fibre membrane another, the circulating absorption solution body being formed by water, the ammonia seeing through is absorbed as to ammoniacal liquor, ammoniacal liquor is absorbed the liberated heat of ammonia by refrigerant, the normal absorption that has guaranteed ammonia reaches capacity, the ammonia concn detector of installing in ammonia circulation system, the ammoniacal liquor that indication reaches capacity is squeezed into strong aqua tank automatically.Water-fast nitrogen, hydrogen are discharged by another of membrane module, enter innocuous gas blowdown stack.Membrane module can reach 99.9% by the specific absorption that in LED production, the useless ammonia of discharge is absorbed as ammoniacal liquor, and ammonia concn can reach 25% left and right method, has solved the environmental issue of discharging the ammonia that gives up during LED produces.
Technical scheme of the present invention is: a kind of membrane component of using is from the device that reclaims the useless ammonia of discharge in LED production, it comprises: air temperature type gas cooler, accurate filter, booster fan, membrane separation assemblies, ammonia circulation tank, ammonia circulation pump, plate-type heat exchanger, freezing unit, chilled water circulating pump, saturated ammonia water pot, saturated ammoniacal liquor Send out pump, described air temperature type gas cooler air outlet is connected with accurate filter entrance, accurate filter outlet connects booster fan entrance, booster fan outlet junctional membrane separation assembly entrance, membrane separation assemblies outlet connects ammonia circulation tank entrance, ammonia circulation tank exit is provided with ammonia circulation pump, ammonia circulation pump is provided with two pipelines, a wherein pipeline connecting plate type heat exchanger entrance, plate-type heat exchanger outlet connects freezing unit entrance, another pipeline connects saturated ammonia water pot entrance, and described freezing unit exit is provided with chilled water circulating pump, and saturated ammonia water pot exit is provided with saturated ammoniacal liquor Send out pump.
With membrane component, from a method that reclaims the useless ammonia of discharge in LED production, the method comprises following step:
(1) mixed gas is cooling: the nitrogen higher than temperature, hydrogen, the ammonia that from LED produces, give off
Oxygen mixture, is cooled to normal temperature through air temperature type gas cooler by discharge mix waste gas, to guarantee that rear road booster fan can normally work;
(2) supercharging of mixed gas: be cooled to the mixed gas of temperature, by booster fan by boost in pressure
To 0.01MPa～0.05MPa, with guarantee lower road membrane component from time see through the requirement of pressure;
(3) absorption of ammonia in mixed gas: the solvent absorbing being formed by water through the ammonia of film group is ammonia
Water, the temperature that guarantees ammoniacal liquor by refrigerator, at 0 ℃～10 ℃, makes ammonia can absorb the saturation concentration of 25% left and right through plate-type heat exchanger condensation;
(4) separation of nitrogen, hydrogen in mixed gas: nitrogen in mixed gas, hydrogen are owing to being insoluble to
Water, therefore, the entering by and discharged of film group, the ammonia level of discharging in nitrogen, hydrogen gas mixture can be less than 25ppm/Nm
3, reach state environmental emissioning standard;
(5) circulation of ammoniacal liquor: ammoniacal liquor film group see through circulation, reach 25% reach saturation concentration after under the commander of ammonia concn detector, automatically squeeze into saturated ammonia water pot.
Described air temperature type gas cooler is finned air vaporizer.
Described booster fan is that its force value of aluminium alloy booster fan is minimum for 0.01MPa, is 0.05MPa to the maximum.
Described membrane separation assemblies adopts hydrophilic hollow fibre film.
The water temperature span of control of described freezing unit be minimum be 0 ℃, be up to 2 ℃.
Described membrane separation assemblies is minimum is one group, and every group of membrane separation assemblies all connects ammonia circulation tank and connect ammonia circulation pump again, ammonia circulation pump connecting plate type interchanger.
The invention has the beneficial effects as follows: the inventive method can reach 99.9% by the specific absorption that in LED production, the useless ammonia of discharge is absorbed as ammoniacal liquor, and ammonia concn can reach 25% left and right method, solved the environmental issue of discharging the ammonia that gives up during LED produces.
Accompanying drawing explanation
Fig. 1 is five groups of membrane separation assemblies structural representations that the present invention adopts;
Wherein: 1, air temperature type gas cooler, 2, accurate filter, 3, booster fan, 4, membrane separation assemblies, 5, ammonia circulation tank, 6, ammonia circulation pump, 7, plate-type heat exchanger, 8, freezing unit, 9, chilled water circulating pump, 10, saturated ammonia water pot, 11, saturated ammoniacal liquor Send out pump.
Embodiment
The present embodiment be a kind of with membrane component from reclaim LED produce in the device of the useless ammonia of discharge, it comprises: air temperature type gas cooler (1), accurate filter (2), booster fan (3), membrane separation assemblies (4), ammonia circulation tank (5), ammonia circulation pump (6), plate-type heat exchanger (7), freezing unit (8), chilled water circulating pump (9), saturated ammonia water pot (10), saturated ammoniacal liquor Send out pump (11).
As shown in Figure 1, air temperature type gas cooler (1) is that its air outlet of finned air vaporizer is connected with accurate filter (2) entrance, accurate filter (2) outlet connects booster fan (3) entrance, booster fan (3) outlet junctional membrane separation assembly (4) entrance, described membrane separation assemblies (4) adopts hydrophilic hollow fibre film, membrane separation assemblies (4) outlet connects ammonia circulation tank (5) entrance, ammonia circulation tank (5) exit is provided with ammonia circulation pump (6), ammonia circulation pump (6) is provided with two pipelines, a wherein pipeline connecting plate type interchanger (7) entrance, plate-type heat exchanger (7) outlet connects freezing unit (8) entrance, described freezing unit (8) exit is provided with chilled water circulating pump (9), another pipeline connects saturated ammonia water pot (10) entrance, and saturated ammonia water pot (10) exit is provided with saturated ammoniacal liquor Send out pump (11).
[0016]with membrane component, from a method that reclaims the useless ammonia of discharge in LED production, the method comprises following step:
(1) mixed gas is cooling: the nitrogen higher than temperature, hydrogen, the ammonia that from LED produces, give off
Oxygen mixture, is cooled to normal temperature through air temperature type gas cooler (1) by discharge mix waste gas, to guarantee that rear road booster fan (3) can normally work;
(2) supercharging of mixed gas: be cooled to the mixed gas of temperature, by booster fan (3) by boost in pressure to 0.01MPa～0.05MPa, see through the requirement of pressure when guaranteeing that lower road membrane separation assemblies (4) separates;
(3) absorption of ammonia in mixed gas: the solvent absorbing being formed by water through the ammonia of membrane separation assemblies (4) is ammoniacal liquor, the temperature that guarantees ammoniacal liquor by freezing unit (8), at 0 ℃～10 ℃, makes ammonia can absorb the saturation concentration of 25% left and right through plate-type heat exchanger (7) condensation;
(4) separation of nitrogen, hydrogen in mixed gas: nitrogen in mixed gas, hydrogen are owing to being insoluble to
Water, therefore, the entering by and discharged of membrane separation assemblies (4), the ammonia level of discharging in nitrogen, hydrogen gas mixture can be less than 25ppm/Nm
3, reach state environmental emissioning standard;
(5) circulation of ammoniacal liquor: ammoniacal liquor membrane separation assemblies (4) see through circulation, reach 25% reach saturation concentration after under the commander of ammonia concn detector, automatically squeeze into saturated ammonia water pot (10).
Claims (7)
- One kind with membrane component from reclaim LED produce in the device of the useless ammonia of discharge, it comprises: air temperature type gas cooler, accurate filter, booster fan, membrane separation assemblies, ammonia circulation tank, ammonia circulation pump, plate-type heat exchanger, freezing unit, chilled water circulating pump, saturated ammonia water pot, saturated ammoniacal liquor Send out pump, it is characterized in that described air temperature type gas cooler air outlet is connected with accurate filter entrance, accurate filter outlet connects booster fan entrance, booster fan outlet junctional membrane separation assembly entrance, membrane separation assemblies outlet connects ammonia circulation tank entrance, ammonia circulation tank exit is provided with ammonia circulation pump, ammonia circulation pump is provided with two pipelines, a wherein pipeline connecting plate type heat exchanger entrance, plate-type heat exchanger outlet connects freezing unit entrance, another pipeline connects saturated ammonia water pot entrance, and described freezing unit exit is provided with chilled water circulating pump, and saturated ammonia water pot exit is provided with saturated ammoniacal liquor Send out pump.
- 2. a method for the useless ammonia of discharge in producing from recovery LED with membrane component, is characterized in that the method comprises following step:(1) mixed gas is cooling: the nitrogen higher than temperature, hydrogen, the ammonia that from LED produces, give offOxygen mixture, is cooled to normal temperature through air temperature type gas cooler by discharge mix waste gas, to guarantee that rear road booster fan can normally work;(2) supercharging of mixed gas: be cooled to the mixed gas of temperature, by booster fan by boost in pressureTo 0.01MPa～0.05MPa, with guarantee lower road membrane component from time see through the requirement of pressure;(3) absorption of ammonia in mixed gas: the solvent absorbing being formed by water through the ammonia of film group is ammoniaWater, the temperature that guarantees ammoniacal liquor by freezing unit, at 0 ℃～10 ℃, makes ammonia can absorb the saturation concentration of 25% left and right through plate-type heat exchanger condensation;(4) separation of nitrogen, hydrogen in mixed gas: nitrogen in mixed gas, hydrogen are owing to being insoluble toWater, therefore, the entering by and discharged of film group, the ammonia level of discharging in nitrogen, hydrogen gas mixture can be less than 25ppm/Nm 3, reach state environmental emissioning standard;(5) circulation of ammoniacal liquor: ammoniacal liquor film group see through circulation, reach 25% reach saturation concentration after under the commander of ammonia concn detector, automatically squeeze into saturated ammonia water pot.
- 3. a kind of membrane component of using according to claim 1 is from the device that reclaims the useless ammonia of discharge in LED production, and the air temperature type gas cooler described in it is characterized in that is finned air vaporizer.
- 4. a kind of membrane component of using according to claim 1 is from the device that reclaims the useless ammonia of discharge in LED production, and the booster fan described in it is characterized in that is the minimum 0.01MPa of being of its force value of aluminium alloy booster fan, is 0.05MPa to the maximum.
- 5. a kind of membrane component of using according to claim 1 is from the device that reclaims the useless ammonia of discharge in LED production, and the membrane separation assemblies described in it is characterized in that adopts hydrophilic hollow fibre film.
- According to claim 1 a kind of with membrane component from reclaim LED produce in the device of the useless ammonia of discharge, the water temperature span of control that it is characterized in that described freezing unit be minimum be 0 ℃, be up to 2 ℃.
- 7. a kind of membrane component of using according to claim 1 is from the device that reclaims the useless ammonia of discharge in LED production, it is characterized in that described membrane separation assemblies minimum be one group, every group of membrane separation assemblies all connects ammonia circulation tank and connects ammonia circulation pump again, ammonia circulation pump connecting plate type interchanger.
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| CN201310568451.0A CN103818930A (en) | 2013-11-15 | 2013-11-15 | Device for separating and recycling waste ammonia discharged during LED (light emitting diode) production through membrane component and operating method of device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105174554A (en) * | 2015-10-16 | 2015-12-23 | 浙江理工大学 | Ammonia-containing waste water disposal device and disposal method |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103331079A (en) * | 2013-07-10 | 2013-10-02 | 厦门市威士邦膜科技有限公司 | Membrane method ammonia gas treatment recovering apparatus and technology thereof |
| CN203612973U (en) * | 2013-11-15 | 2014-05-28 | 苏州金宏气体股份有限公司 | Device for separating and recycling waste ammonia gas discharged in process of LED (light-emitting diode) production through membrane components |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103331079A (en) * | 2013-07-10 | 2013-10-02 | 厦门市威士邦膜科技有限公司 | Membrane method ammonia gas treatment recovering apparatus and technology thereof |
| CN203612973U (en) * | 2013-11-15 | 2014-05-28 | 苏州金宏气体股份有限公司 | Device for separating and recycling waste ammonia gas discharged in process of LED (light-emitting diode) production through membrane components |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105174554A (en) * | 2015-10-16 | 2015-12-23 | 浙江理工大学 | Ammonia-containing waste water disposal device and disposal method |
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Application publication date: 20140528 |